• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.51-52
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• 2007

This paper compared wired Acoustic Emission (AE) signals with wireless AE signals. According to the material and process condition, each process signal has distinguishable characteristic to show each removal phenomenon. Therefore, wired and wireless AE sensors having different bandwidth are complementary for CMP process monitoring. Especially, the AE sensor was used to investigate abrasive and molecular-scale phenomena during CMP process, which was compatible to acquire high level frequency. In experiment, wireless AE system was used to get signals in rotary system, using bluetooth. But, it is possible to acquire only RMS signals, which can not analyze abrasive and molecular-sale phenomena. Second, wired AE system was installed using mercury slip-ring, which is suitable not only for rotation equipment but also for acquiring original signals. The acquired signals were analyzed by FFT for understanding of abrasive and molecular revel phenomena in CMP process, finally, we verified that two types of AE sensor with different bandwidth were complementary for CMP process monitoring.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.3
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• pp.1778-1785
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• 2014

In order to construct offshore structures safely, geotechnical investigation should be carried out with high accuracy. Up to now, onshore geotechnical investigation equipments installed on the barge are used for offshore geotechnical investigation. In this case, many limitations can be confronted such as deep water depth, high wave, strong current, severe wind and so on. For the safe and economic offshore geotechnical investigation with high precision, a seabed type unmanned automated site investigation equipment is developed. It can be operated remotely underwater conditions with 100m water depth and can explore the ground depth of 50m. Also, the standard penetration test (SPT), soil boring, soil sampling and rock coring can be possible using the equipment. Numerical analysis was conducted to secure the stability of the equipment against current of 4 knot. Energy efficiency of SPT apparatus which is attached to the equipment shows 78% in average.

• Transactions of The Korea Fluid Power Systems Society
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• v.8 no.4
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• pp.9-16
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• 2011

Because of the increasing demand on the high precision and high response of a machinery, proportional control valves are widely adopted at various application fields. This paper studies on the static and dynamic characteristics of a pilot proportional pressure control valve. An experimental apparatus including hydraulic pump, variable speed inverter, pressure and flow sensors and data aquisition system was set up. And various experiments such as P-Q-V curves, step responses due to input voltage and flow rate, hysteresis, frequency response of the proportional valve was carried out and the results are discussed.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.11-14
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• 2007

An additive servo-system is developed to improve straightness of linear motor stages. For linear motor stages used in the field of high-precision linear motion process, high straightness accuracy is necessary as well as positioning accuracy in the longitudinal axis. In such cases, machining and assembling cost increases to improve the straightness accuracy. An electro-magnetic actuator which is relatively cost effective than any other conventional servo-systems is suggested to compensate the fixed straightness error. To overcome the compensation error due to modeling error and friction disturbance, a sliding mode control is addressed. The effectiveness of the suggested mechanism and the control are illustrated along with some experimental results.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.109-112
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• 2007

In this paper we describe a robust method of improving precision in monitoring high energy ion implantation processes. Ion implant energy accuracy was measured in the device manufacturing process using an unpatterned implanted layer on an intrinsic p-type silicon wafer. To increase Rs sensitivity to energy at the well implant process, a PN junction structure was formed by P-well and deep N-well implants into the p-type Si wafer. It was observed that the depletion layer formed by the PN junction was very sensitive to energy variation of the well implant. Conclusively, it can be recommended to monitor well implant processes using the Rs measurement method described herein, i.e., a PN junction diode structure since it shows excellent Rs sensitivity to variation caused by energy difference at the well implant step.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.176.3-176
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• 2001

Hydraulic servo system has the characteristic of high power in itself, as combining its characteristics with excellent electro equipment that comes from the development of electronics, electro-hydraulic servo system is widely used in industry that are requested high precision and power Electro-hydraulic servo system is characteristic of very strong non-linearity in itself and it is mainly applied the field of the inner or outer fluctuating load or disturbance in industry. Evolutionary computation based on the natural evolutionary process may solve many engineering problems. Algorithms can represent the natural selection in crossovers, mutations, production of the offspring, selection, etc. Nature has already shown is the superiority through ...

