• Title/Summary/Keyword: InGaAs/GaAs

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The Electrical Characterization of the Quantized Hall Device with GaAs/AlGaAs heterojunction structure (GaAs/AlGaAs 이종접합된 양자흘 소자의 전기적 특성)

  • 유광민;류제천;한권수;서경철;임국형
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.334-337
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    • 2002
  • The Quantum Hall Resistance(QHR) device which consists of GaAs/AlGaAs heterojunction structure is used for the realization of QHR Standard based on QHE. In order to characterize electrical contact resistances and dissipations of the device, it is slowly cooled down for eliminating thermal shock and unwanted noise. Then, the two properties are measured under 1.5 K and 5.15 T. Contact resistances are all within 1.2 Ω and longitudinal resistivities are all within 1 mΩ up to DC 90${\mu}$A. The results mean the device is operated well to realize the QHR Standard. To confirm it, the QHR Standard having the device is compared using a direct current comparator bridge with a 1 Ω resistance standard which the calibrated value is known from QHR standards maintained by other countries. The difference between them is agreed well within measurement uncertainty. It is thus considered that the properties of the device is estimated well and has good performance.

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A Qualitative Analysis on the Surface States at the Undoped Polycrystalline Si and GaAs Semiconductor Interfaces Using the Zeta Potential (Zeta 전위에 의한 도핑되지 않은 다결정 Si 및 GaAs 반도체 계면의 표면준위에 관한 정성적 해석)

  • Chun, Jang-Ho
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.24 no.4
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    • pp.640-645
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    • 1987
  • Surface states and interfacial phenomena at the undoped polycrystalline semiconductor particale-electrolyte interfaces were qualitatively analyzed based on the zeta potentials which were measured with microelectrophoresis measurements. The suspensions were composed of the undoped polycrystaline silicon(Si) or gallium arsenide (GaAs) semiconductor particles stalline Si and GaAs particles in the KCl electrolytes was 3.73~6.2x10**-4 cm\ulcornerV.sec and -2.3~1.4x10**-4cm\ulcornerV.sec at the same conditions, respectively. The range of zeta potentials corresponding to the electrophoretic mobilities is 47.8~80.1mV and -30.1~17.9mV, respectively. The variation of the zeta potentials of the undoped polycrystalline Si was similar to the doped crystalline Si. On the other hand, two points of zeta potential reversal occurred at the undoped polycrystalline GaAs-KCl electrolyte interfaces. The surface states of the undoped polycrystalline Si and GaAs were dominated by positively charged donor surface states. These surface states are attributed to adsorbed ion surface states (slow states) at the semiconductor oxide layer-electrolyte interfaces.

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High Density Planar Inductively Coupled Plasma Etching of GaAs in BCl$_3$-based Chemistries (BCl$_3$ 기반 가스를 이용한 GaAs의 고밀도 평판형 유도결합 플라즈마 식각)

  • ;;;;;;S.J. Pearton
    • Journal of Surface Science and Engineering
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    • v.36 no.5
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    • pp.418-422
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    • 2003
  • 평판형 유도결합 플라즈마 식각장비(inductively coupled plasma etcher)를 이용하여 각종 공정조건들에 따른 GaAs의 식각특성을 연구하였다. 공정변수들은 ICP 소스파워(0-500 W), RIE 척파워(0-150 W), 가스 종류($BCl_3$, $BCl_3$/Ar, $BCl_3$/Ne) 및 가스혼합비였다. $BCl_3$ 가스만을 이용하여 GaAs를 식각한 경우보다 25%의 Ar이나 Ne같은 불활성 기체를 혼합한 $15BCl_3$/5Ar, $15BCl_3$/5Ne 가스를 이용한 경우의 식각률이 더 우수한 것을 확인하였다. 그리고 50% 이하의 Ar이 혼합된 $BCl_3$/Ar의 경우는 높은 식각률 (>4,000 $\AA$/min)과 평탄한 표면(RMS roughness : <2 nm)을 얻을 수 있었지만 지나친 양(>50%)의 Ar의 혼합은 오히려 표면을 거칠게 하거나 식각률을 떨어뜨리는 결과를 가져왔다. 그리고 20 sccm $BCl_3$, 100 W RIE 척파워, 300 W ICP 소스파워, 공정압력이 7.5 mTorr인 조건에서의 GaAs의 식각결과는 아주 우수한 특성(식각률: ∼ 4,000, $\AA$/min, 우수한 수직측벽도: >$87^{\circ}$, 평탄한 표면: RMS roughness : ∼0.6 nm)을 나타내었다.

