• Journal of the Korean Vacuum Society
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• v.12 no.1
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• pp.1-6
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• 2003

An axial electron beam gun system, which emits the electron beam power of 50 kW, has been manufactured. The electron beam gun consists of two parts. One is the electron beam generation part. including the filament, cathode, and anode. The maximum beam current is 2 A and the acceleration voltage is 25 kV. The other part includes the focusing-, deflection-, and scanning coils. The beam diameter and ham trajectory can be controlled by these coils. The characteristic of each part is measured ior the optimum condition of evaporation process. Moreover, Helmholtz coil is installed inside the vacuum chamber to adjust the incident angel of the beam to the melting surface for the maximum evaporation. We report on the evaporation rates for zirconium(Zr) and gadolinium(Gd) metals which have the high melting temperatures.

• Journal of the Korean Institute of Telematics and Electronics B
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• v.32B no.1
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• pp.110-119
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• 1995

The lateral resolution in an ultrasound imaging system is one of the most important factors for quality of the image and is determined by the beam focusing. For the better lateral resolution SDF(Sampled Delay Focusing) capable of digital focusing was proposed. The second-order sampling, one of band-width sampling methods, is suggested as being the best suitable for SDF because it allows total digital processing and is simple and economical. By proving that it introduces too much error, this article shows the second-order sampling is not appropriate for sampling of the wide-band signal generally used in ultrasound imaging systems. Also, this article suggests new sampling methods that maintain the advantages and reduce the unavoidable errors of the second-order sampling method. From computer simulation it is expected that the proposed methods reduce the errors of the second-order sampling method and can be used in real applications.

• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.17-21
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• 2010

Currently miniaturized electron-optical columns find their way into electron beam lithography systems. For better lithography process, it is required to make smaller spot size and longer working distance. But, the micro-columns of the multi-beam lithography system suffer from chromatic and spherical aberration, even when the electron beam is exactly on the symmetric axis of the micro-column. The off-axis error of the electron emitting source is expected to become worse with increasing off-axis distance of the focusing spot. Especially the electron beams far from the system optical axis have a non-negligible asymmetric intensity distribution in the micro-column. In this paper, the effect of the off-axis e-beam source is analyzed. To analyze this effect is to introduce a micro-column model of which the e-beam emitting source is aligned with the center of the electron beam by shifting them perpendicular to the system optical axis. The presented solution can be used to analysis the performance of the multi-electron-beam system. The performance parameters, such as the working distances and the focusing position are obtained by the computational simulations as a function of the off-axis distance of the emitting source.

• Journal of the Korean Society for Nondestructive Testing
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• v.25 no.6
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• pp.467-474
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• 2005

The expanded multi-Gaussian beam model has recently been developed that can calculate the radiation beam field from a single, rectangular transducer with great computational efficiency. In this study, this model is adopted to calculate the radiation beam field for a phased array transducer with various time delays to achieve steering and/or focusing. The calculation beam fields are compared to those obtained by well known Rayleigh-Sommerfeld integral that provides the exact solution in order to explore the validity of the expanded multi-Gaussian beam model And then, this study proposes a complete ultrasonic measurement model including the expanded beam model, far-field scattering model and system efficiency, Using the proposed model, phased array ultrasonic testing signals for a flat-bottomed hole with/without focusing were performed.

• Laser Solutions
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• v.9 no.3
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• pp.7-13
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• 2006

Auto focusing system to find optimized focal position of laser beam used for material process has been investigated by using fiber confocal method. Wavelength of laser diode (LD) and diameter of single-mode fiber are 780nm and $5.3{\mu}m$, respectively. Intensity distributions of beam reflected from the surface of mirror and silicon bare wafer have been observed in a gaussian form. Experimental results show that focal position obtained by LD is shifted from one observed from surface scribed by laser about $80{\mu}m$. It is due to the difference of wavelength and each divergence of between LD and laser used for material process. It is confirmed that auto focusing control system through position calibration has operated steadily.

