• 제목/요약/키워드: Induced coupled plasma

검색결과 103건 처리시간 0.03초

Ion Energy Analyzer를 이용한 자화된 ICP에서 기판 이온 에너지 분포 특성연구

  • 이우현;김동현;김혁;정재철;황기웅
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.502-502
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    • 2012
  • 반도체 공정 중 플라즈마를 이용하는 식각 공정의 경우, 실제 식각률이나 profile의 특성은 RF Bias power에 의해 기판에 당겨지는 이온 선속에 의해 큰 영향을 받는다. 때문에 플라즈마 발생장치 내에서 기판에서의 이온에너지 분석이 중요해지고 있다. 이온에너지 분석을 위해 다양한 형태의 이온에너지 분석기가 나와있으나 기판 위에 얹혀있는 양상이었다. 이에 본 발표에서는 실제 기판 안에 이온에너지 분석기를 설치함으로써 실제 기판에서 wafer가 받는 이온들의 양상에 더 가깝게 접근했다. 이렇게 제작 된 이온에너지 분석기를 이용해 대면적 M-ICP(Magnetized-Induced Coupled Plasma)에서 아르곤 가스를 이용한 플라즈마에서 기판 이온 에너지 분포를 확인해 보았다. 압력의 변화, ICP Source power의 변화, 일정한 Source power에서 기판에 가해지는 Bias power의 변화에 대해 측정함으로써 각각의 조건 변화에 따른 이온들의 변화양상에 대한 이해를 할 수 있었다.

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Calcite Production by Bacillus amyloliquefaciens CMB01

  • Lee, Young-Nam
    • Journal of Microbiology
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    • 제41권4호
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    • pp.345-348
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    • 2003
  • The bio-mediated production of calcite crystals by calcinogenic bacteria has great applicable value for the restoration of deteriorated calcareous monuments, because of its high purity and coherency. An investigation of the conditions for calcite production by an alkalophilic Bacillus amyloliquefaciens CMB01 strain was made. Optimal calcite precipitation occurred when the bacterium was cultured at pH 8.0 and 30$^{\circ}C$, and in B4 medium that consisted of 0.4% yeast extract, 0.5% glucose, and 1.5% calcium acetate. Calcium ion of the bacterially induced calcite was analyzed by an inductively coupled plasma (ICP) spectrophotometer. Optical and scanning electron microscopy (SEM) of the calcite revealed a typical rombohedral polycrystalline structure.

도파관식 고출력 헬륨 플라즈마의 개발과 분광학적 특성 연구 (Development and spectroscopic characteristics of the high-power wave guide He Plasma)

  • 이종만;조성일;우진춘;박용남
    • 분석과학
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    • 제25권5호
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    • pp.265-272
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    • 2012
  • 기존의 Okamoto cavity를 변형시킨 WR-340 도파관을 사용한 cavity를 제작하고 고출력(2.45 GHz, 2 kW)의 헬륨, 질소 및 아르곤 마이크로파 플라즈마(MIP; Microwave Induced Plasma)를 성공적으로 형성시켰다. 플라즈마 생성의 주요한 요인들은 내부전도체의 직경과 내부전도체와 외부전도체간의 간격, 내부전도체 끝과 토치의 위치 등이 있으며 그 중 헬륨 마이크로파 플라즈마에 대하여 cavity의 디자인을 최적화시키고 그 특성을 조사하였다. ICP(Inductively Coupled Plasma)용 mini 토치와 자체 제작한 나선형흐름토치를 비교 연구한 결과, 헬륨 플라즈마 기체 흐름량은 약 25 L/min~30 L/min로서 서로 비슷하였다. 토치 상단부에 석영관을 덧씌워 공기유입을 막은 결과, 340 nm 근처의 NH분자선들이 없어지거나 감소하였다. 플라즈마의 온도 및 전자밀도를 측정한 결과, 4,350 K의 들뜸 온도와 $3.67{\times}10^{11}/cm^3$의 전자밀도를 얻었다. 이 값들은 기존의 다른 마이크로파 플라즈마와 비슷하거나 약간 작은 값이다. 고출력의 플라즈마로서 수용액을 직접 분석하는 것이 가능하였고 현재 Cl의 검출한계는 116 mg/L 수준으로서 아직 분석적인 최적화가 필요한 단계이다.

