• Title/Summary/Keyword: In-situ annealing

검색결과 147건 처리시간 0.031초

스퍼터된 바나듐 산화막의 전기적 특성에 미치는 진공 어닐링의 효과 (Effects of Vacuum Annealing on the Electrical Properties of Sputtered Vanadium Oxide Thin Films)

  • 황인수;이승철;최복길;최창규;김남철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.435-438
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    • 2003
  • The effects of oxygen partial pressure and vacuum annealing on the electrical properties of sputtered vanadium oxide($VO_x$) thin films were investigated. The thin films were prepared by r.f. magnetron sputtering from $V_2O_5$ target in a gas mixture of argon and oxygen. The oxygen/(oxygen+argon) partial pressure ratio of 0% and 8% is adopted. Electrical properties of films sputter-deposited under different oxygen gas pressures and in situ annealed in vacuum at $400^{\circ}C$ for 1h and 4h are characterized through electrical conductivity measurements. I-V characteristics were distinguished between linear and nonlinear region. In the low field region the conduction is due to Schottky emission, while at high fields it changes to Fowler-Nordheim tunneling type conduction. The conductivity measurements have shown an Arrhenius dependence of the conductivity on the temperature.

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진공 어닐링한 바나듐 산화악의 구조적, 전기적 특성 (Structural and Electrical Properties of Vanadium Oxide Thin Films Annealed in Vacuum)

  • 최복길;최창규;권광호;김성진
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제54권1호
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    • pp.1-7
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    • 2005
  • Thin films of vanadium oxide(VO/sub x/) were deposited by r.f. magnetron sputtering from V₂O/sub 5/ target with oxygen/(oxygen+argon) partial pressure ratio of 0% and 8% and in situ annealed in vacuum at 400℃ for 1h and 4h. Crystal structure, chemical composition, molecular structure, optical and electrical properties of films were characterized through XRD, XPS, RBS, FTIR, optical absorption and electrical conductivity measurements. The films as-deposited are amorphous, but 0%O₂ films annealed for time longer than 4h and 8% O₂ films annealed for time longer than 1h are polycrystalline. As the oxygen partial pressure is increased the films become more stoichiometric V₂O/sub 5/. When annealed at 400℃, the as-deposited films are reduced to a lower oxide. The optical transmission of the films annealed in vacuum decreases considerably than the as-deposited films and the optical absorption of all the films increases rapidly at wavelength shorter than about 550nm. Electrical conductivity and thermal activation energy are increased with increasing the annealing time and with decreasing the oxygen partial pressure.

rf-sputtering을 이용한 $MgB_2$ 박막 제작 (Fabrication of $MgB_2$ Thin Films by rf-sputtering)

  • 안종록;황윤석;이순걸
    • Progress in Superconductivity
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    • 제4권2호
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    • pp.153-156
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    • 2003
  • We have studied fabrication of $MgB_2$ thin film on $SrTiO_3$ (001) and r-cut $A1_2$$O_3$ substrates by rf magnetron sputtering method using and $ MgB_2$ single target and two targets of Mg and B, respectively. Based on P -T phase diagram of $MgB_2$ and vapor pressure curves of Mg and B, a three-step process was employed. B layer was deposited at the bottom to enhance the film adhesion to the substrate. Secondly, co-sputtering of Mg and B was done. Finally, Mg was sputtered on top to compensate fur the loss of Mg during annealing. Subsequently, $MgB_2$ films were in-situ annealed in various conditions. The sample fabricated using the three-step process showed $T_{c}$ of 24 K and formation of superconducting $MgB_2$ phase was confirmed by XRD spectra. In case of co-sputtering deposition, $T_{c}$ depended on annealing time and argon pressure. However, those made by single-target sputtering showed non-superconducting behavior or low transition temperature, at best.est.

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$MgB_2/Fe$ 선재의 초전도성에 대한 열처리 조건과 Mg 분말의 영향 (Influence of Magnesium Powder and Heat Treatment on the Superconducting Properties of $MgB_2/Fe$ Wires)

  • ;김남규;김이정;전병혁;김찬중
    • Progress in Superconductivity
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    • 제9권1호
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    • pp.1-4
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    • 2007
  • The most common technique to fabricate $MgB_2$ superconducting wire is by powder-in-tube (PIT) technique. Therefore, the starting powder for the processing of $MgB_2$ superconductors is an important factor influencing the superconducting properties and performance of the conductors. In this study, the influence of magnesium precursor powders and annealing temperatures on the transition temperatures ($T_c$) and critical current densities ($J_c$) of $MgB_2/Fe$ wires was investigated. All the $MgB_2/Fe$ wires were fabricated by in situ PIT process. It was found that higher $J_c$ was obtained for $MgB_2$ wires with smaller particle size of magnesium precursor powders. The $J_c$ also increases with decreasing annealing temperatures.

