• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.9
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• pp.808-811
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• 2008

Optical and mechanical properties of diamond-like carbon (DLC) films synthesized by RF plasma enhanced chemical vapor deposition were investigated as a function the C/H ratio in gas mixture. The C/H ratio was varied from 6 to 10 %, adjusting the amount of $CH_4$ and $H_2$ as the source gas. The optical and mechanical properties of DLC films were characterized by UV spectrometer, Ellipsometer and Nano-indenter. The change of the C/H ratio during synthesis of DLC films had many effects on the growth rate, transmittance, refractive index and hardness. The growth rate of the films increased exponentially with the increase in C/H ratio. The hardness of the films showed the tendency to improve with increasing C/H ratio, whereas the transmittance decreased. The refractive index was varied from 2.03 to 2.17, and these refractive indexes close to 2.0 indicates that it can be applied to Si-based solar cell.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.169.2-169.2
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• 2013

본 연구에서는 gas를 이용한 PECVD 공법중 이온화 에너지가 높고 대면적 코팅이 용이한 Hybrid 코팅 장비에서 Linear Ion-Gun 이용하여 탄화수소 계열의 gas인 $C_2H_2$ 와 Si을 함유한 TMS (tetramethylsilane, $Si(CH_3)_4)$ gas를 이용하여 저마찰, 고경도 특성을 갖는 Si-DLC 코팅에 대한 연구를 수행하였다. Si-DLC 코팅에 앞서 전처리 공정으로 Linear Ion-Gun에 Ar gas를 주입하고 고전압의 DC 전원을 인가하여 제품 표면의 건식세정 및 표면 활성화를 진행 후, $C_2H_2$ 와 TMS gas를 Linear Ion-Gun에 주입하여 Si-DLC 코팅 공정을 진행하였다. Si-DLC 코팅시 $C_2H_2$ gas 주입량을 고정하고 TMS 가스 유량을 5~20sccm으로 조절하여 Si 함유량에 따른 Si-DLC 코팅막의 특성을 분석하였다. 이렇게 코팅된 Si-DLC의 박막 특성 분석으로 마찰계수 측정을 위해 ball-on-disk 타입의 tribometer를 사용하였으며, 박막 경도 측정은 Nano-indenter를 이용하여 분석을 진행하였다. 그 결과 Si을 포함하지 않는 DLC의 경우 마찰계수가 ~0.2를 가지는 반면, Si-DLC의 경우 Si 함유량이 약 1.5at%일 때, 마찰계수 ~0.04 저마찰의 우수한 특성을 지니며, 박막의 경도는 22[Gpa]로 고경도의 Si-DLC 코팅을 확인할 수 있었다.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2008.05a
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• pp.273-276
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• 2008

Thermoplastic resin takes place stress relaxation and creep according to temperature and time. In room temperature, time dependent deformation (TDD) of polymer was carried out at previous study. In this study, it evaluates time dependent deformation to relate temperature. Nanoscale indents can be used as cells for molecular electronics and drug delivery, slots for integration into nanodevices, and defects for tailoring the structure and properties. Therefore, it is important to control pattern depth for change of indent depth by creep when using Nanoindenter. For evaluating TDD at high temperature, it is occurred thermal-nanoindentation test by changing hold time at maximum load. Temperature is putted at $90^{\circ}C$, hold time at maximum loads are putted at 1, 10, 50, 100, 200, 300 and 500s.

• Transactions of Materials Processing
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• v.12 no.7
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• pp.640-646
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• 2003

The nanoprobe based on lithography, mainly represented by SPM based technologies, has been recognized as potential application to fabricate the surface nanostructures because of its operational versatility and simplicity. The objective of the work is to suggest new mastless pattern fabrication technique using the combination of machining by nanoindenter and KOH wet etching. The scratch option of the nanoindenter is a very promising method for obtaining nanometer scale features on a large size specimen because it has a very wide working area and load range. Sample line patterns were machined on a silicon surface, which has a native oxide on it, by constant load scratch (CLS) of the Nanoindenter with a Berkovich diamond tip, and they were etched in KOH solutions to investigate chemical characteristics of the machined silicon surface. After the etching process, the convex structure was made because of masking effect of the affected layer generated by nano-scratch. On the basis of this fact, some line patterns with convex structures were fabricated. Achieved patterns can be used as a mold that will be used for mass production processes such as nanoimprint or PDMS molding process. All morphological data of scratch traces were scanned using atomic force microscope (AFM).