• Proceedings of the Korean Society of Laser Processing Conference
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• 2006.11a
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• pp.41-45
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• 2006

Auto focusing system to find optimized focal position of laser beam used for material process has been investigated by using fiber confocal method. Wavelength of laser diode (LD) and diameter of single-mode fiber we 780nm and $5.3{\mu}m$, respectively. Intensity distributions of beam reflected from the surface of mirror and silicon bare wafer have been observed in a gaussian form. Experimental results show that focal position obtained by LD is shifted from one observed from surface scribed by laser about $80{\mu}m$. It is due to the difference of wavelength and each divergence of between LD and laser used for material process. It is confirmed that auto focusing control system through position calibration has operated steadily.

• Korean Journal of Optics and Photonics
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• v.19 no.5
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• pp.365-369
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• 2008

The optimal condition for focusing an electron beam was investigated employing an electrostatic deflector in a low voltage micro-column. At fixed voltage of the electron emission tip, the focusing electron beam with source lens showed a larger scan field size and poorer visibility than those with an Einzel lens. Theoretical 3-D simulation indicated that a focusing electron beam with a source lens should have a larger spot size and deflection than those of a focusing Einzel lens.

• ETRI Journal
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• v.41 no.6
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• pp.850-862
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• 2019

This work investigated three-dimensional (3D) focused microwave thermotherapy (FMT) at 925 MHz for a human tissue mimicking phantom using the time reversal (TR) principle for musculoskeletal disorders. We verified the proposed TR algorithm by evaluating the possibility of 3D beam focusing through simulations and experiments. The simulation, along with the electromagnetic and thermal analyses of the human tissue mimicking phantom model, was conducted by employing the Sim4Life commercial tool. Experimental validation was conducted on the developed FMT system using a fabricated human tissue mimicking phantom. A truncated threshold method was proposed to reduce the unwanted hot spots in a normal tissue region, wherein a beam was appropriately focused on a target position. The validation results of the simulation and experiments obtained by utilizing the proposed TR algorithm were shown to be acceptable. Effective beam focusing at the desired position of the phantom could be achieved.

• Journal of the Korean Society for Nondestructive Testing
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• v.19 no.3
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• pp.207-216
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• 1999

A phased array is a multi-element piezoelectric device whose elements are individually excited by electric pulses at programmed delay time. One of the advantages of using phased array in nondestructive evaluation (NDE) application over conventional ultrasonic transducers is their great maneuverability of ultrasonic beam. There are some parameters such as the number and the size of the piezoelectric elements and the inter-element spacing of the elements to design phased array transducer. In this study, the characteristic of ultrasonic beam for phased array transducer due to the variation of the number of elements has been simulated for ultrasonic SH-wave on the basis of Huygen's principle. Ultrasonic beam directivity and focusing due to the change of time delay of each element were discussed due to the change of the number of piezoelectric elements. It was found that ultrasonic beam was much more spreaded and hence its sound pressure was decreased as steering angle of ultrasonic beam was increased. In addition, the ability of ultrasonic bean focusing decreased gradually with the increase of focal length at the same piezoelectric elements. However, the ability of beam focusing was improved as the number of consisting elements was increased.

• Bulletin of the Korean Chemical Society
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• v.24 no.5
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• pp.600-604
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• 2003

The light pressure force from an optical standing wave (SW) can focus an atomic beam to submicrometer dimensions. To make the best of this technique it is necessary to find a set of optimal experimental parameters. In this paper we consider theoretically the chromium atoms focusing and demonstrate that the focusing performance depends not only on the strength of but also on the time atoms take to traverse the force field. The general conclusions drawn can easily be applied to other atoms. To analyze the problem we numerically integrate a coupled time-dependent $Schr{\"{o}}dinger$ equation over a wide range of experimental parameters. It is found that an optimal atomic beam speed-laser intensity pair does exist, which could give substantially improved focusing over the one with the experimental parameters given in the literature. It is also shown that the widely used classical particle optics approach can lead to erroneous predictions.