Journal of Industrial Technology (산업기술연구)
- Volume 17
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- Pages.233-239
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- 1997
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- 1229-9588(pISSN)
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- 1598-1371(eISSN)
A Study on Ultrafine SiO2 Particles Generation and Deposition by 2-Stage Tube Furnace Reactor
2단 튜브형 가열로 반응기에 의한 초미세 SiO2 입자의 제조 및 증착 연구
Abstract
The effects of preheating the gas stream on deposition characteristics of ultrafine
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