• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.3
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• pp.228-233
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• 2001

This paper presents the optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro elelctro mechanical system) applications usign SOI (Si-on-insulator) and trench structures. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10㎛ thick Si membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD (resistance thermometer device) on the same substrate by suing MgO as medium layer. The thermal characteristics of the micro-heater wit the SOI membrane is 280$\^{C}$ at input power 0.9W; for the SOI membrane with 10 trenches, it is 580$\^{C}$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro-thermal sensors and actuators.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.4
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• pp.51-56
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• 2008

Thermoforming is one of the most versatile and economical processes available for shaping polymer products, but obtaining a uniform thickness of the final product using this method is difficult. Heater power adjustment is very important because the thickness distribution depends strongly on the distribution of the sheet temperature. In this paper, the steady-state optimum distribution of heater power is first ascertained by a numerical optimization to obtain a uniform sheet temperature. The time-dependent optimal heater input is then determined to decrease the temperature difference through the direction of the thickness using the response surface method and the D-optimal method. The optimal results show that the time-dependent optimum heater power distribution gives an acceptable uniform sheet temperature in the forming temperature range by the end of the heating process.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.569-572
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• 2000

This paper presents the optimized fabrication and thermal characteristics of micro-heaters for thermal MEMS applications using a SDB SOI substrate. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10$\mu\textrm{m}$ thick silicon membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD(Resistance Thermometer Device)on the same substrate by using MgO as medium layer. The thermal characteristics of the micro-heater with the SOI membrane is 280$^{\circ}C$ at input Power 0.9 W; for the SOI membrane with 10 trenches, it is 580$^{\circ}C$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro thermal sensors and actuators.

• Korean Journal of Optics and Photonics
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• v.19 no.4
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• pp.315-319
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• 2008

We investigate theoretically the power consumption of a notch filter using a thermo-optic long-period grating, which is induced by a heater array consisting of periodic heaters and pads made of metal thin-film. Since the power consumed by the heater array is converted to joule heat that generates the thermo-optic long-period grating, the characteristics of the notch filter are dynamically controlled by adjusting it. The power necessary for appropriate coupling efficiency depends on the parameters of the heater array, which are the width and length of a heater, pad width, and the thickness of the thin-film. We explain an approximate method of analyzing the influence of the parameters on the consumed power. Using the analysis method, we simulate the change of the power depending on the parameters. From the simulation, we suggest a few guidelines on the parameters required to reduce the power.

• Progress in Superconductivity
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• v.5 no.2
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• pp.118-123
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• 2004

We investigated quench distribution in AU/YBCO thin film meander lines with a heater. Quench distribution during faults is important for superconducting fault current limter applications, because uniform quench allows application of higher voltages across the meander lines. AU/YBCO thin films grown on sapphire substrates were patterned into meander lines by photolithography. Gold films grown on the rear sides of the substrates were also patterned into meander lines, and used as heaters. Meander lines on the front and the rear sides were connected in parallel. The meander lines were subjected to simulated AC fault currents for quench measurements during faults. They were immersed in liquid nitrogen during the experiment for effective cooling. Resistance of the AU/YBCO meander lines initially increased more rapidly with the rear heater than without, and consequently the fault current was limited more. The resistance subsequently became similar, The resistance distribution was more uniform with the heater, especially during the initial quench. Quench was completed more uniformly and significantly earlier. This resulted in uniform distribution of dissipated power. These results could be explained with the concept of quench propagation, which was accelerated by heat transfer across the substrate from the rear heater.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.6
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• pp.9-13
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• 2019

In this study, a miniature thin film-patterned heater was fabricated on a silicon substrate using semiconductor process technology and the thermal characteristics of the applied voltage, power, and temperature of the thin film heater were measured and analyzed. The temperature of the thin film pattern heater increased with increasing power, but the temperature increase rate was gradual at high power intervals. The characteristics of the high temperature section of the platinum thin film-patterned heater were analyzed using the heat resistance model under atmospheric and vacuum conditions. The thermal resistance measured in a vacuum atmosphere was 0.79 [K/mW] higher than the heat resistance value 0.69 [K/mW] in air. The temperature of the thin film pattern heater can be maintained at a low power in a vacuum rather than in air, and these results are expected to be utilized in the structural design of a thin film-patterned heater element.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.22 no.11
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• pp.23-29
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• 2008

This paper presents a new conceptual electromagnetic induction eddy current based stainless steel plate spiral type heater for heat exchanger or dual packs heater in hot water system boiler steamer and super heated steamer, which is more suitable and acceptable for new generation consumer power applications. In addition, an active clamping quasi-resonant PWM high frequency inverter using trench gate IGBTs power module can operate under a principle of zero voltage soft commutation with PWM is developed and demonstrated for a high efficient induction heated hot water system and boiler in the consumer power applications. This consumer induction heater power appliance using active clamping soft switching PWM high frequency inverter is evaluated and discussed on the basis of experimental results.

• Journal of Power System Engineering
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• v.9 no.2
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• pp.73-80
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• 2005

Both theoretical and experimental investigations were conducted to analyze defrosting behavior of a window heater operating in the low outdoor temperature($-20^{\circ}C$). To achieve this purpose, first a warm-chamber experiment($23^{\circ}C$) was performed to measure inner and outer surface temperature of the rear window(heated by the electric heater supplying 195 W) as functions of both time and position. Secondly, a cold chamber experiment was made to continuously record defrosting process of the frosted window. From the comparisons of the two experimental results, it was found that there was a similarity between the spatial distributions of both temperature and remaining frost. Thus, the temperature data from the warm-chamber experiments can be utilized to predict an expected zone covered with remaining frosts, and this approach can also be adopted in the inspection process in order to economically guarantee optimized performance of the window heater. Finally, an analytical model based on one-dimensional, steady-state heat transfer theories was proposed and successfully predicted the outer surface temperature of the rear window surrounded by cold air($-20^{\circ}C$) for the given operating conditions(heater power, inside and outside heat transfer coefficients, and surrounding air temperature, etc.).

• Journal of IKEEE
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• v.25 no.3
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• pp.534-539
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• 2021

Induction heating method that allows the maximum heating power to be delivered by varying switching frequency in the inductance change of the work coil of induction heater was proposed in this paper. Depending on the type of work piece in the work coil and proximity to the work coil, the resonance frequency of the resonant circuit will be changed. It may be difficult to deliver the maximum power due to the damage of the induced heater element or switching loss depending on the resonance frequency and switching frequency operating relationship. The switching frequency was variable to maintain the maximum power transmission by sensing the heating power due to the change of the resonance frequency. Through the result of the proposed method that can be controlled within the required output change range according to the change of the switching frequency corresponding to the change of the resonance frequency, the induction heater having a variable switching frequency characteristic that can transmit almost constant output power (within 0.43 dB) power efficiency was achieved.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.1290-1295
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• 2006

The 120 meters high pressure feedwater heater drain piping in nuclear power plant had been suffered by excessive vibration from the beginning of power generation. As time goes by, the piping vibration was beyond the allowable limit and an appropriate countermeasure was required to prevent the fatigue failure of the pipeline from the abnormal vibration. In this study, the vibrational characteristics of high pressure feedwater heater drain piping and the countermeasure for abnormal vibration were investigated. Among the several vibration reduction methods, the piping layout changed by making the smooth pipeline was applied to the high Pressure feedwater heater drain piping in nuclear Power plant. Applying the countermeasure, the vibration level was found to reduce over 54 percents and was satisfied under the allowable velocity at the full-power operation condition.