• Title/Summary/Keyword: HfSiO

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Petrology of the Bokyeongsa Volcanics in the northeast Gyeongsang Basin (경상분지 동북부 보경사화산암체의 암석학적 연구)

  • Yun, Sung-Hyo;Lee, Moon-Won;Koh, Jeong-Seon;Kim, Young-La;Han, Mi-Kyeong
    • Journal of the Korean earth science society
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    • v.21 no.5
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    • pp.595-610
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    • 2000
  • This study has been designed to elucidate the petrography and geochemical characteristics of the volcanic rocks and focused on petrogenesis and tectonic environment of the Bokyeongsa volcanics in the northeast Gyeongsang Basin. The Bokyeongsa volcanics consist of the Naeyeonsan tuff which include rock fragment plagioclase, quartz and hornblende and pumice showing welded structures, and felsite. According to the petrochemical data, the Naeyeonsan tuff and felsite are in the range of 68${\sim}$71wt% and 77wt% SiO$_2$ content respectively. The Naeyeonsan tuff belongs to dacite/rhyodacite, and felsite to rhyolite. These volcanics rocks belong to the calc-alkaline rock series on the TAS diagram and the AFM diagram. The variations of major elements of the volcanic rocks show that contene of TiO$_2$, Al$_2$ O$_3$, FeO$^T$, MnO, MgO, CaO are inversely proportional to those of SiO$_2$, but contents of K$_2$O are positively. They represent differentiation trend of calc-alkaline rocks series. In spider disgram of MORB-normalized trace element partterns, contents of K, Rb, Th and Ta are relatively high, but those of Nb, Zr, Hf, Ti, Y and Yb are nearly similar to MORB. In the chondrite-normalized REE patterns, light REEs are more enriched than heavy REEs. The trace element composition and REE patterns suggest that they are typical island-arc calc-akaline volcanic rocks formed in the tectonomagmatic environment of subduction zone under continental margin.

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Analysis on Oxidation of Porous Silica Obtained from Thermal Oxidation of Porous Silicon (다공성 실리콘의 산화로부터 얻은 다공성 실리카의 산화에 대한 분석)

  • Koh, Young-Dae
    • Journal of Integrative Natural Science
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    • v.3 no.3
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    • pp.153-156
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    • 2010
  • Oxidation behaviors of porous silicon were investigated by the measurement of area of $SiO_2$ vibrational peaks in FT-IR spectra during thermal oxidation of porous silicon at corresponding temperatures. Visible photoluminescent porous silicon samples were obtained from an electrochemical etch of n-type silicon of resistivity between 1-10 ${\Omega}/cm$. The etching solution was prepared by adding an equal volume of pure ethanol to an aqueous solution of HF. The porous silicon was illuminated with a 300 W tungsten lamp for the duration of etch. Etching was carried out as a two-electrode galvanostatic procedure at applied current density of 200 $mA/cm^2$ for 5 min. The porosity of samples prepared was about 80%. After formation of porous silicon, the samples were thermally oxidized at $100^{\circ}C$, $200^{\circ}C$, $300^{\circ}C$, and $400^{\circ}C$, respectively. The growth rate of $SiO_2$ layer of porous silicon was investigated by using FT-IR spectroscopy. The effect of oxidation of porous silicon was presented.

Reliability Characteristics of La-doped High-k/Metal Gate nMOSFETs

  • Kang, C.Y.;Choi, R.;Lee, B.H.;Jammy, R.
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.9 no.3
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    • pp.166-173
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    • 2009
  • The reliability of hafnium oxide gate dielectrics incorporating lanthanum (La) is investigated. nMOSFETs with metal/La-doped high-k dielectric stack show lower $V_{th}$ and $I_{gate}$, which is attributed to the dipole formation at the high-k/$SiO_2$ interface. The reliability results well correlate with the dipole model. Due to lower trapping efficiency, the La-doping of the high-k gate stacks can provide better PBTI immunity, as well as lower charge trapping compared to the control HfSiO stacks. While the devices with La show better immunity to positive bias temperature instability (PBTI) under normal operating conditions, the threshold voltage shift (${\Delta}V_{th}$) at high field PBTI is significant. The results of a transconductance shift (${\Delta}G_m$) that traps are easily generated during high field stress because the La weakens atomic bonding in the interface layer.

