• Journal of the Korean Vacuum Society
• /
• v.11 no.3
• /
• pp.151-158
• /
• 2002

Fabricated were ultra-shallow $p^+-n$ junctions on n-type Si(100) substrates using decaborane $(B_{10}H_{14})$ ion implantation. Decaborane ions were implanted at the acceleration voltages of 5 kV to 10 kV and at the dosages of $1\times10^{12}\textrm{cm}^2$.The implanted specimens were annealed at $800^{\circ}C$, $900^{\circ}C$ and $1000^{\circ}C$ for 10 s in $N_2$ atmosphere through a rapid thermal process. From the measurement of the implantation-induced damages through $2MeV^4 He^{2+}$ channeling spectra, the implanted specimen at the acceleration voltage of 15 kV showed higher backscattering yield than those of the bare n-type Si wafer and the implanted specimens at 5 kV and 10 kV. From the channeling spectra, the calculated thicknesses of amorphous layers induced by the ioin implantation at the acceleration voltages of 5 kV, 10 kV and 15 kV were 1.9 nm, 2.5 nm and 4.3 nm, respectively. After annealing at $800^{\circ}C$ for 10 s in $N_2$ atmosphere, most implantation-induced damages of the specimens implanted at the acceleration voltage of 10 kV were recovered and they exhibited the same channeling yield as the bare Si wafer. In this case, the calculated thickness of the amorphous layer was 0.98 nm. Hall measurements and sheet resistance measurements showed that the dopant activation increased with implantation energy, ion dosage and annealing temperature. From the current-voltage measurement, it is observed that leakage current density is decreased with the increase of annealing temperature and implantation energy.

• Journal of Industrial Technology
• /
• v.20 no.A
• /
• pp.247-256
• /
• 2000

Precursor gels with the composition of $xZrO_2{\cdot}(100-x)SiO_2$ systems (x=10, 20 and 30 mol%) were prepared by the sol-gel method. Kinetic parameters, such as activation energy, Avrami's exponent, n, and dimensionality crystal growth value, m, have been simultaneously calculated from the DTA data using Kissinger and Matusita equations. The crystallite size dependence on tetragonal to monoclinic transformation of $ZrO_2$ was investigated using XRD, in relation to the fracture toughness. The crystallization of tetragonal $ZrO_2$ occurred through 3-dimensional diffusion controlled growth(n=m=2) and the activation energy for crystallization was calculated using Kissinger and Matusita equations, as about $310{\sim}325{\pm}10kJ/mol$. The growth of $t-ZrO_2$, in proportion to the cube of radius, increased with increasing heating temperature and heat-treatment time. It was suggested that the diffusion of Zr4+ions by Ostwald ripening was rate-limiting process for the growth of $t-ZrO_2$ crystallite size. The fracture toughness of $xZrO_2{\cdot}(100-x)SiO_2$ systems glass ceramics increased with increasing crystallite size of $t-ZrO_2$. The fracture toughness of $30ZrO_2{\cdot}70SiO_2$ system glass ceramics heated at $1,100^{\circ}C$ for 5 h was $4.84Mpam^{1/2}$ at a critical crystaliite size of 40 nm.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.351-351
• /
• 2012

최근의 수 십 년 간, 실리콘 나노 와이어는 그 특수한 물성으로 인하여 큰 주목을 받아오고 있다. 또한, 나노 전자소자 개발에 있어 중요한 역할을 담당하며, 현재 실리콘은 반도체 산업 및 기술에서 핵심적인 기능을 수행하고 있기 때문에 실리콘 나노 와이어는 매우 중요하게 고려된다 [1]. 본 연구에서는 유도결합 수소 플라즈마와 PECVD를 이용한 ITO/glass위 실리콘 나노 와이어 형성을 실험하였다. 유도결합 수소 플라즈마를 이용하여 나노 사이즈의 인듐 catalyst를 형성한 후 PECVD를 이용 $SiH_4$ 가스 유량과 성장 온도를 변화시켜 그에 따른 형성 변화를 관찰하였다. Fig. 1 (a) 에서 보이는 바와 같이 $600^{\circ}C$, 30 sccm 5% $SiH_4$, 60 sccm He 조건에서 8분 동안 성장시켰을 경우와 Fig. 1 (b)의 100 sccm 5% $SiH_4$로 유량을 증가시키고 15분 동안 성장시킨 후 FE-SEM 사진을 비교 한 결과 실리콘 나노 와이어의 높이가 $31{\mu}m$로 크게 성장됨을 확인 하였다. 이는 $SiH_4$의 농도의 변화가 실리콘 나노 와이어 성장에 큰 영향을 미치고 있음을 나타내며 그에 따라 나노와이어의 높이를 조절할 수 있음을 보여주고 있다. 추가적으로 실리콘 나노 와이어 성장을 위한 인듐 catalyst 형성과 이를 이용한 ITO 기판위 실리콘 나노 와이어 성장에 따른 광학적 특성 및 XRD 분석 결과 또한 논의 하고자 한다.

