• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.1089-1092
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• 2003

This paper has been studied on wafer cleaning and photoresist striping in semiconductor fabrication processes using ozone solved deionized water. In this work, we have developed high concentration ozone generating system and high contact ratio ozone solving system to get high efficiency DIO$_3$. Through this study, we obtained 11% ozone gas concentration, 99.5% of ozone efficiency and 51% of solubility in deionized water.

• Journal of Korean Society for Atmospheric Environment
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• v.27 no.6
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• pp.751-771
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• 2011

Biogenic Volatile Organic Compound (BVOC) emissions are estimated with BEIS3.12 (Biogenic Emissions Inventory System version 3.12) over the Seoul Metropolitan Area (SMA) and then used in CMAQ (Community Multiscale Air Quality) simulations for two high ozone episodes in 2004 and 2007 June. The first- and second-order sensitivity coefficients of ozone to BVOC emissions are estimated with High-order Decoupled Direct Method (HDDM) simulation in order to estimate the influence of BVOC emissions on ozone using the Zero-Out Contribution (ZOC) approach. ZOC analysis shows that relative contribution of BVOC emissions on daily maximum 1-hr ozone is as high as 30% for high ozone days above 100 ppb. However simulated isoprene concentrations were over-estimated by a factor of 2 when compared to the observations at the PAMS (Photochemical Air Monitoring Station) for the 2007 episode. When assumed that actual BVOC emissions are 50% less than estimated, the ZOC of BVOC emissions on daily maximum ozone drops by more than 10 ppb for the episode. The result indicates that uncertainty in BVOC emissions may have significant impact on high ozone prediction in the SMA.

• Journal of Korean Society for Atmospheric Environment
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• v.22 no.3
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• pp.361-371
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• 2006

This study examines ozone episodes occurred during the intensive sampling periods (Jun. 1-30, 2004) in the air of Seoul metropolitan area. During that period, there were 8 events (or days) in which 1 hr averaged ozone concentrations were greater than 100 ppbv. The photochemical analysis of ozone chemistry (i.e., budget and formation and destruction strengths of ozone) was carried out using a photochemical box model. Peaks in diurnal ozone variations during ozone episode periods occurred were concurrent with the sudden change of the slope of $NO_{2}/NO$ ratio, suggesting significant correlation with photochemical reactivity. In addition, the ozone peaks were concurrent with high concentrations of ozone precursors, peroxy radicals of $HO_{2},\;CH_{3}O_{2},\;and\;RO_{2}$. High ozone levels during the ozone episodes are likely to be affected by ozone destruction rate.

• Journal of Environmental Impact Assessment
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• v.12 no.4
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• pp.303-313
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• 2003

This study was carried out to survey the high ozone episode of summertime in Busan. The selected day was July 18, 1999 and August 24, 2001 which recorded exceed to 12ppb/hr at 3 station in Busan simultaneously. In case July 18, 1999, thick cloud and variable wind made weak ozone concentration during morning hour. And increase of ozone concentration by revolution of mixed layer for morning hour did not occur in this case study day. Photochemical reaction by strong radiation after 1100LST made sharp increase rate of ozone concentration(50ppb/hr). In case August 24, 2001, the meteorological condition of this day was not general wind with gradient force, very clear day with less cloud amount, high insolation and sunshine. Dongsamdong, Beomcheondong, Daeyeondong, and Sinpyeongdong had double peak which twice maximum concentration in the early afternoon and late afternoon. Ozone concentration of this day was in inverse proportion to Nitrogen oxide strongly. Ozone concentration exceed to 60ppb/hr occurred at 1400LST, continued to 2300LST.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05d
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• pp.25-28
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• 2003

Ozone is a strong and useful oxidizing gas for the fabrication of oxide thin films. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper an ozone condensation system was evaluated from the viewpoint of an ozone supplier for oxide thin film growth. Ozone was condensed by an adsorption method and the ozone concentration reached 8.5 mol% in 2.5 h after the beginning of the ozone condensation process, indicating high effectiveness of the condensation process. Ozone was continuously desorbed from the silica gel by the negative pressure. We found the decomposition in the ozone concentration negligible if the condensed ozone is transferred from the ozone condensation system to the film growth chamber within a few minutes.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.12
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• pp.591-596
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• 2006

