Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.07a
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- Pages.73-73
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- 2001
Annealing effects of aluminium silicate films grown on Si(100)
- Kim, Y.K. (Institute of Physics and Applied Physics, Yonsei University) ;
- Roh, Y.S. (Institute of Physics and Applied Physics, Yonsei University) ;
- Cho, M.H. (Institute of Physics and Applied Physics, Yonsei University) ;
- Jeong, K. (Institute of Physics and Applied Physics, Yonsei University)
- Published : 2001.07.05
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