• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.3
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• pp.272-277
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• 2004

The primary aim of this study is to investigate new semi-abrasive free slurry including acid colloidal silica and hydrogen peroxide for copper chemical-mechanical planarization (CMP). In general, slurry for copper CMP consists of colloidal silica as an abrasive, organic acid as a complex-forming agent, hydrogen peroxide as an oxidizing agent, a film forming agent, a pH control agent and several additives. We developed new semi-abrasive free slurry (SAFS) including below 0.5％ acid colloidal silica. We evaluated additives as stabilizers for hydrogen peroxide as well as accelerators in tantalum nitride CMP process. We also estimated dispersion stability and Zeta potential of the acid colloidal silica with additives. The extent of enhancement in tantalum nitride CMP was verified through anelectrochemical test. This approach may be useful for the application of single and first step copper CMP slurry with one package system.

• Toxicological Research
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• v.14 no.4
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• pp.507-513
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• 1998

The purpose of this study was to clarify the effect of silica on cytosolic free calcium mobilization and cell injury in primary cultured rat hepatocytes. Cytosolic free calcium concentration ([Ca$^{2+}$]) was measured employing calcium sensitive fluorescent dye, Fura-2 / AM, and cell injury was evaluated by determination of cellular ATP contents. Silica increased [Ca$^{2+}$], in a concentration-dependent manner in hepatocytes (10$^{-5}$ ~10$^{-2}$ M). Silica caused a biphasic increase in [Ca$^{2+}$], which was composed of an initial rapid rise and following sustained phase. $Ca^{2+}$ removal from the medium resulted in abolishment of initial and sustained phase of silica (10$^{-2}$ M)-induced [Ca$^{2+}$], in hepatocytes. The pretreatment with nifedipine (1 $\mu$M) attenuated silica-induced [Ca$^{2+}$], increases. Silica decreased cellular ATP contents in a dose-dependent manner. This silica-induced cell injury was attenuated by the pretreatment with EGTA (100 $\mu$M) and nifedipine (1 $\mu$M). This study suggests that the elevation of [Ca$^{2+}$], caused by silica may be due mainly to influx through a plasma membrane $Ca^{2+}$ channel and hepatotoxicity by silica relate with alteration of calcium homeostasis.ium homeostasis.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.158-161
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• 2003

The primary aim of this study is to investigate new semi-abrasive free slurry including acid colloidal silica and hydrogen peroxide for copper chemical-mechanical planarization (CMP). In general, slurry for copper CMP consists of colloidal silica as an abrasive, organic acid as a complex-forming agent, hydrogen peroxide as an oxidizing agent, a film forming agent, a pH control agent and several additives. We developed new semi-abrasive free slurry (SAFS) including below 0.5% acid colloidal silica. We evaluated additives as stabilizers for hydrogen peroxide as well as accelerators in tantalum nitride CMP process. We also estimated dispersion stability and Zeta potential of the acid colloidal silica with additives. The extent of enhancement in tantalum nitride CMP was verified through anelectrochemical test. This approach may be useful for the application of single and first step copper CMP slurry with one package system.

• Tuberculosis and Respiratory Diseases
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• v.39 no.2
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• pp.131-140
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• 1992