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초기발달 단계의 생쥐 난소에서 발현하는 유전자에 관한 연구 (Analysis of Genes Expressed in Mouse Ovaries of Early Developmental Stages)

  • 전은현;윤세진;차광렬;김남형;이경아
    • 한국발생생물학회지:발생과생식
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    • 제7권2호
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    • pp.127-136
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    • 2003
  • 본 연구에서는 이러한 초기 난포 발달 과정 중 원시난포-1차 난포 변화과정 시기에 발현하는 유전자를 알아보고 자 수행하였다. 원시난포로만 이루어져 있는 생쥐의 생후 1일자 난소와 원시난포 및 1차 난포로만 이루어져 있는 5일자 난소의 RNA와 총 80개의 annealing control primer(ACP) primer를 사용하여 PCR을 수행하여 서로 다르게 발현하는 유전자 (differentially expressed genes; DEG) 41개를 찾아내었다. 이들 중 33개는 BLAST에 등록되어 있는 유전자와 일치하였고 4개는 novel sequence였으며 나머지 4개의 유전자는 EST이었다. 실험결과, 1일자 난소에서 더 많이 발현되는 유전자를 9개, 5일자 난소에서 더 많이 발현되는 유전자 31개, 5일자 난소에서만 특이적으로 발현하는 유전자를 1개를 얻었다. 1일자 난소에서 높게 발현하는 Anx11과 Pepp2-pending, 반면에 5일자 난소는 Apg3/Autlp-like, BPOZ, Ches1, Kcmf1, NHE3, Nid2, Ninj1, SENP3, Suil-rsl, TIAP/m-survivin등의 유전자를 선택하여 semi-quantitative RT-PCR을 수행하여 이들 중에는 false positive 없음을 확인하였다. In situ hybridization을 수행하여 대부분의 유전자가 원시난포의 난자에서 발현하다가 1차 난포 이상의 발달단계에서는 난자 내 발현이 사라지면서 오히려 과립세포에서 높게 발현됨을 확인하였다. 또한 laser capture microdissection을 이용하여 원시난포와 1차 난포를 각각 오려내고, real-time PCR을 이용하여 실제로 BPOZ와 TIAP/m-survivin의 발현이 1차 난포에서 각각4.5배, 3.4배 높은 것을 다시 확인하였다. 본 연구결과로 얻어진 유전자 목록은 앞으로 초기 난포발달, 특히 원시난포-1차 난포 변화과정에 관여하고 있는 분자생물학적 기전을 연구하는데 기여하게 될 것이다

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상압소결(常壓燒結)한 $SiC-ZrB_2$ 전도성(電導性) 복합체(複合體)의 미세구조(微細構造)와 특성(特性)에 미치는 Annealing 온도(溫度)의 영향(影響) (Effect of Annealing Temperature on Microstructure and Properties of the Pressureless-Sintered $SiC-ZrB_2$ Electroconductive Ceramic Composites)

