• International journal of advanced smart convergence
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• v.6 no.4
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• pp.1-8
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• 2017

In this work, the effects of fairly influential factors on performance of vacuum system, such as constant pressure and outgassing effect were simulated to propose the optimum design factors. Outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for vacuum systems were suggested based on the simulation results. And, the effects of throttle valve applications on vacuum characteristics were also simulated to obtain the optimum design model of variable conductance on high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure. Simulation results were plotted as pump-down curve of chamber and variable conductance of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.4
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• pp.287-292
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• 2010

Effect of conductance factors on performance of vacuum system was simulated for optimum design of vacuum system. In this investigation, the feasibility of modeling mechanism for VacSim$^{Multi}$ simulator was proposed. Application specific design of vacuum system is required to meet the particular process conditions for various industrial implementations of vacuum equipments. Geometry and length, diameter of exhaust pipeline were modeled as simulation modeling variables for conductance effects. Series vacuum system was modeled and simulated with varied dimensions and structures of exhaust pipeline. Variation of pipeline diameter showed the more significant effects on vacuum characteristics than that of pipeline length variations. It was also observed that the aperture structure of pipeline had the superior vacuum characteristics among the modeled systems.

• Journal of the Korean Vacuum Society
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• v.19 no.4
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• pp.265-274
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• 2010

The excellent performance and stability of dry-vacuum-pump is essential to create and maintain high quality vacuum condition in semiconductor and display process. The development of dry-vacuum-pump needs systematic consideration for target application as well as delicate mechanical issues. Here, we introduce a development procedures of dry-vacuum-pump for semiconductor-process-class.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.6
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• pp.449-457
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• 2011

Effect of pump combinations on the vacuum characteristics of vacuum system was simulated for optimum design of system. In this investigation, the feasibility of modelling mechanism for VacSimMulti simulator was proposed. Simulation results of various pumping combinations showed the possibilities and reliabilities of simulation for the performance of vacuum system in specific semiconductor processing. Simulation of roughing pump presented the expected pumping behaviors based on commercial specifications of employed pumps. Application of booster pump exhibited the high pumping efficiency for middle vacuum range. Combinations of optimum backing pump for diffusion and turbo vacuum system were obtained. And, the predictable characteristics of process application of both simulated systems were also acquired.

• Progress in Superconductivity and Cryogenics
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• v.20 no.4
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• pp.11-15
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• 2018

Torque tubes in High Temperature Superconducting (HTS) motor transfer torque from superconducting field winding rotor to the room temperature shaft. It should have minimum heat conduction property for minimizing the load on cryo-refrigerator. Generally, these torque tubes are made with stainless steel material because of high strength, very low outgassing and low thermal contraction properties at cryogenic temperatures and vacuum conditions. With recent developments in composite materials, these torque tubes could be made of composites such as Kevlar and S-Glass, which have the required properties like high strength and low thermal conductivity at cryogenic temperatures, but with a reduced weight. Development and testing of torque tubes made of these composites for HTS motor are taken up at Bharat Heavy Electricals Limited (BHEL), Hyderabad in collaboration with Central Institute of Plastics and Engineering Technology (CIPET), Chennai and Indian Institute of Technology (IIT), Kharagpur. As these materials are subjected to vacuum, it is important to measure their outgassing rates under vacuum conditions before manufacturing prototype torque tubes. The present study focusses on the outgassing characteristics of Kevlar and S-Glass, using an Outgassing Measurement System (OMS), developed at IIT Kharagpur. The OMS facility works under vacuum environment, in which the test samples are exposed to vacuum conditions over a sufficient period of time. The outgassing measurements for the composite samples were obtained using pressure-rise technique. These studies are useful to quantify the outgassing rate of composite materials under vacuum conditions and to suggest them for manufacturing composite torque tubes used in HTS motors.

• Analytical Science and Technology
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• v.17 no.5
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• pp.375-380
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• 2004

Kinetics have been studied by high vacuum and high pressure apparatus under various temperatures and pressures for the nucleophilic substitution reaction. Rate constants, activated parameters and Hammett ${\rho}$-values are determined. The values of ${\Delta}V^{\ddag}$, ${\Delta}{\beta}^{\ddag}$ and ${\Delta}S^{\ddag}$ are all negative. The Hammett ${\rho}$-values are negative for the nucleophile (${\rho}x$) over the pressure range studied. Consequently the rate constant increases as the pressure increases, and some decrease in vacuum. So these reactions proceed in typical $S_N2$ reaction mechanism.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.11a
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• pp.45-48
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• 2007

Vacuum facility is required for high altitude space environment test to develop small thruster. We, at Chungnam National University, developed vacuum test facility up to $10^{-5}$ torr to simulate 100${\sim}$120 km altitude environment. In this paper, we present some preliminary performance test results.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.04b
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• pp.60-63
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• 2004

Recently, carbon nanotubes(CNTs) have been demonstrated to possess remarkable mechanical and electronic properties, in particular, for field emission applications. Its high aspect ratio and extremely small diameter, hollowness, together with high mechanical strength and high chemical stability, are advantages for use in field emitter. In this paper, we demonstrate electrical discharge properties from carbon nanotube cathode electrodes to use as an emitter electrode of vacuum gauges. Vertically aligned $2{\times}2mm^2$ CNT arrays on the silicon substrate were synthesized by the thermal CVD method on Fe catalytic metal, and a glass patterning by the sand blast method and the silicon/glass anodic bonding processes were applied to make samples with 2 electrodes. The field emission was examined under the vacuum range of $10^{-3}$ Torr.

• Proceedings of the KIEE Conference
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• 2004.04a
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• pp.18-20
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• 2004

This paper formulates the principle of the permanent magnetic actuator (PMA) and its dynamic characteristic calculation applicable to High Voltage Vacuum Interrupter (38kV/31.5kA). The new type of PMA is need to apply to High Voltage Vacuum Interrupter for large stroke length and contact force at interrupter. Consequently this paper describes the ideal matching of the new type of PMA mechanism with the characteristics required to operate successfully, reliably and efficiently a High Voltage Vacuum Interrupter.

• Journal of Powder Materials
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• v.14 no.5
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• pp.315-319
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• 2007

Pure WC or WC with low Co concentration less than 0.5 wt.% is studied to fabricate high density WC/Co cemented carbide using vacuum sintering and post HIP process. Considering the high melting point of WC, it is difficult to consolidate it without the use of Co as binder. In this study, the effect of lower Co addition on the microstructure and mechanical properties evolution of WC/CO was investigated. By HIP process after vacuum sintering, hardness and density was sharply increased. The hardness values was $2,800kgf/mm^2$ using binderless WC.