• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2001년도 추계 기술심포지움
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• pp.165-170
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• 2001

AIC$_3$:$^{t}$ BuNH$_2$단일 전구체를 이용하여 MOCVD방법에 의해 상압하에서 1$\mu\textrm{m}$의 두께로 증착하였다. 증착된 AIN 박막을 XRD, SEM, RBS 그리고 AES로 분석했으며 IDT전극을 형성하기 위해 1500＋ 의 두께로 증착했다. 중심주파수 1.5GHz를 갖고 입출력 개수가 각각 500개이며 IDT선폭이 l$\mu\textrm{m}$인 전송형의 SAW filter를 제작하고자 하였다.

• 한국통신학회:학술대회논문집
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• 한국통신학회 1983년도 추계학술발표회논문집
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• pp.35-38
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• 1983

It is described a novel SAW oscillator which can be varriable its frequenis by using two output IDT. The results show that frequencies staility is good and variable frequencies range can be broaden by design of IDT.

• 전자공학회논문지A
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• 제30A권11호
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• pp.88-98
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• 1993

In this paper, the effective permittivity in the piezoelectric material is numerically obtained and greens function is derived from that. It is shown that the admittance and the transfer function of an interdigital transducer is represented by electrostatic charge distribution using Quasi-static approximation. To prove the validity of the quasi-static approximation, numerical results for the uniform IDT of a filter mounted on 128 $^{\circ}$ rotated Y-cut X-propagating Lithium Niobate are compared with the measured ones.

• 지식경영연구
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• 제16권4호
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• pp.191-213
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• 2015

With the advancement of virtual reality technology, virtual reality contents and devices are being competitively released. This research deals with an early stage adoption model of a motion-sensing input device which enhances the user experience of these virtual reality contents and devices. In contrast to the previous research on the adoption or resistance of innovative products, this work compares and analyzes the antecedents in MIR(Model of Innovation Resistance) of resistance-perspective as well as those in UTAUT2(Extended Unified Theory of Acceptance and Use of Technology) and IDT(Innovation Diffusion Theory) of adoption-perspective, and suggests a resistance-incorporated adoption model from a new viewpoint. The analysis of questionnaire data indicates the following results: Performance expectancy, effort expectancy, price value, hedonic motivation in UTAUT2 and visibility in IDT have a significant negative influence on innovation resistance. Compatibility in IDT and MIR exerts a positive influence on perceived value. Social influence and hedonic motivation in UTAUT2 positively relates to perceived value. Higher innovation resistance results in lower perceived value, with innovation resistance and perceived value negatively and positively affecting intention to use, respectively.

• 한국세라믹학회지
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• 제40권6호
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• pp.547-552
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• 2003

RF 마그네트론 스퍼터링법을 이용하여 유리기판위에 인가전력 100 W, 1.33Pa, Ar/O2=50 : 50, 20$0^{\circ}C$ 그리고 타겟과 기판사이의 거리 4 cm의 조건으로 ZnO 압전 박막을 성장시켰다. 증착된 박막의 결정성, 표면형상, 화학적 결합비와 전기적 특성을 XRD, SEM, AFM, RBS와 electrometer를 이용하여 측정 분석하였다 제조된 박막은 우수한 c축 우선 배향성을 보였고 또한 화학 양론적인 결합비를 나타내었다. 전극 구조가 single 및 double IDT를 갖는 ZnO/1DT/glass SAW 필터를 제작하여 특성을 분석한 결과, 전파속도는 각각 2,589 m/sec, 2,533 m/sec이었고, 삽입손실은 -11 dB과 -21 dB 값을 나타내어 박막형 SAW 필터로 응용이 기대된다.

