• Title/Summary/Keyword: Gas Penetration

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Etch characteristics of TiN thin film adding $Cl_2$ in $BCl_3$/Ar Plasma ($BCl_3$/Ar 플라즈마에서 $Cl_2$ 첨가에 따른 TiN 박막의 식각 특성)

  • Um, Doo-Seung;Kang, Chan-Min;Yang, Xue;Kim, Dong-Pyo;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.168-168
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    • 2008
  • Dimension of a transistor has rapidly shrunk to increase the speed of device and to reduce the power consumption. However, it is accompanied with several problems like direct tunneling through the gate dioxide layer and low conductivity characteristic of poly-Si gate in nano-region. To cover these faults, study of new materials is urgently needed. Recently, high dielectric materials like $Al_2O_3$, $ZrO_2$, and $HfO_2$ are being studied for equivalent oxide thickness (EOT). However, poly-Si gate is not compatible with high-k materials for gate-insulator. Poly Si gate with high-k material has some problems such as gate depletion and dopant penetration problems. Therefore, new gate structure or materials that are compatible with high-k materials are also needed. TiN for metal/high-k gate stack is conductive enough to allow a good electrical connection and compatible with high-k materials. According to this trend, the study on dry etching of TiN for metal/high-k gate stack is needed. In this study, the investigations of the TiN etching characteristics were carried out using the inductively coupled $BCl_3$-based plasma system and adding $Cl_2$ gas. Dry etching of the TiN was studied by varying the etching parameters including $BCl_3$/Ar gas mixing ratio, RF power, DC-bias voltage to substrate, and $Cl_2$ gas addition. The plasmas were characterized by optical emission spectroscopy analysis. Scanning electron microscopy was used to investigate the etching profile.

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One-Dimensional Modeling of Hydrogen Generator (수소발생기의 일차원 모델링)

  • Park, Jae Hyun;Lee, Hyojin;Valderrama, Edgar Willy Rimarachin;Yim, Chungsik;Yang, Heesung
    • Journal of the Korean Society of Propulsion Engineers
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    • v.22 no.2
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    • pp.74-86
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    • 2018
  • This paper presents the one-dimensional model of a hydrogen generator, where the alkali solution was supplied from the top to the dry aluminum powders. Hydrogen was produced as the solution moved downward and reacted with aluminum. The species conservation equations were considered for the hydrogen gas and alkali solution, while the energy conservation equation was applied to the gas-liquid-solid mixture as a single medium. The gas rising velocity and liquid penetration velocity were also included in the theoretical approach. The developed code was validated with the experimental data of the hydrogen production amount and collector pressure. Additionally, the model successfully predicted the various reactor properties, such as the concentrations, volume fractions, and temperatures, and is expected to help significantly in the design of a novel hydrogen generator.

Non-aqueous Zinc(Zn) Plating to Prevent Hydrogen Release from Test Specimens in Hydrogen Embrittlement Test (수소 취성 시험 평가를 위한 수소 방출 방지용 비수계 아연(Zn) 도금)

  • Jeon, Jun-Hyuck;Jang, JongKwan
    • Journal of the Korean Institute of Gas
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    • v.26 no.3
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    • pp.21-26
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    • 2022
  • Zinc is emerging as a environment-friendly plating material to replace cadmium, which is harmful to the human body, to prevent hydrogen gas penetration or release from metal materials. Electroplating of Zn and Zn alloys, which is usually performed in an aqueous acidic atmosphere, has disadvantages such as low coulombic efficiency, corrosion, and hydrogen release, resulting in industrial use difficult. In this study, a deep-eutectic solvent was synthesized using choline chloride and ethylene glycol. Using this as a solvent, an electrolyte for Zn plating was prepared, and then zinc was plated on the STS 304 substrate. The surface microstructure and roughness were observed using SEM and AFM. The crystal structure of the electro-plated film was analyzed using XRD. Finally, the preventing effects of hydrogen release through Zn-based deep-eutectic plating on the STS 304 substrate were compared with the uncoated substrate.

An experimental study on the injection and spray characteristics of butanol (부탄올의 분사 및 분무특성에 관한 실험적 연구)

  • JEONG, Tak-Su;WANG, Woo-Gyeong;KIM, Sang-Am
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.53 no.1
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    • pp.89-97
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    • 2017
  • Butanol has an ability to improve the ignition quality due to its lower latent heat of vaporization; it has an advantage to reduce a volume of a fuel tank because its energy density is higher than that of ethanol. Also, butanol-diesel oil blending quality is good because butanol has an effect to prevent the phase-separation between two fuels. Even if the blended oil contains water, it can reduce the corrosion of the fuel line. Thus, it is possible to use butanol-diesel oil blended fuel in diesel engine without modification, and it may reduce the environment pollution due to NOx and particulate and the consumption of diesel oil. Therefore, some studies are being advanced whether butanol is adequate as an alternative fuel for diesel engines, and the results of the combustion and exhaust gas emission characteristics are being presented. Though the injection and spray characteristics of butanol are more important in diesel combustion, the has not yet dealt with the matter. In this study, the influence in which differences of physical properties between butanol and diesel oil may affect the injection and spray characteristics such as injection rate, penetration, spray cone angle, spray velocity and process of spray development were examined by using CRDI system, injection rate measuring device and spray visualization system. The results exhibited that the injection and macroscopic spray characteristics of two fuels were nearly the same.

