• Title/Summary/Keyword: Gaussian beam

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Research on the penetration depth of low-energy electron beam in the PMMA-resist film using Monte Carlo numerical analysis (Monte Carlo 수치해석법을 이용한 PMMA resist에서의 저 에너지 전자빔 투과 깊이에 관한 연구)

  • Ahn, Seung-Joon;Ahn, Seong-Joon;Kim, Ho-Seob
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.8 no.4
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    • pp.743-747
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    • 2007
  • There has been steady effect for the development of the electron-beam lithography technologies for the circuit patterning of the future semiconductor devices. In this study, we have performed a Monte-Carlo simulation whore $1{\times}10^4$ electrons with various kinetic energies (100eV, 300eV, 500eV, 700eV, and 1000eV) were shot into polymethyl methacrylate(PMMA) resist of 100-nm thickness. The penetration depth of each electron beam in the resist layer were analyzed using Gaussian analysis method.

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Constraint Relaxation using User Interaction in Reactive Scheduling Environment (동적 스케줄링 문제에서 사용자 상호작용을 이용한 제약조건 완화)

  • Lee, Hoon;Jung, Jong Jin;Jo, Geun Sik
    • Journal of Advanced Navigation Technology
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    • v.2 no.2
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    • pp.132-142
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    • 1998
  • In optical scanning holography, 3-D holographic information of an object is generated by 2-D active optical scanning. The optical scanning beam can be a time-dependent Gaussian apodized Fresnel zone plate. In this technique, the holographic information manifests itself as an electrical signal which can be sent to an electron-beam-addressed spatial light modulator for coherent image reconstruction. This technique can be applied to 3-D optical remote sensing especially for identifying flying objects. In this paper, we first briefly review optical scanning holography and analyze the resolution achievable with the system. We then present mathematical expression of real and virtual image which are responsible for holographic image reconstruction by using Gaussian beam profile.

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Fundamental Theory on the Zeros Distribution of Multizeros Optical Beam for Longrange Optical Measurement Applications (광학식 장거리 계측을 위한 다중영점 광빔의 영점 배치에 관한 기초 이론)

  • Fujimoto, Ikumatsu;Sato, Seichi;Kurihara, Toru;Ando, Sigeru;Kim, Min-Young
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.3
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    • pp.33-40
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    • 2010
  • Multizeros(multiple order zeros) optical beams which belong to the Laguerre-Gaussian beams, have rotational phase and conically-shaped amplitude structures around multizeros points in their phase and amplitude profiles, respectively. Especially, they have their own characteristics that the multizero points do not vanish over free-space propagation. Therefore, they are expected to be adequate for the applications of long-range optical measurement by using their multizero points as optical markers for the deformation sensing. In this paper, fundamental properties of multizeros optical beams for long-range optical measurement applications are investigated and clarified. In particular, the mathematical investigations are described on the characteristics of multizeoros optical beams such as (1) separation of a multizero into isolated single order zeros, (2) topological charge of zeros distribution which are induced by superposing them. And also the outline of a fundamental experiment and its result are explained briefly.

Propagation and interaction of two dimensional solitary waves in organic single crystal of polydiacetylene para-toluene sulfonate (유기단결정 Polydiacetylene Para-toluene Sulfonate에서 2차원 공간고립파의 진행과 상호 작용 전산모의)

  • 류재명;조재흥;황보창권;정진호
    • Korean Journal of Optics and Photonics
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    • v.13 no.5
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    • pp.400-407
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    • 2002
  • Two dimensional solitary waves are stably propagated in a saturable medium which has a saturable nonlinear index as input intensity. However, in the case of low intensity. a negative fifth-order nonlinear medium has properties of a saturable medium. So a Gaussian beam travels stably. The propagation process into the fifth order nonlinear medium of the Gaussian beam with a weak intensity is investigated by using the computer simulation of the two-dimensional nonlinear Schrodinger equation. As a result, it is confirmed that the two-dimensional spatial solitary waves are stably propagated in this medium when the incident powers are self-trapping powers. In the condition of the phase difference and collisional angle between two input beams of 180 degree and 0.05 degree, respectively, we can confirm that all optical switching is as simple as controlling the incident power of one input beam.

Investigation of Performance Degradation of Shack Hartmann Wavefront Sensing Due to Pupil Irradiance Profile

  • Lee Jun-Ho;Lee Yaung-Cheol;Kang Eung-Cheol
    • Journal of the Optical Society of Korea
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    • v.10 no.1
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    • pp.16-22
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    • 2006
  • Wavefront sensing using a Shack-Hartmann sensor has been widely used for estimating wavefront errors or distortions. The sensor combines the local slopes, which are estimated from the centroids of each lenslet image, to give the overall wavefront reconstruction. It was previously shown that the pupil-plane irradiance profile effects the centroid estimation. Furthermore, a previous study reported that the reconstructed wavefront from a planar wavefront with a Gaussian pupil irradiance profile contains large focus and spherical aberration terms when there is a focus error. However, it has not been reported yet how seriously the pupil irradiance profiles, which can occur in practical applications, effect the sensing errors. This paper considered two cases when the irradiance profiles are not uniform: 1) when the light source is Gaussian and 2) when there is a partial interference due to a double reflection by a beam splitting element. The images formed by a Shack-Hartmann sensor were simulated through fast Fourier transform and were then supposed to be detected by a noiseless CCD camera. The simulations found that sensing errors, due to the Gaussian irradiance profile and the partial interference, were found to be smaller than RMS ${\lambda}/50$ when ${\lambda}$ is $0.6328\;{\mu}m$, which can be ignored in most practical cases where the reference and test beams have the same irradiance profiles.

