• Journal of the Korean Vacuum Society
• /
• v.22 no.1
• /
• pp.26-30
• /
• 2013

For the realization of high-k insulator, aluminum oxide ($Al_2O_3$) was deposited by using an oxygen ion beam assisted deposition (IBAD) during e-beam evaporation. From the thickness of the $Al_2O_3$ layer evaporated with IBAD process, it was possible to investigate the etching effect of ion beam at higher energies during e-beam evaporation. It was also possible to obtain a higher capacitance as a result of IBAD in spite of the reduced thickness of $Al_2O_3$.

• Progress in Superconductivity and Cryogenics
• /
• v.14 no.1
• /
• pp.1-3
• /
• 2012

LMO($LaMnO_3$) buffer layer of superconducting coated conductor was deposited on IBAD-MgO template in the plasma atmosphere at $650^{\circ}C$ which is relatively low compared with conventional deposition temperature of more than $800^{\circ}C$. Deposition method of LMO was DC sputtering, and target and deposition chamber were connected to the cathode and anode respectively. When DC voltage was applied between target and chamber, plasma was formed on the surface of target. The tape substrate was located with the distance of 10 cm between target and tape substrate. When anode bias was connected to the tape substrate, electrons were attracted from plasma in target surface to the tape substrate, and only tape substrate was heated by electron bombardment without heating any other zone. The effect of electron bombardment on the surface of substrate was investigated by increasing bias voltage to the substrate. We found out that the sample of electron bombardment had the effect of surface heating and had good texturing at low controlling temperature.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.07a
• /
• pp.93-96
• /
• 2004

다층의 산화물 박막 구조를 갖는 coated conductor의 장선 제조를 위해서는 연속 증착 공정이 필요하다. 본 연구에서는 RABiTs와 IBAD 공정을 사용한 texture template을 사용하였으며, 금속 테잎을 연속적으로 이동하면서 증착할 수 있는 박막증착 장치(PLD, sputtering, evaporation)를 구축하여 PVD 방법으로 coated conductor를 제조하였다. $CeO_2/YSZ/Y_2O_3$의 완충층을 sputtering 과 evaporation을 이용하여 2축배향성을 가지는 NiW 위에 연속적으로 증착하였다. YBCO 초전도층은 연속 PLD 방법으로 증착하고, Tc, Ic, XRD, SEM을 통해 그 특성을 분석하였다. 그 결과 RABiTS template을 사용하여 Ic가 34A/cm(@77K)인 0.4m 길이의 coated conductor를 제조하였다. IBAD template를 사용하여 Ic가 34A/cm(@77K)인 0.5m길이의 coated conductor를 제조하였고, Jc는 $1.2MA/cm^2$ 이였다.

• Progress in Superconductivity and Cryogenics
• /
• v.9 no.4
• /
• pp.16-18
• /
• 2007

We report the results of MOD-processed YBCO coated conductors on the IBAD-MgO template. The precursor solution was coated on the $CeO_2-buffered$ IBAD-MgO template using a slot-die coating method, calcined at a temperature of $550^{\circ}C$, and fired at high temperatures for 2.5 h in a reduced oxygen atmosphere. The $J_C$ value of YBCO coated conductors was found to be very sensitive to the microstructure, and thus higher $J_C$ value could be achieved when the in-plane texture was higher and the difference in $T_{C,zero}$. was negligible. Optimally processed YBCO coated conductor exhibited $J_C$ value of $0.75MA/cm^2$ at 77 K in self-field, which might be due to somewhat depressed $T_{C,zero}$ of 87.3 K caused by possible $Sm^{3+}$ substitution on the $Ba^{2+}$ site.

• The Journal of Korean Academy of Prosthodontics
• /
• v.38 no.5
• /
• pp.659-674
• /
• 2000

A large increase in the use of thin film coating of hydroxyapatite(HA) in implant dentistry is driven by the desire to take advantage of the excellent biocompatibility and high strength of HA coating. The purpose of this study was to evaluate the effects of HA-coated implants by ion Beam Assisted Deposition(IBAD) method in comparison to the sand-blasted and machined surfaces. Osteoblast culture test, removal torque test and histomorphometric analysis were performed and the following results obtained; 1. Examination of the osteoblast cultures displayed no difference in the secretion of alkaline phosphatase between the various specimen, but IBAD with pure HA specimen showed low alkaline phosphatase secretion(p<0.05). 2. Removal torque tests showed HA-coated implants by IBAD method to be similar in high value to the implants with sand-blasted surface than the implants with machined surface. And the ovariectomized group showed low mechanical test value than the normal group(p<0.05). 3. Histomorphometrical comparisons were performed on undecalcified ground sections. HA-coated implants by IBAD method demonstrated the highest mean bone-to-metal contact ratio on all threads and 3-best consecutive threads, and the implants with sand-blasted surface and implants with machined surface was in the next consecutive order(p<0.05). HA-coated implants showed slightly higher bone-to- metal contact ratio than sand-blasted implants, but no statistically significant difference was obtained between the two materials. The ovariectomized group showed lower value of bone-to-metal contact ratio than the normal group, but no statistically significant difference was obtained between the two groups. 4. Evaluation of bone volume on all threads and 3-best consecutive threads showed no statistically significant difference among the different surface treatment groups, but showed lower bone volume in ovariectomized group than in the normal group(p<0.05). According tn these results, thin film coated implants with HA showed high bone contact ratio, bone volume and removal torque strength in the short term, but long term observation is needed.

• Superconductivity and Cryogenics
• /
• v.5 no.2
• /
• pp.20-25
• /
• 2003

• Proceedings of the Korean Vacuum Society Conference
• /
• 1999.02a
• /
• pp.30-30
• /
• 1999

• 한국초전도학회:학술대회논문집
• /
• v.15
• /
• pp.5-5
• /
• 2005

• 한국초전도학회:학술대회논문집
• /
• 2007.07a
• /
• pp.6-6
• /
• 2007

• 한국초전도학회:학술대회논문집
• /
• 2008.08a
• /
• pp.24-24
• /
• 2008