• Journal of the Korea Academia-Industrial cooperation Society
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• v.5 no.5
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• pp.458-461
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• 2004

In order to improve the adhesion properties of copper, MPS(3-mercaptopropyltrimethoxysilane) organic film were employed. The plasma pretreatment in pure He or $He/O_{2}$ mixed gas environment greatly increased adhesion force. Adhesion force was measured by scratch test with nano indenter. Microstructures and surface roughness were observed with scanning electron microscope(SEM). The characteristics of MPS layer for pretreatment were studied with flourier transform infrared spectroscope(FT-IR) and contact angle tester. The heighest adhesion was achieved in the specimen pretreated with mixed plasma and NPS coating, which was 56mN. Other specimen showed lower value by $20{\%}$ to $30{\%}$. The roughness of substrate was not affected by the bonding strength of copper plating.

• Nuclear Engineering and Technology
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• v.53 no.8
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• pp.2591-2599
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• 2021

The effect of thermal aging at 475 ℃ and 750 ℃ of Z3CN20.09M cast duplex stainless steel (CDSS) on microstructure, mechanical and intergranular corrosion properties were investigated by transmission electron microscope (TEM), nano indenter, scanning electron microscope (SEM) and corrosion fatigue test system. The result indicated that the spinodal decomposition and G precipitated were occurred after aged at 475 ℃, as well as sigma precipitated at 750 ℃. The microstructure degeneration of ferrite was saturated after aged for 2000h and 200 h at 475 ℃ and 750 ℃ respectively. The mechanical properties, intergranular corrosion resistance and corrosion fatigue lives were continuing deteriorated with increasing the aging time at both temperatures. The difference of the degeneration mechanisms of Z3CN20.09M CDSS aged at 475 ℃ and 750 ℃ was analyzed.

• Tribology and Lubricants
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• v.36 no.6
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• pp.378-384
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• 2020

The friction surfaces of mechanical parts are heat-treated or coated with hard materials to minimize wear. Increasing the hardness is a very useful way to reduce abrasive wear. The general Brinell hardness test, which is widely used for metallic materials, is not suitable because it hardly shows any change in hardness when coated with thin films. In this study, we propose a basis for the application of the new Brinell hardness test method to the coated friction surface. An indentation analysis of the rigid sphere and elastic-perfectly plastic materials is performed using a commercial finite element analysis software. The results indicate that their loadto-diameter ratio is the same; the Brinell hardness test method can be applied even when the indenter diameter is on the micrometer scale. In the case of hard coating, it is difficult to calculate Brinell hardness using the diameter of the indentation, but the study revealed, for the first time, that it can be calculated using the depth of the indentation regardless of coating. The change in hardness owing to thin film coating over a wide load range implies that the hardness evaluation method is appropriate. Additional studies on various properties related to the substrate and coating material are required to apply the proposed method.

• Steel and Composite Structures
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• v.42 no.3
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• pp.325-351
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• 2022

This paper studies the lateral impact behavior of ultra-high performance fiber-reinforced concrete (UHPFRC) filled double-skin steel tubular (UHPFRCFDST) columns. The impact force, midspan deflection, and strain histories were recorded. Based on the test results, the influences of drop height, axial load, concrete type, and steel tube wall thickness on the impact resistance of UHPFRCFDST members were analyzed. LS-DYNA software was used to establish a finite element (FE) model of UHPFRC filled steel tubular members. The failure modes and histories of impact force and midspan deflection of specimens were obtained. The simulation results were compared to the test results, which demonstrated the accuracy of the finite element analysis (FEA) model. Finally, the effects of the steel tube thickness, impact energy, type of concrete and impact indenter shape, and void ratio on the lateral impact performances of the UHPFRCFDST columns were analyzed.