Frequency effect of TEOS oxide layer in dual-frequency capacitively coupled CH2F2/C4F8/O2/Ar plasma

  • Lee, J.H.;Kwon, B.S.;Lee, N.E.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.284-284
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    • 2011
  • Recently, the increasing degree of device integration in the fabrication of Si semiconductor devices, etching processes of nano-scale materials and high aspect-ratio (HAR) structures become more important. Due to this reason, etch selectivity control during etching of HAR contact holes and trenches is very important. In this study, The etch selectivity and etch rate of TEOS oxide layer using ACL (amorphous carbon layer) mask are investigated various process parameters in CH2F2/C4F8/O2/Ar plasma during etching TEOS oxide layer using ArF/BARC/SiOx/ACL multilevel resist (MLR) structures. The deformation and etch characteristics of TEOS oxide layer using ACL hard mask was investigated in a dual-frequency superimposed capacitively coupled plasma (DFS-CCP) etcher by different fHF/ fLF combinations by varying the CH2F2/ C4F8 gas flow ratio plasmas. The etch characteristics were measured by on scanning electron microscopy (SEM) And X-ray photoelectron spectroscopy (XPS) analyses and Fourier transform infrared spectroscopy (FT-IR). A process window for very high selective etching of TEOS oxide using ACL mask could be determined by controlling the process parameters and in turn degree of polymerization. Mechanisms for high etch selectivity will discussed in detail.

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Fabrication of Mullite Short Fibers from Coal Fly Ash (석탄회로부터 뮬라이트 단섬유의 제조)

  • Kim, Byung-Moon;Park, Young-Min;Lyu, Seung-Woo;Yoon, Seog-Young;Park, Hong-Chae
    • Journal of the Korean Ceramic Society
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    • v.43 no.4 s.287
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    • pp.235-241
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    • 2006
  • Mullite short fibers have been fabricated by adapting the Kneading-Drying-Calcination (KDC) process and characterized. The effect of the addition of foaming agent and calcination temperature on the formation of mullite fibers from coal fly ash, was examined. In the present work, ammonium alum $NH_4Al(SO_4)_2\;12H_2O$ synthesized trom coal fly ash and sodium phosphate $Na_2HPO_4\;2H_2O$ were used as foaming agents. After calcination at $1300^{\circ}C$ for 10 h and then etching with 20% HF solution at $50^{\circ}C$ for 5 h using a microwave heating source, the alumina-deficient $(AI_2O_3/SiO_2$ = 1.13, molar ratio) orthorhombic mullite fibers with a width of ${\sim}0.8mm$ (aspect ratio >30), were prepared from the coal fly ash with $AI_2O_3/SiO_2$ = 0.32, molar ratio by the addition of $NH_4AI(SO_4)_2\;12H_2O$, and with further addition of 2 wt% sodium phosphate. The excessive addition of sodium phosphate rather decreased the formation of mullite fibers, possibly due to the large amount of liquid phase prior to mullitization reaction.

The Blue and Red Luminescences from Ambient Air Aged Porous Silicon

  • Chang, S.S;Yoon, S.O;Choi, G.J;Kawakami, Y;Sakai, A
    • The Korean Journal of Ceramics
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    • v.4 no.1
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    • pp.28-32
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    • 1998
  • This paper reports on photoluminescence (PL), luminescence decay curves, and compositional analysis of porous silicon(PS) which is aged under air ambient by Fourier transform infrared vibrational spectroscopy (FTIR) and by Auger electron spectroscopy (AES). Porous silicos which has been aged under air ambient yields two PL band structures, i.e. blue/violet PL and red PL. The evolution of a blue/violet band is pronounced, especially for thin PS film which is prepared in dilute HF solution. The blue/violet PL band has been observed initially to increrase rapidly with aging, then saturated with further atmospheric aging. The ambient air aged PS exhibits a fast decay time of sub-nanosecond at room temperature and shows appreciably faster decay time than that at 20K. Atmospheric aging of this thin blue/violet luminescing PS yield non-stoichiometric oxide judging from the vibrational spectra of Si-O and AES analysis.

