• Journal of Information Processing Systems
• /
• 제19권2호
• /
• pp.173-188
• /
• 2023

To improve the shock-resistance of piezoresistive high-g accelerometer, we propose a design of piezoresistive high-g accelerometer. The accelerometer employs special-shaped proof masses system with a cross gap. Four tiny sensing beams are bonded above the cross gap. The expression of the deformation, natural frequency and damping is deduced, and the structural parameters are optimized. The accelerometer structure is simulated and verified by finite element method (FEM) simulation. The results show that the range of the accelerometer can reach 200,000 g, the natural frequency is 453.6 kHz, and the cross-axis sensitivity of X-axis and Y-axis is 0.25% and 0.11%, respectively, which can apply to the measurement of high shock. Contrastively, the cross-axis sensitivity of X-axis and Y-axis is respectively, reduced by 93.2% and 96.9%. The sensitivity of our accelerometer is 0.88 μV/g. It is of great value for the application of piezoresistive high-g accelerometer with high shock-resistance.

• Transactions on Electrical and Electronic Materials
• /
• 제18권2호
• /
• pp.78-88
• /
• 2017

Cantilever beam MEMS piezoelectric accelerometers are the simplest and most widely used accelerometer structure. This paper discusses the design of a piezoelectric accelerometer exclusively for SHM applications. While such accelerometers need to operate at a lower frequency range, they also need to possess high sensitivity and low noise floor. The availability of a simple model for deflection, charge, and voltage sensitivities will make the accelerometer design procedure less cumbersome. However, a review of the open literature suggests that such a model has not yet been proposed. In addition, previous works either depended on FEM analysis or only reported on the fabrication and characterization of piezoelectric accelerometers. Hence, this paper presents, for the first time, a simple analytical model developed for the deflection, induced voltage, and charge sensitivity of a cantilever beam piezoelectric accelerometer.The model is then verified using FEM analysis for a range of different cases. Further, the model was validated by comparing the induced voltages of an accelerometer estimated using this model with experimental voltages measured in the accelerometer after fabrication. Subsequently, the design of an accelerometer is demonstrated for SHM applications using the analytical model developed in this work. The designed accelerometer has 60 mV/g voltage sensitivity and 2.4 pC/g charge sensitivity, which are relatively high values compared to those of the piezoresistive and capacitive accelerometers for SHM applications reported earlier.

• ETRI Journal
• /
• 제40권6호
• /
• pp.794-801
• /
• 2018

This paper proposes a novel graphene-based optical microelectromechanical systems MEMS accelerometer that is dependent on the intensity modulation and optical properties of graphene. The designed sensing system includes a multilayer graphene finger, a laser diode (LD) light source, a photodiode, and integrated optical waveguides. The proposed accelerometer provides several advantages, such as negligible cross-axis sensitivity, appropriate linearity behavior in the operation range, a relatively broad measurement range, and a significantly wider bandwidth when compared with other important contributions in the literature. Furthermore, the functional characteristics of the proposed device are designed analytically, and are then confirmed using numerical methods. Based on the simulation results, the functional characteristics are as follows: a mechanical sensitivity of 1,019 nm/g, an optical sensitivity of 145.7 %/g, a resonance frequency of 15,553 Hz, a bandwidth of 7 kHz, and a measurement range of ${\pm}10g$. Owing to the obtained functional characteristics, the proposed device is suitable for several applications in which high sensitivity and wide bandwidth are required simultaneously.

• 센서학회지
• /
• 제9권3호
• /
• pp.196-202
• /
• 2000

본 논문에서는 3축의 가속도를 검출하기 위한 새로운 방식인 브리지조합 검출원리를 제안하고, SOI 구조의 웨이퍼를 이용하여 $200^{\circ}C$ 이상 고온에서 동작이 가능한 압저항형 실리콘 가속도센서를 제작하였다. 제작된 센서의 감도는 x 및 y축이 8mV/V G, z 축이 40mV/V G 이였다. 그리고 출력전압의 비선형성은 1.6%FS, 타축감도는 약 4.6% 이하였다. 이것은 외부 연산회로를 이용하여 3축의 가속도성분을 검출하는 방법에 비해 검출방식은 간단하면서도, 특성은 거의 동일하였다. 또한 SOI 구조를 이용하여 고온에서도 안정한 동작을 하였다. 제작된 가속도센서의 오프셋전압 온도계수와 감도 온도계수는 $27^{\circ}C$에서 각각 $1033ppm^{\circ}C^{-1}$와 $1145ppm^{\circ}C^{-1}$이였다.

• 한국공간구조학회논문집
• /
• 제16권1호
• /
• pp.85-94
• /
• 2016

In this study, an acceleration sensor that has optical fibers to measure the inclination and acceleration of a structure through contradictory changes in two-component FBG sensors was examined. The proposed method was to ensure precise measurement through the unification of the deformation rate sensor and the angular displacement sensor. A high sensitivity three-axis accelerometer was designed and prepared using this method. To verify the accuracy of the accelerometer, the change in wavelength according to temperature and tension was tested. Then, the change in wavelength of the prepared accelerometer according to the sensor angle, and that of the sensor according to the change in ambient temperature were measured. According to the test results on the FBG-based vibration sensor that was developed using a high-speed vibrator, the range in measurement was 0.7 g or more, wavelength sensitivity, 2150 pm/g or more, and the change in wavelength change, $9.5pm/^{\circ}C$.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2003년도 ICCAS
• /
• pp.2187-2191
• /
• 2003

In this paper, a x/y-axis accelerometer is fabricated, using the SBM process on a <111> SOI wafer. This fabrication method solves the problem of the footing phenomenon in the conventional SOI process for improved manufacturability and performance. The roughened lower parts as well as the loose silicon fragments due to the footing phenomenon are removed by the alkaline lateral etching step of the SBM process. The fabricated accelerometer has a demodulated signal-to-noise ratio of 92 dB, when 40Hz, 5 g input acceleration is applied. The noise equivalent input acceleration resolution and bandwidth are $125.59\;{\mu}g$ and over 100 Hz, respectively. The acceleration random walk is $12.5\;{\mu}g/\sqrt{Hz}$. The output linearity is measured to be 1.2 % FSO(Full Scale Output) at 40 Hz, and the input range is over ${\pm}\;10g$.

