• Journal of the Semiconductor & Display Technology
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• v.23 no.2
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• pp.87-91
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• 2024

SiO₂, renowned for its excellent insulating properties, has been used in the semiconductor industry as a valuable dielectric material. High-quality SiO₂ films find applications in gate spacers and interlayer insulation gap-fill oxides, among other uses. One of the prevalent methods for depositing these SiO₂ films is plasma enhanced chemical vapor deposition (PECVD) favored for its relatively low processing costs and ability to operate at low temperatures. However, compared to the increasingly utilized atomic layer deposition (ALD) method, PECVD exhibits inferior film characteristics such as uniformity. This study aims to produce SiO₂ films with uniformity as close as possible to those achieved by ALD through the adjustment of PECVD process parameters. we conducted a total of nine PECVD processes, varying the process time and gas flow rates, which were identified as the most influential factors on the PECVD process. Furthermore, ellipsometry analysis was employed to examine the uniformity variations of each process. The experimental results enabled us to elucidate the relationship between uniformity and deposition rate, as well as the impact of gas flow rate and deposition time on the process outcomes. Additionally, thickness measurements obtained through ellipsometer facilitate the identification of optimal process parameters for PECVD.

• The Journal of the Acoustical Society of Korea
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• v.34 no.5
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• pp.385-393
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• 2015

The speed of train has rapidly been increased in accordance with the developed railway technology. Nowadays, high-speed trains were introduced which has the speed faster than 400 km/h. In Korea, a lots of efforts were undertaken to increase the speed of train faster than 350 km/h, however noise and vibration are still the main problems to solve for realization of the high-speed train. In the case of operation speed faster than 350 km/h, it can be easily presumed that the noise and vibration damages could be increased in the train stations which are close to the passing railway tracks. Thus, the noise in the five different types of high-speed train stations were analyzed including stations built on the ground, underground, under rail, and two types on rail. The present paper predicts noises inside the stations depending on the speed of the passing trains and analyze the noise comparing with noise criteria (NC). Sound insulation performance of each part of buildings was calculated using the transmission noise formula and computer modeling, Finally, a series of processes were introduced to satisfy the aural environment with the optimum interior noise criteria by changing interior finishing materials.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.60 no.6
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• pp.1274-1279
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• 2011

The purpose of this paper is to present the manufacturing defect and damage pattern of a 3 phase 22.9/3.3kV oil immersed transformer, as well as to present an objective basis for the prevention of a similar accident and to secure data for the settlement of PL related disputes. It was found that in order to prevent the occurrence of accidents to transformers, insulating oil analysis, thermal image measurement, and corona discharge diagnosis, etc., were performed by establishing relevant regulation. The result of analysis performed on the external appearance of a transformer to which an accident occurred, the internal insulation resistance and protection system, etc., showed that most of the analysis items were judged to be acceptable. However, it was found that the insulation characteristics between the primary winding and the enclosure, those between the ground and the secondary winding, and those between the primary and secondary windings were inappropriate due to an insulating oil leak caused by damage to the pressure relief valve. From the analysis of the acidity values measured over the past 5 years, it is thought that an increase in carbon dioxide (CO2) caused an increase in the temperature inside the transformer and the increase in the ethylene gas increased the possibility of ignition. Even though 17 years have passed since the transformer was installed, it was found that the system's design, manufacture, maintenance and management have been performed well and the insulating paper was in good condition, and that there was no trace of public access or vandalism. However, in the case of transformers to which accidents have occurred, a melted area between the upper and the intermediate bobbins of the W-phase secondary winding as well as between its intermediate and lower bobbins. It can be seen that a V-pattern was formed at the carbonized area of the transformer and that the depth of the carbonization is deeper at the upper side than the lower side. In addition, it was found that physical bending and deformation occurred inside the secondary winding due to non-uniform pressure while performing transformer winding work. Therefore, since it is obvious that the accident occurred due to a manufacturing defect (winding work defect), it is thought that the manufacturer of the transformer is responsible for the accident and that it is lawful for the manufacture to investigate and prove the concrete cause of the accident according to the Product Liability Law (PLL).

