• Title/Summary/Keyword: Focused laser beam

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Transmission Grating Formation in High Refractive-index Amorphous Thin Films Using Focused-Ion-Beam Lithography (접속이온빔 리소그라피를 이용한 고굴절 비정질 박막 투과 격자 형성)

  • Shin, Kyung;Kim, Jin-Woo;Park, Jeong-Il;Lee, Hyun-Yong;Lee, Young-Jong;Chung, Hong-Bay
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.50 no.1
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    • pp.6-10
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    • 2001
  • In this study, we investigated the optical properties of sub-wavelength a-Si thin film transmission gratings, especially the polarization effect, the phase difference and the birefringence by using linearly polarized He-Ne laser beam (632.8nm). The a-Si transmission grating of the thickness $of < 0.1 \mum$ with four-type period($\Lambda = 0.4 \mum and 0.6 \mum$ for sub-wavelength and $\Lambda = 1.0 \mum and 1.4 \mum$ for above-wavelength) on quartz substrates have been fabricated using 50 KeV Ga+ Focused-Ion-Beam(FIB) Milling and $CF_4$Reactive-Ion-Etching(RIE) method. Finally, we obtained the trating array of a-Si thin film with a period $0.4 \mum, 0.6 \mum, 1.0 \mum, 1.4 \mum$ which have nearly equal finger spacing and width, sucessfully. Especially, for gratings with $\Lambda = 0.6 \mum(linewidth=0.25 \mum, linespace=0.35\mum), the \etamax at \theta_в=17.0^{\circ}$ is estimated to be 96%. As the results, we believe that the sub-wavelength grating arrayed a-Si thin film has the applicability as the optical device and components.

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Arrayed-Arc Slit Design to Improve the focusing Effect of the focused Lamb Wave by Laser (레이저에 의한 집속형 램파의 집속도 향상을 위한 원호형 슬릿 설계)

  • Jhang, Kyung-Young;Kim, Hong-Joon;Sin, Min-Jea;Kim, Jae-Yeol
    • Journal of the Korean Society for Nondestructive Testing
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    • v.25 no.2
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    • pp.87-94
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    • 2005
  • In recent, Lamb wave has been actively studied for non-destructive testing of plate. Among those studios, laser generation method of focused Lamb wave is expected to have high spatial resolution with advantages of non-contact testing. In this method, the laser beam is illuminated on the surface of object by through an arrayed-arc slit, and then the energy of the generated Lamb wave is concentrated at a focus of arc. This focusing effect improves the spatial resolution, which is dependant on the geometries of arrayed-arc slit. In this paper, the relationships between the parameters of arc-shaped slit and the focusing ability of the generated Lamb wave was investigated by the simulation based parametric study The results show that to improve the focusing effect, radius of illuminated laser, angle of arc and number of arcs must be increased, which minimum radius of arc and distance between arcs(=wavelength) must be decreased. These results are expected to be used as a guide to design the proper shape of slit.

Development of microscopic surface profile estimation algorithm through reflected laser beam analysis (레이저 반사광 분석을 통한 미세 표면 프로파일 추정 알고리즘의 개발)

  • Seo Young-Ho;Ahn Jung-Hwan;Kim Hwa-Young;Kim Sun-Ho
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.11 s.176
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    • pp.64-71
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    • 2005
  • In order to measure surface roughness profile, stylus type equipments are commonly used, but the stylus keeps contact with surface and damages specimens by its tip pressure. Therefore, optics based measurement systems are developed, and light phase interferometer, which is based on light interference phenomenon, is the most noticeable research. However, light interference based measurements require translation mechanisms of nano-meter order in order to generate phase differences or multiple focusing, thus the systems cannot satisfy the industrial need of on-the-machine and in-process measurement to achieve factory automation and productive enhancement. In this research, we focused light reflectance phenomenon rather than the light interference, because reflectance based method do not need translation mechanisms. However, the method cannot direct]y measure surface roughness profile, because reflected light consists of several components and thus it cannot supply surface height information with its original form. In order to overcome the demerit, we newly proposed an image processing based algorithm, which can separate reflected light components and conduct parameterization and reconstruction process with respect to surface height information, and then confirmed the reliability of proposed algorithm by experiment.

