• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.539-542
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• 1997

We present a micro-positioning stage that has minimized geometrical error and can drive in the 4-axis. This stage divided into two parts: $Z\theta_x$ $\theta_y$, motion stage and$\theta_z$ motion stage. These stages are constructed in flexure hinges, piezoelectric actuators and displacement scnsors. The dynamic model for each stage is obtained and their FE (finite element) models are made. Using the Lagrange's equation, the motion of equation is found. Through the parametric analysis and FE analysis, sensitiv~ty of the design parameters is executed. Finally, fundamental frequencies, maximum stress, and displacement sensitivity for each stage are obtained. We expect that this micro-positioning stage be a useful micro-alignment device for various applications.

• 한국공작기계학회논문집
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• 제15권3호
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• pp.111-119
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• 2006

The ultra-precision stage is demanded for some industrial fields such as semiconductor lithography, ultra-precision machining, and fabrication of nano structure. A new stage was developed for those applications in order to obtain nano meter resolution. This stage consists of symmetric double parallelogram mechanism using flexure hinges. The mechanical properties such as strength of the flexures and deformations along the applied force were analyzed using FEM. The stage is actuated by a piezoelectric actuator and its movement was measured by a ultra-precision linear encoder. In order to improve positioning performance, a PID controller was designed based on the identified second order transfer function. Experimental results showed that this stage could be positioned within below 5 nm resolution irrespective of hysteresis and creep by the controller.

• 한국생산제조학회지
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• 제21권3호
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• pp.465-472
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• 2012

This paper describes a new robust control algorithm which can be used to enhance the positioning performance of an ultra-precision positioning system. The working table is supported by flexure hinges and moved by a piezoelectric actuator, whose position is measured by an ultra-precise linear encoder. The system dynamics is very complicated because the movement of the table is governed by both the mechanical characteristics and those of the PZT actuator. So that, the dynamics of the stage was modeled roughly in this paper, and the overall system was formularized to solve the small gain problem. A series of experiments was conducted in order to verify the usefulness of the proposed algorithm. From the experimental results, the positioning performance such as the accuracy, the rise time and the hysteresis nonlinearity were greatly improved.

• 한국공작기계학회논문집
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• 제17권2호
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• pp.13-22
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• 2008

For the accuracy correction of the micro-positioning industrial robot, micro-manipulator has been devised. The compliant mechanisms using piezoelectric actuators is necessary geometrically and structurally to be developed by the optimization approaches. The overall geometric advantage as the mechanical efficiencies of the mechanism are considered as objective functions, which respectively art the ratio of output displacement to input force, and their constraints are the vertical notion of supporting leg and the structural strength of manipulation. In optimizing the compliant mechanical amplifier, the sequential linear programming and an optimality criteria method are used for the geometrical dimensions of compliant bridges and flexure hinges. This paper presents the integrated design process which not only can maximize the mechanism feasibilities but also can ensure the positioning accuracy and sufficient workspace. Experiment and simulation are presented for validating the design process through the comparisons of the kinematical and structural performances.

• 대한기계학회논문집A
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• 제30권9호
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• pp.1094-1101
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• 2006

Recently, a ultra-precision stage is widely used in the fields of the nano-technology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator and ultra-precision linear encoder, is designed and developed. The system transfer function of the ultra-precision stage system was derived from the step responses of the system using system identification tool. A $H_{\infty}$ controller was designed using loop shaping method to have robustness for the system uncertainty and external disturbances. For the designed controller, simulations were performed and it was applied to the ultra-precision stage system. From the experimental results it was found that this stage could be controlled with less than 5nm resolution irrespective of hysteresis and creep.

• 한국정밀공학회지
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• 제30권1호
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• pp.105-112
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• 2013

This paper presents the structural design and finite element analysis of precision stage based on a double triangular parallel mechanism for precision positioning and large force generation. Recently, with the acceleration of miniaturization in mobile appliances, the demand for precision aligning and bonding has been increasing. Such processes require both high precision and large force generation, which are difficult to obtain simultaneously. This study aimed at constructing a precision stage that has high precision, long stroke, and large force generation. Actuators were tactically placed and flexure hinges were carefully designed by optimization process to constitute a parallel mechanism with a double triangular configuration. The three actuators in the inner triangle function as an in-plane positioner, whereas the three actuators in the outer triangle as an out-of-plane positioner. Finite element analysis is performed to validate load carrying performances of the developed precision stage.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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• pp.15-18
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• 2007

As the line width of the pattern become thin more and more, the accuracy of ultra-precision stage should be increased. Various type stages have been developed and used in fabrication phase and inspection lab. Furthermore the line with become several tens of nanometer recently. We need ultra high precision stage. In this paper a new type stage is proposed in order to reduce the deformation of working table. The table is supported by several flexure hinges and actuated by a PZT. The local deformation is analyzed and the vibratory motion is also examined by FEM package.

• Design & Manufacturing
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• 제16권3호
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• pp.22-27
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• 2022

The demand for new processing technology that can improve productivity is increasing in industries that require large-scale and various products. In response to this demand, a robot machining system with flexibility is required. Because of the low rigidity of the robot, the robot machining system has a large error during machining and is vulnerable to vibration generated during machining. Vibration generated during machining deteriorates machining quality and reduces the durability of the machine. To solve this problem, a stage for fixing the spindle during machining is required. In order to compensate for the robot's low rigidity, a system combining a piezoelectric actuator for generating a large force and a guide mechanism to actuate with a desired direction is required. Since the rigidity of flexible hinges varies depending on the structure, it is important to optimal design the flexible hinge and high-rigidity system. The purpose of this research is to make analytic model and optimize a flexible hinge and to design a high rigidity stage. In this research, to design a flexible hinge stage, a concept design of system for high rigidity and flexure hinge modeling is carried out. Based on analytic modeling, the optimal design for the purpose of high rigidity is finished and the optimal design results is used to check the error between the modeling and actual simulation results.

• 대한기계학회논문집A
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• 제33권10호
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• pp.1045-1053
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• 2009

Precision stages for 6-DOF positioning, actuated by PZT stacks, which are fed back by gap sensors and guided by flexure hinges, have enlarged their application territory in micro/nano manufacturing and measurement area. The precision stages inherently have such limitations as the nonlinearity between input and output in piezoelectric stacks, feedback signal noise in precision capacitive gap sensors and low material damping in precision kinematic linkages of mechanical flexures. To surmount these limitations, the precision stage is modeled with physics-based variables, which are identified by transient response correspondence, and a gain margin calculation algorithm using the Prandtl-Ishlinskii model and describing function is newly developed to assess system performance more precisely than linear controller design schemes. Based on such analyses, a precision positioning controller is designed. Excellent positioning accuracy with rapid settlement accomplished by the controller is shown in step responses of the closed-loop system.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1950-1953
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• 1996

A $1\;{\times}\;4$ micro mirror array is designed and fabricated. In contrast to other micro mirrors which utilize torsional flexure hinges or cantilevers for restoring torque and supporting purpose, we have placed a substrate hinge structure under each mirror. Each micro mirror consists of address electrode, substrate hinge consisting of pin and staple, supporter post, and mirror plate. Electrical connection between mirror plate and ground electrode is established by substrate hinge. Mirror undergoes a rotational motion due to electrostatic force when voltage difference is applied between address electrode and mirror plate. Micro mirrors with two different types of staple shape and two different pin sizes are designed and fabricated. Each mirror is designed to have ${\pm}\;10^{\circ}$ of deflection angle and have $100\;{\times}\;110\;{\mu}m^2$ of size.