• 제목/요약/키워드: Focus ring

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Role of an edge ring in plasma processing systems for semiconductor wafers (반도체용 플라즈마 장치에서 edge ring의 역할)

  • Ju, Jeong-Hun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.71-71
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    • 2017
  • 플라즈마를 이용하는 건식 식각 또는 박막 증착 장비(PECVD)의 경우 웨이퍼에 rf bias를 인가하여 이온의 에너지와 입사각을 조절한다. 종래에는 웨이퍼의 가장 자리 3 mm영역을 공정 대상에서 제외하는 exclusion area로 지정하였으나 점차 공정 기술의 발달로 2 mm 이내로 감소하고 있다. 따라서 웨이퍼의 가장 자리에서 발생하는 전기장의 방향 및 크기 변화를 조절할 수 있는 기술의 개발이 필요하게 되었으며 그중 핵심적인 부품이 Si 또는 SiC로 제작되는 edge ring이다. Focus ring이라고도 불리는 이 부품은 웨이퍼 상에서 반경 방향으로 흐르는 가스의 유속이 가장 자리에 근접하면 빨라지는 현상과 이에 의해 식각/증착 화학 반응 속도가 증가하는 문제를 완화하기 위한 것과 적절한 전기 전도도를 부여함으로써 가장 자리의 전기장 분포를 최적화 할 수 있는 새로운 설계 변수로 활용할 수 있다. 스퍼터링의 경우에도 웨이퍼 중앙과 주변 부는 마그네트론 음극의 회전 링과의 입체각이 차이가 나므로 가장 자리의 경우 트렌치나 홀의 내측이 외측에 비해서 증착막의 두께가 얇아지는 문제가 있으며 건식 식각의 경우 홀의 형상이 수직에서 벗어나는 경향이 발생할 수 있다. 또한 사용 시간에 비례해서 edge ring의 형상이 변화하는데 상대적으로 고가품이어서 교체 주기를 설정하는 보다 합리적 기준이 필요하다. 본 연구에서는 전산 유체 역학 모델을 사용하는 ESI사의 CFD-ACE+를 활용하여 edge ring의 형상과 재질이 갖는 영향을 전산 모사하기 위한 기초 작업을 그림 1과 같이 진행하였다. 2D-CCP model에 Ar 가스를 가정하고 비유 전율 10내외 전도도 $0.1/Ohm{\cdot}m$정도의 재질에 대한 용량성 결합 플라즈마에 대해서 계산을 하고 이 때 기판에 인가되는 고주파 전력에 의한 이온의 입사 에너지 분포 및 각도 분포를 Monte Carlo 방법으로 처리하여 계산하였다.

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New Gel-type Biomimetic Variable-focus Lens System (새로운 겔형 생체모방 가변초점 렌즈 시스템)

  • Seo, Jeong-Ho;Son, Hyung-Min;Lee, Yun-Jung
    • Journal of Institute of Control, Robotics and Systems
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    • v.16 no.11
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    • pp.1082-1088
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    • 2010
  • In this paper, we propose a new gel-type biomimetic variable-focus lens system. The miniaturization of conventional lens system is limited due to the use of a set of glass lenses for adjusting the focal length. Biologically inspired by the focus adjustment mechanism of the human eye, a gel-type single lens system with variable-focus is presented. The proposed system consists of a gel-type lens, mechanical parts such as body, rotation ring, and winding-type SMA actuator. In addition, the proposed system is designed to operate with a simple and miniaturized mechanical structure using a new attachment and driving mechanism. The focusing performance of the proposed system is verified through a series of experiments and measurements of the shape of the lens using tomography.