인진(茵蔯) 에탄올추출물이 ${\alpha}$-MSH로 유도된 과색소 형성에 미치는 영향 (Effect of the Ethanol Extract of Artemisiae Capillaris Herba on the Hyperpigmentation Induced by ${\alpha}$-MSH)

  • 신기돈;김대성;이장천;문연자;우원홍;이영철
    • 동의생리병리학회지
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    • 제23권3호
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    • pp.574-580
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    • 2009
  • Melanogenesis is induced mainly by ultraviolet radiation of sunlight and ${\alpha}$-Melanocyte stimulation hormone (${\alpha}$-MSH) which binds to a specific G protein coupled receptor. ${\alpha}$-MSH and cAMP-elevating agents are known to melanin syntheisis and dendrite outgrowth. The purpose of this study was to investigate the mechanism of melanogenesis inhibition in B16/F10 cells by ethanol extract of Artemisiae Capillaris Herba. In the present study, ${\alpha}$-MSH led to a stimulation of melanin synthesis that appeared to result from an increased tyrosinase activity and melanin content. However, the ethanol extract of Artemisiae Capillaris Herba inhibited the ${\alpha}$-MSH-induced tyrosinase activity and melanin content. In control conditions, B16/F10 cells displayed a fibroblastic appearance while ${\alpha}$-MSH treatment promoted the emergence of small and numerous dendrites from the plasma membrane. The ethanol extract of Artemisiae Capillaris Herba abolished the ${\alpha}$-MSH-induced dendricity. Regarding protein levels of the melanogenic enzymes, the amounts of tyrosinase were increased after incubation with ${\alpha}$-MSH. The treatment of Artemisiae Capillaris Herba ethanol extract decreased the ${\alpha}$-MSH expression levels of tyrosinase. Based on these findings, it is likely that the ethanol extract of Artemisiae Capillaris Herba exerts its depigmenting effects in B16/F10 cells through the suppression of tyrosinase expression, which are key enzymes for melanogenesis.

녹두나물 생즙이 카드뮴에 의한 흰쥐의 간손상에 미치는 영향 (Effect of Mungbean Sprouts Juice on Cadmium-Induced Hepatotoxicity in Rats)

  • 이명렬;최인화;김성오;김경수
    • 한국식품영양과학회지
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    • 제27권5호
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    • pp.980-986
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    • 1998
  • The effects of mungbean sprout juice on cadmium-induced hepatotoxicity in rats were investigated. Sprague-Dawley rats weighing about 90g were divided into 4 groups and raised for 6 weeks. ; control group(CON), mungbean sprouts juice-administered group(MSJ), cadmium-administered group(CAD) fed water containing 40 ppm cadmium chloride and mung bean sprouts juice and cadmium-administered group(MCD). The diet was supplied every day for the measurement of feed efficiency ratio(FER) and net weight gain was measured every 3 days. The activities of serum glutamic oxaloactic transaminase(GOT) and glutamic pyruvic transaminase(GPT), superoxide dimutase(SOD), catalase and glutathione peroxidase(GSH-Px) in the liver and the hepatic contents of glutathione were examined. The contents of Cd in liver and kidney of the rats were determined by using ICP(Inductively Coupled Plasma Emission Spectrophotometer). Growth rate and FER were decreased in CAD group, compared with CON group but the changes were not significant in MCD group. The activities of serum GOT and GPT, SOD, catalase and GSH-Px in the liver were increased by Cd administration, but the alterations were decreased by supplementation with mungbean sprouts juice. The level of glutathione decreased in CAD group(26.8$\pm$9.0mg/g liver), whereas it increased in MCD group(36.4$\pm$15.8mg gliver). The content of Cd in the liver and kidney in MCD group(9.57 ppm, 4.88 ppm) was decreased, compared with CAD group(12.81 ppm, 5.46 ppm). This result suggested that mungbean sprout juice has a lowering effect on the accumulation of Cd in the liver and kidney and it is believed that the juice has some protective effects to Cd-induced hepatotoxicity in rats, but the mechanism of these effects was obscure.

