• 제목/요약/키워드: IBAD

검색결과 127건 처리시간 0.025초

MOCVD 법에 의해 제조된 YBCO 초전도 박막의 물성에 대한 완충층 템플릿의 영향 (Effect of the Buffered-template on the Property of YBCO Superconducting Film Deposited by MOCVD Method)

  • 전병혁;최준규;김찬중
    • Progress in Superconductivity
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    • 제8권1호
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    • pp.27-32
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    • 2006
  • [$YBa_2Cu_3O_{7-x}$] thin films were deposited on various buffered-templates by a metal organic chemical vapor deposition(MOCVD). Three different templates of $CeO_2/YSZ/CeO_2/pure-Ni(CYC),\;CeO_2/YSZ/Y_2O_3/Ni-3at.%W(YYC)$ and $CeO_2/IBAD-YSZ$/stainless steel were used. The Ni and Ni-W alloy tapes were biaxially textured by cold rolling and annealing heat treatment. The dense YBCO films were grown on both the IBAD and YYC templates with no microcrack, while the YBCO films on the CYC templates were grown with the formation of microcracks and NiO. The YBCO film on the YYC template showed the higher $I_c$ than that on CYC template. Especially, the IBAD templates with a thin $CeO_2$(type I) and thick $CeO_2$(type II) top layer were used to compare the deposition nature of the YBCO on them. Comparing the current property of the YBCO films on IBAD templates, the YBCO film deposited on thick $CeO_2$ layer was better than the film on thin $CeO_2$ layer.

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질산염 전구체 원료로 분무 열분해 방법에 의한 YBCO 박막 증착 (Deposition of YBCO Thin Film by Aerosol Assisted Spray Pyrolysis Method using Nitrate Precursors)

  • 김병주;홍석관;김재근;이종범;이희균;홍계원
    • Progress in Superconductivity
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    • 제12권1호
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    • pp.68-73
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    • 2010
  • Y123 films have been deposited on $LaAlO_3$ (100) single-crystal and IBAD substrates by spray pyrolysis method using nitrate precursors. Ultrasonic atomization was adopted to decrease the droplet size, spraying angle and its moving velocity toward substrate for introducing the preheating tube furnace in appropriate location. A small preheating tube furnace was installed between spraying nozzle and substrate for fast drying and enhanced decomposition of precursors. C-axis oriented films were obtained on both LAO and IBAD substrates at deposition temperature of around $710{\sim}750^{\circ}C$ and working pressures of 10~15 torr. Thick c-axis epitaxial film with the thickness of $0.3{\sim}0.6\;{\mu}m$ was obtained on LAO single-crystal by 10 min deposition. But the XRD results of the film deposited on IBAD template at same deposition condition showed that the buffer layers of the IBAD metal substrate was affected by long residence of metal substrate at high temperature for YBCO deposition.

Effects of Fe layer on Li insertion/extraction Reactions of Fe/Si Multilayer thin Film Anodes for Lithium Rechargeable Batteries

  • Kim, Tae-Yeon;Kim, Jae-Bum;Ahn, Hyo-Jun;Lee, Sung-Man
    • Journal of Electrochemical Science and Technology
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    • 제2권4호
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    • pp.193-197
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    • 2011
  • The influences of the thickness and microstructure of Fe layer on the electrochemical performances of Fe/Si multilayer thin film anodes were investigated. The Fe/Si multilayer films were prepared by electron beam evaporation, in which Fe layer was deposited with/without simultaneous bombardment of Ar ion. The kinetics of Li insertion/extraction reactions in the early stage are slowed down with increasing the thickness of Fe layer, but such a slowdown seems to be negligible for thin Fe layers less than about $500{\AA}$. When the Fe layer was deposited with ion bombardment, even the $300{\AA}$ thick Fe layer significantly suppress Li diffusion through the Fe layer. This is attributed to the dense microstructure of Fe layer, induced by ion beam assisted deposition (IBAD). It appears that the Fe/Si multilayer films prepared with IBAD show good cyclability compared to the film deposited without IBAD.

