• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2005.05a
• /
• pp.54-59
• /
• 2005

Recently, the ultra-precision stage is widely used in the fields of the nano-technology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator, and ultra-precision linear encoder, is designed and developed. The guide mechanism which consisted of flexure hinges is analyzed by Finite Element Method. And we derived the transfer function of the system in 1st order system from step responses according to the magnitude. We performed simulation for the model to tune the control gain and applied the gains to the developed system. Experimental results found that the stage can be controlled in 5 nm resolution by PID controller.

• Journal of the Korea Institute of Military Science and Technology
• /
• v.19 no.4
• /
• pp.476-482
• /
• 2016

In this study, a method using single Wheatstone bridge flexure has been presented to measure hinge moment acting on control surfaces of wind tunnel models. The structural simplicity of the flexure reduces difficulty regarding gauging and wire-routing, and also makes it feasible to install flexures even inside thin wings. Some flexures were designed and fabricated under typical aerodynamic loads in wind tunnel test, and the strains on the flexure according to applied loads were compared with the result of the analysis by finite element method. The relation between applied loads and output signals showed good linearity, and the standard deviation on the residual errors from linear equation obtained by least square method was within 1.0 % of the maximum design moments. In addition, the FEM analysis on the thickness of load-connecting part of the flexure showed that the sensitivity was improved as the thickness became thin as much as desired to avoid buckling.

• The Journal of the Institute of Internet, Broadcasting and Communication
• /
• v.19 no.6
• /
• pp.169-174
• /
• 2019

Flexure joints are recently used in the ultra-precision mechanism for a telecommunication mirror stage. Flexure joints have several advantages coming from their monolithic characteristics. They can be used to reduce the size of manipulators or to increase the precision of motion. In our research, 6 dof(degree of freedom) mechanism is suggested for micrometer repeatability using a flexure mechanism. To design the 6-dof motion, the 2-dof planar mechanism are designed and assembled to make the 6-dof motion. To achieve a certain performance, it is necessary to define the performance of mechanism that quantifies the characteristics of flexure joints. This paper addresses the analysis and design of the 6-dof parallel manipulator with a flexure joint using a finite element analysis tool. To obtain experimental result, CCD laser displacement sensor is used for the total displacement and the stiffness for the 6-dof flexure mechanism.

• Structural Engineering and Mechanics
• /
• v.53 no.4
• /
• pp.781-790
• /
• 2015

We apply higher-order beam theory to analyze the deflections and stresses of a cantilevered single leaf flexure in bending. Our equations include shear deformation and the warping effect in bending. The results are compared with Euler-Bernoulli and Timoshenko beam theory, and are verified by finite element analysis (FEA). The results show that the higher-order beam theory is in a good agreement with the FEA results, with errors of less than 10%. These results indicate that the analysis of the deflections and stresses of a single leaf flexure should consider the shear and warping effects in bending to ensure high precision mechanism design.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.15 no.6 s.99
• /
• pp.667-673
• /
• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program.

• Structural Engineering and Mechanics
• /
• v.13 no.3
• /
• pp.241-260
• /
• 2002

The effect of shear coupled with axial force variation on the inelastic seismic behaviour of reinforced concrete bridge piers is investigated in this paper. For this purpose, a hysteretic axial-shear interaction model was developed and implemented in a nonlinear finite element analysis program. Thus, flexure-shear-axial interaction is simulated under variable amplitude reversed actions. Comparative studies for shear-dominated reinforced concrete columns indicated that a conventional FE model based on flexure-axial interaction only gave wholly inadequate results and was therefore incapable of predicting the behaviour of such members. Analysis of a reinforced concrete bridge damaged during the Northridge (California 1994) earthquake demonstrated the importance of shear modelling. The contribution of shear deformation to total displacement was considerable, leading to increased ductility demand. Moreover, the effect of shear with axial force variation can significantly affect strength, stiffness and energy dissipation capacity of reinforced concrete members. It is concluded that flexure-shear-axial interaction should be taken into account in assessing the behaviour of reinforced concrete bridge columns, especially in the presence of high vertical ground motion.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.742-745
• /
• 2003

Piezoelectric elements driven ultra-precision stages have been used for high accuracy, fast response and high load rapacity. which are allowable to apply the stages to AFMs. Most of the piezoelectric driven stages are guided by flexure hinges for force transmission and mechanical amplification. However the flexure hinge mechanisms cause lack of position accuracy due to coupled and parasitic motions. Hence it is important that the mechanism design of the stage is focused on the stiffness of the flexure hinges to accomplish fast response and hish accuracy without the coupled and parasitic motions. In this study, some constraints for optimal design of a piezoelectric elements driven stage and a design method are proposed. Next, an optimal design is carried out using mathematical calculation. Finally the designed results are verified by FEM.

• Structural Engineering and Mechanics
• /
• v.59 no.3
• /
• pp.527-537
• /
• 2016

We describe a stress analysis of a single leaf flexure under torsion in which the warping effect is considered. The theoretical equations for the warping normal stress (${\sigma}_{xx}$) and shear stresses (${\tau}_{xz}$ and ${\tau}_{xy}$) are derived by applying the warping function of a rectangular cross-sectional beam and the twist angle equation that includes the warping torsion. The results are compared with those of the non-warping case and are verified using finite element analysis (FEA). A sensitivity analysis over the length, width, and thickness is performed and verified via FEA. The results show that the errors between the theory of warping stress results and the FEA results are lower than 4%. This indicates that the proposed theoretical stress analysis with warping is accurate in the torsion analysis of a single leaf flexure.

• Journal of Institute of Control, Robotics and Systems
• /
• v.15 no.9
• /
• pp.881-886
• /
• 2009

This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2009.06a
• /
• pp.667-668
• /
• 2009