• Title/Summary/Keyword: Hybrid deposition system

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Characterization of Nanocomposite Ti-Si-N Films Prepared by a Hybrid Deposition System of A If and Sputtering Techniques (하이브리드 증착 시스템을 이용한 나노복합체 Ti-Si-N 박막의 특성 연구)

  • 윤순영;최성룡;이미혜;김광호
    • Journal of the Korean institute of surface engineering
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    • v.36 no.2
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    • pp.122-127
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    • 2003
  • Ti - Si - N hard films were deposited on SKD11 steel substrates by a hybrid deposition system, where TiN was deposited by AIP method while Si was incorporated by sputtering one. The microstructure of Ti-Si-N films was revealed to be a composite of TiN crystallites and amorphous Si3N4 by instrumental analyses. The highest hardness value of about 45 Gpa was obtained at the Si content of around 7.7 at.%. With increase of Si content, the size of TiN crystallites was reduced and their distribution was changed from aligned to randomly orientated states. Surface roughness of Ti-Si-N film also decreased with increase of Si content.

Microstructural and Mechanical Characterization of Nanocomposite Ti-Al-Si-N Films Prepared by a Hybrid Deposition System (하이브리드 증착 시스템에 의해 합성된 나노복합체 Ti-Al-Si-N 박막의 미세구조와 기계적 특성)

  • 박인욱;최성룡;김광호
    • Journal of the Korean institute of surface engineering
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    • v.36 no.2
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    • pp.109-115
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    • 2003
  • Quaternary Ti-Al-Si-N films were deposited on WC-Co substrates by a hybrid deposition system of arc ion plating (AIP) method for Ti-Al source and DC magnetron sputtering technique for Si incorporation. The synthesized Ti-Al-Si-N films were revealed to be composites of solid-solution (Ti, Al, Si)N crystallites and amorphous Si3N4 by instrumental analyses. The Si addition in Ti-Al-N films affected the refinement and uniform distribution of crystallites by percolation phenomenon of amorphous silicon nitride, similarly to Si effect in TiN film. As the Si content increased up to about 9 at.%, the hardness of Ti-Al-N film steeply increased from 30 GPa to about 50 GPa. The highest microhardness value (~50 GPa) was obtained from the Ti-Al-Si-N film haying the Si content of 9 at.%, the microstructure of which was characterized by a nanocomposite of nc-(Ti,Al,Si) N/a$-Si_3$$N_4$.

Fabrication of Nano Composites Using Hybrid Rapid Prototyping (하이브리드 쾌속 조형을 이용한 나노 복합재의 조형)

  • Chu W.S.;Kim S.G.;Ahn S.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.757-760
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    • 2005
  • The technology of rapid prototyping (RP) is used for design verification, function test and fabrication of prototype. The current issues in RP are improvement in accuracy and application of various materials. In this paper, a hybrid rapid prototyping system is introduced which can fabricate nano composites using various materials. This hybrid system adopts RP and machining process, so material deposition and removal is performed at the same time in a single station. As examples, micro gears and a composite scaffold were fabricated using photo cured polymer with nano powders such as carbon black and hydroxyapatite. From the micro gear samples the hybrid RP technology showed higher precision than those made by casting or deposition process.

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Development of New Rapid Prototyping System Performing both Deposition and Machining (II) (적층과 절삭을 복합적으로 수행하는 새로운 개념의 판재 적층식 쾌속 시작 시스템의 개발(II) - 공정계획 시스템 -)

  • Heo, Jeong-Hun;Lee, Geon-U
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.24 no.9 s.180
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    • pp.2235-2245
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    • 2000
  • The necessity of using rapid prototyping(RP) for short-run manufacturing is continuously driving a development of a cost-effective technique that will produce completely-finished quality parts in a very short time. To meet these demands, the improvements in production speed, accuracy, materials, aid cost are crucial. Thus, a new hybrid-RP system performing both deposition and machining in a station is proposed. For the new hybrid RP process to maintain the same degree of process automation as in currently available processes like SLA or FDNI, a sophisticated process planning system is developed. In the process planner, CAD models(STEP AP203) are partitioned into 3D manufacturable volumes called 'Ueposition feature segment"(DFS) after machining features called "machining feature segmenf'(MFS) are extracted from the initial CAD model. Once MFS and DFS are identified, the process planner arranges them into a chain of processes and automatically generates machining information for each DFS and MFS. The goal of this paper is to present a framework for a process planning system for hybrid RP processes and to outline the geometric algorithms involved in developing such an environment.

