• 한국염색가공학회지
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• 제17권6호
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• pp.27-35
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• 2005

Conventional pad- dry-cure(thermo-fixation) process usually produces functional performance on both sides of a fabric. UV curing technique was applied to impart water- and oil-repellent finish effective only on the face of a PET knitted fabric. The preferential one-side coating, by virtue of the limited penetration of UV light, was achieved by W curing after padding of a fluorocarbon agent without special coating or printing equipments. The difference in the functional property of face and back sides was examined by measuring water and oil repellency at each side of the treated fabric. The influence of pre/post-irradiation dose and agent concentration on the performance of the finished fabrics were investigated. While increase in both resin concentration and post-irradiation did not have significant effect on the finish, UV pre-irradiation of PET fabrics caused remarkable influence presumably due to appropriate surface modification of PET fabrics required for facile wetting of the resin. The dimensional stability and color change of the UV cured fabrics measured by FAST and reflectance spectrophotometry showed significantly decreased color difference and increased percent extension compared with the samples pre-irradiated without agent application.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.104-105
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• 2007

In this study, characteristics of silver ink-jet printing were investigated under various substrate treatments such as substrate heating, hydrophobic coating, and ultraviolet(UV)/ozone soaking. Fluorocarbon(FC) film was spin-coated on the polyimide (PI) film substrate to obtain a hydrophobic surface. Although hydrophobicity of the FC film could reduce the diameter of the printed droplets, the singlet images printed on the FC film surface showed irregularities in the pattern size and the position of the printed droplet along with droplet merging phenomenon. The proposed UV/ozone soaking of the FC film improved the uniformity of the pattern size and the droplet position after printing and substrate heating was very effective way in preventing droplet merging. By heating of the substrate after UV/ozone soaking of the coated FC film, silver conductive lines of 78-116 ${\mu}m$ line were successfully printed at low substrate temperatures of $40^{\circ}C$.

• 설비공학논문집
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• 제25권9호
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• pp.506-515
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• 2013

The PFT (PerFluorocarbon Tracergas Technique) is of advantage to field surveys for evaluating the ventilation condition, due to its simplicity and convenience. On the other hand, it requires researchers to make some additional considerations that include uncertainties, such as the substance concentration distribution in indoor air, representativeness of a sampler, deviation of emission sources, and analysis error. In this study, the PFT and $CO_2$ tracer gas methods were applied simultaneously, to evaluate the accuracy of PFT on six ventilation conditions in the three-storied detached house. The air exchange and the outdoor air introduction a between and into zones were measured. As the results, deviations of PFT concentration distributions were observed at a sufficiently low level for an accurate determination for a house where the interior height was large, and there were relatively many partition walls. However, when a uniform airflow appeared in the indoor air, it was also validated that the indoor air would be exhausted without sufficient mixing, and consequently the measurement error of the PFT would be large.

• 대한금속재료학회지
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• 제49권10호
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• pp.797-804
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• 2011

In this study, the mechanisms of the three steps (the polymer deposition step, the polymer etching step and the Si etching step) that constitute the Bosch process were investigated. The effects of radicals and ions on each step were quantitatively analyzed by comparing the simulated aspect ratio dependency of the deposition or etch rate with the experimental results. In the polymer deposition step, fluorocarbon polymer is deposited by chemical reactions of $CF_x$ radicals, of which the reaction probability is 0.13. Although the polymer etching step and the Si etching step were conducted under the same conditions, the etching mechanisms of polymer and Si were found to be quite different. In the polymer etching step, both chemical etching and physical sputter-etching contribute to the polymer etching. Whereas, in the Si etching step, Si is chemically etched by F radicals, of which the reactivity is greatly increased by the bombardment of energetic ions.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.61.1-61.1
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• 2015

Nanoscale semiconductor plasma processing has become one of the most challenging issues due to the limits of physicochemical fabrication routes with its inherent complexity. The mission of future and emerging plasma processing for development of next generation semiconductor processing is to achieve the ideal nanostructures without abnormal profiles and damages, such as 3D NAND cell array with ultra-high aspect ratio, cylinder capacitors, shallow trench isolation, and 3D logic devices. In spite of significant contributions of research frontiers, these processes are still unveiled due to their inherent complexity of physicochemical behaviors, and gaps in academic research prevent their predictable simulation. To overcome these issues, a Korean plasma consortium began in 2009 with the principal aim to develop a realistic and ultrafast 3D topography simulator of semiconductor plasma processing coupled with zero-D bulk plasma models. In this work, aspects of this computational tool are introduced. The simulator was composed of a multiple 3D level-set based moving algorithm, zero-D bulk plasma module including pulsed plasma processing, a 3D ballistic transport module, and a surface reaction module. The main rate coefficients in bulk and surface reaction models were extracted by molecular simulations or fitting experimental data from several diagnostic tools in an inductively coupled fluorocarbon plasma system. Furthermore, it is well known that realistic ballistic transport is a simulation bottleneck due to the brute-force computation required. In this work, effective parallel computing using graphics processing units was applied to improve the computational performance drastically, so that computer-aided design of these processes is possible due to drastically reduced computational time. Finally, it is demonstrated that 3D feature profile simulations coupled with bulk plasma models can lead to better understanding of abnormal behaviors, such as necking, bowing, etch stops and twisting during high aspect ratio contact hole etch.

