• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.290-290
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• 2011

In this study Diamond-like carbon (DLC) films were deposited on p-type Si substrates using a Radio-Frequency magnetron Sputtering system. The DLC film was deposited by bombarding graphite target with a N2/Ar plasma mixture with various conditions: substrate, pressure, deposition time, temperature of substrate, power and ratio of gas mixture. The effect on the conduction and hardness of DLC thin films were investigated. The conduction of DLC films were measured by I-V measurement. In addition, Raman analysis was performed to study the chemical bonding structure. The hardness was measured by Nano indentation. Atomic Force Microscopy was used for determined surface morphology of DLC film.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.5
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• pp.492-497
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• 2006

The study on laser-ablation plasmas has been strongly interested in fundamental aspects of laser-solid interaction and consequent plasma generation. In particular, this plasma has been widely used for the deposition of thin solid films and applied to the semiconductors and insulators. In this paper, we developed and discussed the generation of carbon ablation plasmas emitted by laser radiation on a solid target, graphite. The progress of carbon plasmas by laser-ablation was simulated using Monte-Carlo particle model under the pressures of vacuum, 1 Pa, 10 Pa and 66 Pa. At the results, carbon particles with low energy were deposited on the substrate as the pressure becomes higher However, there was no difference of deposition distributions of carbon particles on the substrate regardless of the pressure.

• Bulletin of the Korean Chemical Society
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• v.28 no.5
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• pp.767-771
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• 2007

By adopting a time-resolved optical emission spectrometry, we have investigated the effects of transverse magnetic field on C2 and CN molecules produced by laser ablation of a graphite target in nitrogen atmosphere. We found that the spectroscopic temperatures of both species, obtained via simulation of the optical emission spectra, as well as their emission intensities from the electronically excited states increased significantly in the presence of a magnetic field. The cyclotron radii and frequencies for electrons and ions were estimated to explain the increase in the number of collisions in the laser-produced carbon plasma plume under a magnetic field.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.406-408
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• 1999

Amorphous carbon nitride thin films were prepared on pretreated silicon(100) substrate in sputtering graphite target by activated gas phase using RF reactively sputtering. We measured the FT-IR spectrum to identify C=N(nitrile)stretching mode(2200cm$\^$-1/), C-H stretching mode(2800cm$\^$-1/), C-H bending mode, C=C stretching mode C=N(imino) mode(1680cm$\^$-1/ ), and the XPS to investigate chemical structure of surface. By the results of FT-H and XPS spectrum, We confirmed that amorphous carbon nitride films with typel (C(1s): 285.9[eV], N(1s): 398.5[ev]) and type 2(C1s): 287.5[eV, N(1s): 400.2[eV]) successfully were synthesized by RF reactively sputtering

• Journal of Korean Vacuum Science & Technology
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• v.3 no.1
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• pp.54-58
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• 1999

We deposited diamond-like carbon (DLC) films using ion beam sputtering of a graphite target on flat substrates for use as a thin film field emitter. An n-type silicon wafer, titanium-coated silicon, and indium tin oxide (ITO) coated glass were used as a substrate. All films exhibited a sudden increase in the emission after a breakdown occurred at high voltage. The morphology of the films after the breakdown depended on the substrate. On ITO and Ti substrates, the DLC film peeled off upon breakdown, but on the Si substrate the surface melting due to breakdown resulted in the formation of various structures such as a sharp point, mound, and crater. By scanning the deformed surface with a tip anode, we found that the emission was concentrated at the deformed sites, indicating that the field enhancement due to the morphology change was responsible for the increased emission.

• Journal of the Microelectronics and Packaging Society
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• v.18 no.1
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• pp.49-53
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• 2011

Diamond-like carbon (DLC) films is a metastable form of amorphous carbon containing a significant fraction of Sp3 bond. DLC films have been characterized by a range of attractive mechanical, chemical, tribological, as well as optical and electrical properties. In this study DLC films were prepared by the RF magnetron sputter system on $SiO_2$ substrates using graphite target. The effects of the post annealing temperature on the Property variation of the DLC films were examined. The DLC films were annealed at temperatures ranging from 300 to $500^{\circ}C$ using rapid thermal process equipment in vacuum. The variation of electrical property and surface morphology as a function of annealing treatment was investigated by using a Hall Effect measurement and atomic force microscopy. Raman and X-ray photoelectron spectroscopy analyses revealed a structural change in the DLC films.

