• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.118-118
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• 2008

The oxide CMP has been applied to interlayer dielectric(ILD) and shallow trench isolation (STI) in chip fabrication. Recently the slurry used in oxide CMP being changed from silica slurry to ceria (cerium dioxide) slurry particularly in STI CMP, because the material selectivity of ceria slurry is better than material selectivity of silica slurry. Moreover, the ceria slurry has good a planarization efficiency, compared with silica slurry. However ceria abrasives make a material removal rate too high at the region of wafer center. Then we focuses on why profile of material removal rate is convex. The material removal rate sharply increased to 3216 $\AA$/min by $4^{th}$ run without conditioning. After $4^{th}$ run, material removal rate converged. Furthermore, profile became more convex during 12 run. And average material removal rate decreased when conditioning process is added to end of CMP process. This is due to polishing mechanism of ceria. Then the ceria abrasive remains at the pad, in particular remains more at wafer center contacted region of pad. The field emission scanning electron microscopy (FE-SEM) images showed that the pad sample in the wafer center region has a more ceria abrasive than in wafer outer region. The energy dispersive X-ray spectrometer (EDX) verified the result that ceria abrasive is deposited and more at the region of wafer center. Therefore, this result may be expected as ceria abrasives on pad surface causing the convex profile of material removal rate.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.253-253
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• 2008

Recently, high performance microelectronic devices are designed in multi-layer structure in order to make dense wiring of metal conductors in compact size. For making dense wiring of metal conductors, we investigated CTE and peel strength of dielectric materials for next generation PCB. It is an object of this research to develop an epoxy resin composition for an interlayer insulating material exhibiting low CTE and high peel strengnth and making an insulating layer thinner.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.6
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• pp.502-507
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• 2007

The oxidation treatment of several carbon materials with a sodium chlorate and 70 wt.% of nitric acid, combined with heat treatment, were attempted to achieve an electrochemical active material with a larger capacitance. Among pitch, needle coke, calcinated needle coke and natural graphite, the structure of needle coke and calacinated needle coke were changed to the graphite oxide structure with the expansion of the inter-layer. On the other hand, the calcinated needle coke after oxidation and heating at $200^{\circ}C$ has exhibited largest capacitance per weight and volume of 29.5 F/g and 24.5 F/ml at the two-electrode system in the potential range of 0 to 2.5 V. The electrochemical performance of the calcinated needle coke was discussed with the phenomenon of the electric field activation and the formation of new pores between the expanded inter-layer at first charge.

• Steel and Composite Structures
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• v.49 no.5
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• pp.547-570
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• 2023

In the present work, a comparative study has been carried out between power, exponential, and sigmoidal sandwich FGM plates for free vibration conditions under hygro-thermal conditions. Rules of mixture is used to determine effective material properties across the thickness for power-law and sigmoid sandwich FGM plates. Exponential law is used to plot effective material properties for exponentially graded sandwich FGM plates. Temperature and moisture dependent material properties were used during the analysis. Free vibration analysis is carried out using recently proposed finite element based HOZT. Present formulation satisfies interlayer transverse stress continuity conditions at interfaces and transverse shear stress-free conditions at the plate's top and bottom surfaces. The present model is free from any penalty or post-processing requirements. Several new results are reported in the present work, especially for unsymmetric sandwich FGM plates and exponential and sigmoidal sandwich FGM plates.

• Journal of the Korean Society for Heat Treatment
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• v.22 no.5
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• pp.290-297
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• 2009

In case of using Asymmetric Bipolar Pulsed DC (ABPD) power generator, thin film is efficiently deposited as ions are getting higher energy by suppressing target poisoning and electric arc. In this article, the mechanical properties of CNx thin films deposited on the STS 316L were compared with DC and ABPD power generators. The CNx thin films deposited with ABPD clearly improved wear resistance by higher ratio of sp3CN as compared with DC. Nb interlayer affected to increase the value of 10N of adhesion between CNx thin films and substrate. But, CNx thin films deposited with ABPD couldn't endure to wear load and decreased wear resistance as the films were too thinner than substrate. Nevertheless the higher substrate bias energy applied to perform the dense films, it wasn't shown benefits about the wear properties from DC sputtering. But, in case of using ABPD sputtering, the wear resistance was largely improved without changing morphology despite of thin films.

• International Journal of Highway Engineering
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• v.7 no.2 s.24
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• pp.1-12
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• 2005

This study was conducted to evaluate effect of geogrid and fabric, which are used underneath the overlaid asphalt pavement for retarding reflection cracking by simulated laboratory test. In this study, an interlayer at the interface between old concrete pavement surface and overlaid asphalt mixture, and polymer-modifier were used as an effort of retarding reflection crack initiation and for strengthening mixture. Five products were used in preparation of asphalt concrete beam specimen which was tack coated on top of jointed concrete block. Simulated Mode I and II fracture test were conducted under wheel loading and results were compared among those products. From the test results, several material and reinforcement combinations were observed to have a significant retardation effect against reflection cracking. The most effectively strengthened pavement against reflection cracking was found to be the LDPE-modifier asphalt mixture with a grid reinforcement at the bottom.