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On-Line music score recognition by DPmatching (DP매칭에 의한 On-Line 악보인식)

  • 구상훈;이병선;김수경;이은주
    • Proceedings of the Korea Society of Information Technology Applications Conference
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    • 2002.11a
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    • pp.502-511
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    • 2002
  • 컴퓨터의 기술적 발전은 사회 여러 분야에 막대한 영향을 끼쳤다. 그중 악보 인식분야에도 커다란 영향을 주었다 그러나, On-line 상에서 그린 악보를 실시간으로 정형화된 악보형태로 변환하는 처리에 대한 연구가 미흡하여 이에 대한 연구가 필요하다. 본 논문에서는 실시간으로 악보를 인식하고, 사용자의 편의를 도모하기 위해 DP(Dynamic Programming) 매칭법을 이용한 On-Line 악보인식에 관한 방법을 제안하였다. 본 연구에서는 실시간으로 입력되는 악상기호를 인식하기 위해, 가장 유효한 정보인 악상 기호내의 방향, x, y 좌표를 이용하여 벡터형태로 추출한 후 음표와 비음표(쉼표, 기타기호)의 두개의 그룹으로 나누어진 표준패턴과의 DP매칭을 통해 인식한다. 먼저 tablet을 통해 실시간으로 악상 기호를 입력할 때 생기는 x, y좌표를 이용하여, 펜의 움직임에 대한 16방향 부호화를 수행한다. 음표와 비음표를 구분하기 위한 시간을 줄이고자 16방향 부호화를 적용하치 않고 사사분면부호화를 적용한다. 음표를 약식으로 그릴 경우 음표 머리에 해당하는 부분의 좌표는 삼사분면에 분포하고, 폐곡선의 음표일 경우에는 좌표가 사사분면에 고르게 나타난다. 폐곡선을 제외한 음표의 머리는 폐곡선과 같은 조건이면서 입력받은 y좌표값들 중에서 최소값과 최대값을 구한 다음 2로 나눈 값을 지나는 y좌표의 개수가 임의의 임계값 이상이면 음표로 판단한다. 위 조건을 만족하지 않을 경우 비음표로 취급한다. 음표와 비음표를 결정한 다음, 입력패턴과 표준패턴과의 DP매칭을 통하여 벌점을 구한다. 그리고 경로탐색을 통해 벌점에 대한 각각의 합계를 구해 최소값을 악상기호로 인식 하였다. 실험결과, 표준패턴을 음표와 비음표의 두개의 그룹으로 나누어 인식함으로써 DP 매칭의 처리 속도를 개선시켰고, 국소적인 변형이 있는 패턴과 특징의 수가 다른 패턴의 경우에도 좋은 인식률을 얻었다.r interferon alfa concentrated solution can be established according to the monograph of EP suggesting the revision of Minimum requirements for biological productss of e-procurement, e-placement, e-payment are also investigated.. monocytogenes, E. coli 및 S. enteritidis에 대한 키토산의 최소저해농도는 각각 0.1461 mg/mL, 0.2419 mg/mL, 0.0980 mg/mL 및 0.0490 mg/mL로 측정되었다. 또한 2%(v/v) 초산 자체의 최소저해농도를 측정한 결과, B. cereus, L. mosocytogenes, E. eoli에 대해서는 control과 비교시 유의적인 항균효과는 나타나지 않았다. 반면에 S. enteritidis의 경우는 배양시간 4시간까지는 항균활성을 나타내었지만, 8시간 이후부터는 S. enteritidis의 성장이 control 보다 높아져 배양시간 20시간에서는 control 보다 약 2배 이상 균주의 성장을 촉진시켰다.차에 따른 개별화 학습을 가능하게 할 뿐만 아니라 능동적인 참여를 유도하여 학습효율을 높일 수 있을 것으로 기대된다.향은 패션마케팅의 정의와 적용범위를 축소시킬 수 있는 위험을 내재한 것으로 보여진다. 그런가 하면, 많이 다루어진 주제라 할지라도 개념이나 용어가 통일되지 않고 사용되며 검증되어 통용되는 측정도구의 부재로 인하여 연구결과의 축적이 미비한 상태이다. 따라서, 이에 대한 재고와 새로운 방향 모색이 필요하다고 사료된다.로 사료되며, 임신관련 cytokine에 대한 다양한 연구가 요구되고 있다.₂/Hf(Variable)/Si 계에서 HfO₂ 박막이 Si 기판위에 직접 증착되면, 순수 HfO₂ 박막의

