• Journal of the Korean institute of surface engineering
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• v.46 no.6
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• pp.283-289
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• 2013

The experimental study for the temperature uniformity on the wafer using liquid-vapor phase heat transfer mechanism is performed. For the experiment, the heater plate which is consist of stainless steel container, working fluid and electrical heater is designed, manufactured and tested at the range of 600 to $850^{\circ}C$. The results showed that the phase change type heater plate was much more uniform and stable temperature on the heater plate surface and wafer than the uniform heat flux type heater plate at the atmospheric condition. Also, the results of 300 mm outer diameter of heater plate showed that the same temperature uniformity compared with 230 mm.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.320-320
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• 2000

In this paper, a temperature controller of a test plate for semiconductor is developed using LQG/LTR methodology. The liquid is heated or cooled in a tank by a heater of a cooler. The controller controls the flow of heated or cooled liquid in the plate by controling an electronic valve. The developed controller is applied to the plate designed for function test of a semiconductor under high or low temperature environment. As a result, control using the heater and the cooler together shows better control performance than using the heater or the cooler separately.

• Journal of Power System Engineering
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• v.10 no.1
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• pp.71-76
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• 2006

This paper aims to study several type heaters which are mica heater, film heater, quartz heater and rod heater and to get an temteraturel and electrical characteristics. These four type heaters have a merit in many fields than present electric heater with nichrome wire. Carbon and mica plate heater have higher heat efficiency and less electromagnetic waves. Also it has been reported that far infrared ray emission from this heater is good for our health. Additionally heating element is thin and lighter plate. For these reasons, they will be widely used to various application such as room-heating or manufacturing goods. Experimental result confirmed that when 220V current authorized, the temperature, electric current, electric power and the resistance rise to stationary state in early stage. Moreover, the temperatures and electric characteristics show a good stability.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1186-1190
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• 2003

In this paper, a valveless bubble-actuated fluid micropump was has been developed and its performance was tested. The valveless micropump consists of the lower plate, the middle plate, the upper plate and a resistive heater. The lower plate includes the nozzle-diffuser elements and the double-chamber. Nozzle-diffuser elements and a double-chamber are fabricated on the silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The lower plate also has inlet/outlet channels for fluid flow. The middle plate is made of glass and plays the role of the diaphragm. The chamber in the upper plate is filled with deionized water, and which contacts with the resistive heater. The resistive heater is patterned on a silicon substrate by Ti/Pt sputtering. Three plates and the resister heater are laminated by the aligner and bonded in the anodic bonder. Since the bubble is evaporated and condensed periodically in the chamber, the fluid flows from inlet to outlet with respect to the diffusion effect. In order to avoid backflow, the double chamber system is introduced. Analytical and experimental results show the validity of the developed double-chamber micropump.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.381-385
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• 2003

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated by a micro-heater under pulse heating. The micro-actuator is consist of three plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive ion Etching) process. The middle plate includes the chamber and diaphragm, and the upper plate is the micro-heater. The micro-heater designed non-uniform width and results in periodic generation of stable single bubbles in D.I water. The single bubble appears precisely on the narrow part of the micro-heater and control is recorded.

• Journal of IKEEE
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• v.18 no.1
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• pp.114-118
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• 2014

This paper presents improvement of the production process of a unified fuel heater with the help of the performance evaluation system. In order to enhance a starting capability of diesel-engine car, the unified fuel heater is proposed, which consists of main body, upper plate, stopper, lower plate, PTC, screw, bimetal and terminals. In the proposed heater, the sensor is combined with heater body not only to maximize the performance of car but also to reduce the production cost. The performance test chamber is proposed to evaluate the performance of heater. Especially, an effective manufacturing progress for assembling the heater elements can cut down expenses.

• Journal of the Korean institute of surface engineering
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• v.43 no.6
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• pp.309-314
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• 2010

The numerical study for the effect of various factors that affect the temperature distribution of the process glass installed above the large rectangular heater plate was carried out. For the calculation, heat flux, distance between heat source and process glass plate, effect of vacuum condition and convection in a chamber were considered as important factors. The results showed that the temperature gradient on the glass was increased at the natural convection because of the buoyancy force increases due to the heated air. Also, the more heat flux and distance between the heater plate and glass increases, the more increasing the temperature gradient was. In the case of isothermal heating wall, the temperature variation was smaller than the uniform heat flux condition.

• Proceedings of the KSME Conference
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• 2001.06a
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• pp.860-864
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• 2001

Today's industrialized plants are required to reduce SOx emitted from stacks at factories, utility power stations, etc. For this purpose, flue gas desulfurization (FGD) system is installed and gas-gas heater (GGH) is used to play a vital role to reheat the wet treated gas from FGD. The sector plates are located at cold and hot sides of gas gas heater. They serve as sealing to prevent mixing treated and untreated gases. Therefore, the deformation of the sector plate due to its dead weight and gas pressure should be considered as major factor for the sector plate design.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.463-467
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• 2004

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated b micro-heater under pulse heating. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, he middle plate, the upper plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The middle plate includes the chamber and diaphragm d the upper plate is the micro-heater. The Micropump is fabricated by bonding process of the three layer. This paper resented the possibility of the PCR chip operation by the fabricated micropump.

• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
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• v.6 no.4
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• pp.255-261
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• 1977

This study was concerned with the performance of solar air heater using parallel channels. Heat transmission model was developed and fabricated to increase the economic feasibility for solar heating system by using the cheap zinc plate. The prformance was discussed as a function of mass flow rate, and plate, inlet and outlet temperatures. Experimental results show that heat transmission model is sufficient for the analysis of thermal characteristics of air heater and collection efficiency is better than the domestic water heater, as the range 32-49 percent. Collection efficiency in the 2 layers of glass cover is better than that in 1 layer, so it is considered better to use the 2 layers of glass cover during the cold winter season in Korea.