• Steel and Composite Structures
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• v.47 no.3
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• pp.355-363
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• 2023

The main purpose of this study is to characterize the size-dependent strain rate sensitivity in structural steel using the continue stiffness measurement (CSM) indentation. A series of experiments, such as CSM indentation and optical microscope examination, has been performed at the room temperature at different rate conditions. The results indicated that indentation hardness, strain rate, and flow stress showed size-dependent behavior. The dependency of indentation hardness, strain rate, and flow stress on the indentation size was attributed to the transition of the dislocation nucleation rate and the dislocation behaviors during the indentation process. Since both hardness and strain rate showed the size-dependent behavior, SRS tended to depend on the indentation depth. The results indicated that the SRS was quite high over 2.0 at the indentation depth of 240 nm and quickly dropping to 0.08, finally around 0.046 at large indents. The SRS values at large indentations strongly agree with the general range reported for several types of low-carbon steel in the literature (Chatfield and Rote 1974, Nguyen et al. 2018b, Luecke et al. 2005). The results from the present study can be used in both static and dynamic analyses of structures as well as to assess and understand the deformation mechanism and the stress-state of material underneath the indenter tip during the process of the indentation testing.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.291-292
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• 2012

MOSFET 구조에서 metal oxide에 기반을 둔 게이트 유전체의 연구는 실리콘(Si)을 기반으로 한 반도체 발명이래로 가장 인상적인 발전을 이뤄 왔다. 이는 metal oxide의 높은 유전상수 특성이 $SiO_2$보다 우수하고, 유전체 박막의 두께 감소로 인한 전기적 특성 저하를 보완하기 때문이다. 특히 지난 10년 동안, Hafnium에 기반을 둔 $HfO_2$는 차세대 반도체용 유전 물질로 전기적 구조적 특성에 대한 연구가 활발히 진행되어왔다. 그러나 현재까지 $HfO_2$에 대한 nano-mechanical 특성 연구는 미미하여 이에 대한 연구가 필요하다. 이에 본 연구에서는 Hf 및 $HfO_2$ 박막의 증착 및 열처리 조건을 다르게 하여 실험을 진행하였다. 시료는 rf magnetron sputter를 이용하여 Si 기판위에 Hafnium target으로 산소유량(4, 6 sccm)을 달리하여 증착하였고, 이후 furnace에서 400에서 $800^{\circ}C$까지 질소분위기에서 20분간 열처리를 실시하였다. 실험결과 산소 유량을 6 sccm으로 증착한 시료의 current density 성능이 모든 열처리 과정에서 증가하였다. Nano-indenter로 측정하고 Weibull distribution으로 정량적 계산을 한 경도 (Hardness)는 as-deposited 시료를 기준으로 $400^{\circ}C$에서는 감소했으나 온도가 높아질수록 증가하였다. 특히, $400^{\circ}C$ 열처리한 시료에서 산소농도에(4 sccm : 5.35 GPa, 6 sccm : 6.15 GPa)따른 두 시료간의 변화가 가장 두드러졌다. 반면에, 탄성계수 (Elastic modulus)는 산소농도 6 sccm을 넣고 증착된 시료들이 4 sccm을 넣고 증착한 시료보다 모두 높은 값을 나타냈다. 또한, $800^{\circ}C$ 열처리한 시료에서 산소농도에(4 sccm : 128.88 GPa, 6 sccm : 149.39 GPa)따라 표면의 탄성에 큰 차이가 있음을 확인하였다. 이는 증착된 $HfO_2$ 시료들이 비정질 상태에서 $HfO_2$로 결정화되는 과정에서 산소가 증가할수록 박막의 defect이 감소되기 때문으로 사료된다.