MOD-processed YBCO coated conductors on the $CeO_2$-buffered IBAD-MgO template

  • Shin, G.M.;Ko, R.K.;Oh, S.S.;Moon, S.H.;Yoo, S.I.
    • 한국초전도ㆍ저온공학회논문지
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    • 제11권4호
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    • pp.20-24
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    • 2009
  • YBCO coated conductors (CC) on the $CeO_2$-buffered IBAD-MgO template were fabricated by metal-organic deposition (MOD) Process with Ba-trifluoroacetate and fluorine-free Y and Cu precursor materials. The precursor solution was coated on $CeO_2$-buffered IBAD MgO templates using the multiple dip-coating method, decomposed into inorganic precursors by pyrolysis up to $400^{\circ}C$ within 3 h, and finally fired at $740{\sim}800^{\circ}C$ in a reduced oxygen atmosphere. Microstructure, texture, and superconducting properties of YBCO films were found highly sensitive to both the firing temperature and time. The high critical current density ($J_C$) of $1.15\;MA/cm^2$ at 77.3K in the self-field could be obtained from $1\;{\mu}m$ thick YBCO CC, fired at $740^{\circ}C$ for 3.5 h, implying that high performance YBCO CC is producible on IBAD MgO template. Further enhancement of $J_C$ values is expected by improving the in-plane texture of $CeO_2$-buffer layer and avoiding the metal substrate contamination.

IBAD-MgO 템플릿을 이용한 SmBCO 박막선재의 제조 (Fabrication of SmBCO Coated Conductors using IBAD-MgO Template)

  • 하홍수;김호섭;양주생;정예현;김호겸;유권국;고락길;송규정;하동우;오상수;염도준;박찬;유상임;문승현;주진호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.30-31
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    • 2006
  • We have fabricated SmBCO coated conductor on IBAD-MgO substrates using unique co-evaporation method. The batch type co-deposition system was specially designed and named as EDDC(evaporation using drum m dual chamber) that is possible to deposit superconducting layer with different composition ratio at low temperature of $700^{\circ}C$. In this study, we have investigated the influence of SmBCO phase composition and texture of IBAD-MgO template on the critical current density. We have changed the deposition rates of Sm, Ba and Cu during co-evaporation to examine the optimal composition ratio shown better critical current density. The composition ratio and surface morphology of SmBCO coated conductors were analyzed by the EDX and SEM, respectively. A higher critical current density was measured at superconducting phase composition ratio of Ba deficiency, Sm or Cu rich compared to the Sm1Ba2Cu3Ox stoichiometry.

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IBAD-MgO 기판을 이용한 GdBCO 초전도 박막선재의 제조 (Fabrication of GdBCO Coated conductor using IBAD-MgO substrate)

  • 하홍수;이정훈;오재근;고락길;김호섭;하동우;오상수;김호겸;양주생;정승욱;문승현;박찬;유상임;염도준
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.44-44
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    • 2008
  • GdBCO coated conductor have been fabricated using reactive co-evaporation. The batch type co-deposition system was specially designed and was named EDDC (evaporation using drum in dual chamber) that is possible to deposit superconducting layer with optimum composition ratio of materials at temperature over $700^{\circ}C$ and several mTorr of oxygen. The IBAD-MgO substrate with the architecture of LaMnO3(LMO)/IBAD-MgO/Hastelloy was used for coated conductor. In this study, GdBCO superconducting layer was deposited on IBAD-MgO substrate at optimal oxygen partial pressure (pO2) and deposition temperature. After fabrication of GdBCO coated conductor, critical current density was measured by 4-probe method. Surface morphology and texture of GdBCO coated conductors were analyzed by the SEM and XRD, respectively.

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표면전극 형성 방법과 이온-교환막 두께가 이온성 고분자-금속 복합체(IPMC) 구동에 미치는 영향 (Effect of the Surface Electrode Formation Method and the Thickness of Membrane on Driving of Ionic Polymer Metal Composites (IPMCs))