we have been developed on the ultra high concentration ozone generator system which is the core technology in the realization of the semiconductor photoresist strip process using the ozone-vapor chemistry. The proposed ozone generator system has the structure of the surface discharge type which adopt the high purity ceramic dielectric tube. We investigate the performance of the proposed ozone generator system experimentally and the results show that the system has very high ozone concentration characteristics of $19.7[wt%/O_2]$ at the flow rate of $0.3[{\ell}/min]$ of each discharge cell. As a result of the silicon wafer photoresist strip test, we obtained the strip rate of about 400[nm/min] at the ozone concentration of $16[wt%/O_2]$ and flow rate of $8[{\ell}/min]$. So, we confirmed that it's possible to use the proposed high concentration ozone generator system for the ozone-vapor photoresist strip process in the semiconductor and FPD industry.

• Journal of Korean Society for Atmospheric Environment
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• v.13 no.1
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• pp.41-49
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• 1997

Status of photochemical air pollution in the Greater Seoul Area (GSA) between 1990 and 1995 was assessed in terms of frequency distributions, number of days exceeding standards, average concentration and meteorological effects. In Seoul compared with other areas in Korea, daily maximum concentration was higher but average concentration was not so high due to lower daily minimum from April to October. The top 5th percentile was high especially in summer season. Average number of days exceeding 100 ppb at monitoring stations in GSA was highest in 1994, the hottest year, but it was only 4 days a year. Mean meteorological pattern of high ozone days could be summarized as low wind speeds, high temperatures, strong solar radiation, and low precipitation. Westerlies were more frequent on high ozone days and at Pangi station located in the eastside of GSA, both number of high ozone days and average concentration were high. Effect of precursor transport on the rise of ozone concentration was, however, not consistently important on the whole in GSA.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.12
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• pp.579-585
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

• Journal of Environmental Science International
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• v.20 no.11
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• pp.1465-1481
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• 2011

The accuracy of ozone sensitivity coefficients estimated with HDDM (High-order Decoupled Direct Method) can vary depending on the $NO_x$ (Nitrogen Oxides) and VOC (Volatile Organic Compound) conditions. In order to evaluate the applicability of HDDM over the Seoul Metropolitan Area (SMA) during a high ozone episode in 2007 June, we compare BFM (Brute Force Method) and HDDM in terms of the $1^{st}$-order ozone sensitivity coefficient to explain ozone change in response to changes in NOx and VOC emissions, and the $2^{nd}$-order ozone sensitivity coefficient to represent nonlinear response of ozone to the emission changes. BFM and HDDM estimate comparable ozone sensitivity coefficients, exhibiting similar spatial and temporal variations over the SMAduring the episode. NME (Normalized Mean Error) between BFM and HDDM for the episode average $1^{st}$- and $2^{nd}$-order ozone sensitivity coefficients to NOx and VOC emissions are less than 3% and 9%, respectively. For the daily comparison, NME for the $1^{st}$- and $2^{nd}$-order ozone sensitivity coefficients are less than 4% ($R^2$ > 0.96) and 15% ($R^2$ > 0.90), respectively. Under the emission conditions used in this study, two methods show negative episode average $1^{st}$-order ozone sensitivity coefficient to $NO_x$ emissions over the core SMA. The $2^{nd}$-order ozone sensitivity coefficient to $NO_x$ emissions leads ozone to respond muchnonlinear to the reduction in $NO_x$ emissions over Seoul. Nonlinear ozone response to reduction in VOC emissions is mitigated due to the $2^{nd}$-order ozone sensitivity coefficient which is much smaller than the $1^{st}$-order ozone sensitivity coefficient to the emissions in the magnitude.

• Journal of Environmental Impact Assessment
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• v.8 no.2
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• pp.21-29
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• 1999

This study was conducted to investigate the characteristics of surface ozone concentration and occurrence of high ozone concentration using hourly ozone and meteorological data of 1997~1998 in Pusan coastal area. Monthly mean ozone concentration was highest in Spring(35.4ppb) and lowest in Winter(22.2ppb). Relative standard deviation indicating clearness of observation site was 0.42 that is similar to urban area. The diurnal variation of ozone concentration of Dongsamdong showed maximum at 15~16LST and minimum 07~08LST that typical pattern of ozone concentration. In ozone episode period(May 18~23, 1998), diurnal change of ozone concentration was very high, and ozone concentration was related to meteorological parameters such as temperature, relative humidity, wind speed, cloud amount and radiation on a horizontal surface.