• Applied Chemistry for Engineering
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• v.9 no.7
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• pp.1059-1064
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• 1998

We have investigated various kind of graphite and MCMB6-28 to develop carbon negative electrode for lithium ion secondary battery. The interlayer length of them was $3.358{\sim}3.363{\AA}$ and the BET specific surface area was $2.95{\sim}26.15m^2/g$. From this study, When the interlayer of them was large and the BET specific surface area was high, the electrochemical characteristics of them was very excellent. Adding 0, 3, 5, wt% of KJ-Black as conducting agent to various graphitic carbon active materials, interface resistance of electrode and electrolyte was less, but rechargeability was better at 3 wt%. At constant current charge and discharge test, discharge capacity was small according to large current.

• Journal of Electrochemical Science and Technology
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• v.11 no.4
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• pp.336-345
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• 2020

Nickel-doped lanthanum cobalt oxide (LaCo_1-xNi_xO_3-δ, LCN) was investigated as an alternative anode material for solid oxide fuel cells. To improve its catalytic activity for steam methane reforming (SMR) reaction, Ni²⁺ was substituted into Co³⁺ lattice in LaCoO₃. LCN anode, synthesized using the Pechini method, reacts with yttria-stabilized zirconia (YSZ) electrolyte at high temperatures to form an electrochemically inactive phase such as La₂Zr₂O₇. To minimize the interlayer by-products, the LCN was coated via a double-tape casting method on the Ni/YSZ anode as a catalytic functional layer. By increasing the Ni doping amount, oxygen vacancies in the LCN increased and the cell performance improved. CH₄ fuel decomposed to H₂ and CO via SMR reaction in the LCN functional layer. Hence, the LCN-coated Ni/YSZ anode exhibited better cell performance than the Ni/YSZ anode under H₂ and CH₄ fuels. LCN with 12 mol% of Ni (LCN12)-modified Ni/YSZ anode showed excellent long-term stability under H₂ and CH₄ conditions.

• Transactions on Electrical and Electronic Materials
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• v.8 no.2
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• pp.53-57
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• 2007

In this study, a novel slurry containing ceria as the abrasive particles was analyzed in terms of its frictional, thermal and kinetic attributes for interlayer dielectric (ILD) CMP application. The novel slurry was used to polish 200-mm blanket ILD wafers on an $IC1000_{TM}$ K-groove pad with in-situ conditioning. Polishing pressures ranged from 1 to 5 PSI and the sliding velocity ranged from 0.5 to 1.5 m/s. Shear force and pad temperature were measured in real time during the polishing process. The frictional analysis indicated that boundary lubrication was the dominant tribological mechanism. The measured average pad leading edge temperature increased from 26.4 to $38.4\;^{\circ}C$ with the increase in polishing power. The ILD removal rate also increased with the polishing power, ranging from 400 to 4000 A/min. The ILD removal rate deviated from Prestonian behavior at the highest $p{\times}V$ polishing condition and exhibited a strong correlation with the measured average pad leading edge temperature. A modified two-step Langmuir-Hinshelwood kinetic model was used to simulate the ILD removal rate. In this model, transient flash heating temperature is assumed to dominate the chemical reaction temperature. The model successfully captured the variable removal rate behavior at the highest $p{\times}V$ polishing condition and indicates that the polishing process was mechanical limited in the low $p{\times}V$ polishing region and became chemically and mechanically balanced with increasing polishing power.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.40 no.1
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• pp.29-34
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• 2008

The charcoal has been used not only as fuel but also as human health care material since it was used. Charcoal's performances were generally investigated in aspects of energy efficiency and caloric values. This study was conducted in order to increase charcoal's application area and to develop functional paper. Five types of charcoal were used on a basis of gas absorption properties from previous study. Handsheets were made by two methods by internal loading and surface spray on interlayer. Strength properties of internal loading and interlayer spray handsheets were decreased as the charcoal loading increased. Ethylene gas absorption property was higher in both of oak's black charcoal and white charcoal than others. In terms of strength, 5-10% charcoal loading was efficient. Above 10% loading, a rate of strength decrease was higher than that of ethylene gas absorption rate. Formaldehyde absorption property was higher at both of oak's black charcoal and mixed charcoal than others. However, to guarantee enough charcoal loading should be higher than 95 $g/m^2$ for sufficient formaldehyde absorption.