  • 신용덕;주진영
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제55권9호
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    • pp.434-441
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    • 2006
  • The effect of pressureless-sintered temperature on the densification behavior, mechanical and electrical properties of the $SiC-ZrB_2$ electroconductive ceramic composites was investigated. The $SiC-ZrB_2$ electroconductive ceramic composites were pressureless-sintered for 2 hours at temperatures in the range of $1,750{\sim}1,900[^{\circ}C]$, with an addition of 12[wt%] of $Al_2O_3+Y_2O_3$(6:4 mixture of $Al_2O_3\;and\;Y_2O_3$) as a sintering aid. The relative density and mechanical properties are increased markedly at temperatures in the range of $1,850{\sim}1,900[{^\circ}C]$. The relative density, flexural strength, vicker's hardness and fracture toughness showed the highest value of 81.1[%], 230[MPa], 9.88[GPa] and $6.05[MPa\;m^{1/2}]$ for $SiC-ZrB_2$ composites of $1,900[{^\circ}C]$ sintering temperature at room temperature respectively. The electrical resistivity was measured by the Pauw method in the temperature ranges from $25[{^\circ}C]\;to\;700[{^\circ}C]$, The electrical resistivity showed the value of $1.36{\times}10^{-4},\;3.83{\times}10^{-4},\;3.51{\times}10^{-4}\;and\; 3.2{\times}10^{-4}[{\Omega}{\cdot}cm]$ for SZ1750, SZ1800, SZ1850 and SZ1900 respectively at room temperature. The electrical resistivity of the composites was all PTCR(Positive Temperature Coefficient Resistivity). The resistance temperature coefficient showed the value of $4.194{\times}10^{-3},\;3,740{\times}10^{-3},\;2,993{\times}10^{-3},\;3,472{\times}10^{-3}/[^{\circ}C}$ for SZ1750, SZ1800, SZ1850 and SZ1900 respectively in the temperature ranges from $25[{\circ}C]\;to\;700[{\circ}C]$, It is assumed that because polycrystallines such as recrystallized $SiC-ZrB_2$ electroconductive ceramic composites, contain of porosity and In Situ $YAG(Al_5Y_3O_{12})$ crystal grain boundaries, their electrical conduction mechanism are complicated. In addition, because the condition of such grain boundaries due to $Al_2O_3+Y_2O_3$ additives widely varies with sintering temperature, electrical resistivity of the $SiC-ZrB_2$ electroconductive ceramic composites with sintering temperature also varies with sintering condition. It is convinced that ${\beta}-SiC$ based electroconductive ceramic composites for heaters or ignitors can be manufactured by pressureless sintering.

저압 화학 기상 증착법으로 제작한 다결정 실리콘의 표면 형태 및 결정 성장 (Surface Morphology and Grain Growth of LPCVD Polycrystalline Silicon)

  • 이은구;박진성;이재갑
    • 한국재료학회지
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    • 제5권2호
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    • pp.197-202
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    • 1995
  • 저압 화학 기상증착법으로 제작한 비정질 실리콘의 표면 형태 및 결정 성장 과정을 증착조건과 열처리 조건의 변화에 따라 조사하였다. 비정질에서 결정으로 변화하는 전이온도인 570~$590^{\circ}C$에서 증착한 시편은 (311)조직의 거친 표면으로 성장하였다. 같은 증착 온도에서 두께가 두꺼울수록 다결정에서 비정질로 변화하였다. 증착하는 과정에서의 결정화는 기판에서부터 시작되지만, 진공상태를 그대로 유지하고 비정질 실리콘을 전이온도에서 열처리하면 표면 실리콘 원자가 이동하여 결정화하였다.

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상압소결(常壓燒結)한 $SiC-TiB_2$ 전도성(電導性) 복합체(複合體)의 미세구조(微細構造)와 특성(特性)에 미치는 Annealing 온도(溫度)의 영향(影響) (Effect of Annealing Temperature on Microstructure and Properties of the Pressureless-Sintered $SiC-TiB_2$ Electroconductive Ceramic Composites)

