• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.1061-1064
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• 1997

Micro injection molding technology is very important fiw mass product of micro structures or micro parts. And, it is so difficult that the molding technology of micro pole or thin wall(barrier rib) structures with high aspect ratio. In this stud). \vc intend to research on the basic technology of micro wall structure part:< with high aspect ratio by the inject~on moldins method. The mold for esperimenrs with micro multi-square structures was made by L, I(;A process. One square polc's size is 157 157pm. height 50011111. And the distance of each poles is 5011n1. 7'hus. molding products will be for~nctl like as the net structure with thin wall of about 50pn thickness.(aspect ratio 10) Ihrough the e~lxriment. \be obtained the prociuctr of micro multi-square slructure with bout 37.000 cell per a piece. 'Ihe micro injection molding process technolog for thin wall by multi-square structure mold was analy~cd.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.85-88
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• 1995

Recently, the micro mold maching techining technology is developed by means of the mechanical and high energy beam process. It is possible to make the micro structure mold with high aspect ratio by the LIGA technology. This mode is used for mass production of plastic parts by the micro injection molding method. In this study, we intend to research on the basic technology of micro injection molding. As the result, we developed the injection molding technology for small column plastic parts which diameter is 500 .mu. m and 200 .mu. m respectively with wbout aspect ratio 20.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.9 s.186
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• pp.164-173
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• 2006

The cooling capacity of a micro-heat pipe is mainly governed by the magnitude of capillary pressure induced in the wick structure. For microchannel wicks, a higher capillary pressure is achievable for narrower and deeper channels. In this study, a metallic micro-heat pipe adopting high-aspect-ratio microchannel wicks is fabricated. Micromachining of high-aspect-ratio microchannels is done using the laser-induced wet etching technique in which a focused laser beam irradiates the workpiece placed in a liquid etchant along a desired channel pattern. Because of the direct writing characteristic of the laser-induced wet etching method, no mask is necessary and the fabrication procedure is relatively simple. Deep microchannels of an aspect ratio close to 10 can be readily fabricated with little heat damage of the workpiece. The laser-induced wet etching process for the fabrication of high-aspect-ratio microchannels in 0.5mm thick stainless steel foil is presented in detail. The shape and size variations of microchannels with respect to the process variables, such as laser power, scanning speed, number of scans, and etchant concentration are closely examined. Also, the fabrication of a flat micro-heat pipe based on the high-aspect-ratio microchannels is demonstrated.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.12
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• pp.1272-1278
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• 2012

The micro barrier rip array structures have been applied in a variety of areas including as privacy films, micro heat sinks, touch panel and optical waveguide. The increased aspect ratio (AR) of barrier rip array structures is required in order to increase the efficiency and performance of these products. There are several problems such as burr, defect of surface roughness and deformation and breakage of barrier rip structure with machining high-aspect ratio micro barrier rip array structure using orthogonal cutting method. It is essential to develop technological methods to solve these problems. The optimum machining conditions for machining micro barrier rip array structures having high-aspect ratio were determined according to lengths ($200{\mu}m$ and $600{\mu}m$) and shape angles ($2.89^{\circ}$ and $0^{\circ}$) of diamond tool, overlapped cutting depths ($5{\mu}m$ and $10{\mu}m$), feed rates (100 mm/s) and three machining processes. Based on the optimum machining conditions, micro barrier rib array structures having aspect ratio 30 was machined in this study.

• Proceedings of the KSME Conference
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• 2001.06e
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• pp.169-174
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• 2001

This paper reports on the development of high aspect ratio structure and 3-D integrated process for MEMS-based micro gas turbines. To manufacture high aspect ratio structures, Deep Reactive Ion Etching (DRIE) process have been developed and optimized. Specially, in this study, structures with aspect ratios greater than 10 were fabricated. Also, wafer direct bonding and Infra-Red (IR) camera bonding inspection systems have been developed. Moreover, using glass/silicon wafer direct bonding, we optimized the 3-D integrated process.

