• 대한전자공학회논문지
• /
• 제23권6호
• /
• pp.961-967
• /
• 1986

A technique of optical image synthesis with an extended incoherent source is presented and compared with the coherent method. A holographic diffraction grating is fabricated by using Michelson interferometer, and by equalizing the 8th-order to the 2nd-order diffraction efficiency, complex amplitude addition and subtracdtion of optical images are simultaneously realized. The experiment shows that the quality of synthesized optical images in the incoherent method is improved in comparison with that of the coherent method by suppressing the coherent artifact noise.

• 비파괴검사학회지
• /
• 제36권1호
• /
• pp.18-26
• /
• 2016

반도체 산업은 우리나라 주력산업중 하나로 매년 꾸준한 성장세를 보이며 지속적인 성장을 하고 있다. 이러한 반도체 산업에서의 중요한 기술은 소자의 고 집적화이다. 이는 면적당 메모리 용량을 증가시키는 것으로 핵심역할을 하는 것이 바로 포토리소그래피 기술이다. 포토리소그래피란 마스크의 표면에 빛을 쬐어 생기는 그림자를 웨이퍼 상에 인쇄하는 기술이며 반도체 제조공정에서의 가장 중요한 공정이다. 이러한 공정을 통해 나온 패터닝을 분석 시에 폭과 단차의 균일성을 측정한다. 이에 따라 본 논문은 포토리소그래피 공정이 적용된 시험편 패터닝에 폭과 판 사이와의 단차를 투과형 디지털 홀로그래피를 구성하여 측정하고자 한다. 투과형 디지털 홀로그래피 간섭계를 구성하고 시험편에 임의의 9포인트를 설정하여 각 포인트를 측정하고 상용장비인 SEM (scanning electron microscopy)과 alpha step으로 측정한 결과와 비교하고자 한다. 투과형 디지털 홀로그래피는 측정시간이 타 기법에 비에 짧다는 장점과 배율렌즈를 사용하기 때문에 저 배율에서 고 배율로 변경하여 측정할 수 있는 장점을 가지고 있다. 실험 결과로부터 투과형 디지털 홀로그래피가 포토 리소그래피가 적용된 패터닝 측정에 유용한 기술임을 확인할 수 있었다.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2001년도 춘계학술대회논문집D
• /
• pp.348-353
• /
• 2001

Experimental schemes that enable characterization of phase-change phenomena in the micro scale regime is essential for understanding the phase-change kinetics. Particularly, monitoring rapid vaporization on a submicron length scale is an important yet challenging task in a variety of laser-processing applications, including steam laser cleaning and liquid-assisted material ablation. This paper introduces a novel technique based on Michelson interferometry for probing the liquid-vaporization process on a solid surface heated by a KrF excimer laser pulse (${\lambda}=248nm,\;FWHM=24\;ns$) in water. The effective thickness of a microbubble layer has been measured with nanosecond time resolution. The maximum bubble size and growth rate are estimated to be of the order of $0.1{\mu}m\;and\;1\;m/s$, respectively. The results show that the acoustic enhancement in the laser induced vaporization process is caused by bubble expansion in the initial growth stage, not by bubble collapse. This work demonstrates that the interference method is effective for detecting bubble nucleation and microscale vaporization kinetics.

• 항공우주산업기술동향
• /
• 제8권2호
• /
• pp.76-85
• /
• 2010

본 논문에서는 우주환경에 사용되는 광섬유자이로(FOG)의 최근 개발동향에 대해 기술하고자 한다. 광섬유자이로는 샤냑효과를 이용하여 각속도를 측정하는 장치로 링레이저자이로(RLG)에 비해 짧은 개발역사를 가지고 있지만, 관련 소자 및 신호처리 방법의 발전으로 인해 고성능의 우주용 관성항법장치로 링레이저자이로를 대체하기에 충분한 것으로 알려져 왔다. 본 논문에서는 광섬유자이로의 개발동향을 현재까지 개발된 광섬유자이로 제품을 바탕으로 각각의 성능과 특징에 대해 알아보고, 앞으로 고성능 우주용 관성항법장치로서의 광섬유자이로의 발전 방향에 대해 살펴보기로 한다.

