• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.523-523
• /
• 2012

As the wafer geometric requirements continuously complicated and minutes in tens of nanometers, the expectation of real-time add-on sensors for in-situ plasma process monitoring is rapidly increasing. Various industry applications, utilizing plasma impedance monitor (PIM) and optical emission spectroscopy (OES), on etch end point detection, etch chemistry investigation, health monitoring, fault detection and classification, and advanced process control are good examples. However, process monitoring in semiconductor manufacturing industry requires non-invasiveness. The hypothesis behind the optical monitoring of plasma induced ion current is for the monitoring of plasma induced charging damage in non-invasive optical way. In plasma dielectric via etching, the bombardment of reactive ions on exposed conductor patterns may induce electrical current. Induced electrical charge can further flow down to device level, and accumulated charges in the consecutive plasma processes during back-end metallization can create plasma induced charging damage to shift the threshold voltage of device. As a preliminary research for the hypothesis, we performed two phases experiment to measure the plasma induced current in etch environmental condition. We fabricated electrical test circuits to convert induced current to flickering frequency of LED output, and the flickering frequency was measured by high speed optical plasma monitoring system (OPMS) in 10 kHz. Current-frequency calibration was done in offline by applying stepwise current increase while LED flickering was measured. Once the performance of the test circuits was evaluated, a metal pad for collecting ion bombardment during plasma etch condition was placed inside etch chamber, and the LED output frequency was measured in real-time. It was successful to acquire high speed optical emission data acquisition in 10 kHz. Offline measurement with the test circuitry was satisfactory, and we are continuously investigating the potential of real-time in-situ plasma induce current measurement via OPMS.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.8 no.6
• /
• pp.1-8
• /
• 2000

A new method of knock detection in SI engines, using a change of ion concentration in the combustion chamber, was developed. In order to measure in-cylinder ionization current, ionization probes were installed at spark plug and cylinder head of production engine. It was found that the electric current generated by ionized gas in core burned gas region of knocking cycle is between 2 and 10 times larger than that of normal cycle, because the burned gas temperature which is the dominant parameter of a change of ion concentration increases. However, a change of ionization current in boundary region of burned gas is relatively weak. Hence a change of ion concentration in core burned gas region can be used for knock detection.

• Journal of Korean Vacuum Science & Technology
• /
• v.6 no.2
• /
• pp.92-96
• /
• 2002

In this paper, we treated the Ni$_3$Al based alloy samples with intense pulsed ion beams (IPIB) at the beam parameters of 250KV acceleration voltage, 100 - 200 A/cm$^2$ current density and 60 u pulse duration. We simulated the thermal-mechanical process near the surface of Ni$_3$Al based alloy with our STEIPIB codes. The surface morphology and the cross-section microstructures of samples were observed with SEM, the composition of the sample surface layer was determined by X-ray Energy Dispersive Spectrometry (XEDS) and the microstructure on the surface was observed by Transmission Electron Microscope (TEM). The results show that heating rate increases with the current density of IPIB and cooling rate reached highest value less than 150 A/cm$^2$. The irradiation of IPIB induced the segregation of Mo and adequate beam parameter can improve anti-oxidation properly of IC6 alloy. Some craters come from extraneous debris and liquid droplets, and some maybe due to the melting of the intersection region of interphase. Increasing the pulse number enlarges average size of craters and decreases number density of craters.

• Proceedings of the Korea Concrete Institute Conference
• /
• 2003.05a
• /
• pp.705-710
• /
• 2003

In this study, to confirm the diffusion coefficient of chloride ion is affected by the concentration of NaCl solution, capacity of voltage, time of an electric current, the diffusion coefficient of chloride ion in concrete was investigated through an electrochemical accelerated test. and the results of these test were compared with the diffusion coefficient of chloride ion by test of sodium chloride solution digestion. As the results of this study, the diffusion coefficient of chloride ion wasn't affected by the concentration of NaCl solution, capacity of voltage, time of an electric current within the range of this study and was similar to the diffusion coefficient of chloride ion by test of sodium chloride solution digestion.

