• 제목/요약/키워드: GaInZnO

검색결과 511건 처리시간 0.029초

Ga doped ZnO 박막의 열처리 조건에 따른 구조 및 전기적 특성에 관한 연구 (Effect of Annealing on the Structural, Electrical and Optical Characteristics of Ga-doped ZnO(GZO)films)

  • 오수영;김응권;이태용;강현일;김봉석;송준태
    • 한국전기전자재료학회논문지
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    • 제20권9호
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    • pp.776-779
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    • 2007
  • In this study we present the effect of annealing temperatures on the structural, electrical and optical characteristics of Ga-doped ZnO (GZO) films. GZO target is deposited on coming 7059 glass substrates by DC sputtering. and then GZO films are annealed at temperatures of 400, 500, $600^{\circ}C$ in air ambient for 20 min. in this case of as-grown film, it shows the resistivity of $6{\times}10^{-1}{\Omega}{\cdot}cm$ and transmittance under 85%, whereas the electrical and optical properties of film annealed at $500^{\circ}C$ are enhanced up to $1.9{\times}10^{-3}{\Omega}{\cdot}cm$ and 90%, respectively.

RF 마그네트론 스퍼터링법으로 제조한 GZO 박막의 Ar 유량에 따른 특성 (Properties of ZnO:Ga Thin Films Deposited by RF Magnetron Sputtering with Ar Gas Flows)

  • 김덕규
    • 한국전기전자재료학회논문지
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    • 제33권6호
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    • pp.450-453
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    • 2020
  • In this study, ZnO:Ga thin films were fabricated on a glass substrate using various Ar flows by an RF magnetron sputter system at room temperature. The dependencies of Ar flow on different properties were investigated. An appropriate control over the Ar flow led to the formation of a high-quality thin film. The ZnO:Ga films were formed as a hexagonal wurtzite structure with high (002) preferential orientation. The films exhibited a typical columnar microstructure and a smooth top face. The average transmittance was 85~89% within the visible area. By decreasing the Ar flow, the sheet resistance was decreased due to an increase in the grain size and a decrease in the root mean square roughness. The lowest sheet resistance of 86 Ω/□ was obtained at room temperature for the 40 sccm Ar flow.

갈륨 도핑된 ZnO 나노와이어의 합성과 구조적 광학적 특성 분석 (Structural and optical properties of Ga-doped ZnO nanowires synthesized by pulsed laser deposition in furnace)

  • 김창은;안병두;전경아;손효정;김건희;이상렬
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 추계학술대회 논문집 전기물성,응용부문
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    • pp.46-47
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    • 2006
  • Ga-doped ZnO nanowires have been synthesized by pulsed laser deposition (PLD) in furnace on gold coated (0001) sapphire substrates. The effect of repetition rate on structural and optical properties of Ga-doped ZnO nanowires are investigated. By controlling repetition rate, the diameter of nanowires is varied between about 60 and 100 nm, and the length of nanowires is varied between about 2 and 4 um. The X-ray diffraction (XRD) reveals the structural defects induced by the Ga doping. The room temperature photoluminescence (PL) spectra of Ga-doped ZnO nanowires show strong UV emission between 382.394 and 385.279 nm with negligible visible emission.

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침전법과 고상반응법으로 제조한 $ZnGa_2O_4$ 형광체의 특성 (Characteristics of $ZnGa_2O_4$ phosphor prepared by Precipitation method and Solid-state reaction method)

  • 차재혁;김세준;곽현호;최형욱
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.383-384
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    • 2007
  • The nano and micro-sized $ZnGa_2O_4$ phosphor were prepared by precipitation method and solid-state method. The luminescence, formation process and structure of phosphor powders were investigated by means of XRD, SEM and PL. The result of XRD analysis showed that $ZnGa_2O_4$ spinel structure was formed at as-prepared in the case of precipitation method. However, micro-sized phosphor was required high heating treatment to have a satisfactory spinel structure. The CL intensity of nano-sized phosphor was about 4-fold higher than that of micro-sized phosphor. The emission spectra of all $ZnGa_2O_4$ phosphor show a self activated blue emission band at around 420 nm in the wide range of 300~600 nm.

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(Ga,Al):ZnO 투명전극층의 두께에 따른 CIGS 박막 태양전지의 성능 변화 연구 (Influence of (Ga,Al) : ZnO Window Layer Thickness on the Performance of CIGS Thin Film Solar Cells)

  • 차정화;전찬욱
    • Current Photovoltaic Research
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    • 제5권1호
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    • pp.28-32
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    • 2017
  • In this paper, (Ga,Al):ZnO layers were deposited by sputtering to evaluate the device performance according to the thickness of the layer. As the thickness increased, low transmittance was observed, but the electrical resistance was improved. On the other hand, the highest efficiency was recorded at 400 nm device than a 500 nm of it. Therefore, since the critical thickness exists, it is necessary to set an adequate TCO layer thickness in consideration of the characteristics of the underlying film and the device.

게이트 길이와 게이트 폭에 따른 InGaZnO 박막 트랜지스터의 소자 특성 저하 (Device Degradation with Gate Lengths and Gate Widths in InGaZnO Thin Film Transistors)

  • 이재기;박종태
    • 한국정보통신학회논문지
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    • 제16권6호
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    • pp.1266-1272
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    • 2012
  • 게이트 길이와 폭이 다른 InGaZnO 박막 트랜지스터를 제작하고 소자의 크기에 따른 문턱전압과 음의 게이트 전압 스트레스 후의 소자 특성 저하에 관한 연구를 수행하였다. 게이트 길이가 짧은 소자는 문턱전압과 문턱전압 아래의 기울기 역수가 감소하였고 채널 폭이 작은 소자는 문턱전압이 증가 하였다. 음의 게이트 전압 스트레스 후에는 전달특성 곡선이 왼쪽으로 이동하였고 문턱전압은 감소하였으며 문턱전압 아래의 기울기 역수는 변화가 거의 없었다. 이러한 결과는 게이트 유전체에 포획된 홀 때문으로 사료된다. 게이트에 음의 스트레스 전압을 인가한 후에 게이트 길이가 짧을수록 그리고 게이트 폭이 증가할수록 문턱전압의 변화가 적은 것은 홀 주입이 적기 때문으로 사료된다.

