Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Development of micro-stereolithography system for the fabrication of three-dimensional micro-structures

3 차원 형상의 미소제품 제작을 위한 마이크로 광 조형시스템의 개발

  • Published : 2004.02.01
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Abstract

Micro-stereolithography is a newly proposed technology as a means that can fabricate a 3D micro-structure of free form. It makes a 3D micro-structure by dividing the shape into many slices of relevant thickness along horizontal surfaces, hardening each layer of slice with a focused laser beam, and stacking them up to a desired shape. In this technology, differently from the conventional stereolithography, scale effect is dominant. To realize micro-stereolithography technology, we developed the micro-stereolithography apparatus which is composed of an Ar+ laser, x-y-z stages. controllers. optical devices and scan path generation software. Related processes were developed, too. Using the system, a number of micro-structures were successfully fabricated. Some of these samples are shown for prove this system. Laser scan path generation algorithm and software considering photopolymer solidification phenomena as well as given 3D model were developed. Sample fabrication of developed software shows relatively high dimensional accuracy compared to the uncompensated result.

Keywords

References

  1. Ikuta, K., Hirowatari, K., 'Real three dimensional micro fabrication using stereo lithography and metal molding,' Proc. of IEEE international Workshop on Micro Electro Mechanical Systme(MEMS '93), pp.42-47, 1993 https://doi.org/10.1109/MEMSYS.1993.296949
  2. Ikuta K., Maruo S. and Kojima S., 'New microstereo lithography for freely movable 3D microstructure,' Proc. of IEEE international Workshop on Micro Electro Mechanical System(MEMS '98), pp. 290-295, 1993 https://doi.org/10.1109/MEMSYS.1998.659770
  3. Bertsch A., Jezequel J. Y. and Andre J. C., 'Study of the spatial resolution of a new 3D micro fabrication process: the microstereolithography using a dynamic mask-generator technique,' J. of Photochemistry and Photobiology A: Chemistry 107, pp. 275-282, 1997 https://doi.org/10.1016/S1010-6030(96)04585-6
  4. Bertsch A., Lorenz H. and Renaud P., 'Combining microstereolithography and thick resist UV lithography for 3D microfabrication,' Proc. of IEEE international Workshop on Micro Electro Mechanical System(MEMS '98), pp. 18-23, 1998 https://doi.org/10.1109/MEMSYS.1998.659722
  5. Zhang X., Ziang, X. N. and Sun C., 'Microstereolithography of polymeric and ceramic microstructure,' Sensors and Actuators 77, pp. 149-156, 1999 https://doi.org/10.1016/S0924-4247(99)00189-2
  6. http://www.3dsystems.com
  7. Liao Y. S. and Chiu Y. Y., 'A New Slicing Procedure for Rapid Prototyping Systems,' International Journal of Advanced Manufacturing Technology, Vol. 18, Issue 8, pp. 575-582, 2001 https://doi.org/10.1007/s001700170034
  8. Ma Weiyin and He Peiren, 'An Adaptive Slicing and Selective Hatching Strategy for Layered manufacturing,' Journal of Materials Processing Technology, Vol. 89, pp. 191-197, 1999 https://doi.org/10.1016/S0924-0136(99)00043-6
  9. Choi Hong-Tae, Kim Jun-An, Lee Seok-Hee and Paik In-Hwan, 'Development of Cross-sectional Information Conversion System from STL file for Stereolithography,' Journal of Korean Society of Precision Engineering Vol. 12, No. 11, Nov. 1995
  10. NakamotoTakeshi, Yamaguchi Katsumi, Abraha Petros A and Mishima Kunihiro, 'Manufacturing of Three-dimensional Micro-parts by UV Laser Induced Polymerization,' J. Micromech. Microeng. 6, pp. 240-253, 1996 https://doi.org/10.1088/0960-1317/6/2/006