• Journal of Drive and Control
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• v.12 no.1
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• pp.21-27
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• 2015

Pneumatic cylinders are classified into rod-type pneumatic cylinders and rodless pneumatic cylinders depending on the presence of the rod. Rodless cylinders have a constant area and have no deflection. Rodless cylinders are widely used in automatic systems requiring high-speed performance and high-precision transportation. However, the research of the pneumatic cylinder has been focused on the structure and life characteristics. In this research, aging characteristics and shape parameter analysis which are related to the lifetime were investigated. By conducting the lifetime tests with two different materials for the transfer plate, the failure mode and lifetime characteristics were analyzed. By the Anderson-Darling (A-D) verification based on the complete data set, the analysis results of lifetime distribution, shape parameter, and scale parameter were provided.

• 유공압시스템학회:학술대회논문집
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• 2010.06a
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• pp.18-24
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• 2010

Because of the increasing demand on the high precision and high response of a machinery, electronic control valves are widely adopted at various application fields. This paper studies on the static characteristic of a first-stage proportional pressure control valve. At first an experimental apparatus including hyd. pump variable speed inverter, pressure and data aquisition system was setted up with the experimental apparatus, various tests such as P-Q-W test, hyd, pump, dynamic, static, frequency response test of the proportional valve was carride out and the results are discussed.

• Korean Journal of Optics and Photonics
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• v.32 no.2
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• pp.49-54
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• 2021

In this paper, we design and construct the equipment to manufacture large-diameter optical fiber end caps, which are the core parts of high-power fiber lasers, and we fabricate large-diameter optical fiber end caps using the home-made equipment. This equipment consists of a CO2 laser as a fusion-splice heat source, a precision stage assembly for transferring the position of a large-diameter optical fiber and an end cap, and a vision system used for alignment when the fusion splice is interlocked with the stage assembly. The output of the laser source is interlocked with the stage assembly to control the output, and the equipment is manufactured to align the polarization axis of the large-diameter polarization-maintaining optical fiber with the vision system. Optical fiber end caps were manufactured by laser fusion splicing of a large-diameter polarization-maintaining optical fiber with a clad diameter of 400 ㎛ and an end cap of 10×5×2 ㎣ (W×D×H) using home-made equipment. Signal-light insertion loss, polarization extinction ratio, and beam quality M2 of the fabricated large-diameter optical fiber end caps were measured to be 0.6%, 16.7 dB, and 1.21, respectively.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.5
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• pp.84-94
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• 1996

In order to prevent shell sticking by providing sufficient lubrication between the strand and the mold, the mold oscillation has been used. Now it is well known that the shape of the oscillation curve has a decisive effect on the surface quality of the cast product. Besides, oscillation parameters such as stroke and frequency are also very important. In order to guarantee that parameters which have been found to be optimal for a certain grade of steel do not change with time, periodical checks of the physical condition of the whole equipment are necessary. The portable mold oscillation analyzer with integrated computer, developed by POSCO, records the movement of the mold in every spatial direction. The system uses the gap sensors to measure the mold movement (displacement ) in the two horizontal directions according to the mold narrow and broad faces and the vertical strokes in the four corners of mold. The gap sensor is a non-contacting minute displacement measuring device using the principle of high frequency eddy current loss. The mold oscillation diagnosis system integrates the gap sensors, their converters and the industrial portable computer with plug-in data acquisition boards. The all programs, such as the fast Fourier transformation module (amplitude and phase spectrums) and harmonic analysis module, was coded by LabVIEW$^{TM}$ software as the graphical language. In an own 'expert module' which is included in the diagnosis program, one can obtain much information about the mold oscillation equipment.