• Title/Summary/Keyword: Ge(111)

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Structural properties of GeSi/Si heterojunction compound semiconductor films by using SPE (SPE법을 통해 형성된 $Ge_xSi_{1-x}/Si$이종접합 화합물 반도체의 결정분석)

  • 안병열;서정훈
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.4 no.3
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    • pp.713-719
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    • 2000
  • In order to Prepare the$Ge_xSi_{1-x}/Si$(111) heterosructure by solid phase epitaxy (SPE), about 1000A of Au and about 1000A Ge were sequentially deposited on the Si(111) substrate. The resulting Ge/Au/Si(111) samples were isochronically annealed in the high vacuum condition. The behaviors of Au and Ge during thermal annealing and the structural Properties of $Ge_xSi_{1-x}$ films were characterized by Auger electron spectroscopy (AES), X-ray diffraction (XRD) and high resolution transmission electron microscopy (TEM). The a-Ge/Au/Si(111) structure was converted to the Au/GeSi/Si(111) structure. Defects such as stacking faults, point defects and dislocations were found at the GeXSil-X(111) interface, but the film was grown epitaxially with the matching face relationship of $Ge_xSi_{1-x}/$(111)/Si(111). Twin crystals were also found in the $Ge_xSi_{1-x}/$(111) matrix.

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Analysis of Core-level Spectra of the $Li/Ge(111)-3\times1$ Surface ($Li/Ge(111)-3\times1$ 표면의 Core-level 스펙트럼에 대한 분석 연구)

  • Cho, Hye-Jin;Kim, Yeong-Hoon;Lee, Geun-Seop
    • Journal of the Korean Vacuum Society
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    • v.15 no.1
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    • pp.31-36
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    • 2006
  • By analyzing the Ge 34 core-level photoelectron spectrum, we studied the structure of the $Li/Ge(111)-3\times1$ surface. Two surface related components tying on either side of the main bulk peak were identified in the Ge 3d spectrum. The existence and the position of the two surface components in the core-level spectrum from $Li/Ge(111)-3\times1$ is similar to those of the $Li/Ge(111)-3\times1$, suggesting the similarities in structure of the two surfaces. The core-level photoelectron spectra of the Li-induced $Li/Ge(111)-3\times1$ surface are well consistent with the honeycomb-chain-channel model, which was proposed as the structure of the $Si/Ge(111)-3\times1$ induced by alkali metals.

Epitaxial Growth of Ge on Si(100) and Si(111) Surfaces (Si(100)와 Si(111) 표면의 Ge 에피 성장 연구)

  • Khang, Yun-Ho;Kuk, Young
    • Journal of the Korean Vacuum Society
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    • v.2 no.2
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    • pp.161-165
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    • 1993
  • The geometrical and electronic structure of epitaxially grown Ge on Si(100) and Si(111) surfaces has been studied by scanning tunneling microscopy. Since Ge atoms could be distinguished from Si atoms by scanning tunneling spectroscopy and voltage dependent STM images, the growth mode of the added layer could be studied. On the (100) surface with a (2${\times}$1) reconstruction, Ge overlayer grow preferentially on the B type step edges at 720K. On the (111) surface, Ge overlayer also grow on the step edges with (7${\times}$7) and (5${\times}$5) structure depending on their coverage and annealing temperature.

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A Study of Epitaxial Growth on the Clean and Surfactant (Sn) Adsorbed Surface of Ge(111) (계면금속(Sn)이 흡착된 Ge(111)표면에서의 Ge의 층상성장에 대한 연구)

  • 곽호원
    • Journal of the Korean Vacuum Society
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    • v.7 no.2
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    • pp.77-81
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    • 1998
  • The eptiaxial growth of Ge on the clean and surfactant (Sn) adsorbed surface of Ge(111) was studied by the intensity oscillation of a RHEED specular spot. In the case of epitaxial growth without the adsorbed surfactant, the RHEED intensity oscillation was stable and periodic up to 24 ML at the substrate temperature of $200^{\circ}C$. Therefore the optimum temperature for the epitaxial growth of Ge on clean Ge(111) seems to be $200^{\circ}C$. However, in the case of epitaxial growth with the adsorbed surfactant, the irregular oscillations are observed in the early stage of the growth. The RHEED intensity osicillation was very stable and periodic up to 38 ML, and the d2$\times$2 structure was not charged with continued adsorption of Ge at the substrate temperature of 2002$\times$2. These results may be explained by the fact that the diffusion length of Ge atoms is increased by decreasing the activation energy of the Ge surface diffusion, resulted by segregation of Sn toward the growing surface.

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STM investigation of as-cleaved and annealed single crystalline GeTe (111) surface

  • Kim, Ji-ho;Choi, Hoon-hee;Chung, In;Lyo, In-Whan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.140.2-140.2
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    • 2016
  • Despite the growing interest in GeTe as a archetypal displacive ferroelectric material as well as the basis of related materials used in data-storage applications, atom-resolved study of single crystalline GeTe surface been lacking. Using low temperature scanning tunneling microscopy (STM) and spectroscopy (STS), we investigated as-cleaved and annealed surfaces of GeTe. We found that as-cleaved GeTe(111) surface is composed of at least two kinds of terraces at 78 K. While two terraces show metallic characteristics, they also exhibit distinctive I-V spectra and imaging conditions, with each being attributed to Ge-terminated, and Te-terminated surfaces respectively. GeTe(111) surfaces annealed at moderately elevated temperature introduces intricate networks of extended defect structures. We will present these data and discuss the role of vacancies in the formation of these structures.

