JSTS:Journal of Semiconductor Technology and Science

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Reliability Characteristics of La-doped High-k/Metal Gate nMOSFETs

  • Kang, C.Y. (SEMATECH) ;
  • Choi, R. (Inha University) ;
  • Lee, B.H. (Dept. of Nanobio Materials Electronics and Dept. of Materials Science and Engineering, Gwangju Institute of Science and Technology) ;
  • Jammy, R. (SEMATECH)
  • Published : 2009.09.30
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Abstract

The reliability of hafnium oxide gate dielectrics incorporating lanthanum (La) is investigated. nMOSFETs with metal/La-doped high-k dielectric stack show lower $V_{th}$ and $I_{gate}$, which is attributed to the dipole formation at the high-k/$SiO_2$ interface. The reliability results well correlate with the dipole model. Due to lower trapping efficiency, the La-doping of the high-k gate stacks can provide better PBTI immunity, as well as lower charge trapping compared to the control HfSiO stacks. While the devices with La show better immunity to positive bias temperature instability (PBTI) under normal operating conditions, the threshold voltage shift (${\Delta}V_{th}$) at high field PBTI is significant. The results of a transconductance shift (${\Delta}G_m$) that traps are easily generated during high field stress because the La weakens atomic bonding in the interface layer.

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References

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