• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2005년도 춘계종합학술대회
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• pp.363-366
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• 2005

마이크로 흐름센서는 종래의 반도체 집적회로 공정기술을 이용하여 소형으로 제작이 가능하며, 빠른 응답특성으로 다양한 응용이 기대되고 있다. 본 연구에서는 넓은 흐름의 세기 영역에서 정밀한 감도를 가지는 2차원 마이크로 흐름센서를 실리콘 기판위에 설계하였다. 흐름센서 중앙에 하나의 히터와 양측에 3쌍의 온도 감지막을 가진 새로운 구조를 제안하고, 제안된 구조의 성능평가를 위해 유한차분법을 이용하석 열운송방정식을 시간영역에서 해석하였다. 성능평가는 제안된 흐름센서 모델에 대하여 공기흐름의 세기 변화에 따른 온도분포를 계산함으로써 실제 흐름센서의 동작을 정량적으로 분석하였다.

• 한국자동차공학회논문집
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• 제3권3호
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• pp.58-65
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• 1995

In this study an air flow meter was developed for MPI engine using ultrasonic sensors. The major characteristcs of the ultrasonic flow meter are high speed response, flow direction recognition and linear output. The air flow rate measurements were conducted at upstream of the throttle and intake manifold. The characteristics of the ultrasonic flow meter are compared with those of the Bosch hot wire flow meter at both steady and unsteady engine conditions.

• 전기전자학회논문지
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• 제23권3호
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• pp.1033-1037
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• 2019

GaN-based sensors have been widely investigated thanks to its potential in detecting the presence of hydrogen. In this study, we fabricated hydrogen gas sensors with AlGaN/GaN heterojunction and investigated how the sensing performance to be affected by SiN surface passivation. The gas sensor employed a high electron mobility transistors (HEMTs) with 30 nm platinum catalyst as a gate to detect the hydrogen presence. SiN layer was deposited by inductively-coupled chemical vapor deposition as post-passivation. The sensors with SiN passivation exhibited hydrogen sensing characteristics with various gas flow rates and concentrations of hydrogen in inert background gas at $200^{\circ}C$ similar to the ones without passivation. Aside from quick response time for both sensors, there are differences in sensitivity and recovery time because of the existence of the passivation layer. The results also confirmed the dependence of sensing performance on gas flow rate and gas concentration.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.845-850
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• 2003

Unsteady nature of a tip leakage vortex in an axial flow fan operating at a design and off-design operating conditions has been investigated by measuring the velocity fluctuation in a blade passage with a rotating hotwire probe sensor. Two hot-wire probe sensors rotating with the fan rotor were also introduced to obtain the cross-correlation coefficient between the two sensors located in the vortical flow as well as the fluctuating velocity. The results show that the vortical flow structure near the rotor tip can be clearly observed at the quasi-orthogonal planes to a tip leakage vortex. The leakage vortex is enlarged as the flow rate is decreased, thus resulting in the high blockage to main flow. The spectral peaks due to the fluctuating velocity near the rotor tip are mainly observed in the reverse flow region at higher flow rates than the peak pressure operating condition. However, no peak frequency presents near the rotor tip for near stall condition.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1063-1066
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• 2003

A flow-meter and its measurement controller was developed for a hydraulic system. This study, for development of positive displacement flow-meter, consist of PIC(Peripheral Interface Controller) controller with MR(Magneto-resistive) sensors. This flow-meter is used valve position indicator for valve control system by hydraulic. The MR sensors are used for the rotation of OVAL gear that detecting device. In the ship environments, consideration that necessary explosive proof. Thus electro device or electro flow-meter needs explosion design for electric circuit. We designed noncontact type flow-meter and evaluated the safety and measuring abilities.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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• pp.609-611
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• 1997

Pt thin films flow sensors were fabricated by using aluminum oxide films as medium layer and their characteristics were investigated after annealing at $600^{\circ}C$ for 60min. Aluminum oxide improved adhesion of Pt thin films to $SiO_2$ layer without any chemical reactions to Pt thin films under high annealing temperatures. Output voltages increased as gas flow rate and gas conductivity increased because heat loss of heater, which was integrated with a sensing resistor in the flow sensor, increased. Output voltage of flow sensor fabricated on membrane structure was 101mV at $O_2$ flow rate of 2000sccm, heating power of 0.8W while flow sensor fabricated on Si substrate without membrane had output voltage of 78mV under the same conditions.

• Journal of Mechanical Science and Technology
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• 제20권4호
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• pp.554-560
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• 2006

This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include: (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

• 한국에너지공학회:학술대회논문집
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• 한국에너지공학회 1998년도 추계 학술발표회 논문집
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• pp.150-160
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• 1998

Measuring temperature with ultrasonic wave apparatus is desirable in the case of both below 300$0^{\circ}C$ and ideal gas because of the fact that the temperature of gas is the function of only sound velocity. In this study, being used a heatable wind channel and a blower, the variation of temperature is observed in accordance with diverse flow rate(air velocity). The frequency modulation method is used to measure the temperature which is varying in hot air flow till 10$0^{\circ}C$. The length changed in the position of ultrasonic sensors is considered. Also, the effects of air velocity at the same temperature and various facing angles of ultrasonic sensors are considered. As a result of this study, it has been found that the temperature in gas flow is correctly measured regardless of both the distance of ultrasonic sensors and the variation of air velocity, and that there is just a little influence of facing angles.

• International Journal of Control, Automation, and Systems
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• 제2권4호
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• pp.485-493
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• 2004

Open-loop position estimation methods are commonly used in mobile robot applications. Their strength lies in the speed and simplicity with which an estimated position is determined. However, these methods can lead to inaccurate or unreliable estimates. Two position estimation methods are developed in this paper, one using a single optical flow sensor and a second using two optical sensors. The first method can accurately estimate position under ideal conditions and also when wheel slip perpendicular to the axis of the wheel occurs. The second method can accurately estimate position even when wheel slip parallel to the axis of the wheel occurs. Location of the sensors is investigated in order to minimize errors caused by inaccurate sensor readings. Finally, a method is implemented and tested using a potential field based navigation scheme. Estimates of position were found to be as accurate as dead-reckoning in ideal conditions and much more accurate in cases where wheel slip occurs.

• 대한기계학회논문집B
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• 제23권7호
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• pp.893-900
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• 1999

Measuring temperature with ultrasonic wave apparatus is desirable in the cue of gas below $300^{\circ}$ because of the fact that the temperature of gas is the function of only sound velocity. In this study, being used a heatable wind channel and a blower. the variation of temperature is observed in accordance with flow rate(air velocity). The frequency modulation method is used to measure the temperature which is varying in hot air flow up to $100^{\circ}$. The length changed in the position of ultrasonic sensors is considered. Also. the effects of air velocity at the same temperature and various facing angles of ultrasonic sensors are considered. As a result of this study. it has been found that the temperature in gas flow is correctly measured regardless of both the distance of ultrasonic sensors and the variation of air velocity. and that there is just a little influence of facing angles.