• 제목/요약/키워드: High-aspect-ratio tip

검색결과 24건 처리시간 0.029초

자외선 활성화 원자층 성장 기술을 이용한 상온에서 TiO2 박막의 제조 (Fabrication of TiO2 Thin Films Using UV-enhanced Atomic Layer Deposition at Room Temperature)

  • 이병훈;성명모
    • 한국진공학회지
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    • 제19권2호
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    • pp.91-95
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    • 2010
  • 상온에서 고품질의 $TiO_2$ 박막을 제조하기 위하여 titanium isopropoxide [Ti(OCH$(CH_3)_2)_4$, TIP]와 $H_2O$을 이용한 자외선 활성화 원자층 증착(UV-enhanced atomic layer deposition: UV-ALD) 기술을 개발하였다. UV-ALD 기술은 상온에서 자체제어 표면 반응(self-limitting surface reaction)을 통해 균일하고 고품위 등방 특성을 갖는 순수한 $TiO_2$ 박막 증착이 가능하였다. ALD 반응 시 조사되는 자외선은 Si 기질 위에 우수한 접착력을 가지는 고품질의 $TiO_2$ 박막을 얻는데 효과적이었다. UV-ALD 기술은 높은 단차비(aspect ratio)를 가지는 trench 기질 위에 균일한 $TiO_2$ 박막을 증착하는 데에 적용되었다.

Fabrication of Sputtered Gated Silicon Field Emitter Arrays with Low Gate Leakage Currents by Using Si Dry Etch

  • Cho, Eou Sik;Kwon, Sang Jik
    • Transactions on Electrical and Electronic Materials
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    • 제14권1호
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    • pp.28-31
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    • 2013
  • A volcano shaped gated Si-FEA (silicon field emitter array) was simply fabricated using sputtering as a gate electrode deposition and lift-off for the removal of the oxide mask, respectively. Due to the limited step coverage of well-controlled sputtering and the high aspect ratio in Si dry etch caused by high RF power, it was possible to obtain Si FEAs with a stable volcano shaped gate structure and to realize the restriction of gate leakage current in field emission characteristics. For 100 tip arrays and 625 tip arrays, gate leakage currents were restricted to less than 1% of the anode current in spite of the volcano-shaped gate structure. It was also possible to keep the emitters stable without any failure between the Si cathode and gate electrode in field emission for a long time.

Switch-on Phenomena and Field Emission from Multi-Walled Carbon Nanotubes Embedded in Glass

  • Bani Ali, Emad S;Mousa, Marwan S
    • Applied Microscopy
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    • 제46권4호
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    • pp.244-252
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    • 2016
  • This paper describes a new design of carbon nanotube tip. $Nanocly^{TM}$ NC 7000 Thin Multiwall Carbon Nanotubes of carbon purity (90%) and average diameter tube 9.5 nm with a high aspect-ratio (>150) were used. These tips were manufactured by employing a drawing technique using a glass puller. The glass microemitters with internal carbon nanotubes show a switch-on effect to a high current level (1 to $20{\mu}A$). A field electron microscope with a tip (cathode)-screen (anode) separation at ~10 mm was used to characterize the electron emitters. The system was evacuated down to a base pressure of ${\sim}10^{-9}$ mbar when baked at up to ${\sim}200^{\circ}C$ overnight. This allowed measurements of typical Field Electron Emission characteristics; namely the current-voltage (I-V) characteristics and the emission images on a conductive phosphorus screen (the anode). Fowler-Nordheim plots of the current-voltage characteristics show current switch-on for each of these emitters.

Thrust force and base bending moment acting on a horizontal axis wind turbine with a high tip speed ratio at high yaw angles

