• 제어로봇시스템학회:학술대회논문집
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• 1991.10b
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• pp.1961-1965
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• 1991

This paper deals with an automatic and precision alignment technique for proximity printing in x-ray lithography, using two pairs of moire gratings, with moire signals from each pair being 180.deg. out of phase with each other. We constructed an automatic and precision alignment experimental system which could measure both transmitted moire signals and reflected moire signals at the same time. The automatic alignment was achieved using transmitted moire signals and also reflected moire signals as a control signal for a stage driver. The alignment position of the system was monitored not only by a control signal but also by a non-control signal. The effect of transmitted and reflected moire signals upon alignment accuracy was discussed. We concluded that the technique using diffracted moire signals is a viable automatic and precision alignment technique.

• Journal of the Semiconductor & Display Technology
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• v.6 no.1 s.18
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• pp.43-48
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• 2007

For exposure systems, very accurate alignment between the mask and the substrate is indispensable. In this paper, an automatic alignment system using machine vision for exposure systems is described. Machine vision algorithms are described in detail including extraction of an alignment mark's center position and camera calibration. Methods for extracting parameters for alignment are also presented with some compensation techniques to reduce alignment time. Our alignment system was implemented with a vision system and motion control stages. The performance of the alignment system has been extensively tested with satisfactory results. The performance evaluation shows alignment accuracy of lum within total alignment time of about $2{\sim}3$ seconds including stage moving time.

• Journal of the Korean Operations Research and Management Science Society
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• v.31 no.4
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• pp.13-33
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• 2006

Using structural equation modeling, this study empirically examined the causal relationships among the level of advanced manufacturing technology (AMT), facilitation of alignment, the degree of strategic alignment of management eccounting Information systems (MAIS), and the improvement of production performance. The causal relationships between MAIS strategic alignment and information characteristics of MAIS were also investigated. The results showed that the level of AMT has a significant and positive impact on alignment facilitation. A significant causal relationship between alignment facilitation and MAIS strategic alignment was also found. It was shown that under high degrees of MAIS strategic alignment, MAIS must provide broad-scope and integrated types of Information. The causal relation-ships between MAIS strategic alignment and organizational performance were significant and positive. Thus, it is concluded that under high levels of AMT, a high degree of MAIS strategic alignment positively contributes to the improvement of production performance.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2009.10a
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• pp.410-413
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• 2009

Wafer pre-alignment is to find the center and the orientation of a wafer and to move the wafer to the desired position and orientation. In this paper, an area camera based pre-aligning method is presented that captures 8 wafer images regularly during 360 degrees rotation. From the images, wafer edge positions are extracted and used to estimate the wafer's center and orientation using least square circle fitting. These information are utilized for the proper alignment of the wafer.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.13 no.9
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• pp.4814-4832
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• 2019

Plagiarism detection is increasingly exploiting text alignment. Text alignment involves extracting the plagiarism passages in a pair of the suspicious document and its source document. The heuristics have achieved excellent performance in text alignment. However, the further improvements of the heuristic methods mainly depends more on the experiences of experts, which makes the heuristics lack of the abilities for continuous improvements. To address this problem, machine learning maybe a proper way. Considering the position relations and the context of text segments pairs, we formalize the text alignment task as a problem of sequence labeling, improving the current methods at the model level. Especially, this paper proposes to use the probabilistic graphical model to tag the observed sequence of pairs of text segments. Hence we present the sequence labeling approach for text alignment in plagiarism detection based on Conditional Random Fields. The proposed approach is evaluated on the PAN@CLEF 2012 artificial high obfuscation plagiarism corpus and the simulated paraphrase plagiarism corpus, and compared with the methods achieved the best performance in PAN@CLEF 2012, 2013 and 2014. Experimental results demonstrate that the proposed approach significantly outperforms the state of the art methods.

