• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.282.1-282.1
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• 2016

The remarkable physical properties of two-dimensional (2D) semiconducting materials such as molybdenum disulfide ($MoS_2$) and tungsten disulfide ($WS_2$) etc. have attracted considerable attentions for future high-performance electronic and optoelectronic devices. The ongoing studies of $MoS_2$ based nonvolatile memories have been demonstrated by worldwide researchers. The opening hysteresis in transfer characteristics have been revealed by different charge confining layer, for instance, few-layer graphene, $MoS_2$, metallic nanocrystal, hafnium oxide, and guanine. However, limited works built their nonvolatile memories using entirely of assembled 2D crystals. This is important in aspect view of large-scale manufacture and vertical integration for future memory device engineering. We report $WS_2$ based nonvolatile memories utilizing functional van der Waals heterostructure in which multi-layered graphene is encapsulated between $SiO_2$ and hexagonal boron nitride (hBN). We experimentally observed that, large memory window (20 V) allows to reveal high on-/off-state ratio (>$10^3$). Moreover, the devices manifest perfect retention of 13% charge loss after 10 years due to large graphene/hBN barrier height. Interestingly, the performance of our memories is drastically better than ever published work related to $MoS_2$ and black phosphorus flash memory technology.

• Composites Research
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• v.30 no.5
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• pp.303-309
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• 2017

Organo-montmorillonite (OMMT) has attracted much attention for fiber-reinforced polymer composites as a filler material due to high aspect ratio and low charge density. The present study focused on the fabrication of nanocomposites using Vinyl ester and Jute fabric as matrix and reinforcement respectively. The OMMT was uniformly dispersed in vinyl ester resin at 1, 2 and 3 wt%, loading through high speed mechanical stirrer at room temperature and further nanocomposites were manufactured through vacuum assisted resin infusion (VARI) technique. Effects of OMMT on the mechanical properties of vinyl ester/Jute composites were carefully investigated through tensile, bending and Izod impact tests, which revealed significant improvement in mechanical properties. The morphology of the nanocomposites after tensile test was investigated by SEM which affirmed that OMMT filled nanocomposites has improved interactions with the host matrix than the pure composites. Based on the nature and flame retardancy mechanism, the OMMT slightly improved the flammability property which was clearly explained by horizontal burning test.

• International Journal of Precision Engineering and Manufacturing
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• v.2 no.2
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• pp.57-64
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• 2001

In recent years, the concern of designing multi-stage gear drives ha increased with more application of them in high-speed and high-load. Until now, however, the researches on the design of gear drives have been focused on single gear pairs. Thus the design practice for multi-stage gear drives has been depended on experiences and expertise of designers and carried out commonly by trial and error. We propose an automation algorithm for the design of two-and three-strage cylindrical gear drives. The two types of dimensional design processes have been proposed to determine gear dimensions in a formal way. The first design process(Process I) uses to total volume of gears to determine gear ration , and uses K factor , unit load and aspect ration to determine gear dimensions, The second one(Process II) makes use of Niemann's formula and center distance to calculate gear ratio and gear dimensions. Process I and Process II employ material date from AGMA and ISO standards, respectively. The configuration design determines the positions of gears with minimizing the volume of gearbox by using a simulated annealing algorithm. The availability of the design algorithm is validated by the design examples to two-and three=stage gear drives.

• Korean Journal of Materials Research
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• v.13 no.1
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• pp.6-10
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• 2003

Electroplated Ni and Ni-W micro-molds using LIGA-like process for replication of micro-components such as microfluidic parts and micro optical parts have been investigated. In general, it is hard to produce micro-parts using conventional mechanical processes. Micro-mold formed by LIGA-like process could fabricate micro-parts with high aspect ratio. In this paper, fabrication and properties of electroplated Ni molds with varying applied current types as well as those of Ni-W molds were investigated. Ni molds fabricated under pulse-reverse current showed the highest hardness value of about 160 Hv. Ni-W molds showed the hardness of about 500 Hv which was much harder than that of Ni electroplated molds. The above results suggested that high quality micro-molds could be fabricated by using Ni electroplating of pulse-reverse type for core molds and sequential Ni-W alloys coating.

• Transactions of Materials Processing
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• v.13 no.3
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• pp.253-261
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• 2004

The machining technology for the brittle materials such as ceramics are applied to the fields of MEMS(micro electromechanical system) by the progress of new machining technologies such as Etching, Diamond machining, Micro drilling, EDM(Electro discharge machining), ECDM(Electro discharge machining), USM(Ultrasonic machining), LBM(Laser beam machining), EBM(Electron beam machining). Especially, the USM technology can be applied to the dieletric brittle materials such as silicon, borosilicate glass, silicon nitride, quartz and ceramics with high aspect ratio. The micro machining system with machining force controlled position servo is developed in this paper and the optimized ultrasonic machining algorithm is constructed by the force controlled position servo control. The load cell is adapted in the force measuring and the servo control algorithm, suit for the ultrasonic machining characteristics, is estabilished with using the PID auto-tunning functions at the PMAC system which is generally adapted in the field of robot industries. The precision force signal amplifier is constructed with high precision operational amplifier AD524. The vacuum adsorption chuck which is made of titanum and internal flow line is engraved, is used in the workpiece fixing. The mahining results by USM shows that there are some deviation between the force command and the actual machining force that the servo control algorithm should be applied in the machining procedures. Therefore, the constant force controlled position servo system is developed for the micro USM system and by the examination machining process in USM, the stable USM system is realized by tracking the average value of machining force.