Design and Lithographic Fabrication of Elliptical Zone Plate Array with High Fill Factor

  • Anh, Nguyen Nu Hoang;Rhee, Hyug-Gyo;Ghim, Young-Sik
    • Current Optics and Photonics
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    • v.5 no.1
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    • pp.8-15
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    • 2021
  • An elliptical zone plate (EZP) array is important in off-axis optical systems because it provides two advantages. First, the residual beam and the main source are not focused in the same direction and second, the light from the observation plane is not reflected back towards the beam source. However, the fill factor of the previous EZP array was about 76% which was a little low. Hence, this EZP array could not collect the maximum amount of illumination light, which affected the overall optical performance of the lens array. In this study, we propose a new EZP array design with a 97.5% fill factor used in off-axis imaging system for enhancement of brightness and contrast. Then, direct laser lithography was used to fabricate the high fill factor EZP array by moving the XY linear stage of the system in a zigzag motion. The imaging properties of the proposed EZP array were experimentally verified at the focal plane and compared with the previous model.

Manufacturing Process of Self-Luminous Glass Tube (SLGT) Utilizing Tritium Gas (I) (삼중수소 활용을 위한 자발광유리관 (SLGT) 제조기술)

  • Kim Kwangsin;Kim Kyeongsook;Chung Eun-Su;Son Soon Hwan;Nam Gi-Jung
    • Proceedings of the Korean Radioactive Waste Society Conference
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    • 2005.11a
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    • pp.87-95
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    • 2005
  • Laser sealing/cutting technique, one of the 4 core technologies to manufacture self-luminous glass tubes (SLGTs) has been developed. Through the analysis of commercial products it is found that Pyrex Is used for SLGTs. A CO2 laser, which is commonly used for glass work was used for the study The factors affecting the sealing/cutting were laser intensity, duration. Irradiation method, and pressure inside the tube. The whole Process is composed of 2 stages. In the first stage. both ends of the tubes are sealed while tritium is insected in the tubes. And the tritium sealed tubes are cut in the desired size in the second stage. Defocused beam was used for seal ing and focused beam was used for cutting. After the sealing/cutting, the tubes were heat treated to prevent fracture due to the residual heat stress.

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A Study on the Heat Transfer Characteristics of Single Bead Deposition of Inconel 718 Superalloy on S45C Structural Steel Using a DMT Process (DMT 공정을 이용한 S45C 구조용강 위 Inconel 718 초합금 단일 비드 적층시 열전달 특성 분석에 관한 연구)

  • Lee, Kwang-Kyu;Ahn, Dong-Gyu;Kim, Woo-Sung;Lee, Ho-Jin
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.19 no.8
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    • pp.56-63
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    • 2020
  • The heat transfer phenomenon in the vicinity of the irradiated region of a focused laser beam of a DMT process greatly affects both the deposition characteristics of powders on a substrate and the properties of the deposited region. The goal of this paper is to investigate the heat transfer characteristics of a single bead deposition of Inconel 718 powders on S45C structural steel using a laser-aided direct metal tooling (DMT) process. The finite element analysis (FEA) model with a Gaussian volumetric heat flux is developed to simulate a three-dimensional transient heat transfer phenomenon. The cross-section of the bead for the FEA is estimated with an equivalent area method using experimental results. Through the comparison of the results of the experiments and those of the analysis, the effective beam radius of the bottom region of the volumetric heat flux and the efficiency of the heat flux model for different powers and travel speeds of the laser are predicted. From the results of the FEA, the influence of the power and the travel speed of the laser on the creation of a steady-state heat transfer region and the formation of the heat-affected zone (HAZ) in the substrate are investigated.