In order to investigate the changes of hydroxyproline amount and pathologic finding in rat lung which were instilled the natural coal and free silica dust intratracheally, the subjects were divided into two groups as follows. The control group was only administered intratracheally 0.5 ml of normal saline, and the experimental groups were instilled at once the turbid solution containing 10 mg, 30 mg and 50 mg of natural coal and free silica dust each, subjects were sacrified at the 3rd and the 20th week each after the experiment. Hydroxyproline amount in the right upper lung was measured by Woessner method and HPLC (modified Dunphy) method, and the pathlogic finding of lung tissue were observed for hematoxylin-eosin staining, Bielschowski method and Masson's trichrome method. The results were as follows. 1) The wet lung weights of all experimental groups excluding in the groups instilled 10 mg and 30 mg of natural coal dust at 3rd week, were significantly increased (p<0.05) compared with control group. The weight in each free silica group was markedly increased (p<0.05) at 20th week compared with the same dose of natural coal dust group, while the weight in the same dose group of free silica dust was increased significantly at 20th week compared with at 3rd week. 2) The amount of hydroxyproline were significantly increased (p<0.05) in the natural coal and free silica groups at 20th week compared with the control groups, and in each experimental group instilled the same kind and dose of dust, its amount was markedly increased (p<0.05) at 20th week compared with at 3rd week. And also the hydroxyproline in 30 mg and 50 mg free silica groups increased markedly (p<0.05) at 20th week compared with the natural coal dust of the same dose. 3) The polymorphonuclear leukocytes, fibroblasts and macrophages in interstitium and alveolar space showed the increasing tendency in the free silica group more markedly than in the natural coal dust group. The exudate in alveolar space at 3rd week was disappeared at 20th week, and pneumoconiotic nodules observed microscopically in all experimental groups at 20th week, while the nodules apeared already at 3rd week in the 30 mg and 50 mg free silica dust groups. The significant increase of Hydroxyproline content in lung tissue and pneumoconiotic nodule formation in experimental groups found in this study indicate that the observation period, dust amount and kind of dust is important factors associated with pneumoconiosis. And these findings were generally more severe in free silica dust groups than in natural coal groups.

• Bulletin of the Korean Chemical Society
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• v.31 no.4
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• pp.981-983
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• 2010

The condensation of several aromatic/heteroaromatic aldehydes with 2-aminothiophenol catalyzed by silica sulfuric acid under microwave irradiation afforded 2-arylbenzothiazoles in high yields and short reaction times under solvent-free conditions. The major advantages of the present method are good yields, ecofriendly, reusable catalyst, mild and solvent-free reaction conditions.

• Bulletin of the Korean Chemical Society
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• v.33 no.7
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• pp.2149-2155
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• 2012

A metal-free and efficient procedure for the oxidation of alcohols into the corresponding carbonyl compounds has been described using ammonium nitrate in the presence of silica sulfuric acid under mild and heterogeneous conditions. The use of non-toxic and inexpensive materials, simple and clean work-up, short reaction times and good yields of the products are among the advantages of this method.

• Bulletin of the Korean Chemical Society
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• v.25 no.2
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• pp.325-327
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• 2004

• Journal of the Korean Chemical Society
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• v.45 no.6
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• pp.546-548
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• 2001

Neat chlorosulfonic acid reacts with silica gel to give silica sulfuric acid in which sulfuric acid is immobilized on the surface of silica gel via covalent bond. A combination of silica sulfuric acid and wet SiO$_2$ was used as an effective deacetalizating agent for the conversion of acetals to their corresponding carbonyl derivatives by using microwave irradiation under solvent free conditions.

• Proceedings of the Korea Concrete Institute Conference
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• 2010.05a
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• pp.107-108
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• 2010

This paper provides test results on the tension stiffening behavior of high strength concrete (HSC) members used silica fume free binder (SFFB) instead of silica fume. The objective of this study is to evaluate the capability of replacing expensive silica fume to SFFB in HSCs with compressive strength of 60 and 80MPa. Test results indicated that for two mixes of 60 and 80 MPa HSC, cracking and strength behavior of tension members, which are replaced silica fume to SFFB, showed equivalent performance to those of tension members used silica fume.

• Journal of Sensor Science and Technology
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• v.16 no.1
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• pp.77-83
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• 2007

Nanoporous silica aerogels with various surface modifiers were prepared by ambient drying process. Tetraethylorthosilicate (TEOS) were used a raw material. Ambient drying process for various surface modifier was studied in the point of view of a crack-free monolith and thin films and low cost. Various kinds of surface modifiers like as hexamethyldisilazane (HMDSZ), trimethlychlorosilane (TMCS), methlytriethoxylsilane (MTES), and methlytrimethoxysilane (MTMS) were studied in order to enhance hydrophobicity for the silica aerogel. Surface modified aerogels were evaluated by FT-IR, TG, BET, SEM and wetting angle measurement. Homogeneous and crack-free aerogels were obtained by modifying the HMDSZ and the TMCS. However silica xerogel was obtained when modified with MTMS, MTES.