  • Bosnar, Danijel;Kozmar, Hrvoje;Pospisil, Stanislav;Machacek, Michael
    • Wind and Structures
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    • 제32권5호
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    • pp.471-485
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    • 2021
  • Onshore wind turbines may experience substantially different wind loads depending on their working conditions, i.e. rotation velocity of rotor blades, incoming freestream wind velocity, pitch angle of rotor blades, and yaw angle of the wind-turbine tower. In the present study, aerodynamic loads acting on a horizontal axis wind turbine were accordingly quantified for the high tip speed ratio (TSR) at high yaw angles because these conditions have previously not been adequately addressed. This was analyzed experimentally on a small-scale wind-turbine model in a boundary layer wind tunnel. The wind-tunnel simulation of the neutrally stratified atmospheric boundary layer (ABL) developing above a flat terrain was generated using the Counihan approach. The ABL was simulated to achieve the conditions of a wind-turbine model operating in similar inflow conditions to those of a prototype wind turbine situated in the lower atmosphere, which is another important aspect of the present work. The ABL and wind-turbine simulation length scale factors were the same (S=300) in order to satisfy the Jensen similarity criterion. Aerodynamic loads experienced by the wind-turbine model subjected to the ABL simulation were studied based on the high frequency force balance (HFFB) measurements. Emphasis was put on the thrust force and the bending moment because these two load components have previously proven to be dominant compared to other load components. The results indicate several important findings. The loads were substantially higher for TSR=10 compared to TSR=5.6. In these conditions, a considerable load reduction was achieved by pitching the rotor blades. For the blade pitch angle at 90°, the loads were ten times lower than the loads of the rotating wind-turbine model. For the blade pitch angle at 12°, the loads were at 50% of the rotating wind-turbine model. The loads were reduced by up to 40% through the yawing of the wind-turbine model, which was observed both for the rotating and the parked wind-turbine model.

변형률을 이용한 외팔보의 구조 대변형 예측 (Prediction for Large Deformation of Cantilever Beam Using Strains)

  • 박승현;김인걸;이한솔;김민성
    • 한국항공우주학회지
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    • 제43권5호
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    • pp.396-404
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    • 2015
  • 무인기의 날개는 고고도 장기체류에 적합하도록 가로세로비가 크며, 비행 중 구조 대변형이 발생한다. 비행 중 날개 구조의 실시간 변형 상태 파악을 위해 변위-변형률 관계를 이용하여 비행체의 구조 건전성 및 관련 하중 상태 평가, 이상 진동 현상 발견 및 조종성 향상과 같은 영역에서 활용할 수 있다. 본 논문에서는 비행 중 변형이 발생하는 날개 구조물을 외팔보로 가정하여 구조 대변형을 보다 간편하게 예측하기 위한 변형률 기반의 비선형성을 고려한 변위 예측 알고리즘을 작성하였다. 변위 예측식은 외팔보의 다양한 끝단 변위 조건에서 이루어진 구조 실험과 유한요소 해석 결과의 비교를 통하여 검증하였다. 변형률은 스트레인 게이지로부터 취득한 값을 사용하였으며, 변형률을 이용하여 예측된 변위는 레이저 변위 센서로 측정한 변위와 잘 일치하였다.

자연모사 2층 구조 응착시스템의 최적화 (Optimization of Biomimetic Two-level Hierarchical Adhesive System)

  • 김태완
    • Tribology and Lubricants
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    • 제26권2호
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    • pp.129-135
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    • 2010
  • Geckos have a unique ability to cling to ceilings and walls utilizing dry adhesion. Their foot pads are covered by a large number of small hairs (setae) that contain many branches per seta with a lower level of spatulae. Their fibrillar structure is the primary source of high adhesion. In this study, we construct the adhesion design database for biomimetic adhesive system. A simple idealized fibrillar structure consisting of single array of beams is modeled. The fibers are assumed as oriented cylindrical cantilever beams with spherical tip. We consider three necessary conditions; buckling, fracture and sticking of fiber structure, which constrain the allowed geometry. The adhesion analysis is performed for the attachment system in contact with rough surfaces with different s values for different main design variables-fiber radius, aspect ratio and material elastic modulus and so on. The developed adhesion design databases are useful for understanding biological systems and for guiding of fabrication of the biomimetic attachment system.

Fabrication of carbon nanotube emitters by filtration through a metal mesh

  • ;;;이내성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.150-150
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    • 2010
  • Carbon nanotubes have drawn attention as one of the most promising emitter materials ever known not only due to their nanometer-scale radius of curvature at tip and extremely high aspect ratios but also due to their strong mechanical strength, excellent thermal conductivity, good chemical stability, etc. Some applications of CNTs as emitters, such as X-ray tubes and microwave amplifiers, require high current emission over a small emitter area. The field emission for high current density often damages CNT emitters by Joule heating, field evaporation, or electrostatic interaction. In order to endure the high current density emission, CNT emitters should be optimally fabricated in terms of material properties and morphological aspects: highly crystalline CNT materials, low gas emission during electron emission in vacuum, optimal emitter distribution density, optimal aspect ratio of emitters, uniform emitter height, strong emitter adhesion onto a substrate, etc. We attempted a novel approach to fabricate CNT emitters to meet some of requirements described above, including highly crystalline CNT materials, low gas emission, and strong emitter adhesion. In this study, CNT emitters were fabricated by filtrating an aqueous suspension of highly crystalline thin multiwalled CNTs (Hanwha Nanotech Inc.) through a metal mesh. The metal mesh served as a support and fixture frame of CNT emitters. When 5 ml of the CNT suspension was engaged in filtration through a 400 mesh, the CNT layers were formed to be as thick as the mesh at the mesh openings. The CNT emitter sample of $1{\times}1\;cm^2$ in size was characteristic of the turn-on electrical field of 2.7 V/${\mu}m$ and the current density of 14.5 mA at 5.8 V/${\mu}m$ without noticeable deterioration of emitters. This study seems to provide a novel fabrication route to simply produce small-size CNT emitters for high current emission with reliability.

