• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2153-2155
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• 2005

SF6 &NF3 chemistry를 사용하여 W bitline process 조건에서 plasma confinement 및 gas & radical의 flow에 영향을 미치는 focus ring 재질과 두께변경을 하여 Rnit non uniformity 평가한다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.32 no.1
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• pp.1-6
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• 2022

In this research, a ring-shaped silicon carbide (SiC) single crystal manufactured using the PVT (Physical Vapor Transport) method was proposed to be applied to a SiC focus ring in semiconductor etching equipment. A cylindrical graphite structure was placed inside the graphite crucible to grow a ring-shaped SiC single crystal by the PVT method. SiC single crystal ring without crack was successfully obtained in case of using SiC single crystal wafer as a seed. A plasma etching process was performed to compare plasma resistance between the CVD-SiC focus ring and the PVT-SiC focus ring. The etch rate of ring materials in PVT-single crystal SiC focus ring was definitely lower than that of CVD-SiC focus ring, indicating better plasma resistance of PVT-SiC focus ring.

• Journal of the Semiconductor & Display Technology
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• v.19 no.4
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• pp.28-33
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• 2020

Plasma etching process employs high density plasma to create surface chemistry and physical reactions, by which to remove material. Plasma chamber includes silicon-based materials such as a focus ring and gas distribution plate. Focus ring needs to be replaced after a short period. For this reason, there is a need to find materials resistant to erosion by plasma. The developed chemical vapor deposition processing to produce silicon carbide parts with high purity has also supported its widespread use in the plasma etch process. Silicon carbide maintains mechanical strength at high temperature, it have been use to chamber parts for plasma. Recently, besides the structural aspects of silicon carbide, its electrical conductivity and possibly its enhanced life time under high density plasma with less generation of contamination particles are drawing attention for use in applications such as upper electrode or focus rings, which have been made of silicon for a long time. However, especially for high purity silicon carbide focus ring, which has usually been made by the chemical vapor deposition method, there has been no study about quality improvement. The goal of this study is to reduce surface roughness and depth of damage by diamond tool grit size and tool dressing of diamond tools for precise dimensional assurance of focus rings.

• Journal of the Korean Mathematical Society
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• v.55 no.5
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• pp.1193-1205
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• 2018

We focus our attention on a ring property that nilpotents are contained in the Jacobson radical. This property is satisfied by NI and left (right) quasi-duo rings. A ring is said to be NJ if it satisfies such property. We prove the following: (i) $K{\ddot{o}}the^{\prime}s$ conjecture holds if and only if the polynomial ring over an NI ring is NJ; (ii) If R is an NJ ring, then R is exchange if and only if it is clean; and (iii) A ring R is NJ if and only if so is every (one-sided) corner ring of R.

• Journal of the Korean Mathematical Society
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• v.53 no.2
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• pp.415-431
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• 2016

This note is concerned with examining nilradicals and Jacobson radicals of polynomial rings when related factor rings are Armendariz. Especially we elaborate upon a well-known structural property of Armendariz rings, bringing into focus the Armendariz property of factor rings by Jacobson radicals. We show that J(R[x]) = J(R)[x] if and only if J(R) is nil when a given ring R is Armendariz, where J(A) means the Jacobson radical of a ring A. A ring will be called feckly Armendariz if the factor ring by the Jacobson radical is an Armendariz ring. It is shown that the polynomial ring over an Armendariz ring is feckly Armendariz, in spite of Armendariz rings being not feckly Armendariz in general. It is also shown that the feckly Armendariz property does not go up to polynomial rings.

• Journal of the Korean Mathematical Society
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• v.50 no.5
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• pp.1083-1103
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• 2013

The concepts of reversible, right duo, and Armendariz rings are known to play important roles in ring theory and they are independent of one another. In this note we focus on a concept that can unify them, calling it a right Armendarizlike ring in the process. We first find a simple way to construct a right Armendarizlike ring but not Armendariz (reversible, or right duo). We show the difference between right Armendarizlike rings and strongly right McCoy rings by examining the structure of right annihilators. For a regular ring R, it is proved that R is right Armendarizlike if and only if R is strongly right McCoy if and only if R is Abelian (entailing that right Armendarizlike, Armendariz, reversible, right duo, and IFP properties are equivalent for regular rings). It is shown that a ring R is right Armendarizlike, if and only if so is the polynomial ring over R, if and only if so is the classical right quotient ring (if any). In the process necessary (counter)examples are found or constructed.

• Journal of the Korean Mathematical Society
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• v.59 no.4
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• pp.821-841
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• 2022

In this paper, we introduce and study regular rings relative to the hereditary torsion theory w (a special case of a well-centered torsion theory over a commutative ring), called w-regular rings. We focus mainly on the w-regularity for w-coherent rings and w-Noetherian rings. In particular, it is shown that the w-coherent w-regular domains are exactly the Prüfer v-multiplication domains and that an integral domain is w-Noetherian and w-regular if and only if it is a Krull domain. We also prove the w-analogue of the global version of the Serre-Auslander-Buchsbaum Theorem. Among other things, we show that every w-Noetherian w-regular ring is the direct sum of a finite number of Krull domains. Finally, we obtain that the global weak w-projective dimension of a w-Noetherian ring is 0, 1, or ∞.

• Journal of the Korean Mathematical Society
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• v.60 no.2
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• pp.407-464
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• 2023

Let R be a commutative ring with identity. The structure theorem says that R is a PIR (resp., UFR, general ZPI-ring, π-ring) if and only if R is a finite direct product of PIDs (resp., UFDs, Dedekind domains, π-domains) and special primary rings. All of these four types of integral domains are Krull domains, so motivated by the structure theorem, we study the prime factorization of ideals in a ring that is a finite direct product of Krull domains and special primary rings. Such a ring will be called a general Krull ring. It is known that Krull domains can be characterized by the star operations v or t as follows: An integral domain R is a Krull domain if and only if every nonzero proper principal ideal of R can be written as a finite v- or t-product of prime ideals. However, this is not true for general Krull rings. In this paper, we introduce a new star operation u on R, so that R is a general Krull ring if and only if every proper principal ideal of R can be written as a finite u-product of prime ideals. We also study several ring-theoretic properties of general Krull rings including Kaplansky-type theorem, Mori-Nagata theorem, Nagata rings, and Noetherian property.

• East Asian mathematical journal
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• v.34 no.5
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• pp.615-621
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• 2018

Let R be a ring with the unity 1, and let e be an idempotent of R. In this paper, we discuss some symmetric property for the set $\{(a_1,a_2,{\cdots},a_n){\in}R^n:a_1a_2{\cdots}a_n=e\}$. We here investigate some properties of those rings with such a symmetric property for an arbitrary idempotent e; some of our results turn out to generalize some known results observed already when n = 2 and e = 0, 1 by several authors. We also focus especially on the case when n = 3 and e = 1. As consequences of our observation, we also give some equivalent conditions to the commutativity for some classes of rings, in terms of the symmetric property.

• Bulletin of the Korean Mathematical Society
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• v.55 no.1
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• pp.25-40
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• 2018

We focus on the structure of the set of noncentral idempotents whose role is similar to one of central idempotents. We introduce the concept of quasi-Abelian rings which unit-regular rings satisfy. We first observe that the class of quasi-Abelian rings is seated between Abelian and direct finiteness. It is proved that a regular ring is directly finite if and only if it is quasi-Abelian. It is also shown that quasi-Abelian property is not left-right symmetric, but left-right symmetric when a given ring has an involution. Quasi-Abelian property is shown to do not pass to polynomial rings, comparing with Abelian property passing to polynomial rings.