• The Journal of Information Systems
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• v.26 no.2
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• pp.25-42
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• 2017

Purpose This study empirically examined the causal relationships among the level of advanced manufacturing technology(AMT), facilitation of alignment, the degrees of strategic alignment of management accounting information systems(MAIS), and the improvement of production performance. Design/methodology/approach Data for this study were drawn from a survey of the current status of AMT used in Korean manufacturing firms. At the beginning, 131 organizations responded to the request for information. However, during the survey, 5 firms withdrew from the survey, and as a result, 126 manufacturing firms were included in the research. In order to collect data, this study administered questionnaires with the participating firms. The survey was conducted during a 4-month period between November 2015 and March 2016. Findings The results showed that the level of AMT has a significant impact on alignment facilitation. A significant causal relationship between alignment facilitation and MAIS strategic alignment was also found. It was shown that under high degrees of MAIS strategic alignment, MAIS must provide broad-scope and integrated types of information. The causal relationships between MAIS strategic alignment and organizational performance were significant and positive. Thus, it is concluded that under high levels of AMT, a high degree of MAIS strategic alignment positively contributes to the improvement of a firm's production performance.

• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.11-16
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• 2010

Wafer Pre-Alignment is to find the center and the orientation of a wafer and to move the wafer to the desired position and orientation. In this paper, an area camera based pre-aligning method is presented that captures 8 wafer images regularly during 360 degrees rotation. From the images, wafer edge positions are extracted and used to estimate the wafer's center and orientation using least squares circle fitting. These data are utilized for the proper alignment of the wafer. For accurate alignments, camera calibration methods using high order polynomials are used for converting pixel coordinates into real-world coordinates. A complete pre-alignment system was constructed using mechanical and optical components and tested. Experimental results show that alignment of wafer center and orientation can be done with the standard deviation of 0.002 mm and 0.028 degree, respectively.

• The Journal of Society for e-Business Studies
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• v.9 no.3
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• pp.113-128
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• 2004

Up to the present, most of the previous works, related to the alignment of organizations, have been focused on the alignment between business and information technology. Also these works have been done with single element, e.g., view rather than with overall elements such as view, scope, and perspective for enterprise-wide integrated alignment. Meanwhile, an enterprise architecture is a blueprint that represents the structure of components of organizations and their interrelationships. Nowadays, many organizations attempt to make enterprise-wide alignment of business and information technology based on enterprise architecture. Unfortunately, the enterprise-wide alignment is still in a stage of not only conceptual level but also abstract level. Hence, this paper proposes a structured enterprise-wide alignment model to overcome the limitations of existing alignment models. We survey the existing works and propose the conceptual, the logical, and the physical models for enterprise-wide alignment which includes 3-dimensional elements such view, scope, and perspective based on enterprise architecture. Finally, we have shown that the proposed model is better than existing ones through comparing the characteristics of models.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.8 no.6
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• pp.1926-1945
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• 2014

In this paper, we propose a distributed signal subspace interference alignment algorithm for single beam K-user ($3K{\geq}$) MIMO interference channel based on sum rate maximization and game theory. A framework of game theory is provided to study relationship between interference signal subspace and altruistic-egoistic bayesian game cost function. We demonstrate that the asymptotic interference alignment under proposed scheme can be realized through a numerical algorithm using local channel state information at transmitters and receivers. Simulation results show that the proposed scheme can achieve the total degrees of freedom that is equivalent to the Cadambe-Jafar interference alignment algorithms with perfect channel state information. Furthermore, proposed scheme can effectively minimize leakage interference in desired signal subspace at each receiver and obtain a moderate average sum rate performance compared with several existing interference alignment schemes.

• Journal of Information Display
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• v.12 no.4
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• pp.173-177
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• 2011

The alignment film abrasion caused by the rubbing process was quantitatively evaluated via atomic-force microscopy (AFM). First, a patterned alignment film structure, which was molded through the imprint method, was artificially formed. Then, the surface topography of the alignment film was evaluated via AFM after rubbing, and the degree of abrasion of the alignment film was estimated by subtracting the value after rubbing from the value before rubbing. It was recognized that the degree of abrasion increased with an increase in the rubbing strength. The relationship between the number of rubbing cycles and the degree of abrasion of the alignment film was also estimated.