Study on the Performance of Laser Welded joint of Aluminum alloys for Car Body

  • Kutsuna, Muneharu;Kitamura, Shuhei;Shibata, Kimihiro;Salamoto, Hiroki;Tsushima, Kenji
    • Proceedings of the KWS Conference
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    • 2002.10a
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    • pp.620-625
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    • 2002
  • Considering the fuel consumption of car, a light structure of aluminum alloys is desired for car body nowadays. However, fusion welding of aluminum alloys has some problems of reduction of joint efficiency, porosity formation and hot cracking. ill the present work, investigation to improve the joint performance of laser welded joint has been carried out by addition of Cu, Ni, and Zr to A6N01 alloy welds. Aluminum alloy plate of 2.0mm in thickness with filler metal bar was welded by twin beam Nd:YAG laser facility (total power:5kW). The filler metals were prepared by changing the chemical compositions for adding the elements into the weld metal. Thirteen filler metal bars were prepared and pre-placed into the base metal before welding. Ar gas shielding with a flow rate of 10 l/min was used. The defocusing distance is kept at 0 mm. At travel speeds of 3 to 9 m/min and at laser power of 5kW (front beam 2kW rear beam 3kW), full penetration welds were obtained, whereas at travel speeds of 12 to 18 m/min and same power, partial penetration was observed. The joint efficiency of laser-welded joint was improved by the addition of Cu, Ni, and Zr due to the solid solution hardening, grain refining and precipitation hardening. The type of hardening has been further considered by metallurgical examination.

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Effect of Welding Speed on Mechanical Properties and Formability in Nd:YAG Laser Welds of 1000MPa Grade DP Steel (1000MPa급 DP강의 Nd:YAG 레이저 용접부의 기계적 성질과 성형성에 미치는 용접 속도의 영향)

  • Jang, Jin-Young;Choi, Woo-Nam;Jung, Byung-Hun;Kang, Chung-Yun
    • Journal of Welding and Joining
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    • v.27 no.2
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    • pp.69-75
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    • 2009
  • The effects of welding speed were investigated on penetration characteristics, defects and mechanical properties including formability test in Nd:YAG laser welded 1000MPa grade DP steels. A shielding gas was not used and bead-on-plate welding was performed with various welding speeds at 3.5kW laser power. Defects of surface and inner beads were not observed in all welding speeds. As the welding speed increased, the weld cross-section varied from the trapezoid having wider bottom bead, through X type, finally to V type in partial penetration range of welding speeds. The characteristic of hardness distribution was also investigated. The center of HAZ had maximum hardness, followed by a slight decrease of hardness as approaching to FZ. Significant softening occurred at the HAZ near BM. Regardless of the welding speed, the weld showed approximately the same hardness distribution. In the perpendicular tensile test with respect to the weld direction, all specimens were fractured at the softening zone. In the parallel tensile test to the weld direction, the first crack occurred at weld center and then propagated into the weld. Good formability over 80% was taken for all welding conditions.

Safety assessment of generation III nuclear power plant buildings subjected to commercial aircraft crash part III: Engine missile impacting SC plate

  • Xu, Z.Y.;Wu, H.;Liu, X.;Qu, Y.G.;Li, Z.C.;Fang, Q.
    • Nuclear Engineering and Technology
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    • v.52 no.2
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    • pp.417-428
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    • 2020
  • Investigations of the commercial aircraft impact effect on nuclear island infrastructures have been drawing extensive attention, and this paper aims to perform the safety assessment of Generation III nuclear power plant (NPP) buildings subjected to typical commercial aircrafts crash. At present Part III, the local damage of the rigid components of aircraft, e.g., engine and landing gear, impacting the steel concrete (SC) structures of NPP containment is mainly discussed. Two typical SC target panels with the thicknesses of 40 mm and 100 mm, as well as the steel cylindrical projectile with a mass of 2.15 kg and a diameter of 80 mm are fabricated. By using a large-caliber air gas gun, both the projectile penetration and perforation test are conducted, in which the striking velocities were ranged from 96 m/s to 157 m/s. The bulging velocity and the maximal deflection of rear steel plate, as well as penetration depth of projectile are derived, and the local deformation and failure modes of SC panels are assessed experimentally. Then, the commercial finite element program LS-DYNA is utilized to perform the numerical simulations, by comparisons with the experimental and simulated projectile impact process and SC panel damage, the numerical algorithm, constitutive models and the corresponding parameters are verified. The present work can provide helpful references for the evaluation of the local impact resistance of NPP buildings against the aircraft engine.