• 한국염색가공학회지
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• 제20권6호
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• pp.26-34
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• 2008

Wool fabric having high moisture content were treated with fluorocarbon-based water and oil repellent finishing agents by pad-dry-cure system. Three types of finishing agents which were regular-type or nano-type were adapted to compare the surface chemical composition, water and oil repellent property, crease recovery angle, and durability to repeated laundering. From the surface chemical compositions resulted by ESCA and C1s curve-fitting, it was shown that the regular-type finishing agent were easily taken off from the finished wool fabrics after repeated laundering. On the other hand, the fluoroalkyl groups of nano-type finishing agents turned round from fabric surface to fiber internal after repeated laundering. The water repellency of the wool fabrics treated with regular-type agent had a little changes according to the treatment condition changes and sharply decreased with repeated laundering. However, these values when treated with nano-type agents increased with the concentration and cure temperature and were maintained after 20 times laundering. The wool fabrics treated with nano-type agent had a great oil repellency irrespective of treatment conditions. Furthermore, the wrinkle recovery values of the wool fabrics treated with nano-type agents were higher than those of the fabrics treated with regular-type agent and were unchanged after 20 times laundering.

• 공업화학
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• 제19권1호
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• pp.86-91
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• 2008

다양한 고무 충전제가 연료전지 스택용 가스켓의 재료로서의 적합성 및 스택체결에 있어 미치는 영향을 살펴보기 위하여, 카본블랙 및 실리카계 충전제를 사용하여 고무를 배합하였다. 이렇게 배합된 고무재료를 PEMFC (polymer electrolyte membrane fuel cell)의 구동환경을 고려하여 열과 상대유에 대한 장기평가를 실시하였다. 가스켓에 가장 요구되는 압축 영구 줄음율은, 1000 h까지의 장기평가에서도 15% 이하의 우수한 특성을 보였다. 다양한 충전제를 사용한 배합한 고무재료로 가스켓을 제작하고, 체결시 가스켓과 가스켓 사이의 밀봉력을 FEM (finite element method)을 실시하여 최소 0.2 MPa에서 최대 2.5 MPa일 것으로 예측되었다.

• 한국재료학회지
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• 제15권3호
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• pp.149-154
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• 2005

Teflon like fluorocarbon thin films have been deposited on silicon and oxide molds as an antistiction layer for the hot embossing process by an inductively coupled plasma (ICP) chemical vapor deposition (CVD) method. The process was performed at $C_4F_8$ gas flow rate of 2 sccm and 30 W of plasma power as a function of substrate temperature. The thickness of film was measured by a spectroscopic ellipsometry. These films were left in a vacuum oven of 100, 200 and $300^{\circ}C$ for a week. The change of film thickness, contact angle and adhesion and friction force was measured before and after the thermal test. No degradation of film was observed when films were treated at $100^{\circ}C$. The heat treatment of films at 200 and $300^{\circ}C$ caused the reduction of contact angles and film thickness in both silicon and oxide samples. Higher adhesion and friction forces of films were also measured on films treated at higher temperatures than $100^{\circ}C$. No differences on film properties were found when films were deposited on either silicon or oxide. A 100 nm silicon template with 1 to $500\;{\mu}m$ patterns was used for the hot embossing process on $4.5\;{\mu}m$ thick PMMA spun coated silicon wafers. The antistiction layer of 10 nm was deposited on the silicon mold. No stiction or damages were found on PMMA surfaces even after 30 times of hot embossing at $200^{\circ}C$ and 10 kN.

• 한국의류학회지
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• 제17권4호
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• pp.577-586
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• 1993

Pesticide protective clothing has not been frequently worn due to its lack of thermal comfort. It is important to develop fabrics which can allow the wearer to work in comfort. One of the possible way to achieve the goal is to produce fabrics with a water- and oil-repellent finish which would resist pesticide penetration but maintain some breathability. The purpose of this study were to evaluate the pesticide barrier properties of untreated and water- and oil-repellent finished nonwoven fabrics. Three types of nonwoven fabrics(Tyvek, Sontara and Kimlon) were used as test specimens. By pad-dry-cure method, each of the specimen was treated with fluorocarbon. The pesticide barrier properties (amount of pesticide penetration and residue) were measured by the gas chromatography. The performance properties of untreated and treated specimens were evaluated with respects to water pepellency(KS K 0590), oil repellency(AATCC 118), water resistance(KS K 0591, AATCC 42), water vapor transmission (KS A 1013) and air permeability(KS K 0570). The results of this study were as follows : 1) The untreated Sontara showed much more amount of pesticide penetration than untreated Tyvek and Kimlon, while the treated Sontara showed little amount of pesticide penetration. 2) After laundering, the amount of pesticide residue in the untreated and treated Sontara was less than that in Tyvek and in Kimlon. 3) Water- and oil-repellent finish improved water repellency, oil repellency, and water resistance of specimens. 4) The untreated Sontara and Kimlon showed higher water vapor transmission and air permeability than untreated Tyvek. Water vapor transmission and air permeability of treated specimen decreased compared to those of untreated.

• 설비공학논문집
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• 제19권7호
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• pp.545-554
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• 2007

Flow condensation heat transfer coefficients(HTCs) of R22, propylene, propane, DME and isobutane are measured on a horizontal plain tube. The main test section in the experimental flow loop is made of a plain copper tube of 9.52 mm outside diameter and 530 mm length. The refrigerant is cooled by passing cold water through an annulus surrounding the test section. Tests are performed at a fixed refrigerant saturation temperature of $40{\pm}0.2^{\circ}C$ with mass fluxes of 100, 200, $300kg/m^2s$ and heat flux of $7.3\sim7.7kW/m^2$. The data are obtained in the vapor Quality range of $10\sim90%$. Test results show that at same mass flux the flow condensation HTCs of propylene, propane, DME and isobutane are higher than those of R22 by up to 46.8%, 53.3%, 93.5% and 61.6% respectively. Also well-known correlations developed based upon conventional fluorocarbon refrigerants predict the present data within a mean deviation of 30%. Finally, the pressure drop increase as the mass flux and Quality increase and isobutane shows the highest pressure drop due to its lowest vapor pressure among the fluids tested.