• 마이크로전자및패키징학회지
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• 제11권1호
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• pp.49-57
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• 2004

습도센서의 감습막으로 응용하기 위하여 폴리이온넨계 전해질 잉크를 제조하였다. 감습필름 은 금전극이 인쇄된 알루미나 기판 위에 잉크젯 인쇄 기법을 사용하여 도포 하였다. 또한 methyl methacrylate, acrylic acid, 2-hydroxyethyl methacrylate 그리고 [(2-methacryloyloxy)ethyl)ethyl]trimethylammonium chloride의 공중합체를 합성하였으며, 이것은 침적코팅에 의한 감습막 제조에 사용하였다. 상대습도에 따른 전기적 특성을 측정하였으며 침적코팅에 의한 습도센서와 비교하였다. 습도센서는 상대습도가 증가함에 따라서 저항의 감소함을 보여주었으며 그들의 저항특성은 시료간에 가깝게 일치함을 보여주었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.773-777
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• 2002

In this study, we analyzed the LPG and LNG sensitivity measurement and voltage variation using catalytic type gas sensor characteristics in catalytic combustion type gas detecter sensors. gas detector shall operate as intended when exposed for 24 hours to air having a relative humidity of 0~85 percent at a temperature of $20[{\mu}m]$ and humidity of 45 percent at a temperature of $-10{\sim}40[^{\circ}C]$ the gas detecter sensors are to be subjected to operation for 210 days in an area that has been detemined to be equivalent to a typical residential atmosphere with an air velocity of 50 [cm/sec]. The source of energy for a gas detector sensors employing a supplementary basic circuit is energized from a separate source of supply direct applied voltage 2.1[V], 2.2[V], 2.3[V]. As a result, it was confirmed that the relative humidity and temperature by regression each analysis, compared to the LPG characteristic graph and methane characteristics graph by a relative humidity of 0 ~ 85 [%] at a temperature range of $-10{\sim}40[^{\circ}C]$ show a similar linear pattern on the whore.

• 센서학회지
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• 제1권2호
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• pp.125-130
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• 1992

습도감지물질로서 PMMA박막을 사용하여 저항형 습도감지소자를 제조하고 그 특성을 조사하였다. PMMA에 DVB를 첨가하여 가교결합을 일으키고 여기에 PVA를 섞어 제조된 습도센서는 상대습도의 증가에 따라 저항의 변화를 나타내었으며, 흡착에 비해 탈착 시 약 3% 미만의 히스테리시스 특성을 나타내었다. 또한 제조된 소자는 좋은 장기안정도를 보였으며, 응답시간은 흡착시에는 약 7분, 탈착시에는 약 5분이었다.

• JSTS:Journal of Semiconductor Technology and Science
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• 제4권2호
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• pp.128-132
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• 2004

This paper presents the design, fabrication sequence and measurement results of a highly sensitive capacitive-type humidity sensor using a polyimide film without hydrophobic elements. The structure of the humidity sensor is MIM (metalinsulator-metal). For a high sensitivity, a modified aromatic polyimides as a moisture absorbing layer has been synthesized instead of using general polyimides containing hydrophobic elements. The polyimide film was obtained by synthesizing and thermally polymerizing polyamic acid composed of m-pyromellitic dianhydride, phenelenediamine and dimethylacetamide. Characteristics of fabricated sensors which include sensitivity, hysteresis and stability have been measured. The measurement result shows the percent normalized capacitance change of 0.37/%RH over a range from 10 to 90%RH, hysteresis of 0.77% over the same %RH range and maximum drift of 0.25% at 50%RH. The result shows that the developed humidity sensor can be applied to evaluate a hermeticity of various sensors and actuator systems as well as micro packages.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권10호
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• pp.475-480
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• 2006

Vanadium oxide thin films (VOx) have been deposited by RF magnetron sputtering from $V_2O_5$ target under different oxygen partial pressure ratios(0%, 10%) and substrate temperatures$(27^{\circ}C,\;400^{\circ}C)$. Crystallographic structure and morphology of the films are studied by XRD and SEM. Humidity-sensing properties of resistive sensors having interdigitated electrode structure are characterized through electrical conduction measurements. The films deposited at room temperature are amorphous whereas the ones deposited above foot are polycrystalline. The sensors show good response to humidity over 20%RH to 80%RH. Vanadium oxide thin films deposited with $0%O_2$ partial pressure at $400^{\circ}C$ exhibit greater sensitivity to humidity change than others.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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• pp.448-451
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• 2004