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Geochemical Characteristics of Stream Sediments in the Konyang Area (곤양지역 하상퇴적물에 대한 지구화학적 특성)

  • Park Yaung-Seog;Park Dae-Woo
    • Economic and Environmental Geology
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    • v.39 no.3 s.178
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    • pp.329-342
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    • 2006
  • The purpose of this study is to determine the geochemical characteristics for the stream sediments in the Konyang area. So we can estimate the environment contamination and understand geochemical disaster. We collect the stream sediments samples by wet sieving along the primary channels and slowly dry the collected samples in the laboratory and grind to pass a 200mesh using an alumina mortar and pestle for chemical analysis. Mineralogy, major, trace and rare earth elements are determined by XRD, XRE, ICP-AES and NAA analysis methods. For geochemical characteristics on the geological groups of stream sediments, the studied area was grouped into quartz porphyry area, sedimentary rock area, anorthosite area and gneiss area. Contents of major elements for the stream sediments in the Konyang area were $SiO_2\;41.86{\sim}76.74\;wt.%,\;Al_{2}O_{3}\;9.92{\sim}30.00\;wt.%,\;Fe_{2}O_{3}\;2.74{\sim}12.68\;wt.%,\;CaO\;0.22{\sim}3.31\;wt.%,\;MgO\;0.34{\sim}3.97\;wt.%,\;K_{2}O\;0.75{\sim}0.93\;wt.%,\;Na_{2}O\;0.25{\sim}1.92\;wt.%,\;TiO_{2}\;0.40{\sim}3.00\;wt.%,\;MnO\;0.03{\sim}0.21\;wt.%,\;P_{2}O_{5}\;0.05{\sim}0.38\;wt.%$. The contents of trace and rare earth elements for the stream sediments were $Cu\;7{\sim}102\;ppm,\;Pb\;15{\sim}47\;ppm,\;Sr\;48{\sim}513\;ppm,\;V\;29{\sim}129\;ppm,\;Zr\;31{\sim}217\;ppm,\;Li\;14{\sim}94\;ppm,\;Co\;5.6{\sim}32.1\;ppm,\;Cr\;23{\sim}259\;ppm,\;Cs\;1.7{\sim}8.7\;ppm,\;Hf\;2.1{\sim}109.0\;ppm,\;Rb\;34{\sim}247\;ppm,\;Sc\;4.5{\sim}21.9\;ppm,\;Zn\;24{\sim}609\;ppm,\;Sb\;0.8{\sim}2.6\;ppm,\;Th\;3{\sim}213\;ppm,\;Ce\;22{\sim}1000\;ppm,\;Eu\;0.7{\sim}5.3\;ppm,\;Yb\;0.6{\sim}6.4\;ppm$. Generally, the contents of $Al_{2}O_{3}\;and\;SiO_2$ had a good relationships with each other in rocks but it had a bad relationships in stream sediments for this study area. The contents of $Fe_{2}O_3$, CaO, MnO and $P_{2}O_{5}$ had a good relationships with major and minor elements in stream sediments of this study area. The contents of Co and V in the stream sediments had a good relationships with other toxic elements.

RFID Antenna Based on Ga-doped ZnO Transparent Conducting Oxide (Ga-doped ZnO 투명전도막의 RFID 안테나 응용)