  • 신용덕;주진영
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제55권10호
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    • pp.467-474
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    • 2006
  • The effect of pressureless-sintered temperature on the densification behavior, mechanical and electrical properties of the $SiC-TiB_2$ electroconductive ceramic composites was investigated. The $SiC-TiB_2$ electroconductive ceramic composites were pressureless-sintered for 2 hours at temperatures in the range of $1,750{\sim}1,900[^{\circ}C]$, with an addition of 12[wt%] $Al_2O_3+Y_2O_3(6:4\;mixture\;of\;Al_2O_3\;and\;Y_2O_3)$ as a sintering aid. The relative density, flexural strength, vicker's hardness and fracture toughness showed the highest value of 84.92[%], 140[MPa], 4.07[GPa] and $3.13[MPa{\cdot}m^{1/2}]$ for $SiC-TiB_2$ composites of $1,900[^{\circ}C]$ sintering temperature at room temperature respectively. The electrical resistivity was measured by the Pauw method in the temperature ranges from $25[^{\circ}C]\;to\;700[^{\circ}C]$. The electrical resistivity showed the value of $5.51{\times}10^{-4},\;2.11{\times}10^{-3},\;7.91{\times}10^{-4}\;and\;6.91{\times}10^{-4}[\Omega{\cdot}cm]$ for ST1750, ST1800, ST1850 and ST1900 respectively at room temperature. The electrical resistivity of the composites was all PTCR(Positive Temperature Coefficient Resistivity). The resistance temperature coefficient showed the value of $3.116{\times}10^{-3},\;2.717{\times}10^{-3},\;2.939{\times}10^{-3},\;3.342{\times}10^{-3}/[^{\circ}C]$ for ST1750, ST1800, ST1850 and ST1900 respectively in the temperature ranges from $25[^{\circ}C]\;to\;700[^{\circ}C]$. It is assumed that because polycrystallines, such as recrystallized $SiC-TiB_2$ electroconductive ceramic composites, contain of porosity and In Situ $YAG(Al_5Y_3O_{12})$ crystal grain boundaries, their electrical conduction mechanism are complicated. In addition, because the condition of such grain boundaries due to $Al_2O_3+Y_2O_3$ additives widely varies with sintering temperature, electrical resistivity of the $SiC-TiB_2$ electroconductive ceramic composites with sintering temperature also varies with sintering condition. It is convinced that ${\beta}-SiC$ based electroconductive ceramic composites for heaters or ignitors can be manufactured by pressureless sintering.

Indium Tin Oxide (ITO) Coatings Fabricated Using Mixed ITO Sols

  • Cheong, Deock-Soo;Yun, Dong-Hun;Park, Sang-Hwan;Kim, Chang-Sam
    • 한국세라믹학회지
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    • 제46권6호
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    • pp.708-712
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    • 2009
  • ITO films were achieved by sintering at $500{\sim}550{^{\circ}C}$. This was possible by inducing a seeding effect on an ITO sol by producing crystalline ITO nanoparticles in situ during heat treatment. Two kinds of ITO sols (named ITO-A and ITO-B) were prepared at 2.0 wt% from indium acetate and tin(IV) chloride in different mixed solvents. The ITO-A sol showed a high degree of crystallinity of ITO without any detectable Sn$O_2$ on XRD at $350{^{\circ}C}$/1 h, but the ITO-B sol showed a small amount of Sn$O_2$ even after annealing at $600{^{\circ}C}$/1 h. The 10 wt% ITO-A//ITO-B showed the sheet resistance of 3600$\Omega$/□, while the ITO-B sol alone showed 5200 $\Omega$/□ by sintering at $550{^{\circ}C}$ for 30 min. Processing parameters were studied by TG/DSC, XRD, SEM, sheet resistance, and visible transmittance.

High energy swift heavy ion irradiation and annealing effects on DC electrical characteristics of 200 GHz SiGe HBTs

  • Hegde, Vinayakprasanna N.;Praveen, K.C.;Pradeep, T.M.;Pushpa, N.;Cressler, John D.;Tripathi, Ambuj;Asokan, K.;Prakash, A.P. Gnana
    • Nuclear Engineering and Technology
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    • 제51권5호
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    • pp.1428-1435
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    • 2019
  • The total ionizing dose (TID) and non ionizing energy loss (NIEL) effects of 100 MeV phosphorous ($P^{7+}$) and 80 MeV nitrogen ($N^{6+}$) ions on 200 GHz silicon-germanium heterojunction bipolar transistors (SiGe HBTs) were examined in the total dose range from 1 to 100 Mrad(Si). The in-situ I-V characteristics like Gummel characteristics, excess base current (${\Delta}I_B$), net oxide trapped charge ($N_{OX}$), current gain ($h_{FE}$), avalanche multiplication (M-1), neutral base recombination (NBR) and output characteristics ($I_C-V_{CE}$) were analysed before and after irradiation. The significant degradation in device parameters was observed after $100MeV\;P^{7+}$ and $80MeV\;N^{6+}$ ion irradiation. The $100MeV\;P^{7+}$ ions create more damage in the SiGe HBT structure and in turn degrade the electrical characteristics of SiGe HBTs more when compared to $80MeV\;N^{6+}$. The SiGe HBTs irradiated up to 100 Mrad of total dose were annealed from $50^{\circ}C$ to $400^{\circ}C$ in different steps for 30 min duration in order to study the recovery of electrical characteristics. The recovery factors (RFs) are employed to analyse the contribution of room temperature and isochronal annealing in total recovery.