• 반도체디스플레이기술학회지
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• 제20권4호
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• pp.119-124
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• 2021

In a situation where Moore's law, which states that the performance of semiconductor integrated circuits doubles every two years, is showing a limit from a certain point, and it is difficult to increase the performance due to the limitations of exposure technology.In this study, a wafer hybrid method that can increase the degree of integration Various research on bonding technology is currently in progress. In this study, in order to achieve rotational precision between wafers in wafer hybrid bonding technology, modeling of θ_z alignment stage and VCM actuator modeling used for rotational alignment, magnetic field analysis and desgin, control, and evaluation are performed. The system of this study was controlled by VCM actuator, capactive sensor, and dspace, and the working range was ±7200 arcsec, and the in-position and resoultion were ±0.01 arcsec. The results of this study confirmed that safety and precise control are possible, and it is expected to be applied to the process to increase the integration.

• 한국의학물리학회지:의학물리
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• 제29권4호
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• pp.123-136
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• 2018

The complex dose distribution and dose transfer characteristics of intensity-modulated radiotherapy increase the importance of precise beam data measurement and review in the acceptance inspection and preparation stages. In this study, we propose a process map for the introduction and installation of high-precision radiotherapy devices and present items and guidelines for risk management at the acceptance test procedure (ATP) and commissioning stages. Based on the ATP of the Varian and Elekta linear accelerators, the ATP items were checked step by step and compared with the quality assurance (QA) test items of the AAPM TG-142 described for the medical accelerator QA. Based on the commissioning procedure, dose quality control protocol, and mechanical quality control protocol presented at international conferences, step-by-step check items and commissioning guidelines were derived. The risk management items at each stage were (1) 21 ionization chamber performance test items and 9 electrometer, cable, and connector inspection items related to the dosimetry system; (2) 34 mechanical and dose-checking items during ATP, 22 multileaf collimator (MLC) items, and 36 imaging system items; and (3) 28 items in the measurement preparation stage and 32 items in the measurement stage after commissioning. Because the items presented in these guidelines are limited in terms of special treatment, items and practitioners can be modified to reflect the clinical needs of the institution. During the system installation, it is recommended that at least two clinically qualified medical physicists (CQMP) perform a double check in compliance with the two-person rule. We expect that this result will be useful as a radiation safety management tool that can prevent radiation accidents at each stage during the introduction of radiotherapy and the system installation process.

• 한국정밀공학회지
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• 제17권12호
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• pp.151-156
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• 2000

A vibration in a high-speed machine may lead to machinery malfunction and even catastrophic failure. So solving the vibration problem is a fundamental requirement for the stability of the high-speed machine. The flywheel energy storage system using superconducting magnetic bearings is a device to store electrical energy as rotational kinetic energy by motor and to convert it to electrical by generator when necessary. The high-speed rotating flywheel has large amplitude at a critical speed. And it has an unstable behavior by the electric torque at the first stage of the energy generation. In this paper, the stability analysis is performed with an analytical model and equations of motion-which is considered the effect of the electric torque-to identify the stable driving condition and the dynamic behavior.

• International Journal of Precision Engineering and Manufacturing
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• 제3권3호
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• pp.21-27
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• 2002

In this paper, a simple test rig of high-speed crash for the front members of vehicles was developed for the improvement of crashworthiness of vehicle's side rail. The cart hanging the specimen is accelerated up to 35 mph by the traction wire and by the force of freely dropping weight and 1:3 accelerating pulleys. The cart with shock absorbers travels on the rail roads, so it does not transfer any additional vibration to the specimen. In order to measure the energy absorbed by the specimen when it collapse to the wall and during it deform, the two strain gage type load cells are used at the wall place. The test rig rated good to test the specimen like a side rail of vehicle as developing the vehicle's structures in the early design stage.

• 전자공학회논문지B
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• 제29B권1호
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• pp.76-84
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• 1992

The vision system is essential for SMT(Surface Mounting Technology) automation. The system plays the role of matching the positions betweem SMD and PCB, and inspecting SMD in the final stage of mounting. Real-time processing and high-precision are indispensable for practical purpose. In this paper, a new algorithm for position matching and inspection of SMD is proposed, and which is implemented on the DSP board using DSP board using DSP5600. Experimental results show mean matching error within 0.1 mm in the direction of x,y and execution time within 300msec. Therefore, we could attain high-speed and high-precision of the vision system for SMT automation.