Conceptual Design of Soft X-ray Microscopy for Live Biological Samples

  • Kim, Kyong-Woo;Nam, Ki-Yong;Kwon, Young-Man;Shim, Seong-Taek;Kim, Kyu-Gyeom;Yoon, Kwon-Ha
    • Journal of the Optical Society of Korea
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    • v.7 no.4
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    • pp.230-233
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    • 2003
  • This study describes the conceptual design of a soft x-ray microscope system based on a laserbased source for biomedical application with high resolution (${\leq}$50nm). The laboratory scale soft x-ray microscope consists of high power laser plasma x-ray source and grazing incidence mirrors with high reflectivity. The laser plasma source used for developing this system employs Q-switched Nd-YAG pulsed laser. The laser beam is focused on a tantalum (Ta) target. The Wolter type I mirror was used as condenser optics for sample illumination and as objective mirror for focusing on a detector. The fabrication of the Wolter type I mirror was direct internal cutting using ultraprecision DTM. A hydrated biological specimen was put between the two silicon wafers, the center of which was $Si_3N_4$ windows of 100㎚ thickness. The main issues in the future development work are to make a stable, reliable and reproducible x-ray microscope system.

Development of micro-stereolithography system for the fabrication of three-dimensional micro-structures (3 차원 형상의 미소제품 제작을 위한 마이크로 광 조형시스템의 개발)

  • 이인환;조윤형;조동우;이응숙
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.2
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    • pp.186-194
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    • 2004
  • Micro-stereolithography is a newly proposed technology as a means that can fabricate a 3D micro-structure of free form. It makes a 3D micro-structure by dividing the shape into many slices of relevant thickness along horizontal surfaces, hardening each layer of slice with a focused laser beam, and stacking them up to a desired shape. In this technology, differently from the conventional stereolithography, scale effect is dominant. To realize micro-stereolithography technology, we developed the micro-stereolithography apparatus which is composed of an Ar+ laser, x-y-z stages. controllers. optical devices and scan path generation software. Related processes were developed, too. Using the system, a number of micro-structures were successfully fabricated. Some of these samples are shown for prove this system. Laser scan path generation algorithm and software considering photopolymer solidification phenomena as well as given 3D model were developed. Sample fabrication of developed software shows relatively high dimensional accuracy compared to the uncompensated result.

Generation of Ultra-Wideband Terahertz Pulse by Photoconductive Antenna (광전도안테나에 의한 광대역테라헤르츠파의 발생특성)

  • Jin Yun-Sik;Kim Geun-Ju;Shon Chae-Hwa;Jung Sun-Shin;Kim Jeehyun;Jeon Seok-Gy
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.54 no.6
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    • pp.286-292
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    • 2005
  • Terahertz wave is a kind of electromagnetic radiation whose frequency lies in 0.1THz $\~$10THz range. In this paper, generation and detection characteristics of terahertz (THz) radiation by photoconductive antenna (PCA) method has been described. Using modern integrated circuit techniques, micron-sized dipole antenna has been fabricated on a low-temperature grown GaAs (LT-GaAs) wafer. A mode-locked Ti:Sapphire femtosecond laser beam is guided and focused onto photoconductive antennas (emitter and detector) to generate and measure THz pulses. Ultra-wide band THz radiation with frequencies between 0.1 THz and 3 THz was observed. Terahertz field amplitude variation with antenna bias voltage, pump laser power, pump laser wavelength and probe laser power was investigated. As a primary application example. a live clover leaf was imaged with the terahertz radiation.

Fabrication of Superconducting Narrow Bandpass Filters with Parallel Microstrip Line (마이크로스트립 평행결합선을 이용한 초전도 협대역 필터의 제작)

  • Park, Joo-Hyung;Lee, Sang-Yeol;Yoon, Hyung-Kuk;Yoon, Young-Joong
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1549-1551
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    • 1998
  • We have designed and developed narrow bandpass multipole filters for satellite communication using $YBa_2Cu_3O_{7-x}$(YBCO) thin films on MgO substrates. The superconducting film used in this study was prepared by laser ablation on one side polished MgO (100) substrates. A Nd:YAG laser was used to fabricate YBCO thin films. The wave length of the laser was 355 nm. The laser beam was focused onto a YBCO target rotating linearly to avoid deep craters that may eject macroscopic YBCO particles. The YBCO films were grown at $750^{\circ}C$ in the oxygen partial pressure of 200 mTorr. The deposited YBCO thin films were patterned by conventional wet-etching method. The transition temperatures of YBCO thin films were 85 - 88 K and the film thicknesses were about 5,000 $\AA$. By comparing the performances of normal-metal filters and YBCO filters, we observed that superconducting YBCO multipole filters have been showed superior performances at 77 K.

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