Development of New Rapid Prototyping System Performing both Deposition and Machining(I);Process and Framework (적층과 절삭을 복합적으로 수행하는 새로운 개녕의 판재 적층식 쾌속 시작 시스템의 개발(I);공정 및 기반구조)

  • Heo, Jeong-Hun;Hwang, Jae-Cheol;Lee, Geon-U;Kim, Jong-Won;Han, Dong-Cheol;Ju, Jong-Nam;Park, Jong-U
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.24 no.8 s.179
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    • pp.1958-1967
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    • 2000
  • Rapid Prototyping( RP ) has been increasingly applied in the process of design and development of new products. RP can shrink the time and expense required to bring a new product from initial concept to production. However, the necessity of using RP for short-run manufacturing is continuously driving a development of a cost-effective technique that will produce completely-finished quality parts in a very short time. To meet these demands, the improvements in production speed, accuracy materials, and cost are crucial. Thus, a new hybrid-RP system performing both deposition and machining in a station is proposed in this paper. It incorporates both material deposition in layers and material removal from the outer surface of the layer to produce the required surface finish. The new hybrid-RP system can dramatically reduce the total build time and fabricate largo-sized and freeform objects because it uses very thick layers, i.e.

Fabrication of Nanofiber-Combined 3D Scaffolds using Dual-Head Deposition Technology (듀얼헤드 적층 기술을 이용한 나노섬유로 결합된 3D 인공지지체 제작)

  • Sa, Min-Woo;Lee, Chang-Hee;Kim, Jong Young
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.17 no.1
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    • pp.108-115
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    • 2018
  • In bone tissue engineering, polycaprolactone (PCL) is one of the most widely used biomaterials to manufacture scaffolds as a synthetic polymer with biodegradability and biocompatibility. The polymer deposition system (PDS) with four axis heads, which can dispense bio-polymers, has been used in scaffold fabrication for tissue engineering applications. A dual-head deposition technology of PDS is an effective technique to fabricate 3D scaffolds. The electrospinning technology has been widely used to fabricate porous and highly interconnected polymer fibers. Thus, PDS can fabricate nanofiber-combined hybrid scaffolds using fused deposition modeling (FDM) and electrospinning methods. This study aims to fabricate nanofiber-combined scaffolds with uniform nanofibers using PDS. The PCL nanofibers were fabricated and evaluated according to the fabrication process parameters. PCL nanofibers were successfully fabricated when the applied voltage, tip-to-collector distance, flow rate, and solution concentration were 5 kV, 1 cm, 0.1 ml/h, and 8 wt%, respectively. The cell proliferation was evaluated according to the electrospinning time. Scanning electron microscopy was used to acquire images of the cross-sectioned hybrid scaffolds. The cell proliferation test of the PCL and nanofiber-combined hybrid scaffolds was performed using a CCK-8 assay according to the electrospinning time. The result of in-vitro cell proliferation using osteosarcoma MG-63 cells shows that the hybrid scaffold has good potential for bone regeneration.

Enhanced Anti-reflective Effect of SiNx/SiOx/InSnO Multi-layers using Plasma Enhanced Chemical Vapor Deposition System with Hybrid Plasma Source

  • Choi, Min-Jun;Kwon, O Dae;Choi, Sang Dae;Baek, Ju-Yeoul;An, Kyoung-Joon;Chung, Kwun-Bum
    • Applied Science and Convergence Technology
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    • v.25 no.4
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    • pp.73-76
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    • 2016
  • Multi-layer films of $SiN_x/SiO_x$/InSnO with anti-reflective effect were grown by new-concept plasma enhanced chemical vapor deposition system (PECVD) with hybrid plasma source (HPS). Anti-reflective effect of $SiN_x/SiO_x$/InSnO was investigated as a function of ratio of $SiN_x$ and $SiO_x$ thickness. Multi-layers deposited by PECVD with HPS represents the enhancement of anti-reflective effect with high transmittance, comparing to the layers by conventional radio frequency (RF) sputtering system. This change is strongly related to the optical and physical properties of each layer, such as refractive index, composition, film density, and surface roughness depending on the deposition system.