Vanadium oxides have been widely used in a variety of technological applications such electrochromic devices as infrared detectors and are expected as a material suitable for gas sensing applications. Thin films of Vanadium oxide (VOx) have been deposited by r.f magnetron sputtering under different oxygen partial pressure ratios and substrate temperatures. Humidity-sensitive properties of resistive sensors having interdigitated electrode structure are characterized. Our sensors show good response to humidity over 20%RH to 80%RH. Vanadium oxide films deposited with 0% $O_2$ partial pressure at foot exhibit greater sensitivity to humidity change than others.

• 전기학회논문지P
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• 제58권4호
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• pp.619-622
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• 2009

Multi Cultivation Remote-control System(MCRS) for crpos through characteristics of multi-safe sensors was realized. It was carried out to investigate into the effect of LED Control with the physiological activity of crops(for examples, sprouts). We have also composed a Combined Automatic Control System possible for the control of temperature and humidity at the same time. The applied multi-safe sensors for measurement are blue, green, red, white, yellow leds and humidity sensors, web camera sensors under safe conditions for crops cultivation. And we producted the remote control OS using Linux and defined the characteristics of automatic control about sprouts.

• 센서학회지
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• 제23권1호
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• pp.42-45
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• 2014

Recently, tremendous application utilizing electrospun nanofibers have been actively reported due to its several advantages, such as high surface to volume ratio, simple fabrication and high-throughput manufacturing. In this paper, we developed highly sensitive and consistent nanofiber humidity sensor by electrospinning. The humidity sensor was fabricated by rapid electrospinning (~2 sec) $TiO_2$/PVP/LiCl mixed solution on the micro-interdigitated electrode. In order to evaluate the humidity sensing performances, we measured current response using DC bias voltage under various relative humidity levels. The results show fast response / recovery time and marginal hysteresis as well as long-term stability. In addition, with the aid of micro-interdigitated electrode, we can reduce a total resistance of the sensor and increase the total reaction area of nanofibers across the electrodes resulting in high sensitivity and enhanced current level. Therefore, we expect that the electrospun nanofiber array for humidity sensor can be feasible and promising for diverse humidity sensing application.

• Current Optics and Photonics
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• 제5권6호
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• pp.652-659
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• 2021

The theoretical analysis and optimization of extrinsic Fabry-Perot interferometer (EFPI) opticalfiber humidity sensors are deeply investigated. For a typical dual-cavity structure composed of an optical fiber and a humidity-sensitive membrane (HSM), the changes in refractive index (RI) and initial length are discussed for polymer materials and porous oxide materials when relative humidity (RH) increases. The typical interference spectrum is simulated at different RH using MATLAB. The spectral change caused by changing HSM RI and initial length are simulated simutineously, showing different influences on humidity response. To deeply investigate the influence on RH sensitivity, the typical response sensitivity curves for different HSM lengths and air-cavity lengths are simulated. The results show that the HSM is the vital factor. Short HSM length can improve the sensitivity, but for HSM RI and length the influences on sensitivity are opposite, because of the opposite spectral-shift trend. Deep discussion and an optimization method are provided to solve this problem. According to analysis, an opaque HSM is helpful to improve sensitivity. Furthermore, if using an opaque HSM, a short air cavity and long HSM length can improve the sensor's sensitivity These results provide deep understanding and some ideas for designing and optimizing highly sensitive EFPI fiber humidity sensors.

• Bulletin of the Korean Chemical Society
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• 제34권9호
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• pp.2781-2786
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• 2013

We examined the effect of electrode fingers and gaps of coplanar interdigitated electrode (IDE) structures to characterize the ammonium salt-containing polyelectrolyte film of resistance-based humidity sensors. IDEs designed for this purpose were flexible gold electrodes deposited on a polyimide substrate using a printing process because the geometry presents a potential for tunable sensitivity over other electrode designs. The basic design of the sensors consisted of IDEs with a different number of electrode fingers such as 3, 4, and 5 and gap sizes of 310, 360, 410, and $460{\mu}m$. Details of the AC complex impedance characteristics such as the Nyquist plot, Bode plot, and activation energy based on electrode construction were investigated.