• 한국정보통신학회논문지
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• 제11권10호
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• pp.1916-1923
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• 2007

대역통과용 표면 탄성파 필터 제작하기 위하여 Langasite 기판위에 빗살무의 변환기를 형성 시켜 모의실험을 수행하였으며, 전극재료로는 Al-Cu를 사용하였다. 모의실험을 바탕으로 입력단에는 IDT를 직렬형태로 연결시킨 block 형태로 하중을 가하는 전극 방법을 쓰고 출력 단은 withdrawal 형태로 하중을 가하는 방법을 써서 제작하였다. 이를 바탕으로 광대역의 SAW 필터 전극 설계 방식에 대한 적절한 위상조건도 얻고자 시도하였다. Langasite 기판위에 형성시킨 입출력 빗살무의 변환기 전극 수는 50쌍, 두께는 $5000\;{\AA}$으로 하였으며, 반사기 폭은 $3.6{\mu}m$으로 하였다. 그리고 hot전극과 반사기사이의 거리는 각각 $2.0{\mu}m\;2.4{\mu}m$로 제작하였고, hot전극에서부터 접지전극까지 간격은 $1.5{\mu}m$로 하였으며 전극 모양은 좌우 동일한 형상을 채택하였다. 제작한 필터의 주파수 특성은 중심주파수가 대략 190MHz정도, 대역폭은 7.8MHz 이하로 측정되었으며, matching 후 return-loss는 -18dB 이하이고, 리플 특성은 3dB 이하이며, 반사에 의한 잔향은 -25dB 이하로 측정되었다.

• 한국음향학회:학술대회논문집
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• 한국음향학회 1985년도 학술발표회 논문집
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• pp.43-46
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• 1985

In this paper, the SAW Comb filter which consists of 1 apodized IDT, 2 uniform IDTs, and the grating reflector is studied. The apodized IDT is designed by utilizing the Chebyshev window function, and the output IDTs are arrayed with 0.5$\mu$sec time delay to obtain the Comb characteristics. And also the frequency response below the first peak is sufficiently suppressed by the grating reflector which is constituted 180 electrodes. In experiment the SAW Comb filter is fablicated by depositing Al on the surface of YZ-LiNbO3 substrate. As the experimental result, the frequency characteristics of the SAW Comb filter are consistent with theoretical values in admitted errors.

• Smart Structures and Systems
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• 제4권3호
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• pp.291-304
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• 2008

Piezoelectric materials have been widely used in ultrasonic nondestructive testing (NDT). PZT ceramics can be used to receive and generate surface acoustic waves. It is a common application to attach PZT transducers to the surface of structures for detecting cracks in nondestructive testing. However, not until recently have piezoelectric polymers attracted more and more attention to be the material for interdigitated (IDT) surface and guided-wave transducers. In this paper, an interdigitated gold-on-polyvinylidene fluoride (PVDF) transducer for actuating and sensing Lamb waves has been introduced. A specific etching technology is employed for making the surface electrodes into a certain finger pattern, the spacings of which yield different single mode responses of Lamb waves. Experiments have been performed on steel and carbon fiber composite plates. Results from PVDF IDT sensors have been compared with those from PZT transducers for verification.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 춘계학술대회논문집
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• pp.852-855
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• 2008

In this paper, we proposed a new type's PZT actuator using surface acoustic wave. This actuator uses Rayleigh wave as an operational traveling wave. For the development of the actuator, each components of surface acoustic wave motor like PZT substrate, slider and IDT was studied theoretically and fabricated. For the measurement of transfer function of PZT substrate and operation of surface acoustic wave motor, network analyzer and 13.56MHz RF generator were used. Also the model which expresses the driving characteristic best was suggested and simulation was executed for the suggested model. And the future research works for improvement of SAW actuator was suggested.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2001년도 하계종합학술대회 논문집(1)
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• pp.241-244
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• 2001

The design and fabrication of the surface acoustic wave(SAW) bandpass filters using slanted finger interdigital electrode transducers(IDTs) is investigated. The slanted finger IDTs are used to design SAW filters with good shape factor, a flat passband, and good out-of-band rejection characteristic. The slanted finger IDTS filter was simulated of three kind of IDTs structure. uniform-uniform IDT, uniform-withdrawal weighting IDTS, withdrawal weighting-withdrawal weighting IDTS. Uniform-withdrawal weighting IDTs structure SAW filters was designed and fabricated on 112$^{\circ}$ LiTaO$_3$, 128$^{\circ}$LiNbO$_3$ substrates. Designed SAW filter has about a 30% fractional bandwidth and a 70MHz center frequency.