• Design & Manufacturing
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• v.11 no.3
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• pp.1-7
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• 2017

The fabrication process of micro pattern structure with high precision and high aspect ratio using powder injection molding (PIM) is developed. In the PIM process, the metal powder is mixed with the binder systems and the mixture is injected into the metal mold. The injection molded green parts are debinded and sintered to reach final shape and properties. In this method, the optimization of physical properties such as fluidity and strength of the binder system is essential for perfect filling the high aspect ratio micro-pattern. For this purpose, the correlation between the properties of the binder system and feedstock and ${\mu}-PIM$ process was investigated, and a binder system with low viscosity at low temperature(about $110^{\circ}C$) and high strength after cooling was investigated and applied. Employing this process, high precision parts with line type micro pattern structure which has pattern size $160{\mu}m$ and aspect ratio more than 2 can be manufactured.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.848-853
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• 2001

Electrostatic actuation was adopted for ease of fabrication. We proposed a new driving scheme that uses the vector sum of force generated by comb-finger and by parallel plate. The moving and fixed electrodes are arranged to maximize the driving force. In this paper, an electrostatic field analysis is performed by Maxwell analysis tool for micro actuators. From the analysis, a comb-parallel type micro-actuator with 4${\mu}{\textrm}{m}$ width, 6${\mu}{\textrm}{m}$ overlap and 45${\mu}{\textrm}{m}$ height could be designed. In order to compare the new type of actuator with the conventional comb type of actuator, we arranged that both types have the same area and the same number of actuators. To make a high aspect ratio structure, we are developing fabrication process using SU-8 and electro-plating.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.8
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• pp.601-604
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• 2010

In this study, the piezoelectric energy harvester was investigated employing the pillar structure with the diameter size of 50~500 um. Usually, the aspect ratio between the height and diameter was related with the piezoelectric performance. High aspect ratio was showed the low electric noise and high piezoelectric properties than low aspect ratio. Therefore, we have selected the Su-8 photo-resist and modified lithography process to manufacture the pillar structure with height above the 250 ${\mu}m$. In this presentation, we will report the process and properties of micro pillar structure based on the PMN-PZT (Pb$(Mg_{1/3}Nb_{2/3})O_3$-PbZrTiO$_3$) materials.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1175-1178
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• 2005

Brittle materials, especially single-crystal silicon wafer, are widely used for sensors, IC industry, and MEMS applications. e general machining process of crack easy materials is by chemical agents, but it is hazardous and time consuming. Also, it is difficult to get high aspect ratio micro structure. As an alternative tool, an AJM(Abrasive jet machining) is promising method in terms of high aspect ratio and production cost. In this study, to get more precise detail compared to general AJM, photo polymer mask, SU-8, used in photolithography was applied in AJM. Process parameters such as abrasive diameter, air pressure, nozzle diameter, flow rate of abrasive in AJM and a variety of conditions in spin coating were decided. Finally, micro channel and mixer was fabricated to see the efficiency of the AJM with photo polymer mask.

• Design & Manufacturing
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• v.11 no.3
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• pp.29-34
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• 2017

Increased demand for parts with micro-pattern structure made of metals, ceramics, and composites in various fields such as medical ultrasonic sensors, CT collimators, and ultra-small actuator parts. Micro powder injection molding (PIM) is a technology for manufacturing micro size, high volume, complex, precision, net-shape components from either metal or ceramic powder. In the present study, a standard mold with a variable insert core capable of producing various micro patterns was investigated. An injection molding test was performed on a standard mold using a line type micro-pattern core having an aspect ratio of 2, a slenderness ratio of 70, a pattern size of $200{\mu}m$, and a pattern spacing of $150{\mu}m$. During the filling process, the deformation of the mold with large aspect ratio and slenderness ratio was analyzed by the experiment and the numerical simulation according to the position of the gate. We proposed a mold structure that minimizes mold deformation by gate modification and enables uniform pattern filling behavior.