박막의 두께가 비정질 InGaZnO 무접합 트랜지스터의 소자 불안정성에 미치는 영향 (Effects of thin-film thickness on device instability of amorphous InGaZnO junctionless transistors)

  • 전종석;조성호;최혜지;박종태
    • 한국정보통신학회논문지
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    • 제21권9호
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    • pp.1627-1634
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    • 2017
  • 비정질 InGaZnO 박막 두께가 다른 무접합 트랜지스터를 제작하고 두께에 따른 양과 음의 게이트 스트레스 전압 및 빛을 비춘 상태에서 소자 불안정성을 분석하였다. 채널 박막 두께가 얇을수록 게이트 스트레스 및 빛이 인가된 상태에서 문턱전압 및 드레인 전류 변화가 큰 것을 알 수 있었다. 그 원인을 stretched-exponential 모델과 소자 시뮬레이션을 수행하여 설명하였다. 박막이 얇을수록 캐리어 트랩핑 시간이 짧기 때문에 전자나 홀이 빨리 활성화되는 것과 채널 박막의 뒷부분에서 채널의 수직 전계가 증가하여 전자나 홀을 많이 축적할 수 있는 것으로 설명하였다. IGZO 무접합 트랜지스터 제작에서 채널 박막의 두께를 결정할 때 채널 박막 두께가 얇을수록 소자 불안정성이 큰 것을 고려해야 됨을 알 수 있다.

비정질 InGaZnO 박막트랜지스터에서 Gate overlap 길이와 소자신뢰도 관계 연구 (Study of relation between gate overlap length and device reliability in amorphous InGaZnO thin film transistors)

  • 문영선;김건영;정진용;김대현;박종태
    • 한국정보통신학회:학술대회논문집
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    • 한국정보통신학회 2014년도 추계학술대회
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    • pp.769-772
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    • 2014
  • 비정질 InGaZnO 박막트랜지스터의 Gate Overlap 길이에 따른 NBS(Negative Bias Stress) 및 hot carrier 스트레스 후 시간별 문턱전압의 변화에 의한 소자신뢰도를 분석하였다. 측정에 사용된 소자는 비정질 InGaZnO TFT이며 채널 폭 $W=104{\mu}m$, 게이트 길이 $L=10{\mu}m$이며 Gate Overlap 길이는 $0,1,2,3{\mu}m$를 사용하였다. 소자 신뢰도는 전류-전압을 측정하여 분석하였다. 측정 결과, hot carrier 스트레스 후 Gate Overlap 길이가 증가할수록 문턱전압의 변화가 증가하였다. 또한, NBS 후에는 Gate Overlap 길이가 증가할수록 문턱전압의 변화가 감소하였고 장시간 스트레스 후에 hump가 발생하였다.

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Ampoule-tube 법으로 Phosphorus를 도핑한 P형 ZnO 박막의 광학적 특성 분석 (Alanysis of the Optical Properties of p-type ZnO Thin Films Doped by P based on Ampouele-tube Method)

  • 유인성;오상현;소순진;박춘배
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.145-146
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    • 2006
  • The most Important research topic in the development of ZnO LED and LD is the production of p-type ZnO thin film that has minimal stress with outstanding stoichiometric ratio. In this study, Phosphorus diffused into the undoped ZnO thin films using the ampoule-tube method for the production of p-type znO thin films. The undoped ZnO thin films were deposited by RF magnetron sputtering system on $GaAs_{0.6}P_{0.4}$/GaP and Si wafers. 4N Phosphorus (P) was diffused into the undoped ZnO thin films in ampoule-tube which was performed and $630^{\circ}C$ during 3hr. We found the diffusion condition of the conductive ZnO films which had p-type properties with the highest mobility of above 532 $cm^2$/Vs compared with other studies PL spectra measured at 10K for the purpose of analyzing optical properties of p-type ZnO thin film showed strong PL intensity in the UV emission band around 365nm ~ 415nm and 365nm ~ 385nm.

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Compositional Dependence of Photoluminescence of $ZnGa_2O_4$

  • Lee, Yong-Jei;Sahn Nahm;Kim, Myong-Ho;Suh, Kyung-Soo;Cho, Kyung-Ik;Yoo, Hyung-Joon;Byun, Jae-Dong
    • The Korean Journal of Ceramics
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    • 제3권2호
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    • pp.139-143
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    • 1997
  • The photoluminescence characteristics of the zinc gallate have been investigated as a function of the composition and the firing atmosphere. Two distinct emission bands were observed whose peaks are 360 nm and 430 nm respectively. These emission bands are considered to be from two different emission centers. For $ZnO/Ga_2O_3$=49.3/50.7 or higher, 430 nm band is predominant and for $ZnO/Ga_2O_3$=49.2/50.8 or lower, 360nm band becomes predominant, whereas 430 nm band is almost completely suppressed. The shift of emission peak is though to be due to the change of the cation distribution with the zinc content in the spinel zinc gallate. Also, the emission centers responsible for the 360nm band are considered to be more efficient energy absorbers than the ones for the 430 nm band. Highly efficient green emitting phosphor was obtained by activating Zn-deficient zinc gallate with manganeses.

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