• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.7 s.100
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• pp.871-877
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• 2005

This paper proposes a new modeling scheme to describe the hysteresis between input voltage and displacement of piezoelectric actuators in the inchworm. From the experimental analysis of Piezoelectric actuator behaviors. the hysteresis characteristics including residual displacement can be modeled by second order functions of a maximum Input voltage and preload. Various experiments are performed to demonstrate the effectiveness and validation of the proposed modeling scheme.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.11a
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• pp.195-200
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• 2008

This paper presents motion control of the Inchworm composed of the piezoelectric actuators and mechanical elements. Piezoelectric actuator shows nonlinear response characteristics including hysteresis due to the ferroelectric characteristics. This paper proposes feedback control scheme to improve the ability of tracking response to complex input signal and suppress the phenomenon of hysteresis using the sliding mode control technique with the integrator. The sliding mode control system has the limit to minimize both the settle time and overshoot. For making up this limit, this paper also suggests input shaping technique suitable to the inchworm control system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.19 no.2
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• pp.169-175
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• 2009

This paper presents motion control of the Inchworm composed of the piezoelectric actuators and mechanical elements. Piezoelectric actuator shows nonlinear response characteristics including hysteresis due to the ferroelectric characteristics. This paper proposes feedback control scheme to improve the ability of tracking response to complex input signal and suppress the phenomenon of hysteresis using the sliding mode control technique with the integrator. The sliding mode control system has the limit to minimize both the settle time and overshoot. For making up this limit, this paper also suggests input shaping technique suitable to the inchworm control system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.7
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• pp.756-763
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• 2008

This paper presents an inchworm with three piezoelectric actuators. The dynamic stiffness of the inchworm is generally low compared to its driving condition, so mechanical vibration may degenerate the motion accuracy of the inchworm. The dynamic model of inchworm is identified by curve fitting technique based on the experimental frequency response function. For the precision motion control and low residual vibration of inchworm, driving input signal is designed by using cycloid step input and LQG control technique. Experimental result shows that proposed input shaping method is applicable effectively to the inchworm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1841-1844
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• 2005

A linear motor makes a long stroke by accumulating short steps, which is based on the quasistatic deformation of a magnetostrictive material in a magnetic field. It's also called as inchworm effect. The application areas of linear motors are an adaptive and active optics, X-Y positioning, precision alignment, etc. It is found that control of the frequency and current inputs are all that is necessary to control the speed handling ability of the linear motor. In inchworm mode, linear speeds of up to $500{\mu}m/s$ are achieved resulting from the accumulation of $25{\mu}m$ steps at 1.4A.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.26 no.3
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• pp.313-319
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• 2017

This study presents a genetic algorithm (GA) to design a PID controller systematically for an inchworm operated by piezoelectric actuators. The performance index considering overshoot and settling time is adopted to search an optimal PID gain using GA. The piezoelectric actuator shows nonlinear characteristics including hysteresis and residual displacement. The PID feedback system combined with an integrator is used to improve the ability of tracking the complex input signals and suppressing the steady state error. The PID controller tuned by GA can track the various motion contours effectively. However, the PID controller shows an improper residual vibration under the application of high-frequency square input. The input shaper combined with the feedback system can overcome this limitation of the PID controller.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.228.2-228.2
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• 2005

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.24 no.4
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• pp.414-420
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• 2015

In this study, the linear quadratic Guassian loop transfer recovery (LQG/LTR) control technique was combined with an integrator and applied to an inchworm having piezoelectric actuators for precise motion tracking. The piezoelectric actuator showed nonlinear response characteristics, including hysteresis, due to its ferroelectric characteristics and the residual displacement phenomenon. This paper proposes a feedback control scheme using the LQG/LTR controller with an integrator to improve the ability to track the response to complex input signals and to suppress the phenomenon of hysteresis and residual vibration. Experimental results show that the developed feedback control system for an inchworm can track the various motion contours quickly without residual vibration or overshoot.

• Journal of the Semiconductor & Display Technology
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• v.6 no.1 s.18
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• pp.37-41
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• 2007

Recently PZT is used in ultra precision mechanism field. PZT has a small motion range although it has a high resolution. Many methods, such as inchworm, impact driving, etc., have been applied for the expansion of the motion range.? In this study, the new actuating mechanism for rotational motion with two PZT actuators is proposed. The ultra precision rotational actuator which is made by proposed mechanism is able to operate both coarse and fine motion. The design parameters of the proposed mechanism are considered to improve the performance of the system. The rotational stage which is applied by the proposed mechanism is fabricated. The resolution and velocity for fabricated rotational stage are measured by laser interferometer.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.12
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• pp.174-181
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• 2004

Ultra precision positioning mechanism has widely been used on semiconductor manufacturing equipments, optical spectrum analyzer and cell manipulations. Ultra precision positioning mechanism is consisted of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design, analysis and manufacture all of the inchworm linear motor system, which is one of the equipments embodied in ultra precision positioning mechanism. Inchworm linear motor system is consisted of a controller system and an inchworm linear motor, and its driving form is similar to a motion of spanworm. A design and manufacture of inchworm linear motor, which is consisted of three PZT actuators, a rod, two columns and a guide plate, are performed. Minimizing the von-Mises stress of the hinge using Taguchi method and simulation by FEM software optimizes the structural design in a column of flexure hinge. The designed columns and guide plates are manufactured by a W-EDM and NC-milling. A controller system, which is an apparatus to drive inchworm linear motor, can easily adjust driving conditions by varying resonance frequency and input-output voltage of actuators and amplifiers. The performance of manufactured inchworm linear motor system is verified and valuated. In the future, inchworm linear motor system will be used to make a more precision positioning by reinforcing a sensor and feedback system.