• Journal of Advanced Marine Engineering and Technology
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• v.40 no.4
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• pp.307-313
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• 2016

When liquefied natural gas (LNG) is stored in a tank, it is necessary to maintain low temperature. It is very important that insulation techniques are applied to the LNG cargo because of this extreme environment. Hence, laminated wood, especially plywood, is widely used as the structural member and insulation material in LNG cargo containment systems (CCS). However, fracture of plywood has been reported recently, owing to sloshing effect. Therefore, it is necessary to increase the strength of the structural member for solving the problem. In this study, compressed wood, which is used as a support in LNG independent type B tanks, was considered as a substitute for plywood. Compression and bending tests were performed on compressed wood under ambient and cryogenic temperatures to estimate the mechanical behaviors and fracture characteristics. In addition, the direction normal to the laminates surface was considered as an experimental variable. Finally, the feasibility of using compressed wood for an LNG CCS was evaluated from the test results.

• Tunnel and Underground Space
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• v.23 no.5
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• pp.442-453
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• 2013

A large-scale high-temperature thermal energy storage(TES) was numerically modeled and the heat loss through storage tank walls was analyzed using a commercial code, FLAC3D. The operations of rock cavern type and above-ground type thermal energy storages with identical operating condition were simulated for a period of five consecutive years, in which it was assumed that the dominant heat transfer mechanism would be conduction in massive rock for the former and convection in the atmosphere for the latter. The variation of storage temperature resulting from periodic charging and discharging of thermal energy was considered in each simulation, and the effect of insulation thickness on the characteristics of heat loss was also examined. A comparison of the simulation results of different storage models presented that the heat loss rate of above-ground type TES was maintained constant over the operation period, while that of rock cavern type TES decreased rapidly in the early operation stage and tended to converge towards a certain value. The decrease in heat loss rate of rock cavern type TES can be attributed to the reduction in heat flux through storage tank walls followed by increase in surrounding rock mass temperature. The amount of cumulative heat loss from rock cavern type TES over a period of five-year operation was 72.7% of that from above-ground type TES. The heat loss rate of rock cavern type obtained in long-period operation showed less sensitive variations to insulation thickness than that of above-ground type TES.

• Journal of the Korean Ceramic Society
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• v.41 no.3
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• pp.221-228
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• 2004

Basic properties of artificial lightweight aggregate by using waste dusts and strength properties of LWA concrete were studied. Bulk specific gravity and water absorption of artificial lightweight aggregates varied from 1.4 to 1.7 and 13 to 16%, respectively. Crushing ratio of artificial lightweight aggregate was above 10% higher than that of crushed stone or gravel. As a result of TCLP leaching test, the leaching amount of tested heavy metal element was below the leaching standard of hazardous material. Slump, compressive strength and stress-strain properties of LWA concrete made of artificial lightweight aggregate were tested. Concrete samples derived from LWA substitution ratio of 30 vol% and W/C ratio of 45 wt% showed the best properties overall. Thermal insulation and sound insulation characteristics of light weight concrete panel with the optimum concrete proportion were tested. Average overall heat transmission of 3.293W/㎡$^{\circ}C$ was observed. It was higher by about 15% than those of normal concrete made by crushed stone. Sound transmission loss of 50.9 ㏈ in frequency of 500 ㎐ was observed. It was higher by about 13% than standard transmission loss.

• Journal of the Korean Society of Safety
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• v.33 no.1
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• pp.28-34
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• 2018

The purpose of this study is to fabricate a sensor module to detect the resistive leakage current (Igr) in real time that occurs to low voltage electric lines and to verify its reliability. In the case of the developed sensor module, wires are inserted into the zero current transformer (ZCT) and current transformer (CT) in advance and then the branch line is connected to the circuit breaker. The measurement result of the resistance of the distribution panel equipped with the developed sensor module shows that the resistance is $0.151m{\Omega}$ between the R and R phases, $0.169m{\Omega}$ between the S and S phases, and $0.178m{\Omega}$ between the T and T phases, respectively. The insulation resistance measured at AC 500 V and 1,000 V is $0.08m{\Omega}$ between the R, S, T and N phases, respectively. Then, the insulation resistance measured at DC 500 V is $83.3G{\Omega}$ between the R, S, T and G terminal, respectively. In addition, the applied withstanding voltage is AC 220 V/380 V/440 V and it was found that characteristics between all phases are good. This study measured the standby power by installing the developed sensor module at the rear of the MCCB and switching the circuit breaker on sequentially. The standby power is 1.350 W when one circuit breaker is turned on, 1.690 W when 2 circuit breakers are turned on, and 4.371 W when 10 circuit breakers are turned on. This study also verified the reliability of the standby power of the distribution panel equipped with the developed sensor module using the Minitab Program (Minitab PGM). Since the analysis shows the statistical average of 1.34627 in the reliable range of normal distribution, standard deviation of 0.001874, AD of 0.554, and P value of 0.140, it is found that the distribution panel equipped with the developed sensor module has high reliability.