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Ginsenoside Rg1 activates ligand-independent estrogenic effects via rapid estrogen receptor signaling pathway

  • Gao, Quan-Gui;Zhou, Li-Ping;Lee, Vien Hoi-Yi;Chan, Hoi-Yi;Man, Cornelia Wing-Yin;Wong, Man-Sau
    • Journal of Ginseng Research
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    • 제43권4호
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    • pp.527-538
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    • 2019
  • Background: Ginsenoside Rg1 was shown to exert ligand-independent activation of estrogen receptor (ER) via mitogen-activated protein kinase-mediated pathway. Our study aimed to delineate the mechanisms by which Rg1 activates the rapid ER signaling pathways. Methods: ER-positive human breast cancer MCF-7 cells and ER-negative human embryonic kidney HEK293 cells were treated with Rg1 ($10^{-12}M$, $10^{-8}M$), $17{\beta}$-estradiol ($10^{-8}M$), or vehicle. Immunoprecipitation was conducted to investigate the interactions between signaling protein and ER in MCF-7 cells. To determine the roles of these signaling proteins in the actions of Rg1, small interfering RNA or their inhibitors were applied. Results: Rg1 rapidly induced $ER{\alpha}$ translocation to plasma membrane via caveolin-1 and the formation of signaling complex involving linker protein (Shc), insulin-like growth factor-I receptor, modulator of nongenomic activity of ER (MNAR), $ER{\alpha}$, and cellular nonreceptor tyrosine kinase (c-Src) in MCF-7 cells. The induction of extracellular signal-regulated protein kinase and mitogen-activated protein kinase kinase (MEK) phosphorylation in MCF-7 cells by Rg1 was suppressed by cotreatment with small interfering RNA against these signaling proteins. The stimulatory effects of Rg1 on MEK phosphorylation in these cells were suppressed by both PP2 (Src kinase inhibitor) and AG1478 [epidermal growth factor receptor (EGFR) inhibitor]. In addition, Rg1-induced estrogenic activities, EGFR and MEK phosphorylation in MCF-7 cells were abolished by cotreatment with G15 (G protein-coupled estrogen receptor-1 antagonist). The increase in intracellular cyclic AMP accumulation, but not Ca mobilization, in MCF-7 cells by Rg1 could be abolished by G15. Conclusion: Ginsenoside Rg1 exerted estrogenic actions by rapidly inducing the formation of ER containing signalosome in MCF-7 cells. Additionally, Rg1 could activate EGFR and c-Src ER-independently and exert estrogenic effects via rapid activation of membrane-associated ER and G protein-coupled estrogen receptor.

YH18968, a Novel 1,2,4-Triazolone G-Protein Coupled Receptor 119 Agonist for the Treatment of Type 2 Diabetes Mellitus

  • Han, Taedong;Lee, Byoung Moon;Park, Yoo Hoi;Lee, Dong Hoon;Choi, Hyun Ho;Lee, Taehoon;Kim, Hakwon
    • Biomolecules & Therapeutics
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    • 제26권2호
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    • pp.201-209
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    • 2018
  • G protein-coupled receptor 119 (GPR119) is expressed in the pancreas and gastrointestinal tract, and its activation promotes insulin secretion in the beta cells of the pancreatic islets as well as the secretion of glucagon-like peptide-1 (GLP-1) in intestinal L cells, consequently improving glucose-stimulated insulin secretion. Due to this dual mechanism of action, the development of small-molecule GPR119 agonists has received significant interest for the treatment of type 2 diabetes. We newly synthesized 1,2,4-triazolone derivatives of GPR119 agonists, which demonstrated excellent outcomes in a cyclic adenosine monophosphate (cAMP) assay. Among the synthesized derivatives, YH18968 showed cAMP=2.8 nM; in GLUTag cell, GLP-1secretion=2.3 fold; in the HIT-T15 cell, and insulin secretion=1.9 fold. Single oral administration of YH18968 improved glucose tolerance and combined treatment with a dipeptidyl peptidase 4 (DPP-4) inhibitor augmented the glucose lowering effect as well as the plasma level of active GLP-1 in normal mice. Single oral administration of YH18968 improved glucose tolerance in a diet induced obese mice model. This effect was maintained after repeated dosing for 4 weeks. The results indicate that YH18968 combined with a DPP-4 inhibitor may be an effective therapeutic candidate for the treatment of type 2 diabetes.

