• Journal of the Microelectronics and Packaging Society
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• v.16 no.4
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• pp.17-22
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• 2009

Two different organic-inorganic hybrid thin film transistors (OITFTs) with the structures of glass/ITO/ZnO/PMMA/Al (staggered structure) and glass/ITO/PMMA/ZnO/Al (inverted staggered structure), were fabricated and their electrical and structural properties were compared. The ZnO thin films used as active channel layers were deposited by the atomic layer deposition (ALD) method at a temperature of $100^{\circ}C$. To investigate the effect of the substrates on their properties, the ZnO films were deposited on bare glass, PMMA/glass and ITO/glass substrates and their crystal properties and surface morphologies were analyzed. The structural properties of the ZnO films varied with the substrate conditions. The ZnO film deposited on the ITO/glass substrate showed better crystallinity and morphologies, such as a higher preferred c-axis orientation, lower FWHM value and larger particle size compared with the one deposited on the PMMA/glass substrate. The field effect mobility ($\mu$), threshold voltage ($V_T$) and $I_{on/off}$ switching ratio for the OITFT with the staggered structure were about $0.61\;cm^2/V{\cdot}s$, 5.5 V and $10^2$, whereas those of the OITFT with the inverted staggered structure were found to be $0.31\;cm^2/V{\cdot}s$, 6.8 V and 10, respectively. The improved electrical properties for the staggered OITFTs may originate from the improved crystal properties and larger particle size of the ZnO active layer.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.6 s.348
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• pp.18-22
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• 2006

The inspection of surface properties under n-octadecyltrichlorosilane treated $SiO_2$ film was carried out by current-voltage characteristic and the scanning electron microscope. The voltage at zero current in low electric field is the lowest at 0.3 % OTS treated $SiO_2$ film with hybrid type. $SiO_2$ films changed from inorganic to hybrid or organic properties according to the increase of OTS content. OTS treated $SiO_2$ films with hybrid properties decreased the leakage currents, and the grain size of pentacene deposited sample was also the most small at the hybrid properties. The perpendicular generation of pentacene molecular was related with the surface of insulators. The surface with hybrid properties decreased the grain size, but that with inorganic or organic properties increased the grain size.

• The Korean Journal of Ceramics
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• v.6 no.1
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• pp.15-20
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• 2000

Thick inorganic-organic hybrid films were prepared on ITO-coated glass substrates by the electrophoretic sol-gel deposition of polyphenylsilsesquioxane particles. The morphology of the deposited films changed from the aggregate of the spherical particles to monolith by heat treatment at temperatures higher than $200^{\circ}C$. Transparency of the films was significantly improved accompanied by the morphological change of the particles. The degree of the morphological change was governed by two factors; maximum heat treatment temperature and heating rate. Transparent thick films of ca. 3$\mu\textrm{m}$ in thickness were obtained only by heat treatment at $400^{\circ}C$ for 2h with rapid heating from room temperature to $400^{\circ}C$. These films obtained were strongly adhered to the ITO-coated glass substrates and has a very smooth surface.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.210-211
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• 2006

This study presents the technology and application of hybrid insulation film for electric magnet wire. In order to make the high efficient motor with high space factor, it is necessary to develop a self-lubrication heat-resistant insulation film that can be used when the space factor 70% or more. A key to achieving high windability is to increase the lubricity and bonding strength of vanish, which for a magnet wire generally determines the mechanical scratches characteristics. Effective ways to reduce scratches include improving insulation film prepared by organic and inorganic hybrid synthesis methods.

• Macromolecular Research
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• v.13 no.2
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• pp.96-101
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• 2005

Thin-film humidity sensors were prepared using inorganic/organic hybrid polyelectrolytes, which were prepared from the sol-gel reaction of copolymers of [2-(methacryloyloxy)ethyl]dimethylpropylammonium bromide (MEPAB), n-butyl methacrylate (BMA), and 3-(trimethoxysilyl)propyl methacrylate (TSPM) with tetraethyl ortho-silicate (TEOS). The humidity-sensitive polyelectrolytes were composed of the copolymers having the following mole ratios of MEPAB, BMA, and TSPM: 60/30/10, 55/30/15, and 50/30/20. We found that the impedance varied with the content of MEPAB or TEOS; it ranged from $10^{7} to 10^{3}\Omega$ between 20 and $95\%$ relative humidity, which is the range required for a humidity sensor operating at ambient humidity. In addition we investigated a number of characteristics of these humidity sensors, such as their hysteresis, response time, temperature dependence, frequency dependence, water durability, and long-term stability.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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• 2004.11a
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• pp.7-12
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• 2004

Desalination system of revers osmosis(RO) membrane has been proven to be the most economical not only for the desalination of water containing salts, but also for the concentration of solute. RO membranes were traditionally made of inorganic polymers such. as cellulose acetate(CA), Polyamide(PA). To retain more minerals in deep ocean water, a new hybrid membrane composed of tourmaline film as organic material onto inorganic layer of CA polymer in asymmetric structure was developed for RO membrane process. The performance tests were carried out in the permeability of pure water and the rejection of NaCl solution to evaluate the adaptability for DOW desalination. The results of these basic tests show possibility to apply the new hybrid RO membrane for the desalination with function control.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.4
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• pp.286-290
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• 2020