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A Study of Epitaxial Growth on the Surfactant(Sn) Adsorbed Surface of Ge(111) (RHEED를 이용한 Ge(111)표면의 층상성장에서 Sn의 영향)

  • Kwak, Ho-Weon
    • Journal of the Korean Society of Industry Convergence
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    • v.4 no.4
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    • pp.451-455
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    • 2001
  • The epitaxial growth of Ge on the clean and surfactant(Sn) adsorbed surface of Ge(111) was studied by the intensity oscillation of a RHEED specular spot. In the case of epitaxial growth without the adsorbed surfactant, the RHEED intensity oscillation was stable and periodic up to 24ML at the substrate temperature of $200^{\circ}C$. Therefore the optimum temperature for the epitaxial growth of Ge on clean Ge(111) seems to be $200^{\circ}C$. However, in the case of epitaxial growth with the adsorbed surfactant, the irregular oscillations are observed in the early stage of the growth. The RHEED intensity oscillation was very stable and periodic up to 38ML, and the $d2{\times}2$ structure was not charged with continued adsorption of Ge at the substrate temperature of $200^{\circ}C$. These results may be explained by the fact that the diffusion length of Ge atoms is increased by decreasing the activation energy of the Ge surface diffusion, resulted by segregation of Sn toward the growing surface. From the desorption process, the desorption energy of Sn in Ge $\sqrt{5}{\times}\sqrt{5}$ structure is observed to be 3.28eV.

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Dependence of Hole Mobilities on the Growth Direction and Strain Condition in $Si_{1-x}Ge_x$ Layers Grown on $Si_{1-y}Ge_y$ Substrate ($Si_{1-y}Ge_y$ 위에 성장시킨 $Si_{1-x}Ge_x$ 에서 성장방향과 응력변형 조건에 따른 정공의 이동도 연구)

  • 전상국
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.4
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    • pp.267-273
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    • 1998
  • The band structures of $Si_{1-x}Ge_x$ layers grown on $Si_{1-y}Ge_y$ substrate are calculated using k$\cdot$p and strain Hamiltonians. The hole drift mobilities in the plane direction are then calculated by taking into account the screening effect and the density-of-states of the impurity band. When $Si_{1-x}Ge_x$ is grown on Si substrate, the mobilities of (110) and (111) $Si_{1-x}Ge_x$ layers are larger than that of (001) $Si_{1-x}Ge_x$. However, due to the large defect and surface scattering, (110) and (111) $Si_{1-x}Ge_x$ layers may not be useful for the development of the fast device. Meanwhile, when Si is grown on $Si_{1-y}Ge_y$ substrate, the mobilities of (001) and (110) Si layers are greatly enhanced. Based on the amount of defect and the surface scattering, it is expected that Si grown on (001) $Si_{1-y}Ge_y$ substrate, where the Ge contents is larger than 10%(y>0.1), has the highest mobility.

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Si과 Ge 기판에의 Bi2Te3 박막 성장 특성 분석

  • Kim, Seung-Yeon;Go, Chang-Hun;Lee, Geun-Seop
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.233-233
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    • 2012
  • 위상절연체(Bi2Te3)와의 격자상수 불일치 비율이 서로 다른 Si (111)와 Ge (111) 기판을 선택하여 Bi3Te3 박막의 성장 조건을 찾고 이에 따른 특성 분석을 수행하였다. 시료 제작은 초고진공 분위기에서 MBE를 이용하였고, AFM, XRD와 XPS로 각각 구조적 변화, 결정 상태 및 화학적 상태를 분석하였다. 우선 Si 위에 형성된 Bi2Te3의 경우, 초기 박막이 형성된 후, 증착 시간이 증가함에 따라 섬(island)모양의 구조물들이 step edge 부분에 분포되는 모습을 AFM 이미지에서 확인하였다. 형성된 박막의 스텝 단차는 약 1 nm 또는 이 값의 정수 배였고, 이것은 Bi2Te3 unit cell의 quintuple layer (QL) 값과 일치하였다. 또한 측정된 XRD pattern으로 Bi2Te3가 hexagonal 구조의 c-축에 따라 결정성이 이루어졌음을 확인할 수 있었다. XPS 스펙트럼에서는 Bi 4f가 높은 에너지 방향으로 2.3 eV, Te 3d는 낮은 에너지 방향으로 약 0.7 eV 만큼 구속 에너지의 화학적 이동이 나타남을 알 수 있었다. 이러한 결과는 Si 위에 Bi2Te3 박막이 높은 결정성을 가지고 형성되었다는 것을 의미한다. 또한 Si (111) 기판보다 Bi2Te3 결정과 격자상수 불일치의 비율이 상대적으로 작은 Ge (111)을 기판으로 하여 Bi2Te3 박막을 성장시켜 두 표면에서의 박막 성장의 특성을 비교, 논의할 것이다.

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