• Journal of Magnetics
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• 제21권3호
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• pp.348-355
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• 2016

Precision motion stages used in the manufacturing process of flat-panel displays have inevitably low settling performance due to their huge mass and bulky structures. In order to improve the settling performance, several methods of frame vibration compensation have been developed so far. These methods are used to cancel the vibration by imposing a counter force or modifying the resonance mode of the frame of the stage. To compensate the frame vibration, high force actuators are required. In this paper, a mighty voice coil actuator is proposed to generate the counter force against the frame vibration. The proposed voice coil actuator has an axis-symmetric rectangular structure to achieve a large force with simple and low cost fabrication. Also, the voice coil actuator allows radial clearance up to ${\pm}4mm$. Using an optimized design process and a magnetic circuit model, the power consumption is minimized while the required force is obtained. With a power of 322 W, the VCA has been designed to have a maximum force of 574 N with a force constant of 164 N/A. Experimental results verified the force constant of the fabricated voice coil actuator is well matched with the designed value.

• 대한기계학회논문집A
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• 제21권10호
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• pp.1656-1665
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• 1997

The intake noise, a major source of vehicle noises, has rapidly become a noticeable, and has been studied to reduce the level. Traditionally, the intake system has been developed through a experiment, namely, the trial and error process. This approach requires very high cost and long time consuming to develop the systm. Recently, FEM and BEM are becoming useful in analysis of the intake system, and the results of analysis are very valid. But because this techniques also require high cost and long analysis time, this technique is generally not practical tool at the early stage of the development. In this study, the software was developed to predict and analyze the acoustic characteristics of the intake system. It was based on the Transfer Matrix Method and operated to analyze a simplified intake system in a personal computer. It can be used early in the design stage of development of the intake system. This study presented a improvement to reduce the level of the intake noise, which modified the specification of the intake system. And the improvement were verified by NIT/SYSNOISE, FE analysis commercial software, and testing a prototype.

• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.55-58
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• 2008

Hydroforming is a forming technology in which a steel tube is set in a die and formed to fit a specified shape by applying hydraulic pressure from inside the tube while also applying force in the tube axial direction (axial feed). In present study, the entire design process chain for an automotive cross-member was simulated and developed using hydroforming technology on high-strength steel. The part design stage required a feasibility study. The process was designed using computer-aided design techniques to confirm the actual hydroformability of the part in detail. The possibility of using hydroformable cross-member parts was examined using cross-sectional analyses, which were essential to ensure the formability of the tube material for each forming step, including pre-bending and hydroforming. The die design stage included all the components of a prototyping tool. Press interference was investigated in terms of geometry and thinning.

• 한국정밀공학회지
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• 제20권8호
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• pp.54-61
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• 2003

The first stage rotating blade of industrial gas turbine is one of the components that is normally run in exposed state at the highest temperature of the combustion gas stream. For this reason superior materials and advanced cooling technology are required to allow higher heat resisting characteristics of the component. The 1st stage blade of a selected commercial gas turbine blade made of directionally solidified Ni-based superalloy has a row of cooling holes on its trailing edge. In most cases, minor cracks have been found at some of the root cooling holes after one cycle operation (24,000 hrs) or even shorter operation time because of the high temperature gradient and the frequently alternating thermal stress. In the repair process, unfortunately, it is usually very difficult to get rid of the damage due to the fact that cracks are initiated at the root cooling hole and propagated deep into the hole. In this study, the feasibility of removing the sidewall cracks in the hole by utilizing EDM drilling has been investigated. Also the criteria of surface integrity for EDM drilling were established to achieve high quality repair as well as machining accuracy.

• 한국정밀공학회지
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• 제16권8호
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• pp.46-52
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• 1999

Large valves for steam turbines of fossil power plants are exposed to a severe mechanical and thermal loading resulting from steam with high pressure and high temperature. Valve casings are designed to withstand such a loading. During the operation of a plant, temperatures at inner and outer surface of the casings are measured and steam flow is controlled so that the measured difference is lower than the maximum allowable value determined in the design stage. In this paper, a method is presented to calculate the maximum allowable temperature difference at the inner and outer surface of valve casings for steam turbines of fossil power plants. The finite element method is used to analyze distribution of temperature and stresses of a casing under the operating condition. Low cycle fatigue and creep rupture are taken into consideration to determine the maximum allowable temperature difference. The method can be usefully applied in the design stage of the large valves for the steam turbines, contributing to safe and reliable operation of the fossil power plants.