Study and Adaptation of FM CP-Ring Antenna Radiation Pattern Transmission Facility (철탑의 반사 효과에 따른 FM CP-Ring 안테나의 방사 패턴 고찰 및 현장 적용 방안)

  • Choi, Soocheol;Cho, Kiryang
    • Journal of Broadcast Engineering
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    • v.21 no.3
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    • pp.404-411
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    • 2016
  • In this paper, we investigate the radio wave radiation pattern to measure the actual field strength for the transmission antenna dipole antenna and the CP-ring antenna being used in our country as FM station, and the comparison was for field application. Compare results, If the transmitting station and the relay station which is located in the middle of a service area has been a useful CP-dipole antenna (four directions). CP-ring antenna having a directivity because the reflection effect of the tower was able to adjust the orientation to prevent the spread of menstrual another service area in the main direction was able to radiate high propagation 5~9dB. Especially, If the transmitting station and the relay station is located on one side of the service area for radiating radio waves in three directions by using the CP-ring antennas focus the orientation of the antenna in populated areas and road area can improve the broadcast reception environment.

GORENSTEIN-INJECTORS, GORENSTEIN-FLATORS

  • Gu, Qinqin;Zhu, Xiaosheng;Zhou, Wenping
    • Journal of the Korean Mathematical Society
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    • v.47 no.4
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    • pp.691-704
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    • 2010
  • Over a ring R, let $P_R$ be a finitely generated projective right R-module. Then we define the G-injector (G-projector) if $P_R$ preservers Gorenstein injective modules (Gorenstein projective modules), the Gflator if $P_R$ preservers Gorenstein flat modules. G-injector (G-flator) and G-injector are characterized focus primarily on the cases where R is a Gorenstein ring, and under this condition we also study the relations between the injector (projector, flator) and the G-injector (G-projector, G-flator). Over any ring we also give the characteristics of G-injector (G-flator) by the Gorenstein injective (Gorenstein flat) dimensions of modules.

Effects of Runner Extension and Ingates on Mold Filling in Ring-type Cast Products (환형주조품의 용탕충진에 미치는 탕도연장부와 주입구 형상의 영향)

  • Park, Kyeong-Seob;Kang, Shin-Wook;Kim, Hee-Soo
    • Journal of Korea Foundry Society
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    • v.35 no.2
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    • pp.29-35
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    • 2015
  • In this study, potential defects of ring-type cast products during the mold-filling stage of the casting process were investigated using computer simulation. The main focus was on the effects of runner extension and ingates. During the mold filling the molten metal flowed from the bottom to the top of the mold in two curved paths along the ring-type cavity. The fluid fronts in the two paths did not show the identical velocity during the mold filling stage. This difference in the filling speeds may cause defects such as voids and local contractions. The present model contained virtual fluid detectors at various positions inside the mold. When the molten metal passed those points, the volume of fluid jumped up from zero to one. The moments were measured to compare the speeds of the fluid fronts. We attempted various combinations of runner extensions and ingates to stabilize the flow and then to optimize the casting mold design.

Signet Ring Cell Type Gastric Adenocarcinoma in a Jindo dog (진도견에서 반지세포형 위선암종 증례보고)

  • Jee, Hyang;Kang, Min-Soo;Seo, Kyoung-Won;Hwang, Cheol-Yong;Youn, Hwa-Young;Kim, Wan-Hee;Kim, Dae-Yong
    • Journal of Veterinary Clinics
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    • v.24 no.2
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    • pp.284-287
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    • 2007
  • A case of gastric adenocarcinoma signet ring cell type was described in a ten-year-old female Jindo dog having about three months history of vomiting, anorexia and weight loss. On radiology, ultrasonography and computed tomography, thickness of the gastric fundus was irregularly increased. On necropsy, the gastric fundus was markedly thickened and gastric rugae were attenuated. The cardia and distal esophagus were also thickened. On histopathology, the mucosa was obliterated by neoplastic proliferation of round to polyhedral cells. The neoplastic cells had abundant vacuolated cytoplasm containing mucin. The neoplasm was infiltrated into the submucosa and muscle layer. Metastatic focus was not observed.