• Journal of Energy Engineering
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• v.25 no.3
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• pp.18-26
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• 2016

Mineral oil is the most widely used for electrical transformer, though some factors should be considered such as their environmentally harmfulness when it spill and low flash point. To cover these disadvantages, vegetable oil has developed because of its high biodegradability and thermal stability. However, it is necessary that many studies should conduct to reveal the detailed impacts of long-term operation as transformer oil. In this paper, we applied the accelerated aging test which simulate the real transformer circumstances using insulation paper, coil, steel at $150^{\circ}C$, which is higher than normal operation, for 2 weeks. To figure out the oxidation characteristics between mineral oil and vegetable oil test major properties and components such as total acid number, dielectric breakdown and dissolved gas components during that period. As a result of these tests, we found that vegetable oil has higher electric insulation ability than mineral oil though poor total acid number by hydrophile property. Vegetable oil also kept its thermal stability under the given circumstances.

• Journal of the Architectural Institute of Korea Planning & Design
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• v.35 no.11
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• pp.25-34
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• 2019

It is important to design windows in a reasonable way considering the performance characteristics of the elements of the window rather than just to increase the thermal energy performance of the window. In this study, the Heat-transfer Coefficient as insulation performance of the windows and together with the grade of the glass's SHGC (Solar Heat Gain Coefficient) were analyzed to relate to the energy efficiency performance of the building by azimuth angle. Based on this basic study, the Heat-transfer Coefficient of windows and the SHGC rating of glass were applied to the unit plan of apartment building, and the Heating and Cooling Demand were analyzed by azimuth angle. Apartment plan types were divided into 2 types of Non-extension and extension of balcony. The designPH analysis data derived from the variant of the Heat-transfer Coefficient and SHGC, were put into PHPP(Passive House Planning Package) to analyze precisely the energy efficiency(Heating and Cooling Demands) of the building by azimuth angle. In addition, assuming the 'ㅁ' shape layout, energy efficiency performance and potential of PV Panel installation also were analyzed by floors and azimuth angle, reflecting the shading effects by surrounding buildings. As the results of the study, the effect of Heat Gain by SHGC was greater than Heat Loss due to the Heat-transfer Coefficient. So it is more effective to increase SHGC to satisfy the same Heating Demand, and increasing SHGC made possible to design windows with low Heat-transfer Coefficient. It was also revealed that the difference in annual Heating and Cooling Demands between the low, mid and high floor households is significantly high. In addition to it, the installation of PV Panel in the form of a shading canopy over the window reduces the Cooling Load while at the same time producing electricity, and also confirmed that absolute thermal energy efficiency could not be maximized without controlling the thermal bridge and ventilation problems as important heat loss factors.

• Journal of the Microelectronics and Packaging Society
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• v.27 no.4
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• pp.97-105
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• 2020

Recently, as the data speed and operating frequencies of Ethernet keeps increasing, electro magnetic interference (EMI) also becomes increasing. The generation of such EMI will cause malfunction of near electronic devices. In this study, EMI filters were applied to reduce the EMI generated by DC-DC SMPS (switching mode power supply), which is the main cause of EMI generation of Ethernet switch. As the EMI filter, MLCCs with excellent withstanding voltage characteristics were used, which had advantages in miniaturization and mass production. Two types of EMI MLCC filters were used, which are X-capacitor and X, Y-capacitor. X-capacitor was composed of 2 MLCCs with 10 nF and 100 nF capacity and 1 Mylar capacitor. Y-capacitor was consisted of 6 MLCCs with a capacity of 27 nF. When only X-capacitor was applied as EMI filter, the conductive EMI field strength exceeded the allowable limit in frequency range of 150 kHz ~ 30 MHz. The radiative EMI also showed high EMI strength and very small allowable margin at the specific frequencies. When the X and Y-capacitors were applied, the conductive EMI was greatly reduced, and the radiation EMI was also found to have sufficient margin. In addition, X, Y-capacitors showed very high insulation resistance and withstanding resistance performances. In conclusion, EMI X, Y-capacitors using MLCCs reduced the EMI noise effectively and showed excellent electrical reliability.