• Applied Chemistry for Engineering
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• v.20 no.5
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• pp.465-472
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• 2009

The technologies for improving the capacity of hydrogen storage were investigated and the recent data of hydrogen storage by using various porous carbon materials were summarized. As the media of hydrogen storage, activated carbon, carbon nanotube, expanded graphite and activated carbon fiber were mainly investigated. The hydrogen storage in the carbon materials increased with controlled pore size about 0.6~0.7 nm. In case of catalyst, transition metal and their metal oxide were mainly applied on the surface of carbon materials by doping. Activated carbon is relatively cheap because of its production on a large scale. Carbon nanotube has a space inside and outside of tube for hydrogen storage. In case of graphite, the distance between layers can be extended by intercalation of alkali metals providing the space for hydrogen adsorption. Activated carbon fiber has the high specific surface area and micro pore volume which are useful for hydrogen storage. Above consideration of research, porous carbon materials still can be one of the promising materials for reaching the DOE target of hydrogen storage.

• Applied Chemistry for Engineering
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• v.29 no.2
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• pp.237-243
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• 2018

The surface chemistry of WCK-AC, WCN-AC and WCZ-AC which are activated carbons prepared from waste citrus peel using KOH, NaOH, and $ZnCl_2$ as activating chemicals were investigated. Also the relationships between the adsorption capacities of the target gases such as acetone, benzene and methyl mercaptan (MM) by the prepared activated carbons and the pore characteristics of each activated carbon were examined. According to XPS analysis of the prepared activated carbons, graphite and phenolic were the main surface functional groups of C1, and the sum of phenol, carbonyl and carboxyl groups increased in the order of WCK-AC > WCN-AC > WCZ-AC. The breakthrough curves obtained from the adsorption experiments for the three target gases in the fixed bed adsorption reactor were well simulated by the empirical equations proposed by Yoon and Nelson. The adsorption capacity for acetone, benzene and MM was larger for activated carbons with the larger sum of surface functional groups. The larger the specific surface area and the pore volume of activated carbons and the smaller the pore size, the better the adsorption performance. In particular, the specific surface area was the best criterion for the adsorption performance of activated carbons used in this study.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.165-166
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• 2002

Hydrogen free diamond like carbon (DLC) films were prepared on steel substrates by using a single ion beam in a configuration that allowed sputtering of a graphite target and at the same time allowed to impact the substrate at a grazing angle. The DLC films so prepared have improved properties with increased disorder and with modest hardness that is slightly higher than previously reported values. We have studied the effects of $N_2^+$ ions implantation on such films. It is found that the implantations of nitrogen ions into DLC films lead to chemical modifications that allowed N atoms to be incorporated into the carbon network to produce a nitrogenated DLC. Nano-indentation experiments indicated that the nitrogenated films have consistently higher hardnesses ranging from 30 to 45GPa, which represents a considerable increase in surface hardness, compared with non-nitrogenated precursor films. The investigations by XPS and Raman spectroscopy suggests that the $N_2^+$ implanted DLCs had undergone both chemical and structural modifications through the incorporation of N atoms and the increased ratio of $sp^3/sp^2$ type bonding. The observed high hardness was therefore attributable to these structural and chemical modifications. This result has implication for the preparation of super hard wear resistant films required for tribological functions in devices.

• 한국신재생에너지학회:학술대회논문집
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• 2010.11a
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• pp.90.2-90.2
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• 2010

The coated metallic bipolar plates are getting attractive due to their good feasibility of mass production, low contact resistance, high electrical/thermal conductivity, low gas permeability and good mechanical strength comparing with graphite materials. Yet, metallic bipolar plates for polymer electrolyte membrane(PEM) fuel cells typically require coatings for corrosion protection. Other requirements for the corrosion protective coatings include low electrical contact resistance between metallic bipolar plate and gas diffusion layer, good mechanical robustness, low mechanical and fabrication cost. The authors have evaluated a number of protective coatings deposited on stainless steel substrate by electroplating. The coated metallic bipolar plates are investigated with an electrochemical polarization tests, salt dipping tests, adhesion tests for corrosion resistance and then the contact resistance was measured. The results showed that the selective samples electroplated with optimized method, satisfied the DOE target for corrosion resistance and contact resistance, and also were very stabilized in the typical fuel cell environments in the long-term.