The formation of inorganic thin films in low-temperature solution processes is necessary for a wide range of commercial applications of organic electronic devices. Aluminum oxide thin films can be utilized as barrier films that prevent the deterioration of an electronic device due to moisture and oxygen in the air. In addition, they can be used as the gate insulating layers of a thin film transistor. In this study, aluminum oxide thin film were formed using two methods simultaneously, a thermal process and the DUV process, and the properties of the thin films were compared. The result of converting aluminum nitrate hydrate to aluminum oxide through a hybrid process using a thermal treatment and DUV was confirmed by XPS measurements. A film-based a-IGZO TFT was fabricated using the formed inorganic thin film as a gate insulating film to confirm its properties.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.3
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• pp.51-58
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• 2018

In this paper, the organic material Poly(methyl methacrylate) PMMA is used with inorganic $Al_2O_3$ to fabricate organic-inorganic multilayer barrier thin films. The organic thin films are developed using a roll-to-roll electrohydrodynamic atomization system, whereas the inorganic are grown using a roll-to-roll low-temperature atmospheric pressure atomic layer deposition system. For the first time, these two technologies are used together to develop organic-inorganic multilayer barrier thin films in atmospheric condition. The films are grown under optimized parameters and classified into three classes based on the layer structures, when the total thickness of the barrier is maintained at ~ 160 nm. All classes of barriers show good morphological, optical and chemical properties. The $Al_2O_3$ films with a low average arithmetic roughness of 1.58 nm conceal the non-uniformity and irregularities in PMMA thin films with a roughness of 5.20 nm. All classes of barriers show a notably good optical transmission of ~ 85 %. The hybrid organic-inorganic barriers show water vapor and oxygen permeation in the range of ${\sim}3.2{\times}10^{-2}g/m^2/day$ and $0.015cc/m^2/day$ at $23^{\circ}C$ and 100% relative humidity. It has been confirmed that it can be mass-produced and used as a low-cost barrier thin film in various printing electronic devices.

• Journal of the Microelectronics and Packaging Society
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• v.24 no.4
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• pp.79-84
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• 2017

The solar cells should be protected from the moisture and oxygen in order to sustain the properties and reliability of the devices. In this research, we prepared the protection films on the flexible plastic substrates by spray coating method using organic-inorganic hybrid solutions. The protection characteristics were studied depending on the various process conditions (nozzle distance, thicknesses of the coatings, film structures). The organic-inorganic solutions for the protection film layer were synthesized by addition of $Al_2O_3$ ($P.S+Al_2O_3$) and $SiO_2$ ($P.S+SiO_2$) nano-powders into PVA (polyvinyl alcohol) and SA (sodium alginate) (P.S) organic solution. The optical transmittances of the protection film with the thicknesses of $5{\mu}m$ showed 91%. The optical transmittance decreased from 81.6% to 73.6% with the film thickness increased from $78{\mu}m$ to $178{\mu}m$. In addition, the protective films were prepared on the PEN (polyethylene naphthalate), PC (polycarbonate) single plastic substrates as well as the Acrylate film coated on PC substrate (Acrylate film/PC double layer), and $Al_2O_3$ film coated on PEN substrate ($Al_2O_3$ film/PEN double layer) using the $P.S+Al_2O_3$ organic-inorganic hybrid solutions. The optimum protection film structure was studied by means of the measurements of water vapor transmittance rate (WVTR) and surface morphology. The protective film on PEN/$Al_2O_3$ double layer substrate showed the best water protective property, indicating the WVTR value of $0.004gm/m^2-day$.

• Journal of the Optical Society of Korea
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• v.10 no.1
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• pp.1-10
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• 2006

Optical transparency and high diffraction efficiency are two essential factors for high performance of the photopolymer. Optical transparency mainly depends on the miscibility between polymer binder and photopolymerized polymer, while diffraction efficiency depends on the refractive index modulation between polymer binder and photopolymerized polymer. For most of organic materials, the large refractive index difference between two polymers accompanies large structural difference that leads to the poor miscibility and thus poor optical quality via light scattering. Therefore, it is difficult to design a high-performance photopolymer satisfying both requirements. In this work, first, we prepared a new phase-stable photopolymer (PMMA) with large refractive index modulation and investigated the optical properties. Our photopolymer is based on modified poly (methyl methacrylate) as a polymer binder, acryl amide as a photopolymerizable monomer, triethanolamine as initiator, and yellow eosin as a photosensitizer at 532 nm. Diffraction efficiency over 85% and optical transmittance over 90% were obtained for the photopolymer. Second, Organic-inorganic nanocomposite films were prepared by dispersing an aromatic methacrylic monomer and a photo- initiator in organic-inorganic hybrid sol-gel matrices. The film properties could be controlled by optimizing the content of an organically modified silica precursor (TSPEG) in the sol-gel matrices. The photopolymer film modified with the organic chain (TSPEG) showed high diffraction efficiency (> 90%) under an optimized condition. High diffraction efficiency could be ascribed to the fast diffusion and efficient polymerization of monomers under interference light to generate refractive index modulation. The TSPEG modified photopolymer film could be successfully used for holographic memory.