• 대한기계학회논문집B
• /
• 제28권4호
• /
• pp.493-499
• /
• 2004

Variations of temperature and velocity fields in a Hele-Shaw convection cell (HSC) were investigated using a holographic interferometry and 2-D PIV system with varying Rayleigh number. To measure quasi-steady variation of temperature field, two different measurement methods of holographic interferometry, double-exposure method and real-time method, were employed. In the double-exposure method, unwanted waves were eliminated effectively using a digital image processing technique. The reconstructed images are clear, but transient flow cannot be reconstructed clearly. On the other hand, transient convective flow can be reconstructed well using the real-time method. However, the fringe patterns reconstructed by the real-time method contain more noises, compared with the double-exposure method. Experimental results show a steady flow pattern at low Rayleigh numbers and a time-dependent periodic flow structure at high Rayleigh numbers. The periodic flow pattern at high Rayleigh numbers obtained by the real-time holographic interferometer method is in a good agreement with the PIV results.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.556-560
• /
• 2005

The measurement method by Laser Speckle Interferometry which uses the interference law which will grow precedes and with it explains a resolution measurement ability and together the change of place arrowhead and general measurement, at real-time measurement sensitivity it has application boat song from candle precise measurement field it is increasing. But, currently the domestic application technique to sleeps and optical science military merit by optical science interferometer and directness it composes purchases to the level which it applies the expensive commercial business equipment the outside and in spite of the technical ripple effect is deficient even in many strong point. The hazard which complements like this problem point form technical development it leads from the research which it sees and an application degree and to sleep as the measurement equipment which tries to develop the small-sized optical science interference sensor and an interpretation program it raises it does.

• 한국광학회지
• /
• 제8권2호
• /
• pp.161-164
• /
• 1997

편광유지 광섬유를 이용한 주파수가 안정화된, 두 개의 서로 수직으로 편광된 종모우드를 갖는 He-Ne레이저 빛을 LoTa $O_{3}$ 위상변조기로 구성된 센서부(sensor head)로 전달해 줌으로써 원격에서 전기장을 측정할 수 있는 hybrid, heterodyne 간섭식 센서를 구성하였다. In/quadrature-phase위상변조풀이 방식을 이용하여 전기광학 효과에 의해 서로 수직으로 편광된 두 모우드 사이에 유도된 위상차이를 측정함으로써 항상 높은 검지율을 유지할 수 있는 전기장 센서를 구성하고, 이를 이용하여 광학 물질에 유도된 복굴절도 측정을 할 수 있었다.

• 한국정밀공학회지
• /
• 제15권5호
• /
• pp.93-99
• /
• 1998

Although laser interferometer measurement system has advantages of measurement range and accuracy, it has some disadvantages when measurement of multi degrees of freedom of motion are required. Because the traditional error measurement methods for geometric errors (two straightness and three angular errors) of a slide of machine tools measures error components one at a time. It may also create an optical path difference and affect the measurement accuracy. In order to identify and compensate for geometric errors of a moving rigid body in real time processes, an on-line error measurement system for simultaneous detection of the five error components of a moving object is required. Using laser alignment technique and some optoelectronic components, an on-line measurement system with 5 degrees of freedom was developed for the geometric error detection in this study Performance verification of the system has been performed on an error generating mechanism. Experimental results show the feasibility of this system for identifying geometric errors of a slide of machine tools.

• 한국정밀공학회지
• /
• 제25권3호
• /
• pp.101-108
• /
• 2008

Residual stress is one of the causes which make defects in engineering components and materials. Many methods have been developing to measure the residual stress. Though these methods provide the information of the residual stress, they also have disadvantage like a little damage, time consumption, etc. In this paper, we devised a new experimental technique to measure residual stress in materials with a combination of laser speckle pattern interferometry and spot heating. The speckle pattern interferometer measures in-plane deformation during the heat provides for much localized stress relief. 3-D shape is used for determining heat temperature and other parameters. The residual stresses are determined by the amount of strain that is measured subsequent to the heat and cool-down of the region being interrogated. A simple model is presented to provide a description of the method. In this paper, we could experimentally confirm that residual stress can be measured by using laser interferometry and spot heating method.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 1998년도 춘계학술대회 논문집
• /
• pp.239-244
• /
• 1998

ESP(Electronic Speckle Pattern Interferometry) is an optical technique to measure deforamtion of engineering components and materials in industrial areas. ESPI, a non-contact and non-destructive measuring method, is capable of providing full-field results with high spatial resolution and high speed. One of important application aspects using electronic speckle pattern interferometry is to generate contours of a diffuse object in order to provide data for 3-D shape analysis and topography measurement. The electronic speckle contouring is suitable for providing measurement range from millimeters to several centimeters. In this study, we introduce the contouring method by modified dual-beam speckle pattern interferometer and a shift of the two illumination beams through optical fiber in order to obtain the contour fringe patterns. Before the experiments, we performed the geometric analysis for dual-beam-shifted ESPI contouring. And by this geometric analysis, we performed the electronic speckle contouring experiment. We used 4-frame phase shifting method with PZT for quantitative analysis of contour fringes. Finally, we showed good agreements between the geometric analysis and experimental results.