Study on the Performance of Laser Welded Joint of Aluminum Alloys for Car Body

  • Kutsuna, M.;Kitamura, S.;Shibata, K.;Sakamoto, H.;Tsushima, K.
    • International Journal of Korean Welding Society
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    • v.2 no.2
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    • pp.26-31
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    • 2002
  • Considering the fuel consumption of car, a light structure of aluminum alloys is desired fer car body nowadays. However, fusion welding of aluminum alloys has some problems of reduction of joint efficiency, porosity formation and hot cracking. In the present work, investigation to improve the joint performance of laser welded joint has been carried out by addition of Cu, Ni, and Zr to A6NO 1 alloy welds. Aluminum alloy plate of 2.Omm in thickness with filler metal bar was welded by twin beam Nd: YAG laser facility (total power: 5kW). The filler metals were prepared by changing the chemical compositions for adding the elements into the weld metal. Thirteen filler metal bars were prepared and pre-placed into the base metal before welding. Ar gas shielding with a flow rate of 10 1/min was used. The defocusing distance is kept at 0 mm. At travel speeds off 3 to 9 and at laser power of 5kW (front beam 2kW rear beam 3kW), full penetration welds were obtained, whereas at travel speeds of 12 to 18 m/min and same power, partial penetration was observed. The joint efficiency of laser-welded joint was improved by the addition of Cu, Ni, and Zr due to the solid solution hardening, grain refining and precipitation hardening. The type of hardening has been further considered by metallurgical examination.

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Development of low deformation ATIG welding process for high penetration aspect ratio in thick stainless steel welding (후판 스테인리스 용접에서 높은 용입형상비의 저변형 ATIG용접 공정 개발)

  • Ham, Hyo-Sik;Seo, Ji-Seok;Ha, Jong-Moon;Im, Sung-Bin;Oh, Dong-Soo;Cho, Sang-Myung
    • Proceedings of the KWS Conference
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    • 2009.11a
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    • pp.7-7
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    • 2009
  • TIG 용접에서는 후판 용접의 경우 용입의 한계 때문에 깊고 넓은 그루브 가공을 하여 다층 용접을 한다. 이 때, 그루브를 채우는 용착금속에 의한 응고 수축과 과대한 입열로 인한 변형이 문제시 되고 있다. 변형을 줄이기 위해서는 용착금속의 양과 입열량을 줄여야 한다. 이러한 문제를 해결하기 위해 그루브의 루트패이스를 두껍게 하고 그루브각을 줄여서 용착량을 줄인다. 이때, 좁은 그루브에서 두꺼운 루트패이스를 완전 용입할 수 있는 용접 프로세스가 필요하다. 비드가 좁고 깊은 용입 특성을 가지는 Plasma welding(PAW) 경우에는 좁은 그루브 속에 토치가 접근하기 어려워 적용하기 어렵다. 따라서 접근성이 용이한 TIG 용접에서 높은 용입형상비를 가지는 용접공정 개발이 필요하다. 선행연구로 높은 용입 형상비를 가지는 Active flux Tungsten Inert Gas(ATIG) 용접이 연구되었다. ATIG의 용입 증가 메커니즘으로는 Marangoni effect, 음이온들로 인한 아크 수축 효과, 절연 플럭스에 의한 아크 수축효과 등으로 알려져 있다. 또한 선행연구에서 ATIG에서 Ar가스에 He 또는 $H_2$ 가스를 첨가하면 용입이 더욱 증가하는 것을 확인하였다. 본 연구에서는 A-TIG에 He 가스를 적용하고 아크길이 0.5mm, 1.0mm, 2.0mm와 전극 선단각 30도, 60도, 90도에 따른 용입 형상비와 변형량을 검토하기 위해 실험을 하였다. 실험 결과는 아크길이가 감소할수록 전극 선단각이 증가할수록 용입 형상비는 증가하였고, 변형량은 감소하였다.

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LES on breakup and atomization of a liquid jet into cross turbulent flow in a rectangular duct (사각 덕트내 난류 횡단류 유동장에 분사되는 액체 제트의 분열과 미립화에 관한 LES 해석)

  • Yoo, Young-Lin;Han, Doo-Hee;Sung, Hong-Gye;Jeon, Hyuk-Soo;Park, Chul-Hyun
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.44 no.4
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    • pp.290-297
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    • 2016
  • A two-phase Large Eddy Simulation(LES) has been conducted to investigate breakup and atomization of a liquid jet in a cross turbulent flow in a rectangular duct. Gas-droplet two-phase flow was solved by a coupled Eulerian-Lagrangian method which tracks every individual particles. Effects of liquid breakup models, sub-grid scale models, and a order of spatial discretization was investigated. The penetration depth in cross flow was comparable with experimental data by varying breakup model and LES scheme. SMD(Sauter Mean Diameter) distribution downstream of jet was analyzed.