• 대한전자공학회논문지SD
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• 제41권12호
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• pp.13-19
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• 2004

반도체 또는 평판디스플레이 제조에 있어 노광공정 후의 PR(photo-resist) 제거 공정으로서 기존의 황산기반 용액을 대체하는 고농도 오존 수 생성 기술에 대한 연구를 수행하였다. 세라믹 연면방전구조의 오존발생장치를 개발하여, 0.5［ℓ/min］의 산소 유량에서 최대 12［wt%］이상의 오존가스 농도를 얻었으며, 이를 고농도로 물과 혼합하기 위한 고효율 오존접촉장치를 개발하였다. 오존 수 생성 실험 결과, 오존가스 10［wt%］에서 80［ppm］이상의 오존 수 농도를 달성하였으며, 70［ppm］의 오존 수에서 PR 제거율 147［nm/min］의 양호한 결과를 얻었다.

• 한국전기전자재료학회논문지
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• 제32권4호
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• pp.320-326
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• 2019

Recently, the application of atmospheric plasma technology in air filtration is increasing. Sterilization by an atmospheric plasma device is very effective. However, ozone gas, which is generated during atmospheric plasma formation, poses a hazard to human health. To reduce the ozone gas during plasma discharge, we fabricated a one-plate hybrid plasma discharge device with a heating element, which can decompose ozone gas effectively by a simple heating action. In this study, we evaluated the plasma discharge characteristics and ozone concentrations with various Ar flow rates and temperatures. With increasing Ar gas flow rate, the ozone concentration and spectrum intensity increased till an Ar gas flow rate of 60 sccm, and decreased thereafter. When discharged in high temperature, the ozone concentration and spectrum intensity decreased. Further, to evaluate the state of the treated surface under various plasma discharge and heating conditions, we measured the variation in the contact angles on the surface. Regardless of the temperature, the contact angle increased with increasing discharge voltage. However, the contact angle increased when discharged at high temperature.

• 조명전기설비학회논문지
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• 제16권6호
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• pp.95-101
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• 2002

고농도의 오존발생에 영향을 주는 많은 변수들이 존재한다. 이러한 변수들은 오존발생장치 설계시 매우 중요한 요소가 되고 설계전에 반드시 고려되어야 할 것들이다. 오존발생장치 설계 후에도 고농도 오존발생에 크게 영향을 주는 주변변수들이 있다. 본 연구에서는 오존발생에 영향을 주는 많은 주변변수들중에서 입력산소가스의 유량과 여기에 첨가되는 첨가가스가 고농도의 오존발생에 미치는 영향을 조사하였다. 결과적으로, 입력산소가스의 유량을0.75[LPM］～2.00[LPM］으로 변화시키면서 오존농도를 측정한 결과 1.25［LPM］에서 71145［ppm］의 최대오존발생량을 보여주었다. 입력산소가스에 첨가되는 질소가스의 유량을 0.0［vol%］～6.4［vol%］으로 변화시켜가면서 발생되는 오존농도를 측정한 결과 첨가되는 질소가스량이 0.8［vol%］인 경우 최대 73135［ppm]의 오존을 얻을 수 있었다. 이것은 순수산소만을 입력가스로 사용했을 때보다 최대오존발생량이 3［%］가량 증가한 결과이다. 입력산소가스에 첨가되는 아르곤가스의 유량을 0.0[vol%］～6.4[vol％］으로 변화시켜가면서 발생되는 오존농도를 측정한 결과 첨가되는 아르곤가스량이 0.8［vol%］인 경우 최대 67288［ppm］의 오존을 얻을 수 있었다.

• 한국대기환경학회지
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• 제23권3호
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• pp.364-372
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• 2007

The ozone concentration is one of the important environmental issue for measurement of the atmospheric condition of the country. In this article, two time series ARE models, the direct ARE model and applied ARE model have been considered for analyzing the ozone data at southern part of the Gyeonggi-Do, Pyeongtaek, Osan and Suwon monitoring sites in Korea. The result shows that the direct ARE model is better suited for describing the ozone concentration in all three sites. In both of the ARE models, eight meteorological variables and four pollution variables are used as the explanatory variables. Also the high level of ozone data (over 80 ppb) have been analyzed at the Pyeongtaek, Osan and Suwon monitoring sites.