• 한국군사과학기술학회지
• /
• 제14권1호
• /
• pp.132-138
• /
• 2011

A micromachined silicon accelerometer capable of surviving and detecting very high accelerations(up to 200,000 times the gravitational acceleration) is necessary for a high impact accelerometer for earth-penetration weapons applications. We adopted as a reference model a piezoresistive type silicon micromachined high-shock accelerometer with a bonded hinge structure and performed structural analyses such as stress, modal, and transient dynamic responses and sensor sensitivity simulation for the selected device using piezoresistive-structural coupled-field analysis. In addition, structural optimization was introduced to improve the performances of the accelerometer against the initial design of the reference model. The design objective here was to maximize the sensor sensitivity subject to a set of design constraints on the impact endurance of the structure, dynamic characteristics, the fundamental frequency and the transverse sensitivities by changing the dimensions of the width, sensing beams, and hinges which have significant effects on the performances. Through the optimization, we could increase the sensor sensitivity by more than 70% from the initial value of $0.267{\mu}V/G$ satisfying all the imposed design constraints. The suggested simulation and optimization have been proved very successful to design high impact microaccelerometers and therefore can be easily applied to develop and improve other piezoresistive type sensors and actuators.

• 대한의용생체공학회:의공학회지
• /
• 제32권2호
• /
• pp.177-184
• /
• 2011

In this study, the system for application of the bone stimulation was implemented using high frequency and low strain method. The whole system consists of the high frequency and low strain vibration stimulation system 177 for stimulating bone, LVDT sensor, and wireless sensor based on tri-axial accelerometer. To evaluate the usefulness of the system, the frequencies and accelerations from function generator were applied to the vibration stimulation system. The range of frequency was 17 Hz, 30 Hz, 45 Hz, 50 Hz and the range of acceleration was set 0.3 g, 0.6 g, 1g, and 2 g. The measured frequencies and acceleration using LVDT (linear variable difference transformer) sensor and 3-axial accelerometer were estimated and compared. The range of frequencies average difference was from 0.0 to 0.004 Hz. As the standard deviation of frequencies estimated by LVDT sensor and accelerometer was below 0.03 Hz and the output frequencies of function generator were similar: Also the results of t-test were satisfied with conditions of p > 0.05. And the acquired frequencies and acceleration from vibration measuring device module were estimated and analyzed. As the mean of accelerations was similar to the acceleration applied from function generator. And the standard deviation of acceleration estimated from vibration measuring device module was ranged from 0.019 g to 0.038 g. Also the results of t-test were satisfied with conditions of p > 0.05. Therefore, these results were airy similar to the acceleration applied from function generator. As a result, the usefulness of the system was confirmed. n a further study, clinical experiment will be carried out with the authorization of IRB (institutional review board) so that appropriate frequency and strain would be investigated in clinical field.

• 한국자동차공학회논문집
• /
• 제16권6호
• /
• pp.115-120
• /
• 2008

There are many typesof accelerometer sensor. There was mainly used high-g accelerometer to obtain data for vehicle in crash test. Accelerometer was mounted on test vehicle with mounting blocks. Test result can be influenced by condition of mounting i.e. bonding material and type of block. These influences can be evaluated to variation of sensitivity in calibration test. In this paper, Calibration test were carried out for 3 types of bonding material i.e. stud, beewax and double side tape. Other factor was taken into consideration by 3-types for mounting block. All test was conducted by sinusoidal signal vibrator up to 4500Hz. In order to investigate influence for sensitivity from different input voltage in the calibrator, the same test was repeated. Test results were compared with standard accelerometer data. Relative sensitivities and phases were showed small difference in sensitivity for bonding materials with one block, but significant one for another block and different input voltage below 1000Hz.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2004년도 춘계학술대회논문집
• /
• pp.1047-1051
• /
• 2004

Charge amplifier systems benefit from the very wide dynamic range of PE accelerometers by offering flexibility in adjusting the electrical output characteristics such as sensitivity and range. They are well suited for operation at high temperatures. Modern charge systems feature improved low noise operation, simplified digital controls, and dual mode operation for operation with charge or IEPE voltage mode sensors. high impedance circuitry is not well suited for operation in adverse field or factory environments. The resolution of a PE accelerometer may not be specified or known since noise is a system consideration determined by cable length and amplifier gain. IEPE accelerometrs operate from a constant current power source, provide a high-voltage, low-impedance, fixed mV/g output. They operate through long, ordinary, coaxial cable in adverse environments without degradation of signal quality. They have limited high temperature range. IEPE sensors are simple to operate. Both resolution and operating range are defined specifications. Cost perchannel is lower compared to PE systems since low-noise cable and charge amplifiers are not required.