Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지
DOI QR코드

DOI QR Code

Indium Tin Oxide (ITO) Coatings Fabricated Using Mixed ITO Sols

  • Cheong, Deock-Soo (Department of MATSE, Dankook University) ;
  • Yun, Dong-Hun (Division of MATSE, Korea Institute of Science and Technology) ;
  • Park, Sang-Hwan (Division of MATSE, Korea Institute of Science and Technology) ;
  • Kim, Chang-Sam (Battery Research Center, Korea Institute of Science and Technology)
  • Published : 2009.11.30
Download PDF
⟨ Previous Next ⟩

Abstract

ITO films were achieved by sintering at $500{\sim}550{^{\circ}C}$. This was possible by inducing a seeding effect on an ITO sol by producing crystalline ITO nanoparticles in situ during heat treatment. Two kinds of ITO sols (named ITO-A and ITO-B) were prepared at 2.0 wt% from indium acetate and tin(IV) chloride in different mixed solvents. The ITO-A sol showed a high degree of crystallinity of ITO without any detectable Sn$O_2$ on XRD at $350{^{\circ}C}$/1 h, but the ITO-B sol showed a small amount of Sn$O_2$ even after annealing at $600{^{\circ}C}$/1 h. The 10 wt% ITO-A//ITO-B showed the sheet resistance of 3600$\Omega$/□, while the ITO-B sol alone showed 5200 $\Omega$/□ by sintering at $550{^{\circ}C}$ for 30 min. Processing parameters were studied by TG/DSC, XRD, SEM, sheet resistance, and visible transmittance.

Keywords

References

  1. O. J. Gregory and Y. Tao, “Ceramic Temperature Sensors for Harsh Environment,” IEEE Sens. J., 5 833-38 (2005) https://doi.org/10.1109/JSEN.2005.844346
  2. T. Konry and R. S. Marks, “Physico-chemical Studies of Indium Tin Oxide-coated Fiber Optic Biosensors,” Thin Solid Films, 492 313-21 (2005) https://doi.org/10.1016/j.tsf.2005.07.049
  3. M. Toki, T. Fukui, N. Asakuma, and T. Fujii, “Method for Producing $In_2O_3-SnO_2$ Precursor Sol,” US patent 6,235,260 (2001)
  4. H. Tomonag and T. Morimoto, “Indium-tin-oxide Coatings Via Chemical Solution Deposition,” Thin Solid Films, 392 243-48 (2001) https://doi.org/10.1016/S0040-6090(01)01035-5
  5. J. Zhang, K.H. Au, Z.Q. Zhu, and S. O'Shea, “Sol-gel Preparation of Poly(Ethylene Glycol) Doped Indium Tin Oxide Thin Films for Sensing Applications,” Opt. Mater., 26 47-55 (2004) https://doi.org/10.1016/j.optmat.2004.01.018
  6. A.-C. Dippel, T. Schneller, P. Gerber, and R. Waser, “Morphology Control of Highly-transparent Indium Tin Oxide Thin Films Prepared by a Chlorine-reduced Metalloorganic Decomposition Technique,” Thin Solid Films, 515 3797-801 (2007) https://doi.org/10.1016/j.tsf.2006.09.045
  7. E. Shigeno, K. Shimizu, S. Seki, M. Ogawa, A. Shida, M. Ide, and Y. Sawada, “Formation of Indium-tin-oxide Films by Dip Coating Process Using Indium Dipropionate Monohydroxide,” Thin Solid Films, 411 56-9 (2002) https://doi.org/10.1016/S0040-6090(02)00187-6
  8. A. Beaurain, D. Luxembourg, C. Dufour, V. Koncar, B. Capoen, and M. Bouazaoui, “Effects of Annealing Temperature and Heat-treatment Duration on Electrical Properties of Sol.gel Derived Indium-tin-oxide Thin Films,” Thin Solid Films, 516 4102-06 (2008) https://doi.org/10.1016/j.tsf.2007.10.021
  9. S. Seki, Y. Sawada, and T. Nishide, “Indium-tin-oxide Thin Films by Dip Coating of Indium Diacetate Monohydroxide and Tin Dichloride,” Thin Solid Films, 388 22-6 (2001) https://doi.org/10.1016/S0040-6090(01)00847-1