• Journal of the Korean Society for Aviation and Aeronautics
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• v.23 no.1
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• pp.24-29
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• 2015

In order to increase endurance flight efficiency of long endurance electric powered UAV, main wing of UAV should have high aspect ratio and low structural weight. Since a spar which consists of thin and slender structure for weight reduction can cause catastrophic failure during the flight, it is important to develop verification method of structural integrity of the spar with the light weight design. In this paper, process of structural analysis using non-linear finite element method was introduced for the verification of structural integrity of the spar. The static strength test of the spar was conducted to identify structural characteristic under the static load. Then, the experimental result of the spar was compared to the analytical result from the non-linear finite element analysis. It was found that the developed process of structural analysis could predict well the non-linear structural behavior of the spar under ultimate load.

• Korean Journal of Optics and Photonics
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• v.20 no.2
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• pp.81-86
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• 2009

Digital holography and refractive index difference are used to measure a high aspect ratio's patterns. When interference fringes are very closely spaced, the phase data containing high frequencies where $2{\pi}$ ambiguities cannot be resolved. In this technique, the optical path difference is decreased by decreasing the refractive index difference. As a result, we solve the $2{pi}$ ambiguities. Also, this technique is applicable to measure the refractive index if the shape of the sample is known.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1825-1828
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• 2008

A simple method for the fabrication of porous nano-master for antireflective surface is presented. In conventional fabrication methods for antireflective surface, coating method with low refractive index has usually been used. However, it is required to have high cost and long times for mass production. In this paper, we suggested the fabrication method of antireflective surface by the hot embossing process using the porous nano patterned master on silicon wafer fabricated by low-temperature anodic aluminum oxidation. Through multi-AAO and etching processes, nano patterned master with high aspect ratio was fabricated at the large area. Pore diameter and inter-pore distance are about 150nm and from 150 to 200nm. In order to replicate anti-reflective structure, hot embossing process was performed by varying the processing parameters such as temperature, pressure and embossing time etc. Finally, antireflective surface can be successfully obtained after etching process to remove selectively silicon layer of AAO master.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.10
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• pp.45-51
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• 2010

Electrical discharge drilling (ED-drilling) is a widespread machining method used to bore small holes with a high aspect ratio. This paper presents additional methods by which ED-drilling can improve machining speed, tool wear, and machined surface quality. Firstly, for high machining speed, and low tool wear, a new-type electrode that was ground on one side or both sides of the cylindrical electrodes was suggested to expel debris. The debris which is generated during the machining process can cause sludge deposition and secondary discharge problems: major reasons to decrease machining speed. This new-type electrode also reduced tool wear that was due to the decrease of unstable discharge in a machining gap by helping to expel waste water and debris from the gap. Secondly, to improve the machined surface roughness, an electrolyzation process was included after drilling. This process made the machined surface smooth by means of an electrochemical reaction between an electrode and a workpiece. In this study, the machining speed, electrode wear, and surface roughness were improved by the newtype electrode and the electrolytic process.

• Tribology and Lubricants
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• v.33 no.6
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• pp.282-287
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• 2017

SU-8 is an epoxy-type photoresist widely used for the fabrication of high-aspect-ratio (HAR) micro-structures in micro-electro-mechanical systems (MEMS). To fabricate highly integrated structures, chemical mechanical polishing (CMP) has emerged as the preferred manufacturing process for planarizing the MEMS structure. In SU-8 CMP, an oxidizer decomposes organic impurities and particles in the CMP slurry remove the chemically reacted surface of SU-8. To fabricate HAR microstructures using the CMP process, the adhesion between SU-8 and substrate material is important to avoid the delamination of the SU-8 film caused by the mechanical-dominant material removal characteristic. In this study, the friction force during the CMP process is measured with a CMP monitoring system to detect the delamination phenomenon and investigate the delamination of the SU-8 film from the silicon substrate under various pressure conditions. The increase in applied pressure causes an increase in the frictional force and wafer-edge stress concentration. The frictional force measurement shows that the friction force changes according to the delamination phenomenon of the SU-8 film, and that it is possible to monitor the delamination phenomenon during the SU-8 CMP process. The delamination at a high applied pressure is explained by the effect of stress distribution and pad deformation. Consequently, it is necessary to control the pressure of polishing, which can avoid the delamination in SU-8 CMP.