SiOC 박막에서 Si-O 결합의 증가와 유전상수의 관계 (Relationship between Dielectric Constant and Increament of Si-O bond in SiOC Film)

  • 오데레사
    • 한국산학기술학회논문지
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    • 제11권11호
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    • pp.4468-4472
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    • 2010
  • ICP-CVD 방법에 의해 제작된 SiOC 박막을 유전상수와 화학적 이동의 상관성에 대하여 조사하였다. SiOC 박막은 플라즈마 에너지에 의해서 해리작용과 재결합작용에 의해서 cross link 구조를 갖게 되는 Si-O 와 C-O 결합으로 구성된 $930{\sim}1230\;cm^{-1}$ 영역에서 혼합된 Si-O-C 주 결합으로 이루어졌다. C-O 결합은 $1270cm^{-1}$에서 보여지는 Si-$CH_3$ 결합의 말단부분인 C-H 결합이 전기음성도가 큰 산소에 의해서 끌리는 효과로부터 만들어진 결합이다. 그러나 Si-O 결합은 Si-$CH_3$ 결합이 분해되고 난뒤 2차 이온결합에 의해서 만들어진 결합이다. Si-O 결합의 증가는 주결합에서 오른쪽 결합이 증가하기 때문이며, FTIR 스펙트라에 의해서 red shift로 나타났다. 이러한 결과는 SiOC 박막이 보다 더 안정되고 강한 박막임을 의미한다. 그래서 SiOC 박막은 열처리 후 비정질도가 높고 거칠기가 감소되는 것을 확인하였다.

신문용지 및 인쇄용지 슬러지의 무기성분 및 수용성 이온 분석 (The Analysis of Inorganic Compounds and Water Solubles Ions in Paper Mill Sludges from NewsPaper and Printed Paper)

  • 윤수영;김운정;김미선;김문성;박종문;신수정
    • 펄프종이기술
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    • 제46권2호
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    • pp.30-34
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    • 2014
  • To apply paper mill sludges to soil as fertilizer, paper mill sludges were investigated to predict suitability and maleficence for soil. Newspaper and Printed Paper sludge were analyzed by IC (Ion Chromatography) and ICP-OES (Induced Coupled Plasma Optical Emission Spectrometer). As a results, harmful materials in two types of sludges were below standard by notified Ministy of Environment (ME). Also ionic substances causing the water pollution in sludges were less than the standard value by notified ME. Thus sludges from newspaper and printed paper is presumed that there are no water pollution and soil contamination.

한국(韓國) 남서부(南西部)의 덕음(德蔭)과 전주(全州)-금은광상(金銀鑛床)에 대(對)한 암석지구화학적(岩石地球化學的) 연구(硏究) (Lithogeochemistry on the Dukum and Jeonjuil gold - silver deposits in Southern - western part of Korea)

  • 윤정한;전용원;전효택
    • 자원환경지질
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    • 제21권4호
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    • pp.389-400
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    • 1988
  • Minor elements such as Ag, As, Au, Bi, Cd, Cu, Co, Ni, Pb, Rb, Sb, Sr and Te were analyzed by atomic absorption spectrophotometry and induced coupled plasma spectrophotometry in order to investigate pathfinders for gold in quartz porphyry, granite porphyry and vein materials in Jeonjuil gold - silver mine, and in altered biotite granites and vein materials in Dukum gold - silver mine. In Dukum gold - silver mine, it is observed that Au contents have positive relation with As, Co, and Rb contents, but negative relation with Bi contents in altered biotite granites. Au contents have positive relation with Ag, As, Co and Te contents in vein materials. In Jeonjuil gold - silver mine, it is observed that Cd, Rb, Sr and Te are enriched near ore vein in quartz porphyry and granite porphyry. Au contents have positive relation with As, Cd, Cu, $Fe_2O_3$ and $K_2O$ in vein materials.

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