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항공기 구조 및 제트 엔진에 관한 연구 제 1 절 : 제트엔진용 터어빈디스크의 열전도 해석 (A Study on Aircraft Structure and Jet Engine Part1 : Analysis of Heat Conduction on the Turbine Disk for Jet Engine)

  • Gil Moon Park;Hwan Kyu Park;Jong Il Kim;Jin Heung Kim;Moo Seok Lee;Nak Kyu Chung
    • Journal of Astronomy and Space Sciences
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    • 제2권2호
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    • pp.153-174
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    • 1985
  • The one of critical factor in gas turbine engine performance is high turbine inlet gas temperature. Therefore, the turbine rotor has so many problems which must be considered such as the turbine blade cooling, thermal stress of turbine disk due to severe temperature gradient, turbine rotor tip clearance, under the high operating temperature. The purpose of this study is to provider the temperature distribution and heat flux in turbine disk which is required to considered premensioned problem by the Finite Difference Method and the Finite Element Methods on the steady state condition. In this study, the optimum aspect ratio of turbine disk was analysed for various heat conductivity of turbine disk material by Finite Difference Method, and the effect of laminating method with high conductivity materials to disk thickness direction by Finite Element Methods in order to cool the disk. The laminating method with high conductivity material on the side of the disk is effective.

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Electrical characteristics of lateral poly0silicon field emission triode using LOCOS process

  • Lee, Jae-Hoon;Lee, Myoung-Bok;Park, Dong-Il;Ham, Sung-Ho;Lee, Jong-Hyun;Lee, Jung-Hee
    • Journal of Korean Vacuum Science & Technology
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    • 제3권1호
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    • pp.38-42
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    • 1999
  • Using the LOCOS process, we have fabricated the lateral type polysilicon field emission triodes with poly-Si/oxide/Si structure and investigated their current-voltage characteristics for three biasing modes of operation. The fabricated devices exhibit excellent electrical performances such as a relatively low turn-on anode voltage of 14 V at VGC = 0V, a stable and high emission current of 92${\mu}$A/triode over 90 hours, a small gate leakage current of 0.23 ${\mu}$A/triode and an outstanding transconductance of 57${\mu}$S/5triodes at VGC = 5V and VAC = 26V. these superior electrical operation is believed to be due to a large field enhancement effect, which is related to the sharp cathode tips produced by the LOCOS process as well as the high aspect ratio (height /radius ) of the cathode tip end.

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인간동력항공기의 붙임각 변화에 따른 날개 끝단 굽힘변위 최소화 연구 (Minimization of the Bending Deflection of the Human-powered Aircraft Wing Induced by Change of an Incidence Angle)

  • 이창배;임병욱;주현식;신상준
    • 한국항공우주학회지
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    • 제47권2호
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    • pp.98-106
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    • 2019
  • 인간동력항공기의 날개는 고세장비의 형상을 가지고 있어 큰 굽힘변위가 발생한다. 본 논문에서는 고세장비 형상의 날개가 가지는 구조적인 한계를 붙임각을 변경함으로써 개선하고자 하였다. 날개의 익형 및 단면형상을 고정시킨 후 동일 수준의 양력 발생을 만족시킨다는 전제하에 붙임각의 변경에 따른 날개 끝단의 굽힘변위 변화 경향을 관측하였다. 이를 위해 유한날개의 양력, 항력, 모멘트 하중을 날개의 각 섹션에 분포시켰다. 그리고 EDISON의 "geometrically exact beam (GEB)" 프로그램과 "Variational Asymptotic Beam Sectional Analysis (VABS)" 단면해석 프로그램을 사용하여 변경된 설계안의 구조 안전도를 평가하였다. 또한, 다물체 동역학 해석 프로그램 DYMORE를 이용하여 본 논문에서 예측한 날개의 끝단 변위 예측값을 비교 검증하였다.