• Korean Journal of Materials Research
• /
• v.8 no.10
• /
• pp.912-917
• /
• 1998

화학적 산화막(SiOx)이 형성된 Si(100)기판 위에 Co-silicide의 형성과 계면 형상에 관한 연구를 하였다. 화학적 산화막은 과산화수소수(H2O2)의 인위적 처리에 의해 약 2nm을 형성시켰다. 그 위에 5nm 두께의 Co 박막을 전자빔 증착기에 의해 증착시킨 후 열처리하여 Co-silicide를 형성하였다. 화학적 산화막 위에서 Co-silicide 반응기구를 알아 보기 위해 $500^{\circ}C$-$900^{\circ}C$의 온도 범위에서 ex-situ와 in-situ 열처리를 하였다. 이와같이 형성된 Co-silicide 시편의 상형성, 표면 및 계면 형상, 그리고 화학적 조성을 XRD, SEM, TEM, 그리고 AES를 이용하여 분석하였다. 분석 결과 es-situ 열처리시 $700^{\circ}C$까지 CoSi2 상은 형성되지 않았고 Co의 응집화현상이 일어났다. $800^{\circ}C$ 열처리한 경우에는 CoSI2가 형성되었고 facet 현상이 크게 나타났으며 불연속적인 grain 들이 형성되었다. In-situ 열처리한 경우에는 저온에서 ($550 ^{\circ}C$)반응하여 Co-silicide가 형성되기 시작하였으며 $600^{\circ}C$부터는 facet에 의해 박막의 특성이 나빠지기 시작했다. $550^{\circ}C$에서 Co가 화학적 산화막 층을 통해 확산하여 균질한 Co-silicide를 형성하였다. 이와같이 형성된 균질한 실리사이드 층을 이용하여 다단계(55$0^{\circ}C$-$650^{\circ}C$-$800^{\circ}C$)열처리에 의해 균질한 다결정 CoSI2의 형성이 관찰되었다.

• Food Science and Preservation
• /
• v.17 no.4
• /
• pp.526-532
• /
• 2010

Changes in the nutritional components of Daebong-gam (astringent persimmon) fruit were studied during ripening. The pH rose during ripening and total acidity level fell, from pH 5.36 to pH 5.96 and 0.13% to 0.06%, respectively. Total soluble content did not significantly change. Lightness, redness, and yellowness values, as well as ascorbic acid content, decreased during ripening. The levels of moisture, crude protein, and crude fat also decreased, but nitrogen-free content and crude ash level increased. Daebong-gam was rich in K (96.31~239.47 mg/100 g), P (49.10~55.93 mg/100 g), and Na (15.96~18.13 mg/100 g). Fructose and glucose levels were initially high and increased further during ripening. The glucose content was 4.82% in Daebong-gam, 6.73% in Ban-si, and 7.10% Yeon-Si, respectively. Proline, glutamic acid, and aspartic acid were present at high levels in Daebong-gam. The most common fatty acids were palmitic acid and linolenic acid. Succinic acid was the principal organic acid present.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.17 no.4
• /
• pp.145-150
• /
• 2007

The $SiO_2$ and $TiO_2$ thin films for the multilayer interference filter application were manufactured by electron beam process. In case of electron beam process with ion source, the anode current was controlled by gas volume ratio of $O_2$ and Ar. Substrate temperature of electron beam deposition without ion source was increased from 100 to $250^{\circ}C$ with $50^{\circ}C$ increment. The surface roughness values of $SiO_2$ thin films was most low value at $200^{\circ}C$ substrate temperature and 0.2 A anode current respectively. And the surface roughness values of $TiO_2$ thin films was most low value at room temperature and 0.2 A anode current repectively. The refractive index of $SiO_2$ and $TiO_2$ thin films to be deposited with ion source was usually lower than that of thin films without ion source.

• Korean Journal of Materials Research
• /
• v.13 no.5
• /
• pp.292-296
• /
• 2003

In an attempt to enhance phase transformation and homogenization of Mn-doped $FeSi_2$, mechanical alloying of elemental powders was applied. Cold pressing and sintering in vacuum were carried out to produce a dense microstructure, and then isothermal annealing was employed to induce a phase transformation to the $\beta$-$FeSi_2$semiconductor. Phase transitions in this alloy system during the process were investigated by using XRD, EDS and SEM. As-milled powders after 100 h of milling were shown to be metastable state. As-sintered iron silicides consisted of untransformed mixture of $\alpha$-$Fe_2$$Si_{5}$and $\varepsilon$-FeSi phases. $\beta$-$FeSi_2$phase transformation was induced by subsequent isothermal annealing at $830^{\circ}C$, and near single phase of $\beta$-$FeSi_2$was obtained after 24 h of annealing. Thermoelectric properties in terms of Seebeck coefficient, and electrical conductivity were evaluated and correlated with phase transformation. Seebeck coefficient electrical resistivity and hardness increased with increasing annealing time due to $\beta$ phase transformation.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2001.07a
• /
• pp.73-73
• /
• 2001

• Proceedings of the Korean Vacuum Society Conference
• /
• 2007.02a
• /
• pp.189-189
• /
• 2007

• Proceedings of the Korean Vacuum Society Conference
• /
• 1997.07a
• /
• pp.80-80
• /
• 1997