BIR Containing Proteins (BIRPs): More Than Just Cell Death Inhibitors

  • Yoo, Soon-Ji
    • Animal cells and systems
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    • v.9 no.4
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    • pp.181-190
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    • 2005
  • BIRPs (BIR containing Proteins) which contain one to three BIR domains constitute a highly conserved family from yeast to human. BIR domains mediate the interaction of BIRPs with various other proteins. Some of the members acquire a Ring domain which acts as an E3 ubiquitin ligase. The first member of BIRPs identified in the baculovirus was found as an inhibitor of apoptosis and most of the family members in the other species have been recognized to have the same function which bind to and inhibit caspases, thereby suppresses apoptotic cell death. But an increasing number of evidences indicate that BIRPs are involved in various cellular events such as cell division, control of cell cycle, signal transduction, cell migration, innate immunity as well as regulation of apoptosis. In this review, we summarize the structural and functional features of the BIRPs, especially focus on the various functions of BIRPs unrelated to regulation of apoptosis by the recent findings.

COHEN-MACAULAY DIMENSION FOR COMPLEXES

  • Fatemeh Mohammadi Aghjeh Mashhad
    • Communications of the Korean Mathematical Society
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    • v.39 no.2
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    • pp.303-311
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    • 2024
  • In this paper, our focus lies in exploring the concept of Cohen-Macaulay dimension within the category of homologically finite complexes. We prove that over a local ring (R, 𝔪), any homologically finite complex X with a finite Cohen-Macaulay dimension possesses a finite CM-resolution. This means that there exists a bounded complex G of finitely generated R-modules, such that G is isomorphic to X and each nonzero Gi within the complex G has zero Cohen-Macaulay dimension.

A Critical Review of the Transfer of Presidential Security Work to the Police (대통령경호업무 경찰 이관에 대한 비판적 소고)

  • Jo, Sung-gu
    • Korean Security Journal
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    • no.58
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    • pp.177-194
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    • 2019
  • Last year, the Moon Jae-In administration made an attempt to abolish the presidential security office overseeing the presidential security and to transfer the work to the presidential security service under the National Police Agency. Currently, all of the G7 nations maintain a security system spearheaded by the police, so the policy of transferring the presidential security to the National Police Agency may be discussed. However, it is necessary to focus on the following reality. First, the current presidential security system is consisted of the overlapping security organizations classified into (1) inner ring of the presidential security agency, (2) middle ring of the police agency, and (3) outer ring of the capital defense command. If the presidential security agency is abolished, a vacuum will result as per the principle of class. Second, for the efficient security guard of the President, currently, the presidential security agency at the Presidential Security Safety Measure Committee plays the role of coordinating the tasks. If the National Police Agency becomes the control tower of the presidential security, whether command will be available for the military and diplomatic aspects of the presidential security work should also be considered. Third, Korea is currently in a truce with North Korea, so there is a big difference in terms of the security environment with such G7 nations as the UK, Germany, France, and Japan.

Dynamics of the system consisting of the hollow cylinder and surrounding infinite elastic medium under action an oscillating moving ring load on the interior of the cylinder

  • Akbarov, Surkay D.;Mehdiyev, Mahir A.
    • Coupled systems mechanics
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    • v.7 no.5
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    • pp.525-554
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    • 2018
  • The paper deals with the study of the dynamics of the oscillating moving ring load acting in the interior of the hollow circular cylinder surrounded by an elastic medium. The axisymmetric loading case is considered and the study is made by employing the exact equations and relations of linear elastodynamics. The focus is on the influence of the oscillation of the moving load and the problem parameters such as the cylinder's thickness/radius ratio on the critical velocities. At the same time, the dependence between the interface stresses and load moving velocity under various frequencies of this load, as well as the frequency response of the mentioned stresses under various load velocity are investigated. In particular, it is established that oscillation of the moving load can cause the values of the critical velocity to decrease significantly and at the same time the oscillation of the moving load can lead to parametric resonance. It is also established that the critical velocity decreases with decreasing of the cylinder's thickness/radiusratio.