Design & Fabrication of an InGaP/GaAs HBT MMIC Power Amplifier for IMT-2000 Handsets (IMT-2000 단말기용 InGaP/GaAs HBT MMIC 전력증폭기 설계 및 제작)

  • 채규성;김성일;이경호;김창우
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.28 no.11A
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    • pp.902-911
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    • 2003
  • Using InGaP/GaAs HBT power cells with a 2.0${\times}$20$\mu\textrm{m}$$^2$ emitter area of a unit HBT, a two stage MMIC power amplifier has been developed for IMT-2000 handsets. An active-bias circuit has been used for temperature compensation and reduction in the idling current. Fitting on measured S-parameters of the HBT cells, circuit elements of HBT's nonlinear equivalent model have been extracted. The matching circuits have been designed basically with the extracted model. A two stage HBT MMIC power amplifier fabricated using ETRI's HBT process. The power amplifier produces an 1-㏈ compressed output power(P$\_$l-㏈/) of 28.4 ㏈m with 31% power added efficiency(PAE) and 23-㏈ power gain at 1.95 GHz in on-wafer measurement. Also, the power amplifier produces a 26 ㏈m output power, 28% PAE and a 22.3-㏈ power gain with a -40 ㏈c ACPR at a 3.84 ㎒ off-center frequency in COB measurement.quency in COB measurement.

Inhibitory Effect of Gallic acid on Production of Interleukins in Mouse Macrophage Stimulated by Lipopolysaccharide (Gallic acid가 Lipopolysaccharide로 활성화된 마우스 대식세포의 인터루킨 생성에 미치는 영향)

  • Park, Wan-Su
    • Journal of Pharmacopuncture
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    • v.13 no.3
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    • pp.63-71
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    • 2010
  • Objectives: Gallic acid (GA) is the major component of tannin which could be easily founded in various natural materials such as green tea, red tea, grape juice, and Corni Fructus. The purpose of this study is to investigate the effect of Gallic acid (GA) on production of interleukin (IL) in mouse macrophage Raw 264.7 cells stimulated by lipopolysaccharide (LPS). Methods: Productions of interleukins were measured by High-throughput Multiplex Bead based Assay with Bio-plex Suspension Array System based on $xMAP^{(R)}$ (multi-analyte profiling beads) technology. Firstly, cell culture supernatant was obtained after treatment with LPS and GA for 24 hour. Then, it was incubated with the antibody-conjugated beads for 30 minutes. And detection antibody was added and incubated for 30 minutes. And Strepavidin-conjugated Phycoerythrin (SAPE) was added. After incubation for 30 minutes, the level of SAPE fluorescence was analyzed on Bio-plex Suspension Array System and concentration of interleukin was determined. Results: The results of the experiment are as follows. 1. GA significantly inhibited the production of IL-3, IL-10, IL-12p40, and IL-17 in LPS-induced mouse macrophage RAW 264.7 cells at the concentration of 25, 50, 100, 200 uM (p<0.05). 2. GA significantly inhibited the production of IL-6 in LPS-induced mouse macrophage RAW 264.7 cells at the concentration of 50, 100, 200 uM (p<0.05). 3. GA diminished the production of some cytokine such as IL-4, IL-5, and IL-13 in LPS-induced mouse macrophage RAW 264.7 cells. 4. GA did not show the inhibitory effect on the production of IL-$1{\alpha}$ and IL-9 in LPS-induced mouse macrophage RAW 264.7 cells. Conclusions: These results suggest that GA has anti-inflammatory activity related with its inhibitory effects on the production of interleukins such as IL-3, IL-10, IL-12p40, IL-17, and IL-6 in LPS-induced macrophages.