Fabricated SWCNT-PEDOT Hybrid Flim Using by SAW-ED and Their Optoelectronic Properties

  • Jo, Sang-Hyeon;Yang, Jong-Won;Kim, Jin-Yeol
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.05a
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    • pp.237.2-237.2
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    • 2011
  • SAW-ED를 이용하는 박막공정 기술을 통하여 나노레벨의 SWCNT 와 PEDOT의 thin film 및 hybrid화된 film구조를 얻을 수 있었다. SWCNT와 전도성고분자와의 hybridization을 통해 균일상의 표면 morphology를 갖는 고전도성 투명 필름을 제작하고, 이들의 전기광학적 성질을 확인하였다. SAW-ED를 이용하는 박막공정 기술은 나노입자 및 나노구조물의 박막화 패턴화를 포함하는 새로운 deposition 기술로서의 응용성을 가지고 있으며, 본 연구에서는 SWCNT와 전도성고분자를 이용하여 이를 확인하였다.

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Fabrication and Evaluation of Hybrid Scaffold by Nano-Micro Precision Deposition System (나노-마이크로 정밀 분사 시스템을 이용한 하이브리드 인공지지체의 제작 및 평가)

  • Ha, Seong-Woo;Kim, Jong Young
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.38 no.8
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    • pp.875-880
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    • 2014
  • Recently, three-dimensional scaffolds and nanofibers are being developed for bone tissue regeneration. In this study, we fabricated a hybrid scaffold using a nano-micro precision deposition system. The fabrication process involved the application of the solid freeform fabrication (SFF) technology and electrospinning. The hybrid scaffolds were combined using micro scaffolds and nanofibers. The nanofibers were deposited on each layer of the micro scaffolding using the electrospinning process. The micro scaffolds were fabricated using the SFF technology at a temperature of $100^{\circ}C$, pressure of 650 kPa, and scan velocity of 250 mm/s. Nanofiber fabrication was conducted by means of electrospinning using the flow rate, solution concentration, distance from the tip to the collector (TCD), and voltage. The nanofibers were fabricated using a flow rate of 0.1 ml/min, voltage of 5 kV, TCD of 1 mm, and 10 wt% of solution concentration. MG-63 cells were seeded into the hybrid scaffold for the purpose of its evaluation.

Characteristics of Plasma Polymer Thin Films for Low-dielectric Application

  • Cho, S.J.;Boo, J.H.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.124-124
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    • 2011
  • This study investigated the interaction of varied plasma power with ultralow-k toluene-tetraethoxysilane (TEOS) hybrid plasma polymer thin films, as well as changing electrical and mechanical properties. The hybrid thin films were deposited on silicon(100) substrates by plasma enhanced chemical vapor deposition (PECVD) system. Toluene and tetraethoxysilane were utilized as organic and inorganic precursors. In order to compare the electrical and the mechanical properties, we grew the hybrid thin films under various conditions such as rf power of plasma, bubbling ratio of TEOS to toluene, and post annealing temperature. The hybrid plasma polymer thin films were characterized by Fourier transform infrared (FT-IR) spectroscopy, atomic force microscopy (AFM), nanoindenter, I-V curves, and capacitance. Also, the hybrid thin films were analyzed by using ellipsometry. The refractive indices varied with the RF power, the bubbling ratio of TEOS to toluene, and the annealing temperature. To analyze their trends of electrical and mechanical properties, the thin films were grown under conditions of various rf powers. The IR spectra showed them to have completely different chemical functionalities from the liquid toluene and TEOS precursors. Also, The SiO peak intensity increased with increasing TEOS bubbling ratio, and the -OH and the CO peak intensities decreased with increasing annealing temperature. The AFM images showed changing of surface roughness that depended on different deposition rf powers. An nanoindenter was used to measure the hardness and Young' modulus and showed that both these values increased as the deposition RF power increased; these values also changed with the bubbling ratio of TEOS to toluene and with the annealing temperature. From the field emission scanning electron microscopy (FE-SEM) results, the thickness of the thin films was determined before and after the annealing, with the thickness shrinkage (%) being measured by using SEM cross-sectional images.

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