  • Han, Jae-Sung;Lee, Seok-Jin;Jung, Tae-Hwan;Kim, Jeong-Yeon;Park, Jae-Hwan;Lim, Dong-Gun;Lim, Seong-Woo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.78-79
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    • 2009
  • 본 연구에서는 ZnO계 투명전극 소재를 이용하여 RFID 태그 안테나에 적용 가능성 여부를 확인하였다. Si 기판위에 RF 스퍼터링 공정에 의해 Ga-doped ZnO 투명 마이크로스트립 스파이혈 안테나를 $2{\mu}m$를 증착하여 구현하고 그 전기적 특성을 측정하였다. HFSS 전자계 시뮬레이터를 사용하여 13.56MHz HF 주파수 대역에서 태그 안테나로서의 가능성을 검증한 후 Ga-doped ZnO 타겟을 사용한 RF 스퍼터링 공정에 의하여 스파이럴 안테나 패턴을 구현하였다. 마이크로스트립 선폭 및 선 간격을 $50\sim200{\mu}m$때 영역에서 조절하면서 안테나 패턴을 설계하였다. S 파라메터, 자기공진주파수 및 Q값을 시뮬레이션으로부터 도출하였다. Al $2{\mu}m$ 증착한 시편에 비하여 약 -10dB 정도의 이득저하가 발생하였으나 리더-태그를 밀착시킨 조건에서 1.7V (13.56MHz) 전압검출이 가능하였다.

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The Geochemical and Zircon Trace Element Characteristics of A-type Granitoids in Boziguoer, Baicheng County, Xinjiang (중국 신장 위그루자치구 바이청현 보즈구얼의 A형화강암류의 지화학 및 지르콘 미량원소특징에 대한 연구)

  • Yin, Jingwu;Liu, Chunhua;Park, Jung Hyun;Shao, Xingkun;Yang, Haitao;Xu, Haiming;Wang, Jun
    • Economic and Environmental Geology
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    • v.46 no.2
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    • pp.179-198
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    • 2013
  • The Boziguoer A-type granitoids in Baicheng County, Xinjiang, belong to the northern margin of the Tarim platform as well as the neighboring EW-oriented alkaline intrusive rocks. The rocks comprise an aegirine or arfvedsonite quartz alkali feldspar syenite, an aegirine or arfvedsonite alkali feldspar granite, and a biotite alkali feldspar syenite. The major rock-forming minerals are albite, K-feldspar, quartz, arfvedsonite, aegirine, and siderophyllite. The accessory minerals are mainly zircon, pyrochlore, thorite, fluorite, monazite, bastnaesite, xenotime, and astrophyllite. The chemical composition of the alkaline granitoids show that $SiO_2$ varies from 64.55% to 72.29% with a mean value of 67.32%, $Na_2O+K_2O$ is high (9.85~11.87%) with a mean of 11.14%, $K_2O$ is 2.39%~5.47% (mean = 4.73%), the $K_2O/Na_2O$ ratios are 0.31~0.96, $Al_2O_3$ ranges from 12.58% to 15.44%, and total $FeO^T$ is between 2.35% and 5.65%. CaO, MgO, MnO, and $TiO_2$ are low. The REE content is high and the total ${\sum}REE$ is $(263{\sim}1219){\times}10^{-6}$ (mean = $776{\times}10^{-6}$), showing LREE enrichment HREE depletion with strong negative Eu anomalies. In addition, the chondrite-normalized REE patterns of the alkaline granitoids belong to the "seagull" pattern of the right-type. The Zr content is $(113{\sim}1246){\times}10^{-6}$ (mean = $594{\times}10^{-6}$), Zr+Nb+Ce+Y is between $(478{\sim}2203){\times}10^{-6}$ with a mean of $1362{\times}10^{-6}$. Furthermore, the alkaline granitoids have high HFSE (Ga, Nb, Ta, Zr, and Hf) content and low LILE (Ba, K, and Sr) content. The Nb/Ta ratio varies from 7.23 to 32.59 (mean = 16.59) and the Zr/Hf ratio is 16.69~58.04 (mean = 36.80). The zircons are depleted in LREE and enriched in HREE. The chondrite-normalized REE patterns of the zircons are of the "seagull" pattern of the left-inclined type with strong negative Eu anomaly and without a Ce anomaly. The Boziguoer A-type granitoids share similar features with A1-type granites. The average temperature of the granitic magma was estimated at $832{\sim}839^{\circ}C$. The Boziguoer A-type granitoids show crust-mantle mixing and may have formed in an anorogenic intraplate tectonic setting under high-temperature, anhydrous, and low oxygen fugacity conditions.