Effects of GA3, Moist-Chilling Storage and Removal of Funiculus on the Germination of Dicentra spectabilis (GA3와 냉습저장, 배병의 제거가 금낭화의 발아에 미치는 영향)

  • Kim, Hong-Yul;Chung, Jae-Dong
    • Horticultural Science & Technology
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    • v.19 no.1
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    • pp.78-80
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    • 2001
  • This experiment was performed to investigate the effects of $GA_3(100mg{\cdot}L^{-1})$, moist-chilling ($3^{\circ}C$) storage (MCS) and removal of funiculus on the germination of Dicentra spectabilis. Seeds which were not treated by $GA_3$ did not germinate in spite of MCS for 90 days. However, $GA_3$ treatment accelerated the seed germination regardless of the duration of MCS. In the case of the funiculus removal, the promoting effect of $GA_3$ showed a tendency to decrease. The germination rate and days to germination were accelerated and shortened respectively with increasing the days of MCS after $GA_3$ treatment. As results, $GA_3$ was effective on the seed germination of Dicentra spectabilis and MCS was synergistic on the effect of $GA_3$.

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Rapid thermal annealing temperature effects on the ohmic behavior of the Pd/Ge-based contact to n-type InGaAs (n형 InGaAs에 형성된 Pd/Ge계 오믹 접촉 특성에 미치는 급속 열처리 온도의 영향)

  • 김일호;박성호;김좌연;이종민;이태우;박문평
    • Journal of the Korean Vacuum Society
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    • v.7 no.1
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    • pp.24-28
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    • 1998
  • Pd/Ge ohmic contact system on n-type InGaAs was studied. A good ohmic begavior by rapid thermal annealing was shown up to $400^{\circ}C$, and the specific contact resistance was reduced to low-$10^-6\Omega\textrm{cm}^2$EX>. However, above $425^{\circ}C$ it was deteriorated by intermixing and phase reaction of ohmic metals and InGaAs substrate. No remarkable phase change was observed below $350^{\circ}C$, but the reaction was initiated at ~$375^{\circ}C$ and considerable phase change was found above $425^{\circ}C$. Non-spiking and planar interfaces were observed even when annealed at $425^{\circ}C$, and smooth and shiny surface was kept up to $400^{\circ}C$.

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The Effect of Unprecracked Hydride on the Growth and Carbon Incorporation in GaAs Epilayer on GaAs(100) by Chemical Beam Epitaxy

  • 박성주;노정래;하정숙;이을항
    • Bulletin of the Korean Chemical Society
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    • v.16 no.2
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    • pp.149-153
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    • 1995
  • We have grown GaAs epilayers by chemical beam epitaxy(CBE) using unprecracked hydrides and metal organic compounds via a surface decomposition process. This result shows that unprecracked arsine (AsH3) or monoethylarsine (MEAs) can be used in chemical beam epitaxy(CBE) as a replacement of a precracked AsH3 source in CBE. It was also found that the uptake of carbon impurity in epilayers grown using trimethylgallium(TMG) with unprecracked AsH3 or MEAs was significantly reduced compared to that in epilayers grown by CBE process employing TMG and arsenics produced from precracked hydrides. We propose a surface structural model suggesting that the hydrogen atoms play an important role in the reduction of carbon content in GaAs epilayer. Intermediates like dihydrides from hydride sources were also considered to hinder carbon atoms from being incorporated into the epilayers or to remove other carbon containing species on the surface.

Multi-step growth of a-plane GaN epitaxial layer on r-plane sapphire substrate by HVPE method (HVPE를 이용하여 r-plane 사파이어 위에 multi-step으로 성장시킨 a-plane GaN 에피층의 특성 연구)

  • Lee, Won-Jun;Park, Mi-Seon;Jang, Yeon-Suk;Lee, Won-Jae;Ha, Ju-Hyung;Choi, Young-Jun;Lee, Hae-Yong;Kim, Hong-Seung
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.26 no.3
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    • pp.89-94
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    • 2016
  • In this study, the crystalline property of a-plane GaN epitaxial layer grown on r-plane sapphire by a HVPE method has been investigated according to the V/III ratio and the growth time of multi-step growth. Furthermore, these results were compared with the previous result obtained from the single-step growth of a-plane GaN on r-plane sapphire substrate. In the multi-step growth for a-plane GaN epitaxial layer on r-plane sapphire, the FWHM values of rocking curve in GaN epitaxial layer were decreased as the HCl source flow rate and the growth time were increased. The void formed in epitaxial layer was continuously decreased as the growth time in first step and second step using a higher HCl flow rate was increased. As a result, the GaN layer obtained with the longest growth time on the first step and second step exhibited the lowest FWHM values of 584 arcsec and the smallest dependence of azimuth angle.