• Journal of the Korean institute of surface engineering
• /
• v.32 no.3
• /
• pp.393-400
• /
• 1999

The surface characteristics of nitrogen ion implanted iron aluminides were investigated using various electrochemical methods in $H_2$$SO_4$+KSCN and HCl solutions. Nitrogen ion implantation was performed with doses of $3.0$\times$10^{17}$ /ions/$\textrm{cm}^2$ at an energy of 150keV. Nitrogen ion implanted iron aluminides increased the corrosion potential and significantly decreased grain boundary activation, the active current density, and passive current density. Nitrogen implanted iron aluminides with Mo increased the corrosion, pitting potential, repassivation potential and │$E_{pit}$-$E_{corr}$│ value. Whereas, implanted iron aluminides containing boron reduced the pitting and repassivation potential in comparison with nitrogen implanted iron aluminides with Cr and Mo.o.

• Bulletin of the Korean Chemical Society
• /
• v.11 no.4
• /
• pp.290-296
• /
• 1990

Ion-surface collision studies at low kinetic energies (1-100 eV) provide a unique opportunity for investigating reactions and collision dynamics at surfaces. A special ion optics system for generating an energy- and mass-selected ion beam of this energy is designed and constructed. An ultrahigh vacuum (UHV) reaction chamber, in which the ions generated from the beamline collide with a solid surface, is equipped with Auger electron spectroscopy (AES) and thermal desorption spectrometry (TDS) as in-situ surface analytical tools. The resulting beam from the system has the following characteristics : ion current of 5-50 nA, energy spread < 2eV, current stability within ${\pm}5%,$ and unit mass resolution below 20 amu. The performance of the instrument is illustrated with data representing the implantation behavior of $Ar^+$ into a graphite (0001) surface.

• Journal of Astronomy and Space Sciences
• /
• v.3 no.2
• /
• pp.71-79
• /
• 1986

According to recent satellite observations, strong ion transverse acceleration to the magnetic field(ion conics) has been known. The ion conics may be a result of electrostatic waves frequently observed on the auroral zone. Both linear and nonlinear theory of electrostatic instability driven by an electron current based on 1-dimensional particle simulation experiment have been considered. From the results of simulation strong ion transverse acceleration has been shown.

• Proceedings of the KIEE Conference
• /
• 1997.07e
• /
• pp.1752-1754
• /
• 1997

The Kaufman type ion beam source with focusing lens was prepared to measure $\gamma$-coefficient of MgO thin film. Initial discharge of the system was started with the discharge voltage of 25V, the cathode filament current of 5.5A at the constant magnetic field of 150G. The system shows the maximum ion current density of $120{\mu}A/cm^2$, energy dispersion of 200eV and beam divergence of $30^{\circ}$ under the condition of Ar gas pressure $2.5{\times}10^{-4}Torr$, the beam voltage of 500V, the discharge voltage of 90V, the accelerator voltage of -200V and the cathode filament current of 6.1A. When the focusing lens was installed onto the ion beam source, the spreadness diameter of ion beam was about 10mm.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.28 no.11
• /
• pp.77-83
• /
• 2014

The Estimation of State of Charge(SOC) for batteries is an important aspect of a Battery Management System(BMS). A method for estimating the SOC is proposed in order to overcome the individual disadvantages of the current integral and Open Circuit Voltage(OCV) estimation methods by combining them using Extended Kalman filter(EKF). The non-linear characteristics of the Li-Ion RC battery model used in this study is also solved through EKF. The proposed method is simulated in a Matlab environment with a Li-Ion Kokam battery (3.7V, 1,500mAh). Results showed that there is an improvement in the estimation error when using the proposed model compared to the conventional current integral method.

• Journal of the Korean institute of surface engineering
• /
• v.50 no.3
• /
• pp.192-197
• /
• 2017

A 6-way-cross consisting of a 2.75-inch CF flange was used as a main chamber on a PFEIFFER VACUUM TMP station based on a 67 l / sec turbo molecular pump and a diaphragm pump to produce a magnet array with a volume ratio of 5.5: 1.A 1-inch diameter copper target and graphite target were fabricated using MDX-1.5K from Advanced Energy Industries, Inc as a DC power supply. Ion current density of copper target and graphite target was measured by unbalanced magnetron sputtering. The basic pressure condition was $6.3{\times}10^{-7}mbar$ and the process pressure was Ar 50 sccm at $1.0{\times}10^{-2}mbar$ (7.5 mTorr) in the Ar atmosphere. Therefore, the relative density of copper ions reaching the substrate with the measured ion current density was derived.