A Study on Simulation Of Readout Signal of Magnet-Optic Disk (광자기 디스크 재생신호 시뮬레이션에 관한 연구)

  • 손장우;조순철;이세광;김순광
    • Journal of the Korean Magnetics Society
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    • v.6 no.3
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    • pp.174-178
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    • 1996
  • A method was studied which simulate signal and noise for magneto-optical disk drive system Recorded mark patterns and incident laser beam were modeled and discretized. Using them readout waveformj and amplitude were simulated. Adding Gaussian random noise to the readout signal and executing one dimensional discrete FFT (Fast Fourier Transform) algorithm signal and noise spectrum was estimated. From the spectrum, CNR (Carrier to Noise Ratio) was obtained.

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Precision enhancement for a CCD/LSB type shape measuring system (CCD/LSB 방식의 형상측정시스템의 정밀도 향상 방법)

  • 유주상;정규원
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2001.04a
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    • pp.137-142
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    • 2001
  • Since recent production system becomes that of the small quantity, large volume with high quality production, accurate and high speed inspection system is required. In such situation, noncontact 3D measurement system which utilized CCD cameras is useful technique in terms of system cost, speed of data acquisition, measuring accuracy and application. However, it has low accuracy compared with contact 3D measurement system because of the camera distortion, non uniformity of laser distribution and so on. For those reasons, in this paper precision enhancement method is studied considering radial camera distortion, and laser distribution. A distortion correction method is applied even to the standard lens. The laser slit beam trajectory is determined by 3 method: based of the Gaussian function signal approximation, the median method, the center of gravity method and the peak point of the Gaussian function method.

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Diffractive patterning on Cr thin film using femtosecond laser pulses (펨토초 레이저에 의한 크롬박막 미세 회절패턴 제작)

  • Kim, Jae-Gu;Cho, Sung-Hak;Chang, Won-Seok;Na, Suck-Joo;Whang, Kyung-Hyun
    • Laser Solutions
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    • v.10 no.4
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    • pp.18-22
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    • 2007
  • In this paper, we suggested the femtosecond laser processing using the mask which makes Gaussian spatial beam distribution to a normalized distribution by Fresenel diffraction. Holography pattern of the size of $320{\times}320{\mu}m^2$ on the Cr thin film on glass substrate with a pixel size of $5{\times}5{\mu}m^2$ was fabricated according to the pattern generated by the iterative Fourier transform algorithm(IFTA) algorithm. We analysed the damage threshold with an assumption the power distribution as Gaussian profile as 45 $mJ/cm^2$. The regenerated image of letters through the diffractive pattern was well recognized at the screen.

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Determination of Gaussian Beam Waists by Knife Edge Scanning and Lens Z-scan Methods (칼날 주사와 Lens를 이용한 Z-scan 방법에 의한 Gaussian 빔 반경의 측정)

  • Lee, Sang-Jo;Woo, Sung-Yong;Hwang, Woong;Kwak, Jong-Hoon
    • Proceedings of the Optical Society of Korea Conference
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    • 2003.02a
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    • pp.28-29
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    • 2003
  • 레이저 빔의 세기 분포를 측정하는 knife edge 방법은 레이저의 발명과 함께 시작 되었다. 사용이 편리한 카메라를 이용한 레이저 빔의 세기 분포 측정 장치에 비해, 진행 방향과 수직한 방향에 대해 대칭성을 가져야만 적용이 가능한 knife edge 방법이 지금까지도 사용되는 이유는 높은 공간 분해능(spatial resolution) 때문이다. Z-scan 방법은 렌즈로 집광시킨 빔의 초점 영역에 샘플을 두고, 샘플을 빔의 진행 방향으로 이동시키면서, 샘플의 두께에 비해 먼 영역에 있는 작은 개구를 통해 측정한 빔의 투과도를 샘플이 없을 때의 투과도로 규격화하여 나타낸 것이다. (중략)

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Fabrication of holographic zone plate using dichromated gelatin hologram (Dichromated Gelatin 박막을 이용한 홀로그래픽 Zone Plate 제작 및 해석)

  • 임용석;이영락;곽종훈;최옥식
    • Korean Journal of Optics and Photonics
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    • v.8 no.1
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    • pp.19-25
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    • 1997
  • Holographic zone plate (HZP) is fabricated by interfering a plane wave and a spherical wave in a dichromated gelatin (DCG) film obtained from Agfa 8E75HD plates. We have developed a simple theory for HZP considering optical nonlinearity of DCG material. Analysis of our theory for HZP shows that it has infinite focal points at distances f,f/2, f/3,,…. In experiment, we observed the corresponding focal points of up to f/6 when illuminating HZP by a plane wave. It is also shown that the beam profile around the first focal point measured by using a knife-edge scanning method has a Gaussian shape.

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