• 환경위생공학
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• 제18권4호
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• pp.45-51
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• 2003

This study was conducted to remove the color in dyeing wastewater by ozone oxidation process, and the results were summarized as follows ; The 18.3％ of BOD and 56.3％ TOC were removed as decreasing with pH 1 in dyeing wastewater, containing the polyester reducing process. It showed that terephthalic acid was precipitated at low pH. The color of dyeing wastewater was removed by the first order reaction, and the reaction rate constants at pH 3, 7, 12 were investigated $0.234{\;}min^{-1},{\;}0.215{\;}min^{-1}{\;}and{\;}0.201{\;}min^{-1}$ respectively. It showed that color was more effectively removed with direct reaction of ozone than radical reaction(non-direct reaction). As increasing of the water temperature, the reaction rate constants were increased slightly. It indicated that activity of ozone was improved at high water temperature.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.1230-1233
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• 2004

Ozone is useful oxidizing gas for the fabrication of oxide thin films. Accordingly researching on oxidizing gas is required. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper oxidation property was evaluated relation between oxide gas pressure and inverse temperature(CuO reaction). The obtained condition was formulated by the fabrication of Cu metal thin film by co-deposition using the ion Beam Sputtering method. Because the CuO phase peak appeared at the XRD evaluation of the CuO thin film using ozone gas, this study has succeeded in the fabrication of the CuO phase at $825^{\circ}C$.

• 대한전기학회논문지:시스템및제어부문D
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• 제52권5호
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• pp.226-226
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• 2003

When an excessive voltage is applied to the discharge gap in ozone generator, the discharge room temperature becomes higher. As is well own, the efficiency of the ozone generation is deteriorated by the excessively hot temperature because of the decomposition reaction. In this paper, the simple small capacity ozone generating controller has been introduced, which provides effective and stable silent discharge characteristics over wide range input power. The proposed power controller has two important advantages, which imply that the production rate of ozone can be controlled linearly according to the delivered power and the surplus energy is recovered to the source. The experimental results are given to verify the performance of the pre proposed controller.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권5호
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• pp.226-230
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• 2003

When an excessive voltage is applied to the discharge gap in ozone generator, the discharge room temperature becomes higher. As is well own, the efficiency of the ozone generation is deteriorated by the excessively hot temperature because of the decomposition reaction. In this paper, the simple small capacity ozone generating controller has been introduced, which provides effective and stable silent discharge characteristics over wide range input power. The proposed power controller has two important advantages, which imply that the production rate of ozone can be controlled linearly according to the delivered power and the surplus energy is recovered to the source. The experimental results are given to verify the performance of the pre proposed controller.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 제6회 학술대회 논문집 일렉트렛트 및 응용기술연구회
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• pp.35-38
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• 2004

Ozone is useful oxidizing gas for the fabrication of oxide thin films. Accordingly researching on oxidizing gas is required. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper oxidation property was evaluated relation between oxide gas pressure and inverse temperature(CuO reaction). The obtained condition was formulated by the fabrication of Cu metal thin film by co-deposition using the Ion Beam Sputtering method. Because the CuO phase peak appeared at the XRD evaluation of the CuO thin film using ozone gas, this study has succeeded in the fabrication of the CuO phase at $825^{\circ}C$.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1837-1839
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• 2003

Recently deep interests have been paid on the effective generation of ozone, which has been widely used for water treatment, deoderization, color removal and chemical processing of exhausted smoke. The silent discharge reaction has been proposed as the most effective in the many ozone generation methods by electric discharge, because silent discharge excel others in the condition of high ozone generation yield and low power consumption. In this paper, ozone water generated system measure with silent discharge characteristics and pulsed power supply.