  • 차국찬;송점식;이석민;문무성
    • 폴리머
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    • 제30권6호
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    • pp.471-477
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    • 2006
  • 이온성 고분자-금속 복합체(ionic polymer metal composite, IPMC)는 낮은 구동 전압에서도 비교적 빠른 응답 속도를 갖는 전기활성고분자(electro active polymer, EAP) 재료이다. IPMC는 인간의 근육과 유사한 인성 및 변형 특성을 나타내므로 최근 인공근육용 구동체 개발을 위한 많은 연구들이 진행되어 왔으며, 또한 우주항공, 센서 및 펌프 등의 다양한 분야에서 적용가능성이 조사되고 있다. 본 연구에서는 액상 내피온을 이용하여 용액 캐스팅 방법으로 다양한 두께의 내피온 막을 제조하는 방법을 도입하였다. IPMC 제조방법은 Oguro가 제안한 방법을 기초로 하여 도금온도를 변화시켜 무전해 도금법을 이용하여 내피온 내부로의 1차 전극을 형성시켰으며, 형성된 1차 전극의 안정성과 표면전기저항을 낮추기 위하여 이온빔보조증착법(ion beam assisted deposition, IBAD)을 도입하여 금과 이리듐을 1차 전극표면 위에 증착하여 2차 전극을 형성시켰다. 1, 2차 무전해 도금한 IPMC와 2차 IBAD 코팅한 IPMC 전극의 표면과 단면 형상을 SEM으로 관찰하였으며, 전압을 인가할 때 IPMC 내부의 수분증발 및 이온전도도의 변화를 조사하였다. 또한 다양한 두께의 IPMC를 제조하여 두께변화에 따른 변위와 구동력을 측정하였다.

연속 공정 PVD 방법에 의한 Coated Conductor 제조 (Fabrication of Coated Conductor by Continuous PVD Methods)

  • 고락길;정준기;김호섭;하홍수;;송규정;박찬;유상임;문승현;김영철
    • 한국전기전자재료학회논문지
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    • 제17권11호
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    • pp.1241-1245
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    • 2004
  • Continuous physical vapor deposition (PVD) method is one of many processes to fabricate long length coated conductor which is required for successful large-scale application of superconducting power devices. Three film deposition systems (pulsed laser deposition, sputtering, and evaporation) equipped with reel-to-reel(R2R) metal tape moving apparatus were installed and used to deposit multi-layer oxide thin films. Both RABiTS and IBAD texture templates are used. IBAD template consists of CeO$_2$(PLD)/YSZ(IBAD) on stainless steel(SS) metal tape, and RABiTS template has the structure of CeO$_2$/YSZ/Y$_2$O$_3$ which was continuously deposited on Ni-alloy tape using R$_2$R evaporation and DC reactive sputtering in a deposition system designed to do both processes. 0.4 m-long coated conductor with Ic(77 K) of 34 A/cm was fabricated using RABiTS template. 0.5 m and 1.1 m-long coated conductor with Ic(77 K) of 41 A/cm and 26 A/cm were fabricated using IBAD template.

Hole Injection Layer by Ion Beam Assisted Deposition for Organic Electroluminescence Devices

  • Choi, Sang-Hun;Jeong, Soon-Moon;Koo, Won-Hoe;Baik, Hong-Koo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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    • pp.1619-1622
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    • 2005
  • The ultra thin hole injection layer (HIL) was deposited on an indium-tin-oxide (ITO) anode by using an ion beam assisted d eposition (IBAD) for the fabrication of an polymeric electroluminescence device for the first time. The device with the HIL deposited by IBAD has higher external quantum efficiency than the device with the HIL by conventional thermal evaporation. It is found that the deposited HIL by IBAD has high surface coverage on ITO anode in a few nm regions because the HIL prepared has high adatom mobility by ion beam energy.

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Collagen Formation and Adhesion of Human Gingival Fibroblasts on the IBAD Ca-P Coating on Ti

  • B. H. Zhao;F. Z. Cui;Lee, I-S.;W. Bai;H. L. Feng
    • 한국진공학회지
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    • 제12권S1호
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    • pp.10-14
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    • 2003
  • Coatings of hydroxyapatite (HA) and tricalcium phosphate/HA (TCP/HA) on titanium were fabricated by ion beam assisted deposition (IBAD). Significant effect of the Ca-P coatings on human Gingival Fibroblasts (HGFs) attachment and formation of type I collagen were found by using immunofluorescence microscope. TCP/HA and HA coatings exerted more HGFs attachment and collagen I formation. Comparing with HA coating, TCP/HA coating exhibited better responses during the late period of the tests. This investigation indicated that this surface modification method may enhance the biological seal at the cervical level of the titanium dental implants.