• Transactions on Electrical and Electronic Materials
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• 제14권2호
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• pp.67-70
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• 2013

In this study, we changed the input parameters (gas mixing ratio, RF power, DC bias voltage, and process pressure), and then monitored the effect on TiN etch rate and selectivity with $SiO_2$. When the RF power, DC-bias voltage, and process pressure were fixed at 700 W, - 150 V, and 15 mTorr, the etch rate of TiN increased with increasing $CF_4$ content from 0 to 20 % in $CF_4$/Ar plasma. The TiN etch rate reached maximum at 20% $CF_4$ addition. As RF power, DC bias voltage, and process pressure increased, all ranges of etch rates for TiN thin films showed increasing trends. The analysis of x-ray photoelectron spectroscopy (XPS) was carried out to investigate the chemical reactions between the surfaces of TiN and etch species. Based on experimental data, ion-assisted chemical etching was proposed as the main etch mechanism for TiN thin films in $CF_4$/Ar plasma.

• 센서학회지
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• 제33권5호
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• pp.305-309
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• 2024

Trimethylamine (TMA) is an organic amine gas that serves as a key indicator for evaluating the freshness of seafood. We synthesized a highly sensitive trimethylamine (TMA) sensor based on porous indium oxide (In₂O₃) nanoparticles (NPs) loaded with CuO in the range of 6.7 to 28.4 at.%. CuO was loaded by hydrazine reduction onto as prepared In₂O₃ NPs using the microwave irradiation method. Crystal structures, morphologies, and chemical composition of CuO/In₂O₃ nanostructures (NSs) were characterized by X-ray diffraction, field emission scanning electron microscopy, energy-dispersive X-ray spectroscopy, and inductively coupled plasma mass spectrometry. The response of the 23.8 at.% CuO/In₂O₃ to 2.5 ppm TMA at 325℃ was 5.7, which was 2.8 times higher than that of porous In₂O₃ NPs. The high sensitivity and selective detection of TMA were attributed to electronic interactions between CuO and In₂O₃ and the high catalytic activity of CuO to TMA. Altogether, this CuO/In₂O₃ sensor could be used in the future to detect low concentrations of TMA, thereby aiding in the storage and distribution of marine food resources.

• 한국전기전자재료학회논문지
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• 제26권5호
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• pp.335-340
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• 2013

In this study, the plasma etching of the TaN thin film with $CH_4/BCl_3/Ar$ gas chemistries was investigated. The etch rate of the TaN thin film and the etch selectivity of TaN to $SiO_2$ was studied as a function of the process parameters, including the amount of $CH_4$. X-ray photoelectron spectroscopy (XPS) and Field-emission scanning electron microscopy (FE-SEM) was used to investigate the chemical states of the surface of the TaN thin film.

• 대한화학회지
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• 제36권2호
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• pp.243-247
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• 1992

가스센서로 많이 쓰이고 있는 $SnO_2$는 분해하기 어렵기 때문에 이의 분해 방법에 대하여 집중적으로 연구했으며, 특히 미량 원소의 분석시에 방해영향이 없는 전처리 방법을 연구하였다. 또한 $SnO_2$에서 촉매로 첨가된 귀금속 중 Pd를 선정하여 이의 정량시 방해를 일으키는 요소에 대하여 연구하고, ICP-AES로 Pd를 정량하는 방법을 확립시켰다.

• 한국염색가공학회지
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• 제21권5호
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• pp.51-57
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• 2009

Since heavy metal pollution is a significant global environmental problem and very dangerous to human health, the improved methods for detecting heavy metals are required recently. Colorimetric chemosensors are now considered as one of the most effective analytical method used in the environment monitoring. New direct dyes having the function of colorimetric chemosensors were synthesized. When metal ions such as $Al^{3+}$, $Ca^{2+}$, $Cd^{2+}$, $Cr^{3+}$, $Cu^{2+}$, $Fe^{2+}$, $Fe^{3+}$, $Hg^{2+}$, $Li^+$, $Mg^{2+}$, $Na^+$, $Ni^{2+}$, $Pb^{2+}$ and $Zn^{2+}$ were added each solution of new direct dyes, the color of solution was changed and can be easily detected with naked eyes without expensive experimental equipment such as atomic absorption spectrometer (AAS) or inductively coupled plasma?mass spectrometer (ICP-MS). The new benzidine analogues were diazotized and reacted with couplers such as H-acid, J-acid, Chromotropic acid, Nevill-winther acid and gamma acid to synthesize new direct dyes. The structures of the new direct dyes were confirmed by high resolution mass spectrometer (FAB ionization) and evaluated with UV-Vis spectroscopy. The UV-VIS spectroscopy was measured for the dye solutions by adding various concentrations of metal ions. It was observed that the absorbance in UV-Vis spectra was changed as the heavy metal ions were added.

• Progress in Superconductivity
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• 제10권2호
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• pp.144-148
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• 2009

A current limiter was manufactured using a Josephson junction array to cut off an excessive current flowing into the SQUID sensor. The Fabricateed Josephson junction array was connected in series with a flux transformer that consists of a pick-up coil and an input coil, and the flux transformer was inductively coupled with a Double Relaxation Oscillation SQUID(DROS). The flux-voltage modulation curve was induced by applying an AC magnetic field whose magnitude was far smaller than that of the DC magnetic field. A change in the flux-voltage modulation curve of the SQUID was observed while the DC magnetic field was increased, to qualitatively examine the current limiting characteristic of the Josephson junction array. As a result, it was found that the SQUID flux-voltage modulation curve disappeared at the critical current of the Josephson junction array, which indicates that the Josephson junction array properly works as a current limiter.