• 산업기술연구
• /
• 제17권
• /
• pp.233-239
• /
• 1997

The effects of preheating the gas stream on deposition characteristics of ultrafine $SiO_2$ particles were investigated theoretically. The model equations such as mass and energy balance equations and aerosol dynamic equations were solved to predict the particle growth and deposition. The gas temperatures, $SiCl_4$ concentrations, $SiO_2$ particle volumes, $SiO_2$ particle sizes and deposition efficiencies of $SiO_2$ particles were calculated for various preheating temperatures. As the preheater setting temperature increases, the $SiO_2$ particle size distribution becomes more uniform, because the effect of $SiCl_4$ diffusion decreases.

• 한국결정성장학회지
• /
• 제19권5호
• /
• pp.215-222
• /
• 2009

Many concepts of external magnetic field applications in crystal growth processes have been developed to control melt convection, impurity content and growing interface shape. Especially, travelling magnetic fields (TMF) are of certain advantages. However, strong shielding effects appear when the TMF coils are placed outside the growth vessel. To achieve a solution of industrial relevance within the framework of the $KRISTMAG^{(R)}$ project inner heater-magnet modules(HMM) for simultaneous generation of temperature and magnetic field have been developed. At the same time, as the temperature is controlled as usual, e.g. by DC, the characteristics of the magnetic field can be adjusted via frequency, phase shift of the alternating current (AC) and by changing the amplitude via the AC/DC ratio. Global modelling and dummy measurements were used to optimize and validate the HMM configuration and process parameters. GaAs and Ge single crystals with improved parameters were grown in HMM-equipped industrial liquid encapsulated Czochralski (LEC) puller and commercial vertical gradient freeze (VGF) furnace, respectively. The vapour pressure controlled Czochralski (VCz) variant without boric oxide encapsulation was used to study the movement of floating particles by the TMF-driven vortices.

• 한국결정성장학회지
• /
• 제8권4호
• /
• pp.539-543
• /
• 1998

초크랄스키로 성장한 Si 단결정에서 결정 성장 속도를 달리한 sample을 이용하여 COP, FPD 및 LSTD등의 grown-in 결함 밀도와 한 웨이퍼 내에서의 분포를 정확하게 측정하여 이들 결함들간의 상호 관계를 고찰하였다. 이들 결함의 밀도와 한 웨이퍼 내에 발생하는 영역의 크기는 결정 성장 속도가 빠를수록 증가하였다. 또한 한 웨이퍼 내에서 이들 결함의 발생 영역이 일치하는 것으로 보아 이들 결함은 동일한 origin에 의해 생성된 것으로 판단된다.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
• /
• pp.150-150
• /
• 2016

Mankind is enjoying a great convenience of their life by the rapid growth of secondary industry since the Industrial Revolution and it is possible due to the invention of huge power such as engine. The automobile which plays the important role of industrial development and human movement is powered by the Engine Module, and especially Diesel engine is widely used because of mechanical durability and energy efficiency. The main work mechanism of the Diesel engine is composed of inhalation of the organic material (coal, oil, etc.), combustion, explosion and exhaust Cycle process then the carbon compound emissions during the last exhaust process are essential which is known as the major causes of air pollution issues in recent years. In particular, COx, called carbon oxide compound which is composed of a very small size of the particles from several ten to hundred nano meter and they exist as a suspension in the atmosphere. These Diesel particles can be accumulated at the respiratory organs and cause many serious diseases. In order to compensate for the weak point of such a Diesel Engine, the DPF(Diesel Particulate Filter) post-cleaning equipment has been used and it mainly consists of ceramic materials(SiC, Cordierite etc) because of the necessity for the engine system durability on the exposure of high temperature, high pressure and chemical harsh environmental. Ceramic Material filter, but it remains a lot of problems yet, such as limitations of collecting very small particles below micro size, high cost due to difficulties of manufacturing process and low fuel consumption efficiency due to back pressure increase by the small pore structure. This study is to test the possibility of new structure by direct infiltration of SiC Whisker on Carbon felt as the next generation filter and this new filter is expected to improve the above various problems of the Ceramic DPF currently in use and reduction of the cost simultaneously. In this experiment, non-catalytic VS CVD (Vapor-Solid Chemical Vaporized Deposition) system was adopted to keep high mechanical properties of SiC and MTS (Methyl-Trichloro-Silane) gas used as source and H2 gas used as dilute gas. From this, the suitable whisker growth for high performance filter was observed depending on each deposition conditions change (input gas ratio, temperature, mass flow rate etc.).

• Corrosion Science and Technology
• /
• 제10권4호
• /
• pp.151-155
• /
• 2011

The iron oxide particles could be resulted from the corrosion of the circulating water system of a power plant. Because it may be one of the trouble materials which affect the power generation efficiency due to the deposition on steam generator tube and turbine blade, the continuous observation of its concentration is very important. The laser induced break-down detection (LIBD) technology was applied to monitor continuously the concentration of corrosion products with the detection limit of ppb level. The measurement system consists of a Nd:YAG pulsed laser, a polarizing beam splitter, a flow-type sample cell, an acoustic emission sensor, a high speed data acquisition board, a personal computer, etc.. The performance test results confirmed that this technology can be effective to monitor the corrosion product concentration of the circulating water system of a power plant.

• 한국작물학회지
• /
• 제40권5호
• /
• pp.569-573
• /
• 1995

충주팥의 전년산 바이러스 나병주로부터 얻은 종자가 차대 생육 및 수량에 미치는 영향을 구명하기 위하여 관행재배와 바이러스 매개충인 진딧물을 서단한 강실재배와 비교하고 감염된 바이러스의 형태를 관찰한 결과는 다음과 같다. 1. 매개충을 서단했던 강실재배에서는 전년도 나병주로부터 얻은 종자도 바이러스 감염증상을 발견할 수 없었으나 관행재배에서는 생육이 진전됨에 따라서 건전개체나 나병개체로부터 얻은 종자 공히 바이러스가 심하게 나타났다. 2. 관행재배에서는 바이러스 감염으로 인하여 생육이 부진하였으나 강실재배에서 는 심하게 나병된 개체에서 얻은 종자도 건전개체에서 얻은 종자와 같이 나병 주를 발견할 수 없었고 다소 도장되었으나 전반적으로 생육 및 수량성이 양호하였다. 3. 바이러스 감염이 없었던 강실재배는 관행재배에 비하여 협수, 분기수가 많았고 백립중도 무거웠으며 수량도 10a당 202kg으로서 210% 증수되었다. 4. 바이러스에 나염된 모자이크 증상의 엽조직을 50,000배의 전자현미경으로 검경한 결과 사상 모양의 바이러스 입자가 관찰되었다.

• Korean Chemical Engineering Research
• /
• 제45권6호
• /
• pp.536-546
• /
• 2007

나노 미립자는 부피대비 높은 표면적을 가지고 있기 때문에 벌크 상태에서는 볼 수 없는 여러 흥미로운 성질들을 가지고 있다. 나노 미립자들은 나노 구조체 재료, 산업용 재료 혹은 촉매 재료 등을 제조하는데 사용될 수 있다. 기상공정에 의해 높은 단분산성을 갖는 다양한 크기의 나노 미립자를 제조할 수 있으며 제조된 미립자는 각종 첨단 기능성 재료의 원료로 이용될 수 있다. 본고에서는 기상공정을 통하여 나노 미립자 제조에 이용되는 에어로솔 반응기들을 소개하였으며 각 반응기의 특성을 분석하였고 기상 공정에 의한 미립자 제조에 관련된 최근 흥미 있는 연구들을 소개하도록 하였다.

• Journal of Electrochemical Science and Technology
• /
• 제10권3호
• /
• pp.329-334
• /
• 2019

Sn-Cu alloy powders were prepared via a simple chemical reduction method for the negative electrode materials in lithiumion batteries. The addition of Cu can suppress the growth of Sn particles during synthetic process. Furthermore, the Cu also acts as a matrix phase against the volume change during cycling. With increasing amount of the Cu, a stable $Cu_6Sn_5$ phase formed in the Sn-Cu alloy and its cycle performance greatly enhanced depending on the Cu content. To promote the generation of the $Cu_6Sn_5$ phase, the synthesis temperature is raised to $60-100^{\circ}C$ from the ambient temperature. The Sn-Cu alloy powders prepared at elevated temperatures showed remarkable cycle performances. The Sn-Cu alloy powder obtained at $60^{\circ}C$ exhibited a significantly high volumetric capacity of over 2,000 mAh/cc at the 50th cycle.

• Tribology and Lubricants
• /
• 제35권5호
• /
• pp.274-285
• /
• 2019

Chemical mechanical polishing (CMP), which is a material removal process involving chemical surface reactions and mechanical abrasive action, is an essential manufacturing process for obtaining high-quality semiconductor surfaces with ultrahigh precision features. Recent rapid growth in the industries of digital devices and semiconductors has accelerated the demands for processing of various substrate and film materials. In addition, to solve many issues and challenges related to high integration such as micro-defects, non-uniformity, and post-process cleaning, it has become increasingly necessary to approach and understand the processing mechanisms for various substrate materials and abrasive particle behaviors from a tribological point of view. Based on these backgrounds, we review recent CMP R&D trends in this study. We examine experimental and analytical studies with a focus on substrate materials and abrasive particles. For the reduction of micro-scratch generation, understanding the correlation between friction and the generation mechanism by abrasive particle behaviors is critical. Furthermore, the contact stiffness at the wafer-particle (slurry)-pad interface should be carefully considered. Regarding substrate materials, recent research trends and technologies have been introduced that focus on sapphire (${\alpha}$-alumina, $Al_2O_3$), silicon carbide (SiC), and gallium nitride (GaN), which are used for organic light emitting devices. High-speed processing technology that does not generate surface defects should be developed for low-cost production of various substrates. For this purpose, effective methods for reducing and removing surface residues and deformed layers should be explored through tribological approaches. Finally, we present future challenges and issues related to the CMP process from a tribological perspective.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
• /
• pp.57-58
• /
• 2000

we have grown vertically aligned carbon nanotubes on a large area of Co-Ni codeposited Si substrates by thermal chemical vapor deposition using $C_2H_2$ gas. The carbon nanotubes grown by the thermal chemical vapor deposition are multi-wall structure, and the wall suface of nanotubes is covered with defective carbons or carbonaceous particles. The carbon nanotubes range from 50 to 120 nm in diameter and about 130 ${\mu}m$ in length at $950\;^{\circ}C$. Steric hindrance between nanotubes at an initial stage of the growth forces nanotubes to align vertically. The turn-on voltage was about 0.8 $V/{\mu}m$ with a current density of 0.1 ${\